KR100682621B1 - Liquid collector - Google Patents

Abstract

A liquid collector is provided to prevent corrosion and contamination of a pipeline by dividing a predetermined fluid of a wet station into liquid and gas using an enhanced collecting box structure with upper and lower wing type plates. An inlet line(31) is connected with a gas pipeline of a wet station through one end portion and a collecting box(33) through the other end portion. The collecting box is used for collecting a liquid component from a predetermined gas of the inlet line. A liquid collecting line(35) is installed under the collecting box to exhaust the collected liquid component to the outside. An exhaust line(37) is connected to the collecting box. The collecting box includes an upper wing type plate and a lower wing type plate.

Description

Liquid Collector

1 is a perspective view showing an exhaust duct for exhausting the discharge in the conventional wet station,

2 is a perspective view showing a liquid collecting device according to the present invention,

Figure 3 is a cross-sectional view of a liquid collecting device showing the flow of other emissions in the present invention,

4 is a perspective view showing a liquid collecting tube of the liquid collecting device according to the present invention.

The present invention relates to a liquid collecting device, and in particular, by separating the liquid and the gas from the wet station without discharging it from the liquid and gas, if the gas containing the scattered liquid passes through the pipe to corrode the pipe and the scale is generated flow The present invention relates to a liquid collecting device for preventing interference.

In general, in the semiconductor manufacturing process, a thin film is deposited on a semiconductor wafer, and then, in order to form the grown thin film in a desired pattern, a photosensitive material is coated and the coated photosensitive material is exposed through a pattern mask and then etched with chemicals. And a series of pattern processing steps to obtain the desired pattern by removing the remaining photosensitive material. This pattern processing process requires post-treatment such as cleaning to remove foreign substances on the wafer after etching, and such cleaning process is performed at the wet station, and gases and chemicals harmful to the human body are used in this process. After the cleaning operation, the liquid in the wet station is discharged through the liquid pipe and the gas is discharged through the gas pipe, which generates liquid which is scattered during the wafer cleaning process, and the scattered liquid is mixed with the gas and discharged along the gas pipe. . Liquid fluids contain water, and especially in the case of highly acidic chemicals, the inner wall of the main exhaust pipe as well as the connection pipes and joints are corroded or scaled up to prevent fluid flow and contaminate the clean room. There is a problem that requires frequent piping replacement or repair work.

The conventional exhaust system was in the form of a duct configured to discharge gas such as chemicals from the wet station 1 to the main exhaust pipe 57, as shown in FIG. 1, and in the curved cylindrical damper housing 53, A disk-shaped exhaust damper 51 for controlling the flow is variably mounted. One end of the damper housing 53 is connected to the wet station 1, and the other end of the damper housing 53 is connected to the connecting pipe 55. It is connected to the main exhaust pipe (57) through it is configured to discharge the gas generated from the wet station (1) to the main exhaust pipe (57) through a connecting pipe (55), the main exhaust pipe (57) is a semiconductor production line It extends to the outside of this installed clean room, and the gas discharged from the wet station 1 is discharged completely out of the clean room. In the case of a semiconductor manufacturing facility such as a wet station that wet-processes a wafer for semiconductor manufacturing, only a gas of various chemicals used in the facility is discharged, and liquid chemicals after being used are stored in the wet station. The discharge system of the conventional semiconductor production line is normally removed, but the liquid chemicals scattered at the time of the discharge of gaseous chemicals are sucked out at the same time by the main exhaust pipe 57 and the connection pipe 57 by the fluid. In addition, other main exhaust pipes 57 and the connection pipe 55 is formed in the scale and the corrosion occurs in the exhaust pipe was not only damaged the pipes had a problem that must be replaced frequently.

The present invention has been made to solve the above problems, an object of the present invention is to separate the chemicals, such as chemicals contained in the splashed liquid without immediately discharging the fluid generated in the wet station is a gas containing a scattered liquid The present invention provides a liquid collecting device which prevents the scale from forming a passage through the pipe and obstructs the flow and prevents the pipe from being corroded by the liquid.

Liquid collecting device for achieving the above object of the present invention includes the following configuration.

According to an embodiment of the present invention, the liquid collecting device according to the present invention has an inlet pipe attached to a gas pipe of a wet station and the other end of the liquid collecting device from the gas introduced through the inlet pipe. A collecting tube for collecting the component and a liquid collecting tube disposed on the lower surface of the collecting tube for draining the collected liquid component to the outside and an exhaust pipe mounted to the collecting tube in an opposite direction of the inlet tube; And an upper wing plate attached to an upper portion of the inlet pipe and extending to a predetermined diameter region of the inlet pipe, and a lower wing plate spaced apart from the upper wing plate.

According to another embodiment of the present invention, the liquid collecting device according to the present invention includes a front surface to which the collecting pipe is attached, a back surface to which the exhaust pipe is attached, an upper surface surrounding the front surface and the rear surface, both side surfaces and a bottom surface. It has a three-dimensional shape.

According to another embodiment of the present invention, the liquid collecting device according to the present invention is an inclined surface, the lower surface is inclined downward from the front side, the connection surface is pushed downward from one end of the inclined surface, horizontally at one end of the connection surface It includes a horizontal plane extending to the other end of the back.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the upper wing plate has a corrugated shape, thereby widening the contact area with the fluid.

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According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the lower wing plate may have a wavy shape to increase the contact area with the fluid.

According to another embodiment of the present invention, the liquid collecting device according to the present invention further includes a cohesive member having the upper wing plate positioned at the end of the upper wing plate and including a plurality of voids.

According to another embodiment of the present invention, the liquid collecting device according to the present invention is located at one end of the lower blade plate is spaced apart from the other end of the upper wing plate by a predetermined distance to the left horizontally and by a predetermined distance in the lower vertical direction The other end is spaced apart from the lower surface by a predetermined distance.

According to another embodiment of the present invention, the liquid collecting device according to the present invention further includes one or more funnels in which the liquid collecting tube has a truncated cone shape.

Hereinafter, with reference to the accompanying drawings a preferred embodiment of a liquid collecting device according to the present invention will be described in detail.

2 is a perspective view showing a liquid collecting device according to the present invention, Figure 3 is a cross-sectional view of the liquid collecting device showing the flow of the discharge according to the invention.

The liquid collecting device 3 according to the present invention includes an inlet pipe 31 for introducing fluid from the wet station 1, a collecting container 33 for collecting liquid, and a liquid collecting pipe for discharging separated scattered liquid ( 35) an exhaust pipe 37 for discharging the separated gas.

The inlet pipe 31 is introduced into the collecting container 33 to the fluid generated from the wet station (1) and one end is fixed to one side of the wet station (1) and the other end is the collecting container ( 33) is fixed to the front surface 332.

The collecting container 33 is a three-dimensional cylinder for collecting liquid in the fluid flowing from the inlet pipe 31, the front surface 332 to which the inlet pipe is attached, the back surface 335 to which the exhaust pipe 37 is attached, An upper surface 337, a side surface 336 and a lower surface 334 surrounding the front surface 332 and the rear surface 335 are defined, and the lower surface 334 is an inclined surface 334a extending inclined downward from the front surface 332. ) And a connecting surface 334b tucked downwardly from one end of the inclined surface 334a and a horizontal surface 334c extending horizontally from one end of the connecting surface 334b and extending to the other end of the back surface 335. The front surface 332 has a trapezoidal shape having a smaller area than the rear surface 335, and includes an upper wing plate 331 and a lower wing plate 333 therein.

The upper blade plate 331 has one end thereof 331a attached to the upper edge 332a of the front surface 332 and the other end 331b attached to the front surface 332 in the lower surface 334 direction. A part of the fluid (fluid in the A direction) that flows out of the inlet pipe 31 so as to extend only to a predetermined diameter region of the pipe 31 impinges the upper wing plate 331, and a part of the pipe 31 and the upper wing plate 331. As a plate-shaped member that can pass through without hitting, it is preferable to have a wave shape in order to ensure the maximum contact area with the fluid flowing into the inlet pipe 31 and to smoothly guide the flow of the fluid to the bottom surface (334). Do. Accordingly, the fluid flowing into the inlet pipe 31 hits the upper blade plate 331, is directed toward the lower surface 334, and loss of pressure and speed occurs, and the upper blade plate 331 is a cohesive member. 331d.

The agglomeration member 331d is located at the end of the upper wing plate 331 and includes a plurality of voids so that these voids communicate with each other to have a mesh shape, and the liquid absorption rate is such that liquid can seep between these voids. The liquid formed on the upper wing plate 331 as high flows on the upper wing plate 331 and is absorbed by the agglomeration member 331 d. The liquid absorbed by the agglomeration member 331d gradually agglomerates, becomes a liquid drop, and freely falls into the liquid collecting pipe 35 as the load increases. Any material having a plurality of voids may be used as the agglomeration member 331d, and a preferred embodiment of the agglomeration member 331d may be a sponge that can absorb liquid.

The lower wing plate 333 is positioned with one end 333a spaced apart from the other end 331b of the upper wing plate 331 to the left by a horizontal distance a and spaced apart by a vertical distance b to the lower surface 334. It is extended and the other end 333b is a plate-shaped member which is spaced apart from the lower surface 334 by a predetermined distance to ensure the maximum contact area with the fluid flowing therein and smoothly guides the flow of the fluid to the lower surface 334. It is preferable to have a waveform shape in order to do so. Accordingly, a part of the fluid in the C direction introduced into the inlet pipe 31 not only strikes the lower wing plate 333, but also serves to guide the fluid flowing along the upper wing plate 331, and the surroundings thereof. A vortex is formed along the liquid so that the liquid in the fluid can be easily collected.

Referring to FIG. 3, the distance a indicates that fluid in the A direction flowing through the upper wing plate 331 flows smoothly into the lower wing plate 333, and the fluid in the A direction goes to the lower wing plate 333. The impingement to the lower wing plate 333 while minimizing the flow rate exiting with the fluid in the B direction passing through the exhaust pipe 37 without hitting the upper wing plate 331 and the lower wing plate 333 before being introduced. It is preferable to maximize the distance b, and the distance b passes through the inlet pipe 31 so that the fluid in the B direction directly to the exhaust pipe 37 without hitting the upper wing plate 331 and the lower wing plate 333. By passing the fluid in the B direction as a distance to pass through it to cause a difference in the pressure and speed of the fluid in the D direction and to generate a vortex it is possible to increase the liquid collection efficiency.

4 is a perspective view showing the liquid collecting tube 35 of the liquid collecting device 3 according to the present invention.

3 and 4, the liquid collecting pipe 35 is fixed to the horizontal plane 334c of the collecting container 33 and separated by the upper wing plate 331 and the lower wing plate 333 to free fall. A liquid is discharged to the outside, and includes a hollow tube 355, one or more funnels 351, and a diaphragm 353.

The hollow tube 355 is generally a cylindrical tube that is attached to the lower surface of the collecting container 33 and extends a predetermined length downward.

The diaphragm 353 is installed to partition up and down at a predetermined position of the hollow tube 355 and includes one or more through holes 353a to which the funnel 351 is to be fixed.

The funnel 351 is a truncated cone-shaped tube is fixedly located in the through hole (353a), the upper surface (S1) is a shape having a wider cross-sectional area than the bottom surface (S2). According to the continuous equation in the hydrodynamic basic equation, since the product of the cross-sectional area and the velocity is constant, the velocity of the bottom surface S2 having a smaller cross-sectional area than the upper surface S1 is larger than the upper surface S1. In addition, according to the Bernoulli equation, since the upper surface S1 is slower than the lower surface S2, the pressure is higher than the lower surface S2 of the upper surface S1, and the fluid has a property of flowing from the high pressure to the low pressure. The collected liquid is easily discharged to the outside by the pressure difference.

The exhaust pipe 37 is fixed to the rear surface 335, and the gas introduced from the inlet pipe 31 and the gas collected from the liquid in the collecting container 33 are discharged to the outside.

3 is a cross-sectional view of a liquid collecting device showing a flow of another fluid in the present invention.

Referring to the process of collecting the liquid through the flow of the fluid with reference to Figure 3, the gas in the fluid flowing through the inlet pipe 31 forms three flow paths and is discharged through the exhaust pipe 37, in the process The liquid formed in the upper wing plate 331 and the lower wing plate 333 is discharged through the liquid collecting pipe 35. Hereinafter, a flow of a gas including three liquid flow paths and scattered liquid will be described in detail.

In the first case, the fluid in the A direction impinges on the upper blade plate 331, the pressure and the speed is reduced. At this time, a part of the liquid is formed on the upper wing plate 331, and the liquid formed on the upper wing plate 331 flows along the upper wing plate 331 and is absorbed by the aggregation member 331 d. The liquid absorbed in the c) aggregates and free-falls downward as the load increases, and is collected in the horizontal plane 334c along the inclined plane 334a. In addition, the other part of the fluid that hit the upper blade plate 331 flows along the flow path defined by the upper blade plate 331, which flows along the flow path of the B direction or D direction to be described below.

In the second case, the fluid flowing in the B direction flows between the upper wing plate 331 and the lower wing plate 333 and directly flows into the exhaust pipe 37. This fluid has a low friction and a narrow passage, which increases speed and pressure.

In the third case, the fluid flowing in the C direction hits the lower wing plate 333 and the pressure and the speed are reduced, and the fluid flowing along the flow path of the upper wing plate 331 among the fluid in the A direction. Flow along the lower wing plate 333 forms a fluid in the D direction.

Therefore, the fluid in the A direction hits the upper blade plate 331, the liquid contained in the fluid flows along the upper blade plate 331, agglomerates in the agglomeration member, and falls freely downward and the corrugated surface of the upper wing plate 331 While flowing along the lower wing plate 333 is mixed with the fluid introduced in the C direction flows along the lower wing plate 333. In addition, the upper wing plate 331 and the lower wing plate 333 is spaced apart by a distance b, so that the fluid in the B direction flows therebetween, at this time in the A direction flowing along the upper wing plate 331 Some of the fluid will mix.

The fluid introduced in the A and C directions hits the upper wing plate 331 and the lower wing plate 333 to collect the liquid component and forms a vortex in the process of colliding so that the liquid component free falls or forms on the wing plate, respectively. As a result, the collection of the liquid component proceeds more efficiently. The free fall or the liquid collected on the horizontal surface 334c along the vane is drained to the outside along the liquid collecting pipe 35. Here, since the liquid collecting pipe 35 operates like a nozzle including a funnel, the liquid collected according to the continuous equation and Bernoulli theorem of the fluid described above is easily discharged to the outside by the pressure difference.

Applicants will be described below in the experimental example of the present embodiment.

Experimental condition

The experimental equipment used in the above experiments was equipped with a sprayer on the inlet side, and an IND46360 manometer of Dwyer Instrument Inc. (USA) was respectively installed on the inlet line and the exhaust pipe to measure the internal pressure. NILFISK (Denmark) GS83 pump was installed on the exhaust pipe side for forced discharge. In addition, four funnels with a top surface of 20 mm diameter and a bottom surface of 3 mm diameter were installed in a 100 mm diameter inlet pipe, a 100 mm diameter exhaust pipe, and a 50 mm diameter liquid collection tube. The amount of the liquid drained into the funnel of the liquid collecting tube was measured. In addition, by varying the pumping pressure of the pump as shown below the change in the pressure of the inlet pipe and the exhaust pipe side was measured the water collection rate. Here, internal pressure means sound pressure. In addition, the negative pressure was formed to be similar to the actual 20 to 40 mm of water in the wet station.

Experiment result

The experimental results of the experimental example are shown in the table below.

Experimental Example Inlet pipe side Exhaust pipe side Supply amount (ml) Capture amount d (ml) IN pressure mm of water OUT pressure mm of water One 15 10 1000 987 2 20 10 1000 990 3 25 20 1000 987 4 30 10 1000 985 5 35 35 1000 985 6 42 42 1000 984 7 48 40 1000 982 8 50 45 1000 983 9 50 45 1000 985

As can be seen in the above table, the amount of water recovered was slightly different depending on the pressure in the inlet pipe and the exhaust pipe, but the recovery rate of 98% or more can be seen in the experiment of the pressure below 50mm of water.

Applicant has looked at an embodiment of the present invention below, it is not excluded that various changes and modifications can be interpreted as falling within the scope of the invention, any embodiment that implements the technical spirit of the present invention It should be interpreted as falling within the scope of.

The present invention can achieve the following effects by the above configuration and the coupling relationship.

The present invention includes a fluid such as chemicals, such as chemicals contained in the fluid generated in the wet station, when this fluid flows along the exhaust pipe, the scale is formed in the pipe or the connection portion, which not only disturbs the flow of the fluid but also frequently In consideration of the need to be replaced, the fluid generated in the wet station is discharged by dividing the liquid and gas into the scattered liquid to prevent corrosion of the pipe and reduce contamination.

Claims (9)

One end is placed on the gas pipe of the wet station, and the other end is disposed on the collecting tube and the lower surface of the collecting tube for collecting liquid components scattered from the gas introduced through the collecting tube. A liquid collecting pipe for draining a liquid component to the outside and an exhaust pipe mounted to the collecting pipe in an opposite direction of the pulling pipe, wherein the collecting pipe is attached to an upper portion of the drawing pipe and extends to a predetermined diameter region of the drawing pipe. And a lower wing plate which is spaced apart from the upper wing plate to be spaced apart from the upper wing plate. The method of claim 1, wherein the collecting container, And a three-dimensional shape including a front surface to which the inlet pipe is attached, a back surface to which the exhaust pipe is attached, a top surface surrounding the front surface and a back surface, and both side surfaces and a bottom surface. The method of claim 2, wherein the lower surface, And an inclined surface that is inclined downwardly from the front side, a connecting surface that is tucked downwardly from one end of the inclined surface, and a horizontal surface extending horizontally from one end of the connecting surface to the other end of the rear surface. delete The method of claim 1, wherein the upper blade plate, A liquid collecting device, characterized in that it has a corrugated shape to increase the contact area with the fluid. The method of claim 1, wherein the lower wing plate, A liquid collecting device, characterized in that it has a corrugated shape to increase the contact area with the fluid. The method of claim 1, wherein the upper blade plate, Liquid collecting device, characterized in that it further comprises a cohesive member located at the end of the upper blade plate and comprising a plurality of voids. The method of claim 1, wherein the lower wing plate, One end thereof is spaced apart from the other end of the upper wing plate by a predetermined distance to the left horizontally spaced by a certain distance in the lower vertical direction, the other end is a liquid collecting device, characterized in that spaced apart from the lower surface by a predetermined distance. The liquid collection tube according to any one of claims 1 to 3 and 5 to 8, A liquid collecting device, characterized in that it further comprises one or more funnels having a truncated cone shape.

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