WO2024048856A1 - Collection device using fluid vortex to increase collection efficiency - Google Patents

Collection device using fluid vortex to increase collection efficiency Download PDF

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Publication number
WO2024048856A1
WO2024048856A1 PCT/KR2022/019461 KR2022019461W WO2024048856A1 WO 2024048856 A1 WO2024048856 A1 WO 2024048856A1 KR 2022019461 W KR2022019461 W KR 2022019461W WO 2024048856 A1 WO2024048856 A1 WO 2024048856A1
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WIPO (PCT)
Prior art keywords
fluid
collection
internal space
collection device
vortex
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PCT/KR2022/019461
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French (fr)
Korean (ko)
Inventor
신종수
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주식회사 신양
신종수
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Publication of WO2024048856A1 publication Critical patent/WO2024048856A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D45/00Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/12Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present invention relates to a collection device that improves collection efficiency by using the eddy current of the fluid. More specifically, the present invention relates to a collection device that increases the collection efficiency by using the eddy current of the fluid. It relates to a collection device that maximizes the collection efficiency of a specific substance to be collected by promoting the generation of .
  • semiconductors are manufactured through various processes such as oxidation, etching, deposition, and photolithography. These manufacturing processes include ammonia (NH 3 ), nitrogen monoxide (NO), and Toxic gases such as acid (AsH 3 ) and phosphine (PH 3 ) are used.
  • NH 3 ammonia
  • NO nitrogen monoxide
  • Toxic gases such as acid (AsH 3 ) and phosphine (PH 3 ) are used.
  • waste gas generated from the semiconductor manufacturing process is released into the atmosphere, the above-mentioned toxic gas may have fatal adverse effects on the human body, and fire accidents may also occur due to spontaneous ignition of the waste gas.
  • waste gas generated in the semiconductor manufacturing process is purified through a scrubber or the like and discharged into the atmosphere.
  • These scrubbers include the heat-wet scrubber, which is an indirect combustion wet type that burns waste gas using an induction heating method and then filters it once more using water, and a wet type that uses water to filter waste gas.
  • Wet Scrubber which collects waste gas and purifies water
  • Burn-Wet Scrubber which is a direct combustion wet type that burns waste gas with a high-temperature flame and then collects it using water. etc.
  • water is used in the process of treating waste gas. Since the water used contains many contaminants, water containing contaminants is treated with a filter, etc. and discharged to the outside through a drain pipe. must be discharged.
  • Figure 1 is a diagram showing a conventional liquid collection device 90, which is disclosed in Korean Patent Publication No. 10-2003-0052170 (June 26, 2003).
  • the conventional liquid collection device 90 includes a scrubber (S) that neutralizes the discharged waste gas, and an exhaust duct (Scrubber) that discharges the purified gas through the scrubber (S). D) was installed on the connector between
  • the liquid collection device 90 is composed of a cylindrical upper collection container 91 and a lower collection container 93, and an inlet pipe 911 is installed on one side of the upper collection container 91 connected to a connection pipe. And, on the other side opposite to the inlet pipe 911, an exhaust pipe 913 was installed with a height difference.
  • a metal collecting net 9131 is formed inside the inlet of the exhaust pipe 913, and an outlet 931 is formed at the lower end of the lower collection container 93 to regularly discharge the collected powder and condensate. , At the bottom of the outlet 931, a stopper 9311 was screwed and sealed.
  • a fixed plate 915 of a circular plate is formed at the bottom of the upper collection container 91, and a fixed plate 933 of the same size as the fixed plate 915 is formed at the top of the lower collection container 93. Bar, the upper collection container 91 and the lower collection container 93 could be bolted together.
  • the gas introduced through the inlet pipe 911 of the liquid collection device 90 is filtered and collected by the mesh 9131, and some of the powder falls into the lower collection container 93 or is stored in the liquid collection device 90. Attached, not only the powder but also the condensate from the waste gas accumulates in the lower collection container 93, and the powder and condensate collected in the lower collection container 93 are connected to the stopper screwed to the outlet 931. 9311) was released and released regularly.
  • this conventional liquid collection device 90 had a problem in that it could not block the flame when an unexpected explosion of the scrubber S occurred.
  • Waste gases handled within the scrubber (S) include combustible gases, etc., and ignition may occur due to various causes, resulting in a fire accident.
  • a sprinkler is installed on the exhaust duct (D) side, so that a certain degree of fire suppression can be achieved in the event of a fire, but the pipe connecting the scrubber (S) and the exhaust duct (D) is made of PVC material to prevent corrosion within the pipe, making it vulnerable to fire. Therefore, when a fire accident occurs, flames travel through the pipes and can easily lead to a large-scale fire.
  • the conventional liquid collection device 90 described above has a separate configuration for fire prevention and blocking. Without it, the liquid collection device 90 also cannot prevent the flame and burns, resulting in serious damage to property and human life.
  • FIG. 2 is a diagram illustrating the installation state of the conventional liquid collection device 90.
  • the conventional liquid collection device 90 When described with reference to FIG. 2, the conventional liquid collection device 90 must move fluid along the horizontal direction from one side to the other side to collect the liquid. Because collection was possible, the pipe connected vertically from the scrubber (S) was connected to a horizontal pipe, this horizontal pipe was connected to the liquid collection device 90, and the discharged fluid was taken out through the horizontal pipe and collected again. It was connected to a straight tube and sent to the exhaust duct.
  • Patent Document 1 Korean Patent Publication No. 10-2003-0052170 (June 26, 2003)
  • the present invention was created to solve the above problems,
  • the purpose of the present invention is to provide a collection device that maximizes the collection efficiency of a specific substance to be collected by promoting the generation of a vortex in the internal space of a housing portion through which fluid flows.
  • Another object of the present invention is to provide a collection device that promotes the generation of vortices by creating a difference in the flow rate of fluid by forming a partition that divides the internal space of the housing.
  • Another object of the present invention is to provide a collection device that divides one flow path into a plurality of flow paths having different flow path widths through a partition portion, thereby generating vortices due to differences in flow rates between the flow paths.
  • Another object of the present invention is to provide a collection device that increases collection efficiency by generating a vortex through the partition, and allows substances to be discharged to the outside of the collection unit through the discharge unit to be smoothly discharged.
  • Another object of the present invention is to form a partition parallel to the direction of the stream rising toward the outlet at a position spaced a certain distance away from the side inner circumferential surface of the housing part, but to make the passage width formed by the side inner circumferential surface of the housing part and the partition relatively narrow.
  • the purpose is to provide a collection device that forms a clockwise vortex from the side inner peripheral surface of the housing portion toward the center of the housing portion by forming the fastest flow velocity in the corresponding flow path.
  • Another object of the present invention is to provide a collection device that configures first wings inclined in a downward direction on the upper side of the partition so that the fluid rising rapidly by the partition meets the first wings to form a vortex. .
  • Another object of the present invention is to provide a collection device that configures a first extension extending downward from the other end of the first wing to maximize the vortex phenomenon caused by the fluid whose flow rate is increased by the partition.
  • Another object of the present invention is to configure a second wing portion located above the inlet and inclined in the downward direction, and to configure a second extension portion extending in the downward direction from the other end of the second wing portion to form a housing from the inlet portion.
  • a collection device is provided that guides the direction of movement of fluid entering the internal space of the compartment toward the compartment.
  • Another object of the present invention is to construct a treatment fluid supply unit that is inclined downward along the second wing, so that the treatment fluid falls into the internal space, so that all fluid flowing into the collection device passes through the fluid film, thereby forming a scrubber. It provides a collection device that prevents embers generated from the back from spreading to other places.
  • Another object of the present invention is to provide a collection device that prevents problems that can lead to large-scale fires when flames travel through pipes when a scrubber explodes, etc.
  • Another object of the present invention is to neutralize gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid discharged from a scrubber, etc., and to neutralize fine particles such as fume contained in the fluid.
  • the goal is to provide a collection device that allows it to be removed.
  • Another object of the present invention is to prevent fire by providing a treatment fluid in a collection device installed on the pipe connecting the scrubber and the exhaust duct so that the pipe, which is made of PVC material to prevent corrosion and is vulnerable to fire, does not become a medium for fire spread.
  • the goal is to provide a collection device that blocks the spread.
  • Another object of the present invention is to construct a treatment fluid supply unit that penetrates from the outside of the collection unit to the inside and drops the treatment fluid in the direction of gravity at a specific position in the internal space, blocking the spread of fire through the fluid film and removing the treated fluid from a scrubber, etc.
  • the aim is to provide a collection device that allows corrosion-causing liquid components contained in the fluid to be separated and discharged.
  • Another object of the present invention is to provide a collection device in which the processing fluid supply portion is formed to penetrate the housing portion and is configured to be separably coupled to the housing portion, thereby enabling separate cleaning.
  • Another object of the present invention is to form a plurality of through holes in the processing fluid supply unit by aligning rows and columns on the lower surface of the storage unit, and by arranging the through holes between neighboring rows to be staggered, thereby preventing the penetration of the through holes into the internal space through the inlet portion.
  • the goal is to provide a collection device that allows all of the target fluid to pass through the treatment fluid membrane.
  • Another object of the present invention is to configure the direction of the central axis of the through hole to be parallel to the direction of gravity, so that even if the reservoir is located at an angle, the processing fluid contained in the reservoir adheres to the bottom of the reservoir due to surface tension, etc. and moves in the direction of gravity.
  • the goal is to provide a collection device that allows it to fall vertically.
  • Another object of the present invention is to configure an inclined surface on the lower side of the housing unit, and to allow fluid to flow into the internal space of the housing unit by allowing an inflow portion formed vertically from the bottom to the upper part to communicate with the internal space through the inclined surface, thereby allowing fluid to flow into the internal space of the housing unit and coagulate.
  • the purpose is to provide a collection device that allows the corrosion-causing liquid components to be collected in one place along the slope of the housing.
  • Another object of the present invention is to provide a vertical collection device that minimizes the space required for installation when installing the device between the scrubber and the exhaust duct.
  • Another object of the present invention is to minimize the space required for installation of the collection device and further increase space efficiency by penetrating the inlet from the bottom to the top of the housing forming the interior space to communicate with the interior space. is to provide.
  • Another object of the present invention is to provide a collection device that effectively prevents corrosion of the pipe by minimizing the pressure drop of the fluid by preventing bent portions from occurring when connecting the pipe to the collection unit.
  • Another object of the present invention is to provide a collection device that dramatically reduces the amount of material used, simplifies piping work, and facilitates maintenance after installation by making it possible to shorten the length of the inlet without bending parts. It is provided.
  • Another object of the present invention is to provide a collection device that configures an additional part that forms an additional space in the internal space of the housing part, so that a vortex of fluid is actively formed at the front of the outlet by the additional space.
  • Another object of the present invention is to form a collection unit in parallel with the outlet on one surface of the collection unit where the outlet is formed, thereby generating a vortex of fluid in the internal space before the fluid exits through the outlet, thereby further increasing the collection efficiency of a specific substance.
  • the device is provided.
  • Another object of the present invention is to form an additional space in communication with the internal space and to form a cylindrical body part open on one side and the other side, and a cap part detachably coupled to the body part to open and close the open one side of the body part.
  • the collection device is in operation, one open side of the body is closed by the cap portion to generate a vortex due to the additional space, and when the collection device is not operating, the cap portion is separated to open one side of the body portion to create a vortex.
  • the goal is to provide a collection device that allows the interior to be inspected or easily cleaned.
  • Another object of the present invention is to provide a collection device that configures a fixing part for fixing the cap part to the body part, so that the cap part can be easily fixed or separated from the body part as needed.
  • the present invention is implemented by an embodiment having the following configuration.
  • the present invention includes a collection unit that forms an internal space and collects a specific component from the target fluid entering the internal space, and is connected to the collection unit to introduce the target fluid into the internal space.
  • an inlet unit connected to the collection unit to supply a treatment fluid for collecting the specific component from the target fluid into the internal space
  • a processing fluid supply unit connected to the collection unit to treat the target within the internal space. It includes an outlet part that discharges the fluid out of the internal space, and an outlet part that is connected to the collecting part and discharges the fluid containing the collected specific component out of the internal space, wherein the collecting part is a housing that forms the internal space. It is characterized by comprising a section and a partition section that divides the internal space to generate a vortex of fluid that increases collection efficiency.
  • the partition unit divides one flow path of the internal space into a plurality of flow paths having different flow path widths, and generates a vortex of fluid by the difference in flow rate between the divided flow paths. It is characterized by ordering.
  • the partition portion is formed parallel to a streamline in an upward direction toward the outlet portion.
  • the partition portion is formed at a position spaced apart from the side inner peripheral surface of the housing portion by a predetermined distance, and is a flow path formed with the side inner peripheral surface of the housing portion among the flow paths divided by the partition portion.
  • the width is formed to be relatively narrow, so that the fastest flow rate occurs in the flow path formed by the side inner peripheral surface of the housing portion and the partition portion.
  • the collecting unit includes a first wing portion located on an upper side of the partition and formed in a shape to restrict the flow of fluid rising according to the guidance of the partition.
  • the first wing part is characterized in that one end of the first wing part is coupled to the side inner peripheral surface of the housing part, the other end forms a free end, and is formed to be inclined in a downward direction.
  • the collecting part further includes a first extension part extending downward from the other end of the first wing forming the free end.
  • the collecting part includes a second wing part located above the inlet and formed in a shape to restrict the flow of fluid rising from the inlet, and the second wing part is formed in a shape that restricts the flow of fluid rising from the inlet.
  • the wing portion is characterized in that one end is coupled to the side inner peripheral surface of the housing portion, the other end forms a free end, and is inclined in a downward direction.
  • the collecting part includes a second extension part extending downward from the other end of the second wing forming the free end.
  • the processing fluid supply unit includes a storage portion formed to be inclined downward along the second wing and forming a receiving space in which the processing fluid is stored, and the receiving portion. It may include a through hole formed through the storage unit so that the processing fluid stored in the space falls into the internal space.
  • the present invention includes a collection unit that forms an internal space and collects a specific component from the target fluid entering the internal space, and is connected to the collection unit to collect the target fluid into the internal space.
  • an inlet that flows in
  • a processing fluid supply section that is connected to the collection section and supplies a processing fluid for collecting the specific component from the target fluid to the inner space
  • a processing fluid supply section that is connected to the collection section and processes the processing fluid in the internal space. It includes an outlet part that discharges the target fluid out of the internal space, and an outlet part that is connected to the collecting part and discharges the fluid containing the collected specific component out of the internal space, wherein the collecting part forms the internal space. It is characterized by comprising a housing part and an additional part that forms an additional space in the internal space to generate a vortex of fluid that increases collection efficiency.
  • the additional part is formed parallel to the outlet on one surface of the collection part where the outlet is formed, so that the fluid flows into the internal space before the fluid exits through the outlet. It is characterized by generating a vortex.
  • the additional part includes a cylindrical body part that forms an additional space in communication with the internal space and is open on one side and the other side, and opens and closes one open side of the body part. It is characterized in that it includes a cap part that is detachably coupled to the body part.
  • the additional part includes a fixing part that fixes the cap part to the body part.
  • the fixing part includes a first fixing body formed in a shape to grip the body part and including a first fixing hole penetrating from one side to the other side, and gripping the cap part.
  • a second fixing body is formed in a shape and includes a second fixing hole penetrating from one side to the other side, and is fastened to the first fixing hole and the second fixing hole to form the first fixing body and the second fixing body. It is characterized by including a fastening means for coupling.
  • the present invention can achieve the following effects by combining the above-mentioned embodiment with the configuration, combination, and use relationship described below.
  • the present invention has the effect of providing a collection device that maximizes the collection efficiency of a specific substance to be collected by promoting the generation of a vortex in the internal space of the housing portion through which fluid flows.
  • the present invention has the effect of providing a collection device that promotes the generation of vortices by creating a difference in the flow rate of fluid by forming a partition that divides the internal space of the housing.
  • the present invention has the effect of providing a collection device that divides one flow path into a plurality of flow paths having different flow path widths through a partition portion, thereby generating vortices due to differences in flow rates between the flow paths.
  • the present invention has the effect of providing a collection device that increases collection efficiency by generating a vortex through a partition, and allows substances to be discharged to the outside of the collection unit through the discharge unit to be smoothly discharged.
  • a partition is formed parallel to the direction of the stream rising toward the outlet at a position spaced a certain distance away from the side inner circumferential surface of the housing, and the width of the flow path formed by the side inner circumferential surface of the housing and the partition is formed to be relatively narrow.
  • the present invention has the effect of providing a collection device that configures first wings inclined in a downward direction on the upper side of the partition, allowing fluid rising rapidly by the partition to form a vortex as it meets the first wings.
  • the present invention achieves the effect of providing a collection device that maximizes the vortex phenomenon caused by fluid with an increased flow rate by the partition by configuring a first extension extending downward from the other end of the first wing.
  • the present invention comprises a second wing located above the inlet and inclined in the downward direction, and a second extension part extending downward from the other end of the second wing, from the inlet to the inner space of the housing.
  • the present invention configures a processing fluid supply unit that is inclined downward along the second wing, allowing the processing fluid to fall into the internal space, so that all fluid flowing into the collection device passes through the fluid film, thereby preventing embers generated from scrubbers, etc. It has the effect of providing a collection device that prevents it from spreading to other places.
  • the present invention has the effect of providing a collection device that prevents problems that can lead to large-scale fires when flames travel through pipes when a scrubber explodes, etc.
  • the present invention neutralizes gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid discharged from a scrubber, etc., and allows fine particles such as fume contained in the fluid to be removed.
  • gases harmful to the human body such as ammonia (NH 3 ) and silane (SiH 4 ) contained in the fluid discharged from a scrubber, etc.
  • SiH 4 silane
  • the present invention is made of PVC material to prevent corrosion and prevents fire-vulnerable pipes from becoming a medium for fire spread by providing a treatment fluid in a collection device installed on the pipe connecting the scrubber and the exhaust duct to block the spread of fire. It has the effect of providing a collection device.
  • the present invention constitutes a treatment fluid supply unit that penetrates from the outside of the collection unit to the inside and causes the treatment fluid to fall in the direction of gravity at a specific position in the internal space, blocking the spread of fire through the fluid film and being contained in the fluid treated in a scrubber, etc. It has the effect of providing a collection device that allows corrosion-causing liquid components to be separated and discharged.
  • the present invention has the effect of providing a collection device that allows separate cleaning by forming the processing fluid supply portion to penetrate the housing portion and being configured to be detachably coupled to the housing portion.
  • a plurality of through holes of the processing fluid supply part are formed in rows and columns on the lower surface of the storage part, and the through holes between neighboring rows are arranged in a staggered manner, so that all the target fluid that enters the internal space through the inlet part is The effect of providing a collection device that allows the processing fluid to pass through the membrane is derived.
  • the central axis of the through hole is configured to be parallel to the direction of gravity, so that even if the storage unit is positioned at an angle, the processing fluid contained in the storage unit falls vertically along the direction of gravity without sticking to the bottom of the storage unit due to surface tension or the like. It has the effect of providing a collection device that allows this.
  • an inclined surface is formed on the lower side of the housing part, and an inflow part formed vertically from the lower side to the upper part passes through the inclined surface and communicates with the internal space, thereby allowing fluid to flow into the internal space of the housing part, and condensed corrosion-causing liquid. It has the effect of providing a collection device that allows the ingredients to gather in one place along the slope of the housing.
  • the present invention has the effect of providing a collection device that minimizes the space required for installation when installing the vertical collection device between the scrubber and the exhaust duct.
  • the present invention has the effect of providing a collection device that minimizes the space required to install the collection device and further increases space efficiency by penetrating the inlet from the bottom to the top of the housing forming the interior space to communicate with the interior space. Derive .
  • the present invention has the effect of providing a collection device that effectively prevents corrosion of the pipe by minimizing the pressure drop of the fluid by preventing bent portions from occurring when connecting the pipe to the collection unit.
  • the present invention has the effect of providing a collection device that dramatically reduces the amount of material used, simplifies piping work, and facilitates maintenance after installation by shortening the length of the inlet without bending parts.
  • the present invention has the effect of providing a collection device that configures an additional part that forms an additional space in the internal space of the housing part, and allows a vortex of fluid to be actively formed at the front of the outlet due to the additional space.
  • the present invention provides a collection device that is formed parallel to the outlet on one surface of the collection part where the outlet is formed, and generates a vortex of fluid in the internal space before the fluid escapes through the outlet, thereby further increasing the collection efficiency of a specific substance. Derive the effect.
  • the present invention comprises a cylindrical body part that forms an additional space in communication with the internal space and is open on one side and the other side, and a cap part that is detachably coupled to the body part to open and close the open one side of the body part,
  • a cylindrical body part that forms an additional space in communication with the internal space and is open on one side and the other side
  • a cap part that is detachably coupled to the body part to open and close the open one side of the body part
  • the present invention has the effect of providing a collection device that configures a fixing part for fixing the cap part to the body part and allows the cap part to be easily fixed or separated from the body part as needed.
  • FIG. 1 is a diagram showing a conventional liquid collection device.
  • Figure 2 is a diagram showing the installation state of a conventional liquid collection device.
  • Figure 3 is a diagram showing a collection device according to an embodiment of the present invention.
  • Figure 4 is a cross-sectional view taken along line A-A' of Figure 3.
  • Figure 5 is a state diagram of Figure 3 in use.
  • Figure 6 is a diagram showing a collection device according to another embodiment of the present invention.
  • Figure 7 is a partially exploded perspective view of Figure 6.
  • Figure 8 is a cross-sectional view taken along line B-B' of Figure 6.
  • Figure 9 is a usage state diagram of Figure 6.
  • Figure 10 is a diagram showing an example of the state in which the collection device of the present invention is installed.
  • the present invention's collection device (1) which improves collection efficiency by using the vortex of the fluid, creates a difference in the flow rate of the fluid in the internal space of the housing portion through which the fluid flows, or creates an additional space in communication with the internal space to promote the generation of vortices. It is characterized by maximizing the collection efficiency of the specific substance to be collected.
  • FIG 3 is a diagram showing a collection device 1 according to an embodiment of the present invention.
  • the collection device 1 according to an embodiment of the present invention includes a collection unit 10 and an inlet 20. ), a treatment fluid supply unit 30, an outlet unit 40, and a discharge unit 50.
  • the collection unit 10 forms an internal space and is configured to collect specific components from the target fluid entering the internal space.
  • One side of the collection unit 10 is connected to an inlet 20, which will be described later, and the other side of the collection unit 10 is connected to an outlet 40, which will be described later, to remove corrosion-causing liquid components from the fluid flowing in from a scrubber, etc. It can capture and neutralize gases harmful to the human body.
  • the fluid flowing in through a scrubber, etc. may contain strong corrosive substances such as hydrofluoric acid.
  • the collection unit 10 collects these liquid components, thereby preventing the presence of corrosion-causing liquid components in the discharged fluid, thereby preventing the presence of corrosion-causing liquid components within the pipe. It prevents corrosion and has the function of neutralizing harmful substances such as ammonia (NH 3 ) and silane (SiH 4 ).
  • FIG. 4 is a cross-sectional view taken along line A-A' of FIG. 3, and when explained with reference to FIG. 4, the collection unit 10 includes a housing unit 11, a partition unit 12, a first wing unit 13, and a first wing unit 13. It includes an extension part 14, a second wing part 15, and a second extension part 16.
  • the housing portion 11 is configured to form the internal space and forms the overall appearance of the collection device 1. Referring to FIG. 3, the housing portion 11 may have an overall rectangular box shape, but a lower portion may be removed to form an inclined surface.
  • an inlet portion 20, which will be described later is coupled to the lower side of the housing portion 11, and an outlet portion 40, which will be described later, is coupled to the upper side of the housing portion 11, and the outlet portion 40, which will be described later, is coupled to the lower side of the housing portion 11.
  • the inflow fluid passes through the inner space of the housing portion 11 and is discharged through the outlet portion 40, which will be described later.
  • Corrosion-causing liquid components, gases harmful to the human body, etc. are removed within the housing portion 11. Corrosion-causing liquid components, gases harmful to the human body, etc. are present in the fluid flowing in from the inlet 20, but the outlet portion 40 ), there are no corrosion-causing liquid components or gases harmful to the human body in the fluid discharged through the system.
  • the housing portion 11 may be divided into a front surface 111, a rear surface 112, a side surface 113, an upper surface 114, a lower surface 115, and an inclined surface 116.
  • the front surface 111 is a vertical surface located on the front side of the housing portion 11 and refers to the surface indicated in FIG. 3.
  • the back surface 112 is a surface located on the opposite side of the front surface 111 and refers to a vertical surface located at the rear of the housing portion 11.
  • the side surface 113 is a surface connecting the front surface 111 and the rear surface 112 and refers to a vertical surface located on the left and right sides of the housing portion 11.
  • the upper surface 114 is a horizontal surface located on the upper side of the housing portion 11 and refers to a portion where the outlet portion 40, which will be described later, is coupled.
  • the lower surface 115 is a surface located on the lower side of the housing portion 11 and is a part connected to an inclined surface 116 to be described later. As shown in FIG. 3, the lower surface 115 has a discharge portion to be described later. (50) is combined so that corrosion-causing liquid components, processing fluids, etc. collected on the lower surface (115) can be discharged to the outside of the housing portion (11). 3 and 4 show that the lower surface 115 forms a horizontal surface, but fluid collects on the lower surface 115, and the collected fluid must be discharged through the discharge unit 50. To facilitate this, , the area around the discharge portion 50 is high, so an inclined surface may be formed so that fluid can naturally flow toward the discharge portion 50.
  • the inclined surface 116 is a portion obliquely connected to the lower surface 115, and constitutes the inclined surface 116 on the lower side of the housing portion 11, and an inlet portion 20, which will be described later, is formed vertically from the lower side to the upper side. ) penetrates the inclined surface 116 and communicates with the internal space of the housing part 11, so that fluid flows into the internal space of the housing part 11, and the condensed liquid component is stored in the housing part 11 ) so that they can gather on the lower surface 115 along the inclined surface 116.
  • the inclined surface 116 may include a first inclined surface 1161 and a second inclined surface 1162, as shown in FIGS. 3 and 4.
  • the first inclined surface 1161 forms a certain angle, and is a portion at one end connected to the side 113, and preferably refers to a surface through which an inlet 20, which will be described later, passes. As shown in Figures 3 and 4, the inclination angle of the first inclined surface 1161 may be smaller than the inclination angle of the second inclined surface 1162, which will be described later, and differently, the inclination angle of the first inclined surface 1161 may be configured to be equal to or greater than the inclination angle of the second inclined surface 1162.
  • the second inclined surface 1162 forms a certain angle, and refers to a portion where one end is connected to the other surface of the first inclined surface 1161 and the other end is connected to the lower surface 115. As shown in FIGS. 3 and 4, the second inclined surface 1162 is expressed as forming an angle of 90 degrees, but it is not necessarily limited thereto, and can be used in various ways as long as the fluid can be guided to the lower surface 115. It can have angles.
  • the partition 12 is configured to partition the internal space to generate a vortex of fluid that increases collection efficiency, and divides one flow path of the internal space into a plurality of flow paths having different flow path widths (W1 ⁇ W2). It is characterized by generating a vortex in the fluid due to the difference in flow rate between the divided flow paths.
  • the partition 12 may be configured to have a plate-shaped shape formed parallel to a streamline in an upward direction toward the outlet 40, which will be described later. .
  • One side of the plate-shaped partition 12 may be coupled to the front 111 of the housing 11, and the other side of the partition 12 may be coupled to the rear 112 of the housing 11. .
  • the partition 12 is formed at a position spaced apart by a predetermined distance W1 from the inner peripheral surface of the side 113 of the housing part 11, and is located in one of the flow paths divided by the partition 12.
  • the passage width W1 formed with the inner peripheral surface of the side 113 of the housing portion 11 is formed to be relatively narrow (W1 ⁇ W2), so that the inner peripheral surface of the side 113 of the housing portion 11 and the partition portion 12 ) ensures that the fastest flow velocity occurs in the flow path formed by Accordingly, a clockwise vortex can be formed from the inner peripheral surface of the side 113 of the housing portion 11 toward the center of the housing portion, thereby increasing the collection efficiency of specific substances and the Materials to be discharged to the outside of the collection unit 10 are discharged smoothly.
  • the first wing 13 is located on the upper side of the partition 12 and is formed in a shape to restrict the flow of fluid that rises according to the guidance of the partition 12.
  • the first wing portion 13 has one end coupled to the inner peripheral surface of the side surface 113 of the housing portion 11, the other end forming a free end, and may be a plate-shaped member inclined in the downward direction.
  • the first wing 13 is formed on the upper side of the partition 12 to be inclined downward, so that the fluid rising rapidly by the partition 12 meets the first wing 13. Let it form a vortex.
  • the first extension portion 14 is configured to extend downward from the other end of the first wing portion 13 forming the free end, and as shown in FIG. 4, the first extension portion 14 By configuring, the vortex phenomenon caused by the fluid whose flow rate is increased by the partition 12 can be maximized.
  • the first extension part 14 may be formed to extend vertically from the other end of the first wing part 13, as shown in FIG. 4.
  • the second wing 15 is located on the upper side of the inlet 20, which will be described later, and is formed in a shape to restrict the flow of fluid rising from the inlet 20.
  • One end is coupled to the inner peripheral surface of the side 113 of the housing portion 11, and the other end forms a free end, and may be formed to be inclined in a downward direction.
  • the direction of movement of the fluid entering the inner space of the housing unit 11 from the inlet unit 20, which will be described later, through the second wing unit 15 is guided toward the partition unit 12.
  • the second extension portion 16 refers to a configuration extending downward from the other end of the second wing portion 15 forming the free end. To allow fluid to move into the space between the second extension part 16 and the inclined surface 116 of the housing part 11, the end of the second extension part 16 is connected to the inclined surface of the housing part 11 ( 116) It is desirable to configure it so that they do not meet.
  • the second extension part 16 may be formed to extend vertically downward from the other end of the second wing part 15, as shown in FIG. 4.
  • the inflow part 20 is connected to the collection part 10 and refers to a configuration that introduces the target fluid into the internal space.
  • fluid treated in a scrubber, etc. may enter the internal space of the housing portion 11 through the inlet portion 20.
  • the shape of the inlet 20 is not limited to any specific shape, but as shown in FIG. 3, it may be configured as a cylindrical shape with the upper and lower surfaces open.
  • the inlet portion 20 extends vertically from the bottom to the top, and communicates with the internal space of the housing portion 11 through the inclined surface 116 of the housing portion 11.
  • the inlet part 20 of the collection device 1 of the present invention is composed of a vertical pipe that is not bent and is upright, so that a load is applied when the fluid discharged through a scrubber or the like passes through the inlet part 20, Corrosion problems caused by large pressure drops can be prevented.
  • the length of the inlet 20 can be shortened without bending parts, the amount of material used is dramatically reduced, piping work is simplified, and maintenance after installation becomes easier.
  • the processing fluid supply unit 30 is connected to the collection unit 10 and supplies processing fluid for collecting the specific component from the target fluid into the internal space.
  • the processing fluid supply unit 30 is formed to penetrate the side 113 of the housing unit 11 and is detachably coupled to the housing unit 11 to facilitate separation and cleaning, and the second wing. It can be seen as being in close contact with the lower surface of the part 15.
  • a fluid film or fluid curtain that blocks the spread of fire can be formed by the processing fluid supply unit 30, and the processing fluid is not limited to any specific fluid, but preferably consists of water (H 2 0). Therefore, the fluid film formed by the processing fluid supply unit 30 may be a water film.
  • the treatment fluid may be composed of a neutralizing agent that neutralizes harmful gases, etc. Used processing fluids can be used continuously through recycling processes.
  • the processing fluid supply unit 30 is brought into close contact with the lower surface of the second wing 15, so that even if the processing fluid supply unit 30 is configured, the housing unit 11 Since the internal space is not significantly reduced, sufficient liquid collection is achieved without increasing the size of the collection device 1.
  • the processing fluid supply unit 30 is formed to be inclined downward along the second wing portion 15. By allowing the processing fluid to fall into the internal space through the processing fluid supply unit 30, all fluid flowing into the collection device 1 passes through the fluid film, thereby preventing embers generated from the scrubber, etc. from spreading to other places. . Additionally, when a scrubber explodes, flames travel through the pipes, preventing problems that could lead to large-scale fires. In addition, it neutralizes gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid discharged from a scrubber, etc., and allows fine particles such as fume contained in the fluid to be removed.
  • gases harmful to the human body such as ammonia (NH 3 ) and silane (SiH 4 )
  • the processing fluid supply unit 30 includes a storage unit 31 and a through hole 32.
  • the storage unit 31 is configured to form a receiving space in which the processing fluid is stored, and may be detachably coupled to the housing unit 11 .
  • the storage unit 31 may be formed in the shape of an empty box, as shown in FIG. 4.
  • the storage unit 31 penetrates the side surface 113 of the housing unit 11 and is inclined downward to induce a smooth flow of processing fluid.
  • the through hole 32 refers to a hole formed through the storage unit 31 so that the processing fluid stored in the receiving space falls into the internal space.
  • the through hole 32 is inserted into the inner space of the housing portion 11 in the lower surface of the storage portion 31 to prevent leakage of the processing fluid to the outside of the housing portion 11. It can only be formed in the part where it is.
  • a plurality of through holes 32 of the processing fluid supply unit 30 are formed in rows and columns on the lower surface of the storage unit 31, and the through holes 32 between adjacent rows are arranged to be staggered. As much as possible, all of the target fluid that enters the inner space of the housing part 11 through the inlet part 20 can pass through the processing fluid film.
  • the processing fluid contained in the storage unit 31 is transferred to the storage unit 31 by surface tension, etc. (31) It attaches to the bottom and allows it to fall vertically along the direction of gravity without moving.
  • the outflow unit 40 is connected to the collection unit 10 and is configured to discharge the target fluid treated within the internal space out of the internal space.
  • the liquid component causing corrosion, harmful to the human body, Discharge the fluid from which gases, etc. have been removed.
  • the shape of the outlet portion 40 is not limited to any specific shape, but preferably has a cylindrical shape with the upper and lower surfaces open.
  • the inlet portion 20 is configured to penetrate the inclined surface 116 of the housing portion 11, but the outlet portion 40 communicates with the internal space of the housing portion 11 and
  • the spring is preferably formed to extend vertically upward from the upper surface 114 of the housing portion 11.
  • the outlet 40 of the present invention's collection device 1 can also be configured in the form of an upright vertical pipe without being bent, so even if the collection device 1 is installed between the scrubber and the exhaust duct, a large installation space is required. As the pipes are connected vertically, load problems and pressure drops are prevented. In addition, it prevents foreign substances from sticking to the inner wall of the pipe and forming scale, prevents corrosion inside the pipe caused by corrosion-causing liquid components, and neutralizes gases harmful to the human body.
  • the discharge unit 50 is connected to the collection unit 10 and discharges the collected fluid containing the specific component out of the internal space. That is, the discharge unit 50 is coupled to the lower surface 115 of the housing unit 11 and drains the collected corrosion-causing liquid components and the treatment fluid to the outside.
  • the discharge portion 50 may be configured as a cylinder with open upper and lower surfaces, and may preferably be configured as a cylindrical shape. When the corrosion-inducing liquid component that is coagulated while colliding with the first wing part 13 falls due to gravity, it is collected on the lower surface 115 of the housing part 11, and the discharge part 50 is on this lower surface 115. As configured, specific components collected outside the housing portion 11 are discharged.
  • the processing fluid continuously supplied to the inner space of the housing unit 11 falls by gravity, and the falling processing fluid is collected in the discharge unit 50 and discharged into the discharge unit 50. It can be discharged out of the housing unit 11 and used for recirculation after going through a process such as filtering.
  • FIG. 5 is a diagram illustrating a state of use of FIG. 3.
  • the fluid (F) that enters the internal space of the housing unit 11 through the inlet 20 is the processing fluid (W) falling from the processing fluid supply unit 30.
  • gases harmful to the human body such as ammonia (NH 3 ) and silane (SiH 4 ) contained in the fluid are neutralized, and fine particles such as fume contained in the fluid can be removed. there is.
  • the flow path encountered by the fluid F passing between the inclined surfaces 116 may be divided into two flow paths by the partition 12, as shown in FIG. 5 .
  • the partition portion 12 is offset toward the side 113 of the housing portion 11, and the width W1 of a flow path located close to the side 113 is different from the width W2 of the flow path. As it is formed more narrowly (W1 ⁇ W2), a faster fluid (F) flow rate occurs in a passage having a passage width of W1.
  • the speed of the fluid (F) passing through the passage having a width of W1 is faster than the speed of the fluid (F) passing through the passage having a width of W2, and the upper side of the partition 12 is directed downward.
  • a vortex as shown in FIG. 5 is generated by the fluid F passing through the passage having a width W1.
  • the present invention forms a clockwise vortex by the fluid (F) passing through a passage with a width of W1, as shown in FIG. 5, and creates a fluid (F) rising through a passage with a width of W2.
  • the collection efficiency can be increased while smoothing the discharge of the substance C through the discharge part 50.
  • the fluid (F) from which the specific component (C) has been removed through this process moves out of the housing portion (11) through the outlet portion (40) formed on the upper surface (114) of the housing portion (11).
  • Figure 6 is a diagram showing a collection device according to another embodiment of the present invention.
  • the embodiment of Figure 6 is characterized by an additional part 60, unlike the above-described embodiment. , Hereinafter, the newly added additional part 60 will be described.
  • the additional part 60 is configured to form an additional space in the internal space to generate a vortex of fluid that increases collection efficiency, and the housing part 11 of the collection part 10 in which the outlet part 40 is formed It is formed parallel to the outlet portion 40 on the upper surface 114, and is characterized in that it generates a vortex of fluid in the internal space before the fluid exits through the outlet portion 40. Due to the additional space formed by the additional part 60, fluid vortices can be actively formed at the front of the outlet part 40, which further increases the collection efficiency of specific substances.
  • FIG. 7 is a partially exploded perspective view of FIG. 6 .
  • the additional part 60 includes a body part 61, a cap part 62, and a fixing part 63.
  • the body portion 61 forms an additional space in communication with the internal space and has a cylindrical configuration with one side and the other side open.
  • the body portion 61 is shown as a cylindrical shape, but the body portion 61 is not necessarily limited to this shape and may also have a rectangular pipe shape.
  • a flange is formed on the body portion 61 to facilitate easy coupling with the cap portion 62, which will be described later.
  • the cap portion 62 refers to a component that is detachably coupled to the body portion 61 so that the open surface of the body portion 61 can be opened and closed.
  • the cap portion 62 may be configured to have an open lower surface while forming an empty space therein.
  • the cap portion 62 is separated to open one side of the body portion 61 to inspect or easily clean the inside of the collection device 1.
  • the fixing part 63 is configured to fix the cap part 62 to the body part 61, and configures the fixing part 63 to attach the cap part 62 to the body part 61 as needed. can be easily fixed or separated.
  • the shape of the fixing part 63 is not limited to any specific shape, and for example, it can be configured as the shape shown in FIG. 7.
  • FIG. 7 is a partially exploded perspective view of FIG. 6, and
  • FIG. 8 is a cross-sectional view taken along line B-B' of FIG. 6.
  • the fixing part 63 includes a first fixing body 631 and a second fixing body 631. Includes a fixing body 632 and fastening means 633.
  • the first fixing body 631 is formed in a shape to hold the body portion 61 and includes a first fixing hole 6311 penetrating from one side to the other side.
  • the second fixing body 632 is formed in a shape to hold the cap portion 62 and includes a second fixing hole 6321 penetrating from one side to the other side.
  • the fastening means 633 is fastened to the first fixing hole 6311 and the second fixing hole 6321 to couple the first fixing body 631 and the second fixing body 632.
  • the fastening means 633 may be a bolt with a thread formed on the outer peripheral surface.
  • Figure 9 is a usage state diagram of Figure 6, and hereinafter, the usage state for this embodiment will be described with reference to Figure 9.
  • FIG. 9 shows the additional portion 60 formed in the usage state diagram of FIG. 5 described above, the vortex phenomenon caused by the partition portion 12 that occurred in FIG. 5 appears as is.
  • the vortex of Figure 5 was primarily generated.
  • a secondary vortex as shown in FIG. 9 is generated by the additional space inside the body portion 61 formed by the additional portion 60.
  • the fluid (F) from which the specific component (C) has been removed by the primary vortex is not discharged directly through the outlet 40, but is discharged inside by the additional space that appears during the movement process. As the space suddenly expands, a secondary vortex is formed by the flow of fluid moving toward the additional space, and in this process, the remaining specific component (C) can be removed once again.
  • the additional part 60 not only functions to generate a secondary vortex, but also functions as a cap part 62 of the additional part 60 when the collection device 1 is not operating. It facilitates maintenance by opening it to inspect or clean the inside of the device.
  • FIG 10 is a diagram showing an example of the installed state of the collection device (1) of the present invention.
  • a vertical collection device (1) is configured to include a scrubber (S) and an exhaust duct ( D) When installing the collection device (1) between them, ensure that the space required for installation is minimized.
  • the collection device (1) of the present invention is shown as installed outside the scrubber, but the collection device (1) of the present invention is not necessarily limited to being installed only outside the scrubber (S), and can be installed inside the scrubber (S). It can also be installed. That is, the present invention places the collection device (1) inside the scrubber (S) so that the fluid to be discharged by the operation of the scrubber (S) is collected, processed, and discharged by the collection device (1) installed inside the scrubber (S). It may also be possible.
  • the collection device (1) of the present invention penetrates the inlet portion (20) from the bottom to the top of the housing portion (11) forming the interior space to communicate with the interior space, allowing for installation of the collection device (1). Minimize the space required and increase space efficiency. By preventing bent portions from occurring when connecting the pipe to the collection unit 10, it is possible to provide a collection device 1 that effectively prevents corrosion of the pipe by minimizing the pressure drop of the fluid. In addition, as the length of the inlet 20 can be shortened without a bent part, the amount of material used is dramatically reduced, piping work is simplified, and maintenance is easy after installation. A collection device (1) ) can be provided.

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Abstract

The present invention relates to a collection device using a fluid vortex to increase collection efficiency and, more specifically, to a collection device that maximizes the collection efficiency for a specific material to be collected, by causing a difference in fluid flow rate to occur in the internal space of the housing in which fluid flows, or by creating an additional space in communication with the internal space to facilitate the generation of vortex.

Description

유체의 와류를 이용해 포집 효율을 높이는 포집 장치A collection device that improves collection efficiency by using fluid vortices
본 발명은 유체의 와류를 이용해 포집 효율을 높이는 포집 장치에 관한 것으로, 더욱 상세하게는, 유체가 흐르는 하우징부의 내부 공간에 유체의 유속 차이가 발생하도록 하거나, 내부 공간과 연통되는 추가 공간을 만들어 와류의 발생을 촉진 시킴으로써, 포집하고자 하는 특정 물질의 포집 효율을 극대화하는 포집 장치에 관한 것이다.The present invention relates to a collection device that improves collection efficiency by using the eddy current of the fluid. More specifically, the present invention relates to a collection device that increases the collection efficiency by using the eddy current of the fluid. It relates to a collection device that maximizes the collection efficiency of a specific substance to be collected by promoting the generation of .
일반적으로 반도체는 산화(Oxidation), 식각(Etching), 증착(Deposition), 포토공정(Photolithography) 등 다양한 공정을 거쳐 제조되는데, 이와 같은 제조공정에는 암모니아(NH3), 일산화질소(NO), 아르신(AsH3), 포스핀(PH3) 등과 같은 유독성 가스가 사용된다.In general, semiconductors are manufactured through various processes such as oxidation, etching, deposition, and photolithography. These manufacturing processes include ammonia (NH 3 ), nitrogen monoxide (NO), and Toxic gases such as acid (AsH 3 ) and phosphine (PH 3 ) are used.
반도체 제조공정에서 발생된 폐가스가 대기 중으로 그대로 방출될 경우, 전술한 유독성 가스로 인해 인체에 치명적인 악영향을 미칠 수 있으며, 폐가스의 자연 발화로 인한 화재사고 등도 발생할 수 있다.If waste gas generated from the semiconductor manufacturing process is released into the atmosphere, the above-mentioned toxic gas may have fatal adverse effects on the human body, and fire accidents may also occur due to spontaneous ignition of the waste gas.
이와 같은 이유로, 반도체 제조공정에서는 발생된 폐가스를 스크러버(Scrubber) 등을 통해 정제하여 대기로 방출한다.For this reason, waste gas generated in the semiconductor manufacturing process is purified through a scrubber or the like and discharged into the atmosphere.
이러한 스크러버(Scrubber)로는, 간접 연소 습식형으로 유도가열 방식을 이용하여 폐가스를 태운 후 물을 이용해서 한 번 더 걸러주는 힛-웨트 스크러버(Heat-Wet Scrubber)와, 습식형으로 물을 이용하여 폐가스를 포집한 후 물을 정화하는 방식의 웨트 스크러버(Wet Scrubber)와, 직접 연소 습식형으로서 고온의 불꽃으로 폐가스를 태운 후 물을 이용하여 포집하는 방식인 번-웨트 스크러버(Burn-Wet Scrubber) 등이 있다.These scrubbers include the heat-wet scrubber, which is an indirect combustion wet type that burns waste gas using an induction heating method and then filters it once more using water, and a wet type that uses water to filter waste gas. Wet Scrubber, which collects waste gas and purifies water, and Burn-Wet Scrubber, which is a direct combustion wet type that burns waste gas with a high-temperature flame and then collects it using water. etc.
스크러버(Scrubber)는 종류에 상관없이 폐가스를 처리하는 과정에서 물을 사용하게 되는데, 사용된 물에는 많은 오염물질이 포함되므로, 오염물질이 포함된 물을 필터 등으로 처리하여 드레인관을 통해 외부로 배출해야 한다.Regardless of the type of scrubber, water is used in the process of treating waste gas. Since the water used contains many contaminants, water containing contaminants is treated with a filter, etc. and discharged to the outside through a drain pipe. must be discharged.
이때, 상기 스크러버(Scrubber)의 폐가스를 처리하는 과정에서 사용된 물의 일부가 드레인관을 통해 배출되지 않고 액체 또는 기체상태로 정화 처리된 유체와 함께 외부로 배출될 경우, 배출된 유체 내 부식 유발 액체성분이 존재하여 배관을 부식시키고, 폐가스의 정화처리효과를 감소시키며, 발화로 인한 화재를 유발시킬 수 있다.At this time, if part of the water used in the process of treating the waste gas of the scrubber is not discharged through the drain pipe but is discharged to the outside along with the purified fluid in liquid or gaseous state, the corrosion-causing liquid in the discharged fluid The presence of components can corrode pipes, reduce the purification effect of waste gas, and cause fire due to ignition.
따라서, 종래에는 상기 스크러버(Scrubber)에서 정화 처리된 유체로부터 부식 유발 액체성분을 제거하기 위한 액체 포집 장치가 설치 운용되었다.Therefore, in the past, a liquid collection device was installed and operated to remove corrosion-causing liquid components from the fluid purified in the scrubber.
도 1은 종래의 액체 포집 장치(90)를 도시한 도면으로, 이는 한국공개특허공보 제10-2003-0052170호(2003.06.26.)에 개시되어 있다.Figure 1 is a diagram showing a conventional liquid collection device 90, which is disclosed in Korean Patent Publication No. 10-2003-0052170 (June 26, 2003).
도 1을 참조하여 설명하면, 종래의 상기 액체 포집 장치(90)는, 배출된 폐가스를 중화처리하는 스크러버(Scrubber,S)와, 상기 스크러버(S)를 통하여 정화된 가스를 배출시키는 배기덕트(D) 사이의 연결관 상에 설치되었다.Referring to FIG. 1, the conventional liquid collection device 90 includes a scrubber (S) that neutralizes the discharged waste gas, and an exhaust duct (Scrubber) that discharges the purified gas through the scrubber (S). D) was installed on the connector between
상기 액체 포집 장치(90)는 원통의 상부 포집통(91)과, 하부 포집통(93)으로 구성되며, 상기 상부 포집통(91)에는 연결관 상에 연결된 일측에 인입관(911)이 설치되고, 상기 인입관(911)과 대향하는 타측에는 높이차를 두고 배기관(913)이 설치되었다.The liquid collection device 90 is composed of a cylindrical upper collection container 91 and a lower collection container 93, and an inlet pipe 911 is installed on one side of the upper collection container 91 connected to a connection pipe. And, on the other side opposite to the inlet pipe 911, an exhaust pipe 913 was installed with a height difference.
상기 배기관(913)의 입구 내측에는 금속재의 포집용 그물망(9131)이 형성되며, 상기 하부 포집통(93)의 하단부에는 포집된 파우더 및 응축수를 정기적으로 배출시킬 수 잇는 배출구(931)가 형성되고, 상기 배출구(931)의 하단에는 나사 체결되어 밀폐된 마개(9311)가 구성되었다.A metal collecting net 9131 is formed inside the inlet of the exhaust pipe 913, and an outlet 931 is formed at the lower end of the lower collection container 93 to regularly discharge the collected powder and condensate. , At the bottom of the outlet 931, a stopper 9311 was screwed and sealed.
그리고 상기 상부 포집통(91)의 하단에는 일체로 형성된 원판의 고정판(915)이 구성되며, 상기 하부 포집통(93)의 상단에는 상기 고정판(915)과 같은 크기의 고정판(933)이 형성되었는바, 상기 상부 포집통(91)과 상기 하부 포집통(93)을 맞대어 볼트 체결시킬 수 있었다.In addition, a fixed plate 915 of a circular plate is formed at the bottom of the upper collection container 91, and a fixed plate 933 of the same size as the fixed plate 915 is formed at the top of the lower collection container 93. Bar, the upper collection container 91 and the lower collection container 93 could be bolted together.
상기 액체 포집 장치(90)의 인입관(911)을 통하여 인입된 가스는 상기 그물망(9131)에 걸러져서 포집되며, 일부의 파우더는 하부 포집통(93)에 떨어지거나 액체 포집 장치(90) 내에 부착되고, 상기 하부 포집통(93)에는 파우더 뿐만 아니라 폐가스에 의한 응축수가 고이게 되며, 이렇게 상기 하부 포집통(93)에 포집된 파우더와 응축수는 상기 배출구(931)에 나사결합되어 있는 상기 마개(9311)를 풀어서 정기적으로 배출되었다.The gas introduced through the inlet pipe 911 of the liquid collection device 90 is filtered and collected by the mesh 9131, and some of the powder falls into the lower collection container 93 or is stored in the liquid collection device 90. Attached, not only the powder but also the condensate from the waste gas accumulates in the lower collection container 93, and the powder and condensate collected in the lower collection container 93 are connected to the stopper screwed to the outlet 931. 9311) was released and released regularly.
하지만 이러한 종래의 액체 포집 장치(90)는 예상치 못한 스크러버(S)의 폭발이 발생했을 때, 화염을 차단하지 못하는 문제가 있었다.However, this conventional liquid collection device 90 had a problem in that it could not block the flame when an unexpected explosion of the scrubber S occurred.
스크러버(S) 내에서 취급되는 폐가스에는 가연성 가스 등이 포함되는바, 다양한 원인에 의한 발화가 발생되어 화재사고가 유발될 수 있다.Waste gases handled within the scrubber (S) include combustible gases, etc., and ignition may occur due to various causes, resulting in a fire accident.
배기덕트(D) 측에는 스프링클러가 설치되어 화재 발생시 어느 정도의 화재 진압이 이루어질 수 있겠으나, 스크러버(S)와 배기덕트(D)를 연결하는 배관은 관내 부식 방지를 위해 PVC 소재로 이루어져 화재에 취약하기 때문에, 화재사고 발생시 화염이 배관을 타고 이동하게 되면서 대형 화재로 이어지기 쉽다.A sprinkler is installed on the exhaust duct (D) side, so that a certain degree of fire suppression can be achieved in the event of a fire, but the pipe connecting the scrubber (S) and the exhaust duct (D) is made of PVC material to prevent corrosion within the pipe, making it vulnerable to fire. Therefore, when a fire accident occurs, flames travel through the pipes and can easily lead to a large-scale fire.
결국, 폐가스를 처리하는 과정에서 스크러버(S)의 폭발이 발생했을 때, 화염은 배관을 따라 이동하게 될 것인데, 전술한 종래의 액체 포집 장치(90)가 화재 방지, 차단을 위한 별도의 구성을 가지고 있지 아니한바, 상기 액체 포집 장치(90) 역시 화염을 막지 못하고 불타게 되면서, 심각한 재산상, 인명상의 피해를 낳게 된다.Ultimately, when an explosion of the scrubber S occurs in the process of treating waste gas, the flame will move along the pipe, and the conventional liquid collection device 90 described above has a separate configuration for fire prevention and blocking. Without it, the liquid collection device 90 also cannot prevent the flame and burns, resulting in serious damage to property and human life.
도 2는 종래의 액체 포집 장치(90)의 설치 상태를 도시한 도면으로, 도 2를 참조하여 설명하면, 종래의 액체 포집 장치(90)는 일측에서 타측으로 수평 방향을 따라 유체를 이동시켜야 액체 포집이 가능했기 때문에, 스크러버(S)로부터 수직하게 연결된 배관을 수평관에 연결시키고, 이 수평관을 액체 포집 장치(90)에 연결한 다음, 배기되는 유체를 수평관을 통해 빼 내, 다시 수직관과 연결해 배기 덕트로 보냈다.FIG. 2 is a diagram illustrating the installation state of the conventional liquid collection device 90. When described with reference to FIG. 2, the conventional liquid collection device 90 must move fluid along the horizontal direction from one side to the other side to collect the liquid. Because collection was possible, the pipe connected vertically from the scrubber (S) was connected to a horizontal pipe, this horizontal pipe was connected to the liquid collection device 90, and the discharged fluid was taken out through the horizontal pipe and collected again. It was connected to a straight tube and sent to the exhaust duct.
즉, 종래의 수평형 액체 포집 장치(90)에 의하면, 액체 포집 장치(90)를 설치하는데 상당히 많은 공간과 자재가 필요했으며, 설치 완료 후 배관이 굉장이 복잡해져 유지 보수가 어려운 문제가 발생했고, 무엇보다도 관 내에 큰 부하가 걸리고 큰 압력 강하가 일어나 유체에 포함된 부식 유발 액체성분이 배관 내에 달라붙게 되면서 배관 내부가 쉽게 부식되는 문제가 발생했다. 또한, 액체 포집 효율이 떨어져 유체 내에 포함된 부식 유발 액체성분을 효과적으로 제거할 수 없는 문제가 있었다.That is, according to the conventional horizontal liquid collection device 90, a considerable amount of space and materials were required to install the liquid collection device 90, and after installation, the piping became extremely complicated, making maintenance difficult. Above all, a large load was applied within the pipe and a large pressure drop occurred, causing corrosion-causing liquid components contained in the fluid to stick within the pipe, causing the pipe's interior to easily corrode. In addition, there was a problem in that the liquid collection efficiency was low, making it impossible to effectively remove corrosion-causing liquid components contained in the fluid.
이에 관련 업계에서는 스크러버 폭발 등에 의한 화재 발생시 화재 확산을 차단할 수 있도록 하면서, 설치를 위해 필요한 공간을 최소화 하고, 자재의 낭비를 막으며, 유지보수가 용이하고, 배관의 부식을 방지하며, 부식 유발 액체성분의 포집 효율을 높일 수 있도록 하는 새로운 기술의 도입을 요구하고 있는 실정이다.Accordingly, related industries can block the spread of fire in the event of a fire caused by a scrubber explosion, minimize the space required for installation, prevent waste of materials, facilitate maintenance, prevent corrosion of pipes, and prevent corrosion-causing liquids. There is a demand for the introduction of new technologies that can increase the collection efficiency of ingredients.
(특허문헌 1) 한국공개특허공보 제10-2003-0052170호(2003.06.26.)(Patent Document 1) Korean Patent Publication No. 10-2003-0052170 (June 26, 2003)
본 발명은 상기와 같은 문제점을 해결하고자 안출된 것으로,The present invention was created to solve the above problems,
본 발명의 목적은, 유체가 흐르는 하우징부의 내부 공간에 와류의 발생을 촉진시켜 포집하고자 하는 특정 물질의 포집 효율을 극대화하는 포집 장치를 제공하는 것이다.The purpose of the present invention is to provide a collection device that maximizes the collection efficiency of a specific substance to be collected by promoting the generation of a vortex in the internal space of a housing portion through which fluid flows.
본 발명의 다른 목적은, 하우징부의 내부 공간을 구획하는 구획부를 구성해 유체의 유속 차이를 일으켜 와류의 발생을 촉진시키는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that promotes the generation of vortices by creating a difference in the flow rate of fluid by forming a partition that divides the internal space of the housing.
본 발명의 또 다른 목적은, 구획부를 통해 일 유로를 서로 다른 유로 폭을 가지는 복수의 유로로 구분시켜 유로 간의 유속 차이에 의해 와류가 발생하도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that divides one flow path into a plurality of flow paths having different flow path widths through a partition portion, thereby generating vortices due to differences in flow rates between the flow paths.
본 발명의 또 다른 목적은, 구획부에 의해 와류를 발생시켜, 포집 효율을 높이면서도, 배출부를 통해 포집부의 외부로 배출되어야 할 물질이 원활하게 배출되도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that increases collection efficiency by generating a vortex through the partition, and allows substances to be discharged to the outside of the collection unit through the discharge unit to be smoothly discharged.
본 발명의 또 다른 목적은, 하우징부의 측면 내주면으로부터 일정 거리만큼 이격된 위치에서 유출부 측으로 상승하는 유선 방향과 나란하게 구획부를 형성하되, 하우징부의 측면 내주면과 구획부가 형성하는 유로 폭을 상대적으로 좁게 형성시켜 해당 유로에서 가장 빠른 유속이 발생하도록 함에 따라, 하우징부의 측면 내주면으로부터 하우징부의 중심 방향을 향해 시계 방향의 와류가 형성되도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to form a partition parallel to the direction of the stream rising toward the outlet at a position spaced a certain distance away from the side inner circumferential surface of the housing part, but to make the passage width formed by the side inner circumferential surface of the housing part and the partition relatively narrow. The purpose is to provide a collection device that forms a clockwise vortex from the side inner peripheral surface of the housing portion toward the center of the housing portion by forming the fastest flow velocity in the corresponding flow path.
본 발명의 또 다른 목적은, 구획부의 상측에 하측 방향으로 경사지게 형성되는 제1날개부를 구성하여, 구획부에 의해 빠르게 상승하는 유체가 제1날개부를 만나면서 와류를 형성하도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that configures first wings inclined in a downward direction on the upper side of the partition so that the fluid rising rapidly by the partition meets the first wings to form a vortex. .
본 발명의 또 다른 목적은, 제1날개부의 타단으로부터 하측 방향으로 연장 형성되는 제1연장부를 구성해, 구획부에 의해 유속이 증가한 유체가 일으키는 와류 현상이 극대화 되도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that configures a first extension extending downward from the other end of the first wing to maximize the vortex phenomenon caused by the fluid whose flow rate is increased by the partition.
본 발명의 또 다른 목적은, 유입부의 상측에 위치하여 하측 방향으로 경사지게 형성되는 제2날개부를 구성하고, 제2날개부의 타단으로부터 하측 방향으로 연장 형성되는 제2연장부를 구성해, 유입부로부터 하우징부 내부 공간으로 들어온 유체의 이동 방향이 구획부를 향하도록 가이드하는 포집 장치를 제공하는 것이다.Another object of the present invention is to configure a second wing portion located above the inlet and inclined in the downward direction, and to configure a second extension portion extending in the downward direction from the other end of the second wing portion to form a housing from the inlet portion. A collection device is provided that guides the direction of movement of fluid entering the internal space of the compartment toward the compartment.
본 발명의 또 다른 목적은, 제2날개부를 따라 하측방향으로 경사지게 형성되는 처리유체공급부를 구성해, 처리 유체가 내부 공간으로 낙하하도록 함으로써, 포집 장치 내에 유입된 유체는 모두 유체막을 통과하도록 하여 스크러버 등에서 발생한 불씨가 다른 곳으로 번지는 것을 막는 포집 장치를 제공하는 것이다.Another object of the present invention is to construct a treatment fluid supply unit that is inclined downward along the second wing, so that the treatment fluid falls into the internal space, so that all fluid flowing into the collection device passes through the fluid film, thereby forming a scrubber. It provides a collection device that prevents embers generated from the back from spreading to other places.
본 발명의 또 다른 목적은, 스크러버의 폭발 등이 발생했을 때, 화염이 배관을 타고 이동하게 되면서 대형 화재로 이어질 수 있는 문제를 차단하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that prevents problems that can lead to large-scale fires when flames travel through pipes when a scrubber explodes, etc.
본 발명의 또 다른 목적은, 스크러버 등으로부터 배출되는 유체 내에 포함된 암모니아(NH3), 실란(SiH4) 등의 인체 유해 가스를 중화시키고, 유체 내 포함된 흄(Fume) 등의 미세입자가 제거될 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to neutralize gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid discharged from a scrubber, etc., and to neutralize fine particles such as fume contained in the fluid. The goal is to provide a collection device that allows it to be removed.
본 발명의 또 다른 목적은, 부식 방지를 위해 PVC 소재로 이루어져 화재에 취약한 배관이 화재 확산의 매개체가 되지 않도록, 스크러버와 배기덕트를 연결하는 배관상에 설치되는 포집 장치 내에 처리 유체를 제공해 화재의 확산을 차단하는 포집 장치를 제공하는 것이다.Another object of the present invention is to prevent fire by providing a treatment fluid in a collection device installed on the pipe connecting the scrubber and the exhaust duct so that the pipe, which is made of PVC material to prevent corrosion and is vulnerable to fire, does not become a medium for fire spread. The goal is to provide a collection device that blocks the spread.
본 발명의 또 다른 목적은, 포집부의 외측에서 내측으로 관통되어 내부공간의 특정 위치에서 처리 유체를 중력 방향으로 낙하시키는 처리유체공급부를 구성하여, 유체막을 통해 화재 확산을 차단하면서, 스크러버 등에서 처리된 유체 내에 포함되어 있는 부식 유발 액체성분 등이 분리 배출될 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to construct a treatment fluid supply unit that penetrates from the outside of the collection unit to the inside and drops the treatment fluid in the direction of gravity at a specific position in the internal space, blocking the spread of fire through the fluid film and removing the treated fluid from a scrubber, etc. The aim is to provide a collection device that allows corrosion-causing liquid components contained in the fluid to be separated and discharged.
본 발명의 또 다른 목적은, 처리유체공급부가 하우징부를 관통하도록 형성되되, 하우징부로부터 분리 가능하게 결합되도록 구성하여, 분리 세척을 가능하게 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device in which the processing fluid supply portion is formed to penetrate the housing portion and is configured to be separably coupled to the housing portion, thereby enabling separate cleaning.
본 발명의 또 다른 목적은, 처리유체공급부의 관통홀을 저장부의 하면에 행과 열을 맞추어 복수 개로 형성하되, 이웃하는 행 간의 관통홀이 서로 엇갈려 배치되도록 함에 따라, 유입부를 통해 내부 공간으로 들어온 대상 유체 모두가 처리유체막을 통과할 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to form a plurality of through holes in the processing fluid supply unit by aligning rows and columns on the lower surface of the storage unit, and by arranging the through holes between neighboring rows to be staggered, thereby preventing the penetration of the through holes into the internal space through the inlet portion. The goal is to provide a collection device that allows all of the target fluid to pass through the treatment fluid membrane.
본 발명의 또 다른 목적은, 관통홀의 중심축 방향이 중력 방향과 나란하도록 구성함으로써, 저장부가 경사지게 위치하더라도 저장부 내에 포함된 처리 유체가 표면 장력 등에 의해 저장부 하면에 붙어 움직이는 것 없이 중력 방향을 따라 수직하게 낙하할 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to configure the direction of the central axis of the through hole to be parallel to the direction of gravity, so that even if the reservoir is located at an angle, the processing fluid contained in the reservoir adheres to the bottom of the reservoir due to surface tension, etc. and moves in the direction of gravity. The goal is to provide a collection device that allows it to fall vertically.
본 발명의 또 다른 목적은, 하우징부의 하측에 경사면을 구성하고, 하측에서 상측 방향으로 수직하게 형성된 유입부가 경사면을 관통해 내부 공간과 연통되도록 함으로써, 하우징부의 내부 공간으로 유체가 유입되도록 하고, 응집된 부식 유발 액체 성분은 하우징부의 경사면을 따라 한 곳으로 모일 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to configure an inclined surface on the lower side of the housing unit, and to allow fluid to flow into the internal space of the housing unit by allowing an inflow portion formed vertically from the bottom to the upper part to communicate with the internal space through the inclined surface, thereby allowing fluid to flow into the internal space of the housing unit and coagulate. The purpose is to provide a collection device that allows the corrosion-causing liquid components to be collected in one place along the slope of the housing.
본 발명의 또 다른 목적은, 수직형의 포집 장치를 구성해 스크러버와 배기덕트 사이에 포집 장치를 설치할 경우 설치에 필요한 공간이 최소화될 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a vertical collection device that minimizes the space required for installation when installing the device between the scrubber and the exhaust duct.
본 발명의 또 다른 목적은, 내부 공간을 형성하는 하우징부의 하측에서 상측 방향으로 유입부를 관통시켜 내부 공간과 연통되도록 함으로써, 포집 장치 설치에 필요한 공간을 최소화하고, 공간 효율성은 더욱 높아지도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to minimize the space required for installation of the collection device and further increase space efficiency by penetrating the inlet from the bottom to the top of the housing forming the interior space to communicate with the interior space. is to provide.
본 발명의 또 다른 목적은, 포집부에 배관을 연결할 때 절곡된 부분이 생기지 않도록 함에 따라 유체의 압력 강하를 최소화시켜 배관의 부식을 효과적으로 막는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that effectively prevents corrosion of the pipe by minimizing the pressure drop of the fluid by preventing bent portions from occurring when connecting the pipe to the collection unit.
본 발명의 또 다른 목적은, 절곡된 부분 없이 유입부의 길이를 짧게 할 수 있게 됨에 따라, 자재의 사용량을 획기적으로 줄이고, 배관 공사가 단순해지도록 하며, 설치 후 유지 보수가 용이하도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that dramatically reduces the amount of material used, simplifies piping work, and facilitates maintenance after installation by making it possible to shorten the length of the inlet without bending parts. It is provided.
본 발명의 또 다른 목적은, 하우징부의 내부 공간에 추가 공간을 형성하는 추가부를 구성해, 추가 공간에 의해 유출부 전단에서 유체의 와류가 활발히 형성되도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that configures an additional part that forms an additional space in the internal space of the housing part, so that a vortex of fluid is actively formed at the front of the outlet by the additional space.
본 발명의 또 다른 목적은, 유출부가 형성된 포집부의 일면 상에 유출부와 나란하게 형성되어, 유출부를 통해 유체가 빠져나가기 전의 내부 공간에 유체의 와류를 발생시켜 특정 물질의 포집 효율을 더욱 높이는 포집 장치를 제공하는 것이다.Another object of the present invention is to form a collection unit in parallel with the outlet on one surface of the collection unit where the outlet is formed, thereby generating a vortex of fluid in the internal space before the fluid exits through the outlet, thereby further increasing the collection efficiency of a specific substance. The device is provided.
본 발명의 또 다른 목적은, 내부 공간과 연통되는 추가 공간을 형성하며 일면과 타면이 개방된 통형의 바디부와, 바디부의 개방된 일면을 개폐할 수 있도록 바디부에 분리 가능하게 결합되는 캡부를 구성하여, 포집 장치가 동작 중일 때에는 캡부에 의해 바디부의 개방된 일면이 폐쇄되어 추가 공간에 의해 와류가 발생하도록 하고, 포집 장치가 동작하지 않을 때에는 캡부를 분리해 바디부의 일면을 개방시킴으로써 포집 장치의 내부를 점검하거나 용이하게 청소할 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to form an additional space in communication with the internal space and to form a cylindrical body part open on one side and the other side, and a cap part detachably coupled to the body part to open and close the open one side of the body part. When the collection device is in operation, one open side of the body is closed by the cap portion to generate a vortex due to the additional space, and when the collection device is not operating, the cap portion is separated to open one side of the body portion to create a vortex. The goal is to provide a collection device that allows the interior to be inspected or easily cleaned.
본 발명의 또 다른 목적은, 바디부에 캡부를 고정시키는 고정부를 구성해, 필요에 따라 바디부에 캡부를 용이하게 고정시키거나 분리시킬 수 있도록 하는 포집 장치를 제공하는 것이다.Another object of the present invention is to provide a collection device that configures a fixing part for fixing the cap part to the body part, so that the cap part can be easily fixed or separated from the body part as needed.
본 발명은 앞서 본 목적을 달성하기 위해서 다음과 같은 구성을 가진 실시예에 의해서 구현된다.In order to achieve the above-described object, the present invention is implemented by an embodiment having the following configuration.
본 발명의 일 실시예에 따르면, 본 발명은, 내부 공간을 형성하며 상기 내부 공간에 들어온 대상 유체에서 특정 성분을 포집하는 포집부와, 상기 포집부에 연결되어 상기 내부 공간으로 상기 대상 유체를 유입시키는 유입부와, 상기 포집부에 연결되어 상기 대상 유체에서 상기 특정 성분을 포집하기 위한 처리 유체를 상기 내부 공간으로 공급하는 처리유체공급부와, 상기 포집부에 연결되어 상기 내부 공간 내에서 처리된 대상 유체를 상기 내부 공간 밖으로 유출시키는 유출부와, 상기 포집부에 연결되어 포집된 상기 특정 성분이 포함된 유체를 상기 내부 공간 밖으로 배출시키는 배출부를 포함하고, 상기 포집부는, 상기 내부 공간을 형성하는 하우징부와, 포집 효율을 높이는 유체의 와류가 발생하도록 상기 내부 공간을 구획하는 구획부를 포함하는 것을 특징으로 한다.According to one embodiment of the present invention, the present invention includes a collection unit that forms an internal space and collects a specific component from the target fluid entering the internal space, and is connected to the collection unit to introduce the target fluid into the internal space. an inlet unit connected to the collection unit to supply a treatment fluid for collecting the specific component from the target fluid into the internal space, and a processing fluid supply unit connected to the collection unit to treat the target within the internal space. It includes an outlet part that discharges the fluid out of the internal space, and an outlet part that is connected to the collecting part and discharges the fluid containing the collected specific component out of the internal space, wherein the collecting part is a housing that forms the internal space. It is characterized by comprising a section and a partition section that divides the internal space to generate a vortex of fluid that increases collection efficiency.
본 발명의 다른 실시예에 따르면, 본 발명은, 상기 구획부는, 상기 내부 공간의 일 유로를 서로 다른 유로 폭을 가지는 복수의 유로로 구분시켜 구분된 유로 간 유속의 차이에 의해 유체의 와류를 발생시키는 것을 특징으로 한다.According to another embodiment of the present invention, the partition unit divides one flow path of the internal space into a plurality of flow paths having different flow path widths, and generates a vortex of fluid by the difference in flow rate between the divided flow paths. It is characterized by ordering.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 구획부는, 상기 유출부 측으로 상승하는 방향의 유선(Streamline)과 나란하게 형성되는 것을 특징으로 한다.According to another embodiment of the present invention, the partition portion is formed parallel to a streamline in an upward direction toward the outlet portion.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 구획부는, 하우징부의 측면 내주면으로부터 일정 거리만큼 이격된 위치에 형성되며, 구획부에 의해 구분된 유로 중 상기 하우징부의 측면 내주면과 형성하는 유로 폭을 상대적으로 좁게 형성시켜, 상기 하우징부의 측면 내주면과 상기 구획부가 형성하는 유로에서 가장 빠른 유속이 발생하도록 하는 것을 특징으로 한다.According to another embodiment of the present invention, the partition portion is formed at a position spaced apart from the side inner peripheral surface of the housing portion by a predetermined distance, and is a flow path formed with the side inner peripheral surface of the housing portion among the flow paths divided by the partition portion. The width is formed to be relatively narrow, so that the fastest flow rate occurs in the flow path formed by the side inner peripheral surface of the housing portion and the partition portion.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 포집부는, 상기 구획부의 상측에 위치하여 상기 구획부의 안내에 따라 상승하는 유체의 흐름을 제한하는 형상으로 형성된 제1날개부를 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the collecting unit includes a first wing portion located on an upper side of the partition and formed in a shape to restrict the flow of fluid rising according to the guidance of the partition. Do it as
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 제1날개부는, 일단은 하우징부의 측면 내주면에 결합되고, 타단은 자유단을 형성하며, 하측 방향으로 경사지게 형성되는 것을 특징으로 한다.According to another embodiment of the present invention, the first wing part is characterized in that one end of the first wing part is coupled to the side inner peripheral surface of the housing part, the other end forms a free end, and is formed to be inclined in a downward direction.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 포집부는, 자유단을 형성하는 상기 제1날개부의 타단으로부터 하측 방향으로 연장 형성되는 제1연장부를 추가로 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the collecting part further includes a first extension part extending downward from the other end of the first wing forming the free end.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 포집부는, 상기 유입부의 상측에 위치하여 상기 유입부로부터 상승하는 유체의 흐름을 제한하는 형상으로 형성된 제2날개부를 포함하고, 상기 제2날개부는, 일단은 하우징부의 측면 내주면에 결합되고, 타단은 자유단을 형성하며, 하측 방향으로 경사지게 형성되는 것을 특징으로 한다.According to another embodiment of the present invention, the collecting part includes a second wing part located above the inlet and formed in a shape to restrict the flow of fluid rising from the inlet, and the second wing part is formed in a shape that restricts the flow of fluid rising from the inlet. The wing portion is characterized in that one end is coupled to the side inner peripheral surface of the housing portion, the other end forms a free end, and is inclined in a downward direction.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 포집부는, 자유단을 형성하는 상기 제2날개부의 타단으로부터 하측 방향으로 연장 형성되는 제2연장부를 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the collecting part includes a second extension part extending downward from the other end of the second wing forming the free end.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 처리유체공급부는, 상기 제2날개부를 따라 하측 방향으로 경사지게 형성되며, 상기 처리 유체가 저장되는 수용 공간을 형성하는 저장부와, 상기 수용 공간에 저장된 상기 처리 유체가 상기 내부 공간으로 낙하되도록 상기 저장부에 관통 형성된 구멍인 관통홀을 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the processing fluid supply unit includes a storage portion formed to be inclined downward along the second wing and forming a receiving space in which the processing fluid is stored, and the receiving portion. It may include a through hole formed through the storage unit so that the processing fluid stored in the space falls into the internal space.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 내부 공간을 형성하며 상기 내부 공간에 들어온 대상 유체에서 특정 성분을 포집하는 포집부와, 상기 포집부에 연결되어 상기 내부 공간으로 상기 대상 유체를 유입시키는 유입부와, 상기 포집부에 연결되어 상기 대상 유체에서 상기 특정 성분을 포집하기 위한 처리 유체를 상기 내부 공간으로 공급하는 처리유체공급부와, 상기 포집부에 연결되어 상기 내부 공간 내에서 처리된 대상 유체를 상기 내부 공간 밖으로 유출시키는 유출부와, 상기 포집부에 연결되어 포집된 상기 특정 성분이 포함된 유체를 상기 내부 공간 밖으로 배출시키는 배출부를 포함하고, 상기 포집부는, 상기 내부 공간을 형성하는 하우징부와, 포집 효율을 높이는 유체의 와류가 발생하도록 상기 내부 공간에 추가 공간을 형성하는 추가부를 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the present invention includes a collection unit that forms an internal space and collects a specific component from the target fluid entering the internal space, and is connected to the collection unit to collect the target fluid into the internal space. an inlet that flows in, a processing fluid supply section that is connected to the collection section and supplies a processing fluid for collecting the specific component from the target fluid to the inner space, and a processing fluid supply section that is connected to the collection section and processes the processing fluid in the internal space. It includes an outlet part that discharges the target fluid out of the internal space, and an outlet part that is connected to the collecting part and discharges the fluid containing the collected specific component out of the internal space, wherein the collecting part forms the internal space. It is characterized by comprising a housing part and an additional part that forms an additional space in the internal space to generate a vortex of fluid that increases collection efficiency.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 추가부는, 상기 유출부가 형성된 포집부의 일면 상에 상기 유출부와 나란하게 형성되어, 상기 유출부를 통해 유체가 빠져나가기 전의 내부 공간에 유체의 와류를 발생시키는 것을 특징으로 한다.According to another embodiment of the present invention, the additional part is formed parallel to the outlet on one surface of the collection part where the outlet is formed, so that the fluid flows into the internal space before the fluid exits through the outlet. It is characterized by generating a vortex.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 추가부는, 상기 내부 공간과 연통되는 추가 공간을 형성하며 일면과 타면이 개방된 통형의 바디부와, 상기 바디부의 개방된 일면을 개폐할 수 있도록 상기 바디부에 분리 가능하게 결합되는 캡부를 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the additional part includes a cylindrical body part that forms an additional space in communication with the internal space and is open on one side and the other side, and opens and closes one open side of the body part. It is characterized in that it includes a cap part that is detachably coupled to the body part.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 추가부는, 상기 바디부에 상기 캡부를 고정시키는 고정부를 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the additional part includes a fixing part that fixes the cap part to the body part.
본 발명의 또 다른 실시예에 따르면, 본 발명은, 상기 고정부는, 상기 바디부를 파지하는 형상으로 형성되며 일면에서 타면을 관통하는 제1고정홀을 포함하는 제1고정몸체와, 상기 캡부를 파지하는 형상으로 형성되며 일면에서 타면을 관통하는 제2고정홀을 포함하는 제2고정몸체와, 상기 제1고정홀 및 상기 제2고정홀에 체결되어 상기 제1고정몸체와 상기 제2고정몸체를 결합시키는 체결수단을 포함하는 것을 특징으로 한다.According to another embodiment of the present invention, the fixing part includes a first fixing body formed in a shape to grip the body part and including a first fixing hole penetrating from one side to the other side, and gripping the cap part. A second fixing body is formed in a shape and includes a second fixing hole penetrating from one side to the other side, and is fastened to the first fixing hole and the second fixing hole to form the first fixing body and the second fixing body. It is characterized by including a fastening means for coupling.
본 발명은 앞서 본 실시예와 하기에 설명할 구성과 결합, 사용관계에 의해 다음과 같은 효과를 얻을 수 있다.The present invention can achieve the following effects by combining the above-mentioned embodiment with the configuration, combination, and use relationship described below.
본 발명은, 유체가 흐르는 하우징부의 내부 공간에 와류의 발생을 촉진시켜 포집하고자 하는 특정 물질의 포집 효율을 극대화하는 포집 장치를 제공하는 효과를 가진다.The present invention has the effect of providing a collection device that maximizes the collection efficiency of a specific substance to be collected by promoting the generation of a vortex in the internal space of the housing portion through which fluid flows.
본 발명은, 하우징부의 내부 공간을 구획하는 구획부를 구성해 유체의 유속 차이를 일으켜 와류의 발생을 촉진시키는 포집 장치를 제공하는 효과가 나타난다.The present invention has the effect of providing a collection device that promotes the generation of vortices by creating a difference in the flow rate of fluid by forming a partition that divides the internal space of the housing.
본 발명은, 구획부를 통해 일 유로를 서로 다른 유로 폭을 가지는 복수의 유로로 구분시켜 유로 간의 유속 차이에 의해 와류가 발생하도록 하는 포집 장치를 제공하는 효과를 도출한다.The present invention has the effect of providing a collection device that divides one flow path into a plurality of flow paths having different flow path widths through a partition portion, thereby generating vortices due to differences in flow rates between the flow paths.
본 발명은, 구획부에 의해 와류를 발생시켜, 포집 효율을 높이면서도, 배출부를 통해 포집부의 외부로 배출되어야 할 물질이 원활하게 배출되도록 하는 포집 장치를 제공하는 효과가 있다.The present invention has the effect of providing a collection device that increases collection efficiency by generating a vortex through a partition, and allows substances to be discharged to the outside of the collection unit through the discharge unit to be smoothly discharged.
본 발명은, 하우징부의 측면 내주면으로부터 일정 거리만큼 이격된 위치에서 유출부 측으로 상승하는 유선 방향과 나란하게 구획부를 형성하되, 하우징부의 측면 내주면과 구획부가 형성하는 유로 폭을 상대적으로 좁게 형성시켜 해당 유로에서 가장 빠른 유속이 발생하도록 함에 따라, 하우징부의 측면 내주면으로부터 하우징부의 중심 방향을 향해 시계 방향의 와류가 형성되도록 하는 포집 장치를 제공하는 효과를 가진다.In the present invention, a partition is formed parallel to the direction of the stream rising toward the outlet at a position spaced a certain distance away from the side inner circumferential surface of the housing, and the width of the flow path formed by the side inner circumferential surface of the housing and the partition is formed to be relatively narrow. By causing the fastest flow rate to occur, it has the effect of providing a collection device that causes a clockwise vortex to be formed from the inner peripheral surface of the side of the housing portion toward the center of the housing portion.
본 발명은, 구획부의 상측에 하측 방향으로 경사지게 형성되는 제1날개부를 구성하여, 구획부에 의해 빠르게 상승하는 유체가 제1날개부를 만나면서 와류를 형성하도록 하는 포집 장치를 제공하는 효과가 나타난다.The present invention has the effect of providing a collection device that configures first wings inclined in a downward direction on the upper side of the partition, allowing fluid rising rapidly by the partition to form a vortex as it meets the first wings.
본 발명은, 제1날개부의 타단으로부터 하측 방향으로 연장 형성되는 제1연장부를 구성해, 구획부에 의해 유속이 증가한 유체가 일으키는 와류 현상이 극대화 되도록 하는 포집 장치를 제공하는 효과를 도출한다.The present invention achieves the effect of providing a collection device that maximizes the vortex phenomenon caused by fluid with an increased flow rate by the partition by configuring a first extension extending downward from the other end of the first wing.
본 발명은, 유입부의 상측에 위치하여 하측 방향으로 경사지게 형성되는 제2날개부를 구성하고, 제2날개부의 타단으로부터 하측 방향으로 연장 형성되는 제2연장부를 구성해, 유입부로부터 하우징부 내부 공간으로 들어온 유체의 이동 방향이 구획부를 향하도록 가이드하는 포집 장치를 제공하는 효과가 있다.The present invention comprises a second wing located above the inlet and inclined in the downward direction, and a second extension part extending downward from the other end of the second wing, from the inlet to the inner space of the housing. There is an effect of providing a collection device that guides the direction of movement of the incoming fluid toward the compartment.
본 발명은, 제2날개부를 따라 하측방향으로 경사지게 형성되는 처리유체공급부를 구성해, 처리 유체가 내부 공간으로 낙하하도록 함으로써, 포집 장치 내에 유입된 유체는 모두 유체막을 통과하도록 하여 스크러버 등에서 발생한 불씨가 다른 곳으로 번지는 것을 막는 포집 장치를 제공하는 효과를 가진다.The present invention configures a processing fluid supply unit that is inclined downward along the second wing, allowing the processing fluid to fall into the internal space, so that all fluid flowing into the collection device passes through the fluid film, thereby preventing embers generated from scrubbers, etc. It has the effect of providing a collection device that prevents it from spreading to other places.
본 발명은, 스크러버의 폭발 등이 발생했을 때, 화염이 배관을 타고 이동하게 되면서 대형 화재로 이어질 수 있는 문제를 차단하는 포집 장치를 제공하는 효과가 나타난다.The present invention has the effect of providing a collection device that prevents problems that can lead to large-scale fires when flames travel through pipes when a scrubber explodes, etc.
본 발명은, 스크러버 등으로부터 배출되는 유체 내에 포함된 암모니아(NH3), 실란(SiH4) 등의 인체 유해 가스를 중화시키고, 유체 내 포함된 흄(Fume) 등의 미세입자가 제거될 수 있도록 하는 포집 장치를 제공하는 효과를 도출한다.The present invention neutralizes gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid discharged from a scrubber, etc., and allows fine particles such as fume contained in the fluid to be removed. The effect of providing a collection device that does this is derived.
본 발명은, 부식 방지를 위해 PVC 소재로 이루어져 화재에 취약한 배관이 화재 확산의 매개체가 되지 않도록, 스크러버와 배기덕트를 연결하는 배관상에 설치되는 포집 장치 내에 처리 유체를 제공해 화재의 확산을 차단하는 포집 장치를 제공하는 효과가 있다.The present invention is made of PVC material to prevent corrosion and prevents fire-vulnerable pipes from becoming a medium for fire spread by providing a treatment fluid in a collection device installed on the pipe connecting the scrubber and the exhaust duct to block the spread of fire. It has the effect of providing a collection device.
본 발명은, 포집부의 외측에서 내측으로 관통되어 내부공간의 특정 위치에서 처리 유체를 중력 방향으로 낙하시키는 처리유체공급부를 구성하여, 유체막을 통해 화재 확산을 차단하면서, 스크러버 등에서 처리된 유체 내에 포함되어 있는 부식 유발 액체성분 등이 분리 배출될 수 있도록 하는 포집 장치를 제공하는 효과를 가진다.The present invention constitutes a treatment fluid supply unit that penetrates from the outside of the collection unit to the inside and causes the treatment fluid to fall in the direction of gravity at a specific position in the internal space, blocking the spread of fire through the fluid film and being contained in the fluid treated in a scrubber, etc. It has the effect of providing a collection device that allows corrosion-causing liquid components to be separated and discharged.
본 발명은, 처리유체공급부가 하우징부를 관통하도록 형성되되, 하우징부로부터 분리 가능하게 결합되도록 구성하여, 분리 세척을 가능하게 하는 포집 장치를 제공하는 효과가 나타난다.The present invention has the effect of providing a collection device that allows separate cleaning by forming the processing fluid supply portion to penetrate the housing portion and being configured to be detachably coupled to the housing portion.
본 발명은, 처리유체공급부의 관통홀을 저장부의 하면에 행과 열을 맞추어 복수 개로 형성하되, 이웃하는 행 간의 관통홀이 서로 엇갈려 배치되도록 함에 따라, 유입부를 통해 내부 공간으로 들어온 대상 유체 모두가 처리유체막을 통과할 수 있도록 하는 포집 장치를 제공하는 효과를 도출한다.In the present invention, a plurality of through holes of the processing fluid supply part are formed in rows and columns on the lower surface of the storage part, and the through holes between neighboring rows are arranged in a staggered manner, so that all the target fluid that enters the internal space through the inlet part is The effect of providing a collection device that allows the processing fluid to pass through the membrane is derived.
본 발명은, 관통홀의 중심축 방향이 중력 방향과 나란하도록 구성함으로써, 저장부가 경사지게 위치하더라도 저장부 내에 포함된 처리 유체가 표면 장력 등에 의해 저장부 하면에 붙어 움직이는 것 없이 중력 방향을 따라 수직하게 낙하할 수 있도록 하는 포집 장치를 제공하는 효과가 있다.In the present invention, the central axis of the through hole is configured to be parallel to the direction of gravity, so that even if the storage unit is positioned at an angle, the processing fluid contained in the storage unit falls vertically along the direction of gravity without sticking to the bottom of the storage unit due to surface tension or the like. It has the effect of providing a collection device that allows this.
본 발명은, 하우징부의 하측에 경사면을 구성하고, 하측에서 상측 방향으로 수직하게 형성된 유입부가 경사면을 관통해 내부 공간과 연통되도록 함으로써, 하우징부의 내부 공간으로 유체가 유입되도록 하고, 응집된 부식 유발 액체 성분은 하우징부의 경사면을 따라 한 곳으로 모일 수 있도록 하는 포집 장치를 제공하는 효과를 가진다.In the present invention, an inclined surface is formed on the lower side of the housing part, and an inflow part formed vertically from the lower side to the upper part passes through the inclined surface and communicates with the internal space, thereby allowing fluid to flow into the internal space of the housing part, and condensed corrosion-causing liquid. It has the effect of providing a collection device that allows the ingredients to gather in one place along the slope of the housing.
본 발명은, 수직형의 포집 장치를 구성해 스크러버와 배기덕트 사이에 포집 장치를 설치할 경우 설치에 필요한 공간이 최소화될 수 있도록 하는 포집 장치를 제공하는 효과가 나타난다.The present invention has the effect of providing a collection device that minimizes the space required for installation when installing the vertical collection device between the scrubber and the exhaust duct.
본 발명은, 내부 공간을 형성하는 하우징부의 하측에서 상측 방향으로 유입부를 관통시켜 내부 공간과 연통되도록 함으로써, 포집 장치 설치에 필요한 공간을 최소화하고, 공간 효율성은 더욱 높아지도록 하는 포집 장치를 제공하는 효과를 도출한다.The present invention has the effect of providing a collection device that minimizes the space required to install the collection device and further increases space efficiency by penetrating the inlet from the bottom to the top of the housing forming the interior space to communicate with the interior space. Derive .
본 발명은, 포집부에 배관을 연결할 때 절곡된 부분이 생기지 않도록 함에 따라 유체의 압력 강하를 최소화시켜 배관의 부식을 효과적으로 막는 포집 장치를 제공하는 효과가 있다.The present invention has the effect of providing a collection device that effectively prevents corrosion of the pipe by minimizing the pressure drop of the fluid by preventing bent portions from occurring when connecting the pipe to the collection unit.
본 발명은, 절곡된 부분 없이 유입부의 길이를 짧게 할 수 있게 됨에 따라, 자재의 사용량을 획기적으로 줄이고, 배관 공사가 단순해지도록 하며, 설치 후 유지 보수가 용이하도록 하는 포집 장치를 제공하는 효과를 가진다.The present invention has the effect of providing a collection device that dramatically reduces the amount of material used, simplifies piping work, and facilitates maintenance after installation by shortening the length of the inlet without bending parts. have
본 발명은, 하우징부의 내부 공간에 추가 공간을 형성하는 추가부를 구성해, 추가 공간에 의해 유출부 전단에서 유체의 와류가 활발히 형성되도록 하는 포집 장치를 제공하는 효과가 나타난다.The present invention has the effect of providing a collection device that configures an additional part that forms an additional space in the internal space of the housing part, and allows a vortex of fluid to be actively formed at the front of the outlet due to the additional space.
본 발명은, 유출부가 형성된 포집부의 일면 상에 유출부와 나란하게 형성되어, 유출부를 통해 유체가 빠져나가기 전의 내부 공간에 유체의 와류를 발생시켜 특정 물질의 포집 효율을 더욱 높이는 포집 장치를 제공하는 효과를 도출한다.The present invention provides a collection device that is formed parallel to the outlet on one surface of the collection part where the outlet is formed, and generates a vortex of fluid in the internal space before the fluid escapes through the outlet, thereby further increasing the collection efficiency of a specific substance. Derive the effect.
본 발명은, 내부 공간과 연통되는 추가 공간을 형성하며 일면과 타면이 개방된 통형의 바디부와, 바디부의 개방된 일면을 개폐할 수 있도록 바디부에 분리 가능하게 결합되는 캡부를 구성하여, 포집 장치가 동작 중일 때에는 캡부에 의해 바디부의 개방된 일면이 폐쇄되어 추가 공간에 의해 와류가 발생하도록 하고, 포집 장치가 동작하지 않을 때에는 캡부를 분리해 바디부의 일면을 개방시킴으로써 포집 장치의 내부를 점검하거나 용이하게 청소할 수 있도록 하는 포집 장치를 제공하는 효과가 있다.The present invention comprises a cylindrical body part that forms an additional space in communication with the internal space and is open on one side and the other side, and a cap part that is detachably coupled to the body part to open and close the open one side of the body part, When the device is in operation, one open side of the body is closed by the cap to generate eddy currents due to the additional space. When the collection device is not operating, the cap is removed to open one side of the body to inspect the inside of the collection device. It has the effect of providing a collection device that allows for easy cleaning.
본 발명은, 바디부에 캡부를 고정시키는 고정부를 구성해, 필요에 따라 바디부에 캡부를 용이하게 고정시키거나 분리시킬 수 있도록 하는 포집 장치를 제공하는 효과를 가진다.The present invention has the effect of providing a collection device that configures a fixing part for fixing the cap part to the body part and allows the cap part to be easily fixed or separated from the body part as needed.
도 1은 종래의 액체 포집 장치를 도시한 도면.1 is a diagram showing a conventional liquid collection device.
도 2는 종래의 액체 포집 장치의 설치 상태를 도시한 도면.Figure 2 is a diagram showing the installation state of a conventional liquid collection device.
도 3은 본 발명의 일 실시예에 따른 포집 장치를 도시한 도면.Figure 3 is a diagram showing a collection device according to an embodiment of the present invention.
도 4는 도 3의 A-A' 단면도.Figure 4 is a cross-sectional view taken along line A-A' of Figure 3.
도 5는 도 3의 사용 상태도.Figure 5 is a state diagram of Figure 3 in use.
도 6은 본 발명의 다른 실시예에 따른 포집 장치를 도시한 도면.Figure 6 is a diagram showing a collection device according to another embodiment of the present invention.
도 7은 도 6의 부분 분해 사시도.Figure 7 is a partially exploded perspective view of Figure 6.
도 8은 도 6의 B-B' 단면도.Figure 8 is a cross-sectional view taken along line B-B' of Figure 6.
도 9는 도 6의 사용 상태도.Figure 9 is a usage state diagram of Figure 6.
도 10은 본 발명의 포집 장치가 설치된 상태의 일 예를 도시한 도면.Figure 10 is a diagram showing an example of the state in which the collection device of the present invention is installed.
이하에서는 본 발명에 따른 유체의 와류를 이용해 포집 효율을 높이는 포집 장치의 바람직한 실시 예들을 첨부된 도면을 참고하여 상세히 설명한다. 하기에서 본 발명을 설명함에 있어 공지의 기능 또는 구성에 대한 구체적인 설명이 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우에는 그 상세한 설명을 생략하도록 한다. 특별한 정의가 없는 한 본 명세서의 모든 용어는 본 발명이 속하는 기술분야의 통상의 지식을 가진 기술자가 이해하는 당해 용어의 일반적 의미와 동일하고 만약 본 명세서에서 사용된 용어의 의미와 충돌하는 경우에는 본 명세서에서 사용된 정의에 따른다.Hereinafter, preferred embodiments of a collection device that improves collection efficiency using fluid vortices according to the present invention will be described in detail with reference to the attached drawings. In the following description of the present invention, if a detailed description of a known function or configuration is judged to unnecessarily obscure the gist of the present invention, the detailed description will be omitted. Unless otherwise specified, all terms in this specification have the same general meaning as understood by a person skilled in the art to which the present invention pertains, and if there is a conflict with the meaning of the terms used in this specification, this specification Follow the definitions used in the specification.
본 발명인 유체의 와류를 이용해 포집 효율을 높이는 포집 장치(1)는 유체가 흐르는 하우징부의 내부 공간에 유체의 유속 차이가 발생하도록 하거나, 내부 공간과 연통되는 추가 공간을 만들어, 와류의 발생을 촉진 시킴으로써 포집하고자 하는 특정 물질의 포집 효율을 극대화하는 것을 특징으로 한다.The present invention's collection device (1), which improves collection efficiency by using the vortex of the fluid, creates a difference in the flow rate of the fluid in the internal space of the housing portion through which the fluid flows, or creates an additional space in communication with the internal space to promote the generation of vortices. It is characterized by maximizing the collection efficiency of the specific substance to be collected.
도 3은 본 발명의 일 실시예에 따른 포집 장치(1)를 도시한 도면으로, 도 3을 참고하면, 본 발명의 일 실시예 포집 장치(1)는 포집부(10), 유입부(20), 처리유체공급부(30), 유출부(40), 배출부(50)를 포함한다.Figure 3 is a diagram showing a collection device 1 according to an embodiment of the present invention. Referring to Figure 3, the collection device 1 according to an embodiment of the present invention includes a collection unit 10 and an inlet 20. ), a treatment fluid supply unit 30, an outlet unit 40, and a discharge unit 50.
상기 포집부(10)는, 내부 공간을 형성하며 상기 내부 공간에 들어온 대상 유체에서 특정 성분을 포집하는 구성을 말한다. 상기 포집부(10)의 일측은 후술할 유입부(20)와 연결되고, 상기 포집부(10)의 타측은 후술할 유출부(40)와 연결되어 스크러버 등으로부터 유입된 유체에서 부식 유발 액체 성분 등을 포집하고, 인체 유해 가스 등을 중화시킬 수 있다. 스크러버 등을 통해 유입된 유체 내에는 불산과 같은 강한 부식성 물질이 포함될 수 있는데, 상기 포집부(10)는 이러한 액체 성분을 포집함으로써, 배기되는 유체 내에서는 부식 유발 액체 성분이 존재하지 않도록 함에 따라 관내 부식을 방지하게 되며, 암모니아(NH3), 실란(SiH4) 등과 같은 유해성 물질을 중화시키는 기능을 한다.The collection unit 10 forms an internal space and is configured to collect specific components from the target fluid entering the internal space. One side of the collection unit 10 is connected to an inlet 20, which will be described later, and the other side of the collection unit 10 is connected to an outlet 40, which will be described later, to remove corrosion-causing liquid components from the fluid flowing in from a scrubber, etc. It can capture and neutralize gases harmful to the human body. The fluid flowing in through a scrubber, etc. may contain strong corrosive substances such as hydrofluoric acid. The collection unit 10 collects these liquid components, thereby preventing the presence of corrosion-causing liquid components in the discharged fluid, thereby preventing the presence of corrosion-causing liquid components within the pipe. It prevents corrosion and has the function of neutralizing harmful substances such as ammonia (NH 3 ) and silane (SiH 4 ).
도 4는 도 3의 A-A' 단면도로, 도 4를 참고하여 설명하면, 이러한 상기 포집부(10)는, 하우징부(11), 구획부(12), 제1날개부(13), 제1연장부(14), 제2날개부(15), 제2연장부(16)를 포함한다.FIG. 4 is a cross-sectional view taken along line A-A' of FIG. 3, and when explained with reference to FIG. 4, the collection unit 10 includes a housing unit 11, a partition unit 12, a first wing unit 13, and a first wing unit 13. It includes an extension part 14, a second wing part 15, and a second extension part 16.
상기 하우징부(11)는, 상기 내부 공간을 형성하는 구성으로, 상기 포집 장치(1)의 전체적인 외형을 형성한다. 도 3을 참고하면, 상기 하우징부(11)는 전체적으로 사각 박스형을 이루되, 하측의 일부분이 제거되어 경사면을 형성하는 형상을 가질 수 있다. 바람직하게는 상기 하우징부(11)의 하측에는 후술할 유입부(20)가 결합되고, 상기 하우징부(11)의 상측에는 후술할 유출부(40)가 결합되어, 유입부(20)를 통해 유입된 유체가 상기 하우징부(11)의 내부 공간을 지나 후술할 유출부(40)를 통해 배출되게 된다. 상기 하우징부(11) 내에서는 부식 유발 액체성분, 인체 유해 가스 등이 제거되는바, 유입부(20)로부터 유입된 유체 내에는 부식 유발 액체성분, 인체 유해 가스 등이 존재하나, 유출부(40)를 통해 배출되는 유체 내에는 부식 유발 액체성분, 인체 유해 가스 등이 존재하지 않게 된다.The housing portion 11 is configured to form the internal space and forms the overall appearance of the collection device 1. Referring to FIG. 3, the housing portion 11 may have an overall rectangular box shape, but a lower portion may be removed to form an inclined surface. Preferably, an inlet portion 20, which will be described later, is coupled to the lower side of the housing portion 11, and an outlet portion 40, which will be described later, is coupled to the upper side of the housing portion 11, and the outlet portion 40, which will be described later, is coupled to the lower side of the housing portion 11. The inflow fluid passes through the inner space of the housing portion 11 and is discharged through the outlet portion 40, which will be described later. Corrosion-causing liquid components, gases harmful to the human body, etc. are removed within the housing portion 11. Corrosion-causing liquid components, gases harmful to the human body, etc. are present in the fluid flowing in from the inlet 20, but the outlet portion 40 ), there are no corrosion-causing liquid components or gases harmful to the human body in the fluid discharged through the system.
도 3을 참조하면, 상기 하우징부(11)는, 정면(111), 배면(112), 측면(113), 상면(114), 하면(115), 경사면(116)으로 구분될 수 있다.Referring to FIG. 3, the housing portion 11 may be divided into a front surface 111, a rear surface 112, a side surface 113, an upper surface 114, a lower surface 115, and an inclined surface 116.
상기 정면(111)은, 상기 하우징부(11)의 전측에 위치한 수직면으로 도 3에서 지시된 면을 가리킨다.The front surface 111 is a vertical surface located on the front side of the housing portion 11 and refers to the surface indicated in FIG. 3.
상기 배면(112)은, 상기 정면(111)의 반대 측에 위치한 면으로, 상기 하우징부(11)의 후측에 위치한 수직면을 가리킨다.The back surface 112 is a surface located on the opposite side of the front surface 111 and refers to a vertical surface located at the rear of the housing portion 11.
상기 측면(113)은, 상기 정면(111)과 상기 배면(112)을 연결하는 면으로, 상기 하우징부(11)의 좌우측에 위치한 수직면을 가리킨다.The side surface 113 is a surface connecting the front surface 111 and the rear surface 112 and refers to a vertical surface located on the left and right sides of the housing portion 11.
상기 상면(114)은, 상기 하우징부(11)의 상측에 위치한 수평면으로, 후술할 유출부(40)가 결합되는 부분을 말한다.The upper surface 114 is a horizontal surface located on the upper side of the housing portion 11 and refers to a portion where the outlet portion 40, which will be described later, is coupled.
상기 하면(115)은, 상기 하우징부(11)의 하측에 위치한 면으로, 후술할 경사면(116)과 연결되는 부분이며, 상기 하면(115)에는 도 3에 도시된 것과 같이, 후술할 배출부(50)가 결합되어 상기 하면(115)으로 모여든 부식 유발 액체 성분, 처리 유체 등이 상기 하우징부(11)의 외부로 배출될 수 있도록 한다. 도 3 및 도 4에는 상기 하면(115)이 수평면을 형성하는 것으로 도시했지만, 상기 하면(115)으로 유체가 모이고, 모인 유체가 배출부(50)를 통해 배출되어야 하는바, 이를 용이하게 하기 위해, 배출부(50) 주변이 높아 자연스럽게 유체가 배출부(50) 측으로 흘러들 수 있도록 경사진 면을 형성할 수도 있다.The lower surface 115 is a surface located on the lower side of the housing portion 11 and is a part connected to an inclined surface 116 to be described later. As shown in FIG. 3, the lower surface 115 has a discharge portion to be described later. (50) is combined so that corrosion-causing liquid components, processing fluids, etc. collected on the lower surface (115) can be discharged to the outside of the housing portion (11). 3 and 4 show that the lower surface 115 forms a horizontal surface, but fluid collects on the lower surface 115, and the collected fluid must be discharged through the discharge unit 50. To facilitate this, , the area around the discharge portion 50 is high, so an inclined surface may be formed so that fluid can naturally flow toward the discharge portion 50.
상기 경사면(116)은, 상기 하면(115)에 경사지게 연결된 부분으로, 상기 하우징부(11)의 하측에 상기 경사면(116)을 구성하고, 하측에서 상측 방향으로 수직하게 형성된 후술할 유입부(20)가 상기 경사면(116)을 관통해 상기 하우징부(11)의 내부 공간과 연통 되도록 함으로써, 상기 하우징부(11)의 내부 공간으로 유체가 유입되도록 하고, 응집된 액체 성분은 상기 하우징부(11)의 상기 경사면(116)을 따라 상기 하면(115)으로 모일 수 있도록 한다. 이를 위해 상기 경사면(116)은 도 3 및 도 4에 도시된 바와 같이, 제1경사면(1161), 제2경사면(1162)을 포함할 수 있다.The inclined surface 116 is a portion obliquely connected to the lower surface 115, and constitutes the inclined surface 116 on the lower side of the housing portion 11, and an inlet portion 20, which will be described later, is formed vertically from the lower side to the upper side. ) penetrates the inclined surface 116 and communicates with the internal space of the housing part 11, so that fluid flows into the internal space of the housing part 11, and the condensed liquid component is stored in the housing part 11 ) so that they can gather on the lower surface 115 along the inclined surface 116. To this end, the inclined surface 116 may include a first inclined surface 1161 and a second inclined surface 1162, as shown in FIGS. 3 and 4.
상기 제1경사면(1161)은, 일정한 각도를 형성하며, 일단이 상기 측면(113)과 연결된 부분으로, 바람직하게는, 후술할 유입부(20)가 관통되는 면을 가리킨다. 도 3 및 도 4에 도시된 바와 같이, 상기 제1경사면(1161)의 경사각도는 후술할 제2경사면(1162)의 경사각도보다 작을 수도 있으며, 이와 다르게 상기 제1경사면(1161)의 경사각도를 제2경사면(1162)의 경사각도와 같거나 크게 구성할 수도 있다.The first inclined surface 1161 forms a certain angle, and is a portion at one end connected to the side 113, and preferably refers to a surface through which an inlet 20, which will be described later, passes. As shown in Figures 3 and 4, the inclination angle of the first inclined surface 1161 may be smaller than the inclination angle of the second inclined surface 1162, which will be described later, and differently, the inclination angle of the first inclined surface 1161 may be configured to be equal to or greater than the inclination angle of the second inclined surface 1162.
상기 제2경사면(1162)은, 일정한 각도를 형성하며, 일단이 상기 제1경사면(1161)의 타면과 연결되고, 타단이 상기 하면(115)과 연결된 부분을 말한다. 도 3 및 도 4에 도시된 바에 따르면, 상기 제2경사면(1162)이 90도의 각도를 이루는 것으로 표현했지만, 반드시 이에 제한되는 것은 아니며, 유체를 상기 하면(115) 측으로 유도할 수 있다면 얼마든지 다양한 각도를 가질 수 있다.The second inclined surface 1162 forms a certain angle, and refers to a portion where one end is connected to the other surface of the first inclined surface 1161 and the other end is connected to the lower surface 115. As shown in FIGS. 3 and 4, the second inclined surface 1162 is expressed as forming an angle of 90 degrees, but it is not necessarily limited thereto, and can be used in various ways as long as the fluid can be guided to the lower surface 115. It can have angles.
상기 구획부(12)는, 포집 효율을 높이는 유체의 와류가 발생하도록 상기 내부 공간을 구획하는 구성으로, 상기 내부 공간의 일 유로를 서로 다른 유로 폭(W1<W2)을 가지는 복수의 유로로 구분시켜 구분된 유로 간 유속의 차이에 의해 유체의 와류를 발생시키는 것을 특징으로 한다. 바람직하게는, 상기 구획부(12)는 도 4에 도시된 바와 같이, 후술할 유출부(40) 측으로 상승하는 방향의 유선(Streamline)과 나란하게 형성되는 판상형의 형상을 가지도록 구성될 수 있다. 판상형의 상기 구획부(12) 일측은 상기 하우징부(11)의 정면(111)에 결합되고, 상기 구획부(12)의 타측은 상기 하우징부(11)의 배면(112)에 결합될 수 있다.The partition 12 is configured to partition the internal space to generate a vortex of fluid that increases collection efficiency, and divides one flow path of the internal space into a plurality of flow paths having different flow path widths (W1<W2). It is characterized by generating a vortex in the fluid due to the difference in flow rate between the divided flow paths. Preferably, as shown in FIG. 4, the partition 12 may be configured to have a plate-shaped shape formed parallel to a streamline in an upward direction toward the outlet 40, which will be described later. . One side of the plate-shaped partition 12 may be coupled to the front 111 of the housing 11, and the other side of the partition 12 may be coupled to the rear 112 of the housing 11. .
보다 바람직하게는, 상기 구획부(12)는 상기 하우징부(11)의 측면(113) 내주면으로부터 일정 거리(W1)만큼 이격된 위치에 형성되며, 상기 구획부(12)에 의해 구분된 유로 중 상기 하우징부(11)의 측면(113) 내주면과 형성하는 유로 폭(W1)을 상대적으로 좁게 형성시켜(W1<W2), 상기 하우징부(11)의 측면(113) 내주면과 상기 구획부(12)가 형성하는 유로에서 가장 빠른 유속이 발생하도록 한다. 이에 따라 상기 하우징부(11)의 측면(113) 내주면으로부터 하우징부의 중심 방향을 향해 시계 방향의 와류가 형성될 수 있어, 특정 물질의 포집 효율을 높이면서도, 후술할 배출부(50)를 통해 상기 포집부(10)의 외부로 배출되어야 할 물질은 원활하게 배출되도록 한다.More preferably, the partition 12 is formed at a position spaced apart by a predetermined distance W1 from the inner peripheral surface of the side 113 of the housing part 11, and is located in one of the flow paths divided by the partition 12. The passage width W1 formed with the inner peripheral surface of the side 113 of the housing portion 11 is formed to be relatively narrow (W1<W2), so that the inner peripheral surface of the side 113 of the housing portion 11 and the partition portion 12 ) ensures that the fastest flow velocity occurs in the flow path formed by Accordingly, a clockwise vortex can be formed from the inner peripheral surface of the side 113 of the housing portion 11 toward the center of the housing portion, thereby increasing the collection efficiency of specific substances and the Materials to be discharged to the outside of the collection unit 10 are discharged smoothly.
상기 제1날개부(13)는, 상기 구획부(12)의 상측에 위치하여 상기 구획부(12)의 안내에 따라 상승하는 유체의 흐름을 제한하는 형상으로 형성된 구성을 말한다. 바람직하게는 상기 제1날개부(13)는 일단은 상기 하우징부(11)의 측면(113) 내주면에 결합되고, 타단은 자유단을 형성하며, 하측 방향으로 경사지게 형성된 판상형의 부재가 될 수 있다. 상기 구획부(12)의 상측에 하측 방향으로 경사지게 형성되는 상기 제1날개부(13)를 구성하여, 상기 구획부(12)에 의해 빠르게 상승하는 유체가 상기 제1날개부(13)를 만나면서 와류를 형성하도록 한다.The first wing 13 is located on the upper side of the partition 12 and is formed in a shape to restrict the flow of fluid that rises according to the guidance of the partition 12. Preferably, the first wing portion 13 has one end coupled to the inner peripheral surface of the side surface 113 of the housing portion 11, the other end forming a free end, and may be a plate-shaped member inclined in the downward direction. . The first wing 13 is formed on the upper side of the partition 12 to be inclined downward, so that the fluid rising rapidly by the partition 12 meets the first wing 13. Let it form a vortex.
상기 제1연장부(14)는, 자유단을 형성하는 상기 제1날개부(13)의 타단으로부터 하측 방향으로 연장 형성되는 구성으로, 도 4에 도시된 바와 같이 상기 제1연장부(14)를 구성해, 상기 구획부(12)에 의해 유속이 증가한 유체가 일으키는 와류 현상이 극대화되도록 할 수 있다. 바람직하게는 상기 제1연장부(14)는 도 4에 도시된 바와 같이 상기 제1날개부(13)의 타단으로부터 수직하게 연장 형성될 수 있다.The first extension portion 14 is configured to extend downward from the other end of the first wing portion 13 forming the free end, and as shown in FIG. 4, the first extension portion 14 By configuring, the vortex phenomenon caused by the fluid whose flow rate is increased by the partition 12 can be maximized. Preferably, the first extension part 14 may be formed to extend vertically from the other end of the first wing part 13, as shown in FIG. 4.
상기 제2날개부(15)는, 후술할 유입부(20)의 상측에 위치하여 유입부(20)로부터 상승하는 유체의 흐름을 제한하는 형상으로 형성된 구성으로, 상기 제2날개부(15)의 일단은 상기 하우징부(11)의 측면(113) 내주면에 결합되고, 타단은 자유단을 형성하며, 하측 방향으로 경사지게 형성될 수 있다. 상기 제2날개부(15)를 통해 후술할 유입부(20)로부터 상기 하우징부(11) 내부 공간으로 들어온 유체의 이동 방향이 상기 구획부(12)를 향하도록 가이드 한다.The second wing 15 is located on the upper side of the inlet 20, which will be described later, and is formed in a shape to restrict the flow of fluid rising from the inlet 20. One end is coupled to the inner peripheral surface of the side 113 of the housing portion 11, and the other end forms a free end, and may be formed to be inclined in a downward direction. The direction of movement of the fluid entering the inner space of the housing unit 11 from the inlet unit 20, which will be described later, through the second wing unit 15 is guided toward the partition unit 12.
상기 제2연장부(16)는, 자유단을 형성하는 상기 제2날개부(15)의 타단으로부터 하측 방향으로 연장 형성되는 구성을 말한다. 상기 제2연장부(16)와 상기 하우징부(11)의 경사면(116) 사이의 공간으로 유체가 이동할 수 있도록, 상기 제2연장부(16)의 단부는 상기 하우징부(11)의 경사면(116) 만나지 않도록 구성됨이 바람직하다. 바람직하게는 상기 제2연장부(16)는 도 4에 도시된 바와 같이, 상기 제2날개부(15)의 타단으로부터 수직하게 하측 방향으로 연장 형성될 수 있다.The second extension portion 16 refers to a configuration extending downward from the other end of the second wing portion 15 forming the free end. To allow fluid to move into the space between the second extension part 16 and the inclined surface 116 of the housing part 11, the end of the second extension part 16 is connected to the inclined surface of the housing part 11 ( 116) It is desirable to configure it so that they do not meet. Preferably, the second extension part 16 may be formed to extend vertically downward from the other end of the second wing part 15, as shown in FIG. 4.
상기 유입부(20)는, 상기 포집부(10)에 연결되어 상기 내부 공간으로 상기 대상 유체를 유입시키는 구성을 말한다. 바람직하게는 스크러버 등에서 처리된 유체가 상기 유입부(20)를 통해 상기 하우징부(11)의 내부 공간으로 들어올 수 있다. 상기 유입부(20)의 형상을 어느 특정 형상으로만 한정하는 것은 아니지만, 도 3에 도시된 바와 같이, 상면과 하면이 개방된 원통형의 형상으로 구성될 수 있다. 상기 유입부(20)는 하측에서 상측 방향으로 수직하게 연장 형성되되, 상기 하우징부(11)의 경사면(116)을 관통해 상기 하우징부(11)의 내부 공간과 연통 된다. 본 발명인 포집 장치(1)의 상기 유입부(20)는 절곡되지 않고 직립된 수직관으로 구성됨으로써, 스크러버 등을 통해 배출된 유체가 상기 유입부(20)를 통과할 때 부하가 걸리는 문제와, 큰 압력강하에 따른 부식 발생 문제를 방지할 수 있다. 또한, 절곡된 부분 없이 유입부(20)의 길이를 짧게 할 수 있게 됨에 따라, 자재의 사용량을 획기적으로 줄이고, 배관 공사가 단순해지도록 하며, 설치 후 유지 보수가 용이해 지게 된다.The inflow part 20 is connected to the collection part 10 and refers to a configuration that introduces the target fluid into the internal space. Preferably, fluid treated in a scrubber, etc. may enter the internal space of the housing portion 11 through the inlet portion 20. The shape of the inlet 20 is not limited to any specific shape, but as shown in FIG. 3, it may be configured as a cylindrical shape with the upper and lower surfaces open. The inlet portion 20 extends vertically from the bottom to the top, and communicates with the internal space of the housing portion 11 through the inclined surface 116 of the housing portion 11. The inlet part 20 of the collection device 1 of the present invention is composed of a vertical pipe that is not bent and is upright, so that a load is applied when the fluid discharged through a scrubber or the like passes through the inlet part 20, Corrosion problems caused by large pressure drops can be prevented. In addition, as the length of the inlet 20 can be shortened without bending parts, the amount of material used is dramatically reduced, piping work is simplified, and maintenance after installation becomes easier.
상기 처리유체공급부(30)는, 상기 포집부(10)에 연결되어 상기 대상 유체에서 상기 특정 성분을 포집하기 위한 처리 유체를 상기 내부 공간으로 공급하는 구성을 말한다. 바람직하게는, 상기 처리유체공급부(30)는 상기 하우징부(11)의 측면(113)을 관통하도록 형성되되 분리 세척이 용이하도록 상기 하우징부(11)에 분리 가능하게 결합되며, 상기 제2날개부(15)의 하면에 밀착되는 구성으로 볼 수 있다. 상기 처리유체공급부(30)에 의해 화재 확산을 차단하는 유체막, 유체커튼이 형성될 수 있으며, 상기 처리 유체를 어느 특정 유체로만 한정하는 것은 아니지만, 바람직하게는, 물(H20)로 구성될 수 있고, 따라서, 상기 처리유체공급부(30)에 의해 형성되는 유체막은 수막일 수 있다. 또한, 상기 처리 유체는 유해 가스 등을 중화하는 중화제로 구성될 수도 있다. 사용된 처리 유체는 리사이클링 과정을 통해 계속적으로 사용될 수 있다.The processing fluid supply unit 30 is connected to the collection unit 10 and supplies processing fluid for collecting the specific component from the target fluid into the internal space. Preferably, the processing fluid supply unit 30 is formed to penetrate the side 113 of the housing unit 11 and is detachably coupled to the housing unit 11 to facilitate separation and cleaning, and the second wing. It can be seen as being in close contact with the lower surface of the part 15. A fluid film or fluid curtain that blocks the spread of fire can be formed by the processing fluid supply unit 30, and the processing fluid is not limited to any specific fluid, but preferably consists of water (H 2 0). Therefore, the fluid film formed by the processing fluid supply unit 30 may be a water film. Additionally, the treatment fluid may be composed of a neutralizing agent that neutralizes harmful gases, etc. Used processing fluids can be used continuously through recycling processes.
상기 처리유체공급부(30)는 도 4에 도시된 바와 같이, 상기 제2날개부(15)의 하면에 밀착 접촉되도록 함에 따라, 상기 처리유체공급부(30)를 구성하더라도 상기 하우징부(11)의 내부공간이 크게 줄어들지 않아, 포집 장치(1)의 크기를 늘리지 않아도 충분한 액체 포집이 이루어지게 된다.As shown in FIG. 4, the processing fluid supply unit 30 is brought into close contact with the lower surface of the second wing 15, so that even if the processing fluid supply unit 30 is configured, the housing unit 11 Since the internal space is not significantly reduced, sufficient liquid collection is achieved without increasing the size of the collection device 1.
상기 처리유체공급부(30)는 상기 제2날개부(15)를 따라 하측 방향으로 경사지게 형성된다. 상기 처리유체공급부(30)를 통해 처리 유체가 내부 공간으로 낙하하도록 함으로써, 상기 포집 장치(1) 내에 유입된 유체는 모두 유체막을 통과하도록 하여 스크러버 등에서 발생한 불씨가 다른 곳으로 번지는 것을 막을 수 있다. 또한, 스크러버의 폭발 등이 발생했을 때, 화염이 배관을 타고 이동하게 되면서 대형 화재로 이어질 수 있는 문제를 원천적으로 차단하게 된다. 게다가, 스크러버 등으로부터 배출되는 유체 내에 포함된 암모니아(NH3), 실란(SiH4) 등의 인체 유해 가스를 중화시키고, 유체 내 포함된 흄(Fume) 등의 미세입자가 제거될 수 있도록 한다.The processing fluid supply unit 30 is formed to be inclined downward along the second wing portion 15. By allowing the processing fluid to fall into the internal space through the processing fluid supply unit 30, all fluid flowing into the collection device 1 passes through the fluid film, thereby preventing embers generated from the scrubber, etc. from spreading to other places. . Additionally, when a scrubber explodes, flames travel through the pipes, preventing problems that could lead to large-scale fires. In addition, it neutralizes gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid discharged from a scrubber, etc., and allows fine particles such as fume contained in the fluid to be removed.
도 4를 참고하면, 이러한 상기 처리유체공급부(30)는, 저장부(31), 관통홀(32)을 포함한다.Referring to FIG. 4, the processing fluid supply unit 30 includes a storage unit 31 and a through hole 32.
상기 저장부(31)는, 상기 처리 유체가 저장되는 수용 공간을 형성하는 구성으로, 상기 하우징부(11)에 분리 가능하게 결합될 수 있다. 바람직하게는 상기 저장부(31)는 도 4에 도시된 바와 같이, 내부가 빈 박스 형태로 형성될 수 있다. 상기 저장부(31)는, 상기 하우징부(11)의 측면(113)을 관통하되, 하측 방향으로 경사지게 형성되어 원활한 처리 유체의 흐름을 유도한다.The storage unit 31 is configured to form a receiving space in which the processing fluid is stored, and may be detachably coupled to the housing unit 11 . Preferably, the storage unit 31 may be formed in the shape of an empty box, as shown in FIG. 4. The storage unit 31 penetrates the side surface 113 of the housing unit 11 and is inclined downward to induce a smooth flow of processing fluid.
상기 관통홀(32)은, 상기 수용 공간에 저장된 상기 처리 유체가 상기 내부 공간으로 낙하되도록 상기 저장부(31)에 관통 형성된 구멍을 말한다. 바람직하게는, 상기 관통홀(32)은, 상기 하우징부(11) 외측에 처리 유체의 누수를 방지하기 위해, 상기 저장부(31)의 하면 중, 상기 하우징부(11)의 내부공간에 삽입되는 부분에만 형성될 수 있다. 바람직하게는, 상기 처리유체공급부(30)의 관통홀(32)을 상기 저장부(31)의 하면에 행과 열을 맞추어 복수 개로 형성하되, 이웃하는 행 간의 관통홀(32)이 서로 엇갈려 배치되도록 함에 따라, 상기 유입부(20)를 통해 상기 하우징부(11)의 내부 공간으로 들어온 대상 유체 모두가 처리유체막을 통과할 수 있도록 한다. 그리고, 상기 관통홀(32)의 중심축 방향이 중력 방향과 나란하도록 구성함으로써, 상기 저장부(31)가 경사지게 위치하더라도 상기 저장부(31) 내에 포함된 처리 유체가 표면 장력 등에 의해 상기 저장부(31) 하면에 붙어 움직이는 것 없이 중력 방향을 따라 수직하게 낙하할 수 있도록 한다.The through hole 32 refers to a hole formed through the storage unit 31 so that the processing fluid stored in the receiving space falls into the internal space. Preferably, the through hole 32 is inserted into the inner space of the housing portion 11 in the lower surface of the storage portion 31 to prevent leakage of the processing fluid to the outside of the housing portion 11. It can only be formed in the part where it is. Preferably, a plurality of through holes 32 of the processing fluid supply unit 30 are formed in rows and columns on the lower surface of the storage unit 31, and the through holes 32 between adjacent rows are arranged to be staggered. As much as possible, all of the target fluid that enters the inner space of the housing part 11 through the inlet part 20 can pass through the processing fluid film. In addition, by configuring the central axis direction of the through hole 32 to be parallel to the direction of gravity, even if the storage unit 31 is positioned at an angle, the processing fluid contained in the storage unit 31 is transferred to the storage unit 31 by surface tension, etc. (31) It attaches to the bottom and allows it to fall vertically along the direction of gravity without moving.
상기 유출부(40)는, 상기 포집부(10)에 연결되어 상기 내부 공간 내에서 처리된 대상 유체를 상기 내부 공간 밖으로 유출시키는 구성으로, 상기 포집부(10)에서 부식 유발 액체 성분, 인체 유해 가스 등이 제거된 유체를 배출시킨다. 상기 유출부(40)의 형상은 어느 특정 형상으로만 한정되는 것은 아니지만, 바람직하게는, 상면과 하면이 개방된 원통형의 형상으로 구성될 수 있다. 전술한 바와 같이, 상기 유입부(20)는 상기 하우징부(11)의 경사면(116)을 관통하도록 구성되었으나, 상기 유출부(40)는, 상기 하우징부(11)의 내부 공간과 연통되어 상기 하우징부(11)의 상면(114)으로부터 상측 방향으로 수직하게 연장 형성되는 것으로 봄이 바람직하다. 본 발명인 포집 장치(1)의 상기 유출부(40) 역시 절곡되지 않고 직립된 수직관 형태로 구성될 수 있는바, 스크러버와 배기덕트 사이에 포집 장치(1)를 설치하더라도 넓은 설치 공간을 필요로 하지 않게 되며, 관들이 수직하게 연결되면서 부하가 걸리는 문제와, 압력강하 현상이 방지된다. 또한, 이물질이 배관 내벽에 붙어 스케일(Scale)을 형성하는 것을 막으며, 부식 유발 액체성분에 의한 관내 부식을 차단할 수 있고, 인체 유해 가스 등을 중화시킬 수 있다.The outflow unit 40 is connected to the collection unit 10 and is configured to discharge the target fluid treated within the internal space out of the internal space. In the collection unit 10, the liquid component causing corrosion, harmful to the human body, Discharge the fluid from which gases, etc. have been removed. The shape of the outlet portion 40 is not limited to any specific shape, but preferably has a cylindrical shape with the upper and lower surfaces open. As described above, the inlet portion 20 is configured to penetrate the inclined surface 116 of the housing portion 11, but the outlet portion 40 communicates with the internal space of the housing portion 11 and The spring is preferably formed to extend vertically upward from the upper surface 114 of the housing portion 11. The outlet 40 of the present invention's collection device 1 can also be configured in the form of an upright vertical pipe without being bent, so even if the collection device 1 is installed between the scrubber and the exhaust duct, a large installation space is required. As the pipes are connected vertically, load problems and pressure drops are prevented. In addition, it prevents foreign substances from sticking to the inner wall of the pipe and forming scale, prevents corrosion inside the pipe caused by corrosion-causing liquid components, and neutralizes gases harmful to the human body.
상기 배출부(50)는, 상기 포집부(10)에 연결되어 포집된 상기 특정 성분이 포함된 유체를 상기 내부 공간 밖으로 배출시키는 구성을 말한다. 즉, 상기 배출부(50)는 상기 하우징부(11)의 하면(115)에 결합되어 포집된 부식 유발 액체 성분과 상기 처리 유체 등을 외부로 배수시키는 구성을 말한다. 이를 위해 상기 배출부(50)는 상면과 하면이 개방된 통형으로 구성될 수 있으며, 바람직하게는 원통형으로 구성될 수 있다. 상기 제1날개부(13) 등과 부딪히면서 응집된 부식 유발 액체성분이 중력에 의해 낙하하면 상기 하우징부(11)의 하면(115)으로 모이게 되고, 이러한 하면(115)에는 상기 배출부(50)가 구성되는바, 상기 하우징부(11) 외측으로 수집된 특정 성분이 배출된다. 또한, 화재 확산을 방지하기 위한 유체막 형성을 위해 상기 하우징부(11)의 내부 공간으로 계속적으로 공급되는 처리 유체는 중력에 의해 낙하하고, 낙하된 처리 유체가 상기 배출부(50)에 모여 상기 하우징부(11) 밖으로 배출되어, 필터링 등의 과정을 거친 후 재순환에 사용될 수 있다.The discharge unit 50 is connected to the collection unit 10 and discharges the collected fluid containing the specific component out of the internal space. That is, the discharge unit 50 is coupled to the lower surface 115 of the housing unit 11 and drains the collected corrosion-causing liquid components and the treatment fluid to the outside. To this end, the discharge portion 50 may be configured as a cylinder with open upper and lower surfaces, and may preferably be configured as a cylindrical shape. When the corrosion-inducing liquid component that is coagulated while colliding with the first wing part 13 falls due to gravity, it is collected on the lower surface 115 of the housing part 11, and the discharge part 50 is on this lower surface 115. As configured, specific components collected outside the housing portion 11 are discharged. In addition, in order to form a fluid film to prevent the spread of fire, the processing fluid continuously supplied to the inner space of the housing unit 11 falls by gravity, and the falling processing fluid is collected in the discharge unit 50 and discharged into the discharge unit 50. It can be discharged out of the housing unit 11 and used for recirculation after going through a process such as filtering.
도 5는 도 3의 사용 상태도를 도시한 도면이다. 도 5를 참고하여 설명하면, 상기 유입부(20)를 통해 상기 하우징부(11)의 내부 공간으로 들어오게 된 유체(F)는, 상기 처리유체공급부(30)로부터 낙하하는 처리 유체(W)를 만나게 되어 화재 확산이 방지됨은 물론, 유체 내에 포함된 암모니아(NH3), 실란(SiH4) 등의 인체 유해 가스가 중화되고, 유체 내 포함된 흄(Fume) 등의 미세입자가 제거될 수 있다. FIG. 5 is a diagram illustrating a state of use of FIG. 3. Referring to FIG. 5 , the fluid (F) that enters the internal space of the housing unit 11 through the inlet 20 is the processing fluid (W) falling from the processing fluid supply unit 30. In addition to preventing the spread of fire, gases harmful to the human body, such as ammonia (NH 3 ) and silane (SiH 4 ), contained in the fluid are neutralized, and fine particles such as fume contained in the fluid can be removed. there is.
이후 유체(F)는 상기 제2날개부(15) 및 제2연장부(16)의 가이드를 받아 하측 방향으로 이동하게 되는데, 상기 제2연장부(16)의 단부와 상기 하우징부(11)의 경사면(116) 사이를 통과해 나온 유체(F)가 마주하게 되는 유로는 도 5에 도시된 바와 같이, 상기 구획부(12)에 의해 두 개의 유로로 구분될 수 있다. 상기 구획부(12)는 상기 하우징부(11)의 측면(113) 측으로 오프셋(Offset) 되어 있는바, 상기 측면(113) 측에 가깝게 위치한 유로의 폭(W1)이 다른 유로의 폭(W2) 보다 좁게 형성(W1<W2)되면서, W1의 유로 폭을 가지는 유로에서 보다 빠른 유체(F) 유속이 발현되도록 한다.Thereafter, the fluid F moves downward under the guidance of the second wing portion 15 and the second extension portion 16, where the end of the second extension portion 16 and the housing portion 11 The flow path encountered by the fluid F passing between the inclined surfaces 116 may be divided into two flow paths by the partition 12, as shown in FIG. 5 . The partition portion 12 is offset toward the side 113 of the housing portion 11, and the width W1 of a flow path located close to the side 113 is different from the width W2 of the flow path. As it is formed more narrowly (W1<W2), a faster fluid (F) flow rate occurs in a passage having a passage width of W1.
즉, W1의 폭을 가지는 유로를 통과하는 유체(F)의 속도가 W2의 폭을 가지는 유로를 통과하는 유체(F)의 속도에 비해 빠르게 되고, 상기 구획부(12)의 상측에는 하측 방향으로 경사진 제1날개부(13)가 위치하게 되는바, W1의 폭을 가지는 유로를 통과한 유체(F)에 의해 도 5에 도시된 것과 같은 와류가 발생하게 된다.That is, the speed of the fluid (F) passing through the passage having a width of W1 is faster than the speed of the fluid (F) passing through the passage having a width of W2, and the upper side of the partition 12 is directed downward. As the inclined first wing 13 is positioned, a vortex as shown in FIG. 5 is generated by the fluid F passing through the passage having a width W1.
상기 유출부(40) 측에 부압을 일으켜 유체(F)를 빨아들이는 경우에는, 포집된 액체 성분 등(C)이 상기 배출부(50) 측으로 배출되어야 함에도 불구하고, 상기 부압에 의해 압력차가 커지면서 상기 배출부(50)를 통해 상기 하우징부(11) 밖으로 빠져 나가지 못하는 문제가 발생할 수 있다.When the fluid (F) is sucked in by creating a negative pressure on the outlet side (40), although the collected liquid component (C) must be discharged to the discharge side (50), the pressure difference is increased due to the negative pressure. As it grows, a problem may arise in which it cannot escape out of the housing portion 11 through the discharge portion 50.
이러한 문제를 해결하고자, 본 발명은 도 5에 도시된 바와 같이 W1의 폭을 가지는 유로를 통과한 유체(F)에 의해 시계 방향의 와류를 형성시켜 W2의 폭을 가지는 유로를 통해 상승하는 유체(F)의 흐름과 반대되는 흐름을 발생하도록 함으로써, 상기 배출부(50)를 통한 물질(C)의 배출을 원활히 하면서도 포집 효율을 높일 수 있다.In order to solve this problem, the present invention forms a clockwise vortex by the fluid (F) passing through a passage with a width of W1, as shown in FIG. 5, and creates a fluid (F) rising through a passage with a width of W2. By generating a flow opposite to the flow of F), the collection efficiency can be increased while smoothing the discharge of the substance C through the discharge part 50.
이러한 과정으로 통해 특정 성분(C)이 제거된 유체(F)는 상기 하우징부(11)의 상면(114)에 형성된 유출부(40)를 통해 하우징부(11) 밖으로 이동하게 된다.The fluid (F) from which the specific component (C) has been removed through this process moves out of the housing portion (11) through the outlet portion (40) formed on the upper surface (114) of the housing portion (11).
도 6은 본 발명의 다른 실시예에 따른 포집 장치를 도시한 도면으로, 도 6을 참고하여 설명하면, 도 6의 실시예는 전술한 실시예와 달리 추가부(60)가 구성된 특징이 있는바, 이하에서는 새롭게 추가된 상기 추가부(60)에 대해 설명하도록 하겠다.Figure 6 is a diagram showing a collection device according to another embodiment of the present invention. When described with reference to Figure 6, the embodiment of Figure 6 is characterized by an additional part 60, unlike the above-described embodiment. , Hereinafter, the newly added additional part 60 will be described.
상기 추가부(60)는, 포집 효율을 높이는 유체의 와류가 발생하도록 상기 내부 공간에 추가 공간을 형성하는 구성으로, 상기 유출부(40)가 형성된 상기 포집부(10)의 하우징부(11) 상면(114) 상에 상기 유출부(40)와 나란하게 형성되어, 상기 유출부(40)를 통해 유체가 빠져나가기 전의 내부 공간에 유체의 와류를 발생시키는 것을 특징으로 한다. 상기 추가부(60)가 형성하는 추가 공간에 의해 상기 유출부(40) 전단에서는 유체의 와류가 활발히 형성될 수 있으며, 이로 인해 특정 물질의 포집 효율은 더욱 높아지게 된다.The additional part 60 is configured to form an additional space in the internal space to generate a vortex of fluid that increases collection efficiency, and the housing part 11 of the collection part 10 in which the outlet part 40 is formed It is formed parallel to the outlet portion 40 on the upper surface 114, and is characterized in that it generates a vortex of fluid in the internal space before the fluid exits through the outlet portion 40. Due to the additional space formed by the additional part 60, fluid vortices can be actively formed at the front of the outlet part 40, which further increases the collection efficiency of specific substances.
도 7은 도 6의 부분 분해 사시도로, 도 7을 참고하면, 이러한 상기 추가부(60)는, 바디부(61), 캡부(62), 고정부(63)를 포함한다.FIG. 7 is a partially exploded perspective view of FIG. 6 . Referring to FIG. 7 , the additional part 60 includes a body part 61, a cap part 62, and a fixing part 63.
상기 바디부(61)는, 상기 내부 공간과 연통되는 추가 공간을 형성하며 일면과 타면이 개방된 통형의 구성을 말한다. 도 7에는 상기 바디부(61)를 원통형으로 도시하였지만, 상기 바디부(61)가 반드시 이러한 형상으로만 제한되는 것은 아니고, 각형 파이프 형상 등으로도 구성될 수 있다. 이러한 상기 바디부(61)에는 플랜지가 형성되어, 후술할 캡부(62)와의 용이한 결합을 도모할 수 있다.The body portion 61 forms an additional space in communication with the internal space and has a cylindrical configuration with one side and the other side open. In FIG. 7, the body portion 61 is shown as a cylindrical shape, but the body portion 61 is not necessarily limited to this shape and may also have a rectangular pipe shape. A flange is formed on the body portion 61 to facilitate easy coupling with the cap portion 62, which will be described later.
상기 캡부(62)는, 상기 바디부(61)의 개방된 일면을 개폐할 수 있도록 상기 바디부(61)에 분리 가능하게 결합되는 구성을 말한다. 이를 위해 상기 캡부(62)는 내부에 빈 공간을 형성하면서 하면이 개방된 형상으로 구성될 수 있다. 상기 포집 장치(1)가 동작 중일 때에는 상기 캡부(62)에 의해 상기 바디부(61)의 개방된 일면이 폐쇄되어 추가 공간에 의해 와류가 발생하도록 하고, 상기 포집 장치(1)가 동작하지 않을 때에는 상기 캡부(62)를 분리해 상기 바디부(61)의 일면을 개방시킴으로써 상기 포집 장치(1)의 내부를 점검하거나 용이하게 청소할 수 있도록 한다.The cap portion 62 refers to a component that is detachably coupled to the body portion 61 so that the open surface of the body portion 61 can be opened and closed. To this end, the cap portion 62 may be configured to have an open lower surface while forming an empty space therein. When the collection device 1 is in operation, one open surface of the body portion 61 is closed by the cap portion 62 to generate a vortex due to the additional space, and when the collection device 1 is not in operation, the open surface of the body portion 61 is closed. In this case, the cap portion 62 is separated to open one side of the body portion 61 to inspect or easily clean the inside of the collection device 1.
상기 고정부(63)는, 상기 바디부(61)에 상기 캡부(62)를 고정시키는 구성으로, 상기 고정부(63)를 구성해 필요에 따라 상기 바디부(61)에 상기 캡부(62)를 용이하게 고정 시키거나 분리시킬 수 있게 된다. 상기 고정부(63)의 형상을 어느 특정 형상으로만 제한하는 것은 아니며, 일 예로 도 7에 도시된 것과 같은 형상으로 구성할 수 있다. 도 7은 도 6의 부분 분해 사시도이고, 도 8은 도 6의 B-B' 단면도로, 도 7 및 도 8을 참고하면, 이러한 상기 고정부(63)는, 제1고정몸체(631), 제2고정몸체(632), 체결수단(633)을 포함한다.The fixing part 63 is configured to fix the cap part 62 to the body part 61, and configures the fixing part 63 to attach the cap part 62 to the body part 61 as needed. can be easily fixed or separated. The shape of the fixing part 63 is not limited to any specific shape, and for example, it can be configured as the shape shown in FIG. 7. FIG. 7 is a partially exploded perspective view of FIG. 6, and FIG. 8 is a cross-sectional view taken along line B-B' of FIG. 6. Referring to FIGS. 7 and 8, the fixing part 63 includes a first fixing body 631 and a second fixing body 631. Includes a fixing body 632 and fastening means 633.
상기 제1고정몸체(631)는, 상기 바디부(61)를 파지하는 형상으로 형성되며 일면에서 타면을 관통하는 제1고정홀(6311)을 포함하는 구성을 말한다. 상기 제1고정홀(6311)의 내주면 상에는 후술할 체결수단(633)의 외주면 상에 형성된 수나사산에 상보적인 암나사산이 형성될 수 있다.The first fixing body 631 is formed in a shape to hold the body portion 61 and includes a first fixing hole 6311 penetrating from one side to the other side. On the inner peripheral surface of the first fixing hole 6311, a female thread complementary to the male thread formed on the outer peripheral surface of the fastening means 633, which will be described later, may be formed.
상기 제2고정몸체(632)는, 상기 캡부(62)를 파지하는 형상으로 형성되며 일면에서 타면을 관통하는 제2고정홀(6321)을 포함하는 구성을 말한다. 상기 제2고정홀(6321)의 내주면 상에도 후술할 체결수단(633)의 외주면 상에 형성된 수나사산과 상보적인 암나사산이 형성될 수 있다. The second fixing body 632 is formed in a shape to hold the cap portion 62 and includes a second fixing hole 6321 penetrating from one side to the other side. A female thread complementary to the male thread formed on the outer peripheral surface of the fastening means 633, which will be described later, may also be formed on the inner peripheral surface of the second fixing hole 6321.
상기 체결수단(633)은, 상기 제1고정홀(6311) 및 상기 제2고정홀(6321)에 체결되어 상기 제1고정몸체(631)와 상기 제2고정몸체(632)를 결합시키는 구성으로, 바람직하게는 상기 체결수단(633)은 외주면에 나사산이 형성된 볼트가 될 수 있다.The fastening means 633 is fastened to the first fixing hole 6311 and the second fixing hole 6321 to couple the first fixing body 631 and the second fixing body 632. , Preferably, the fastening means 633 may be a bolt with a thread formed on the outer peripheral surface.
도 9는 도 6의 사용 상태도로, 이하에서는 도 9를 참고하여, 본 실시예에 대한 사용 상태를 설명하도록 하겠다.Figure 9 is a usage state diagram of Figure 6, and hereinafter, the usage state for this embodiment will be described with reference to Figure 9.
도 9는 전술한 도 5의 사용 상태도에서 상기 추가부(60)가 추가로 형성된 것이기 때문에, 도 5에서 발생했던 상기 구획부(12)에 의한 와류 현상이 그대로 나타나게 된다. 도 5에서는 상기 구획부(12), 상기 제1날개부(13) 및 상기 제1연장부(14)에 의한 유체(F) 와류만 발생했다면, 도 9에서는 도 5의 와류가 1차적으로 발생한 다음에, 상기 추가부(60)에 의해 형성되는 상기 바디부(61) 내측의 추가 공간에 의해 도 9에 도시된 것과 같은 2차적인 와류가 발생하게 된다. Since FIG. 9 shows the additional portion 60 formed in the usage state diagram of FIG. 5 described above, the vortex phenomenon caused by the partition portion 12 that occurred in FIG. 5 appears as is. In Figure 5, if only the fluid (F) vortex was generated by the partition part 12, the first wing part 13, and the first extension part 14, in Figure 9, the vortex of Figure 5 was primarily generated. Next, a secondary vortex as shown in FIG. 9 is generated by the additional space inside the body portion 61 formed by the additional portion 60.
즉, 도 9의 실시예에 의하면, 1차 와류에 의해 특정 성분(C)이 제거된 유체(F)가 곧바로 유출부(40)를 통해 배출되는 것이 아니라, 이동 과정 중 나타난 추가 공간에 의해 내부 공간이 갑자기 확장되면서 추가 공간 측으로 이동하려는 유체의 흐름에 의해 2차 와류를 형성하게 되고, 이 과정에서 잔류 특정 성분(C)이 다시 한번 더 제거될 수 있게 된다.That is, according to the embodiment of FIG. 9, the fluid (F) from which the specific component (C) has been removed by the primary vortex is not discharged directly through the outlet 40, but is discharged inside by the additional space that appears during the movement process. As the space suddenly expands, a secondary vortex is formed by the flow of fluid moving toward the additional space, and in this process, the remaining specific component (C) can be removed once again.
도 9의 포집 장치(1)에서 상기 추가부(60)는 2차 와류를 발생시키는 기능을 할 뿐만 아니라, 포집 장치(1)가 동작하지 않을 때에는 상기 추가부(60)의 캡부(62)를 열어 장치 내부를 점검하거나 청소할 수 있도록 함으로써 유지 보수를 용이하게 한다.In the collection device 1 of FIG. 9, the additional part 60 not only functions to generate a secondary vortex, but also functions as a cap part 62 of the additional part 60 when the collection device 1 is not operating. It facilitates maintenance by opening it to inspect or clean the inside of the device.
도 10은 본 발명의 포집 장치(1)가 설치된 상태의 일 예를 도시한 도면으로, 본 발명의 일 실시예에 의하면 수직형의 포집 장치(1)를 구성해 스크러버(S)와 배기덕트(D) 사이에 포집 장치(1)를 설치할 경우 설치에 필요한 공간이 최소화될 수 있도록 한다. Figure 10 is a diagram showing an example of the installed state of the collection device (1) of the present invention. According to one embodiment of the present invention, a vertical collection device (1) is configured to include a scrubber (S) and an exhaust duct ( D) When installing the collection device (1) between them, ensure that the space required for installation is minimized.
도 10에는 본 발명의 포집 장치(1)가 스크러버 외부에 설치된 것으로 도시하였으나, 본 발명의 포집 장치(1)가 반드시 스크러버(S) 외부에만 설치하는 것으로 제한되는 것은 아니며, 스크러버(S)의 내부에도 설치될 수 있다. 즉, 본 발명은 포집 장치(1)를 스크러버(S) 내부에 위치시켜 스크러버(S)의 작동으로 배출될 유체를 스크러버(S) 내부에 설치된 포집 장치(1)가 수집해 처리한 뒤 배출하는 것도 가능할 수 있다.In Figure 10, the collection device (1) of the present invention is shown as installed outside the scrubber, but the collection device (1) of the present invention is not necessarily limited to being installed only outside the scrubber (S), and can be installed inside the scrubber (S). It can also be installed. That is, the present invention places the collection device (1) inside the scrubber (S) so that the fluid to be discharged by the operation of the scrubber (S) is collected, processed, and discharged by the collection device (1) installed inside the scrubber (S). It may also be possible.
본 발명의 포집 장치(1)는 내부 공간을 형성하는 상기 하우징부(11)의 하측에서 상측 방향으로 상기 유입부(20)를 관통시켜 내부 공간과 연통되도록 함으로써, 상기 포집 장치(1) 설치에 필요한 공간을 최소화하고, 공간 효율성은 더욱 높아지도록 한다. 상기 포집부(10)에 배관을 연결할 때 절곡된 부분이 생기지 않도록 함에 따라 유체의 압력 강하를 최소화시켜 배관의 부식을 효과적으로 막는 포집 장치(1)를 제공할 수 있게 된다. 또한, 절곡된 부분 없이 상기 유입부(20)의 길이를 짧게 할 수 있게 됨에 따라, 자재의 사용량을 획기적으로 줄이고, 배관 공사가 단순해지도록 하며, 설치 후 유지 보수가 용이하도록 하는 포집 장치(1)를 제공할 수 있다.The collection device (1) of the present invention penetrates the inlet portion (20) from the bottom to the top of the housing portion (11) forming the interior space to communicate with the interior space, allowing for installation of the collection device (1). Minimize the space required and increase space efficiency. By preventing bent portions from occurring when connecting the pipe to the collection unit 10, it is possible to provide a collection device 1 that effectively prevents corrosion of the pipe by minimizing the pressure drop of the fluid. In addition, as the length of the inlet 20 can be shortened without a bent part, the amount of material used is dramatically reduced, piping work is simplified, and maintenance is easy after installation. A collection device (1) ) can be provided.
이상의 상세한 설명은 본 발명을 예시하는 것이다. 또한, 전술한 내용은 본 발명의 바람직한 실시 형태를 나타내어 설명하는 것이며, 본 발명은 다양한 다른 조합, 변경 및 환경에서 사용할 수 있다. 즉 본 명세서에 개시된 발명의 개념의 범위, 저술한 개시 내용과 균등한 범위 및/또는 당업계의 기술 또는 지식의 범위내에서 변경 또는 수정이 가능하다. 저술한 실시예는 본 발명의 기술적 사상을 구현하기 위한 최선의 상태를 설명하는 것이며, 본 발명의 구체적인 적용 분야 및 용도에서 요구되는 다양한 변경도 가능하다. 따라서 이상의 발명의 상세한 설명은 개시된 실시 상태로 본 발명을 제한하려는 의도가 아니다. 또한 첨부된 청구범위는 다른 실시 상태도 포함하는 것으로 해석되어야 한다.The above detailed description is illustrative of the present invention. Additionally, the foregoing is intended to illustrate preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, changes or modifications can be made within the scope of the inventive concept disclosed in this specification, a scope equivalent to the written disclosure, and/or within the scope of technology or knowledge in the art. The written examples illustrate the best state for implementing the technical idea of the present invention, and various changes required for specific application fields and uses of the present invention are also possible. Accordingly, the detailed description of the invention above is not intended to limit the invention to the disclosed embodiments. Additionally, the appended claims should be construed to include other embodiments as well.

Claims (15)

  1. 내부 공간을 형성하며 상기 내부 공간에 들어온 대상 유체에서 특정 성분을 포집하는 포집부와, 상기 포집부에 연결되어 상기 내부 공간으로 상기 대상 유체를 유입시키는 유입부와, 상기 포집부에 연결되어 상기 대상 유체에서 상기 특정 성분을 포집하기 위한 처리 유체를 상기 내부 공간으로 공급하는 처리유체공급부와, 상기 포집부에 연결되어 상기 내부 공간 내에서 처리된 대상 유체를 상기 내부 공간 밖으로 유출시키는 유출부와, 상기 포집부에 연결되어 포집된 상기 특정 성분이 포함된 유체를 상기 내부 공간 밖으로 배출시키는 배출부를 포함하고,A collection unit that forms an internal space and collects a specific component from the target fluid entering the internal space, an inlet unit connected to the collection unit and allowing the target fluid to flow into the internal space, and a collection unit connected to the collection unit to collect the target fluid. a processing fluid supply unit that supplies a processing fluid for collecting the specific component from the fluid into the internal space; an outlet unit connected to the collection unit to discharge the target fluid processed in the internal space out of the internal space; It includes a discharge unit connected to the collection unit to discharge the collected fluid containing the specific component out of the internal space,
    상기 포집부는, 상기 내부 공간을 형성하는 하우징부와, 포집 효율을 높이는 유체의 와류가 발생하도록 상기 내부 공간을 구획하는 구획부를 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The collection unit is characterized in that it includes a housing part that forms the internal space, and a partition part that divides the internal space to generate a vortex of fluid that increases collection efficiency. A collection device that improves collection efficiency using a vortex of fluid. .
  2. 제1항에 있어서,According to paragraph 1,
    상기 구획부는, 상기 내부 공간의 일 유로를 서로 다른 유로 폭을 가지는 복수의 유로로 구분시켜 구분된 유로 간 유속의 차이에 의해 유체의 와류를 발생시키는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The partition unit divides one flow path of the internal space into a plurality of flow paths having different flow path widths and generates a vortex of the fluid due to the difference in flow velocity between the divided flow paths. Collection efficiency using the vortex of the fluid A collection device that increases .
  3. 제2항에 있어서,According to paragraph 2,
    상기 구획부는, 상기 유출부 측으로 상승하는 방향의 유선(Streamline)과 나란하게 형성되는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.A collection device that improves collection efficiency using vortices of fluid, wherein the partition portion is formed parallel to a streamline in an upward direction toward the outlet.
  4. 제3항에 있어서,According to paragraph 3,
    상기 구획부는, 하우징부의 측면 내주면으로부터 일정 거리만큼 이격된 위치에 형성되며, 구획부에 의해 구분된 유로 중 상기 하우징부의 측면 내주면과 형성하는 유로 폭을 상대적으로 좁게 형성시켜, 상기 하우징부의 측면 내주면과 상기 구획부가 형성하는 유로에서 가장 빠른 유속이 발생하도록 하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The partition portion is formed at a position spaced apart from the side inner peripheral surface of the housing by a predetermined distance, and among the flow paths divided by the partition portion, the width of the flow path formed by the side inner peripheral surface of the housing portion is formed to be relatively narrow, so that the width of the flow path formed by the side inner peripheral surface of the housing portion is relatively narrow, A collection device that increases collection efficiency using vortices of fluid, characterized in that the fastest flow rate occurs in the flow path formed by the partition.
  5. 제1항에 있어서,According to paragraph 1,
    상기 포집부는, 상기 구획부의 상측에 위치하여 상기 구획부의 안내에 따라 상승하는 유체의 흐름을 제한하는 형상으로 형성된 제1날개부를 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The collection unit is located on the upper side of the partition and includes a first wing formed in a shape to restrict the flow of fluid rising according to the guidance of the partition, a collection device that improves collection efficiency using a vortex of fluid. .
  6. 제5항에 있어서,According to clause 5,
    상기 제1날개부는, 일단은 하우징부의 측면 내주면에 결합되고, 타단은 자유단을 형성하며, 하측 방향으로 경사지게 형성되는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The first wing part is characterized in that one end is coupled to the inner peripheral surface of the side of the housing, the other end forms a free end, and is inclined in a downward direction. A collection device that improves collection efficiency using a vortex of fluid.
  7. 제6항에 있어서,According to clause 6,
    상기 포집부는, 자유단을 형성하는 상기 제1날개부의 타단으로부터 하측 방향으로 연장 형성되는 제1연장부를 추가로 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The collection unit is characterized in that it further includes a first extension part extending downward from the other end of the first wing forming the free end. A collection device that improves collection efficiency using a vortex of fluid.
  8. 제1항에 있어서,According to paragraph 1,
    상기 포집부는, 상기 유입부의 상측에 위치하여 상기 유입부로부터 상승하는 유체의 흐름을 제한하는 형상으로 형성된 제2날개부를 포함하고,The collection unit includes second wings located above the inlet and formed in a shape to restrict the flow of fluid rising from the inlet,
    상기 제2날개부는, 일단은 하우징부의 측면 내주면에 결합되고, 타단은 자유단을 형성하며, 하측 방향으로 경사지게 형성되는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The second wing portion is characterized in that one end is coupled to the inner peripheral surface of the side of the housing portion, the other end forms a free end, and is inclined downward. A collection device that improves collection efficiency using vortices of fluid.
  9. 제8항에 있어서,According to clause 8,
    상기 포집부는, 자유단을 형성하는 상기 제2날개부의 타단으로부터 하측 방향으로 연장 형성되는 제2연장부를 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.A collection device that improves collection efficiency using a vortex of fluid, wherein the collection unit includes a second extension part extending downward from the other end of the second wing forming the free end.
  10. 제8항에 있어서,According to clause 8,
    상기 처리유체공급부는, 상기 제2날개부를 따라 하측 방향으로 경사지게 형성되며,The processing fluid supply unit is formed to be inclined downward along the second wing,
    상기 처리 유체가 저장되는 수용 공간을 형성하는 저장부와, 상기 수용 공간에 저장된 상기 처리 유체가 상기 내부 공간으로 낙하되도록 상기 저장부에 관통 형성된 구멍인 관통홀을 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.Characterized in that it includes a storage portion forming an accommodating space in which the processing fluid is stored, and a through hole that is a hole formed through the storage portion so that the processing fluid stored in the accommodating space falls into the internal space. A collection device that uses eddy currents to increase collection efficiency.
  11. 내부 공간을 형성하며 상기 내부 공간에 들어온 대상 유체에서 특정 성분을 포집하는 포집부와, 상기 포집부에 연결되어 상기 내부 공간으로 상기 대상 유체를 유입시키는 유입부와, 상기 포집부에 연결되어 상기 대상 유체에서 상기 특정 성분을 포집하기 위한 처리 유체를 상기 내부 공간으로 공급하는 처리유체공급부와, 상기 포집부에 연결되어 상기 내부 공간 내에서 처리된 대상 유체를 상기 내부 공간 밖으로 유출시키는 유출부와, 상기 포집부에 연결되어 포집된 상기 특정 성분이 포함된 유체를 상기 내부 공간 밖으로 배출시키는 배출부를 포함하고,A collection unit that forms an internal space and collects a specific component from the target fluid entering the internal space, an inlet unit connected to the collection unit and allowing the target fluid to flow into the internal space, and a collection unit connected to the collection unit to collect the target fluid. a processing fluid supply unit that supplies a processing fluid for collecting the specific component from the fluid into the internal space; an outlet unit connected to the collection unit to discharge the target fluid processed in the internal space out of the internal space; It includes a discharge unit connected to the collection unit to discharge the collected fluid containing the specific component out of the internal space,
    상기 포집부는, 상기 내부 공간을 형성하는 하우징부와, 포집 효율을 높이는 유체의 와류가 발생하도록 상기 내부 공간에 추가 공간을 형성하는 추가부를 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The collection unit includes a housing part that forms the internal space, and an additional part that forms an additional space in the internal space to generate a vortex of fluid that increases collection efficiency. height collection device.
  12. 제11항에 있어서,According to clause 11,
    상기 추가부는, 상기 유출부가 형성된 포집부의 일면 상에 상기 유출부와 나란하게 형성되어, 상기 유출부를 통해 유체가 빠져나가기 전의 내부 공간에 유체의 와류를 발생시키는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The additional part is formed parallel to the outlet on one surface of the collection part where the outlet is formed, and generates a vortex of the fluid in the internal space before the fluid escapes through the outlet, using the vortex of the fluid. A collection device that improves collection efficiency.
  13. 제11항에 있어서,According to clause 11,
    상기 추가부는, 상기 내부 공간과 연통되는 추가 공간을 형성하며 일면과 타면이 개방된 통형의 바디부와, 상기 바디부의 개방된 일면을 개폐할 수 있도록 상기 바디부에 분리 가능하게 결합되는 캡부를 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The additional part includes a cylindrical body part that forms an additional space in communication with the internal space and is open on one side and the other side, and a cap part detachably coupled to the body part to open and close the open side of the body part. A collection device that improves collection efficiency using vortices of fluid.
  14. 제13항에 있어서,According to clause 13,
    상기 추가부는, 상기 바디부에 상기 캡부를 고정시키는 고정부를 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The additional part is a collection device that improves collection efficiency using a vortex of fluid, characterized in that it includes a fixing part for fixing the cap part to the body part.
  15. 제14항에 있어서,According to clause 14,
    상기 고정부는, 상기 바디부를 파지하는 형상으로 형성되며 일면에서 타면을 관통하는 제1고정홀을 포함하는 제1고정몸체와, 상기 캡부를 파지하는 형상으로 형성되며 일면에서 타면을 관통하는 제2고정홀을 포함하는 제2고정몸체와, 상기 제1고정홀 및 상기 제2고정홀에 체결되어 상기 제1고정몸체와 상기 제2고정몸체를 결합시키는 체결수단을 포함하는 것을 특징으로 하는, 유체의 와류를 이용해 포집 효율을 높이는 포집 장치.The fixing part includes a first fixing body formed in a shape to hold the body part and including a first fixing hole penetrating from one side to the other side, and a second fixing body formed in a shape to grip the cap part and penetrating from one side to the other side. Characterized in that it includes a second fixing body including a hole, and a fastening means fastened to the first fixing hole and the second fixing hole to couple the first fixing body and the second fixing body. A collection device that uses eddy currents to increase collection efficiency.
PCT/KR2022/019461 2022-09-02 2022-12-02 Collection device using fluid vortex to increase collection efficiency WO2024048856A1 (en)

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Citations (5)

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Publication number Priority date Publication date Assignee Title
KR19980074701A (en) * 1997-03-26 1998-11-05 윤종용 Motor Pump for Semiconductor Manufacturing
KR100682621B1 (en) * 2006-08-18 2007-02-16 신종수 Liquid collector
KR20090005367U (en) * 2007-11-30 2009-06-03 주식회사 케이씨텍 Heat treatment equipment for substrate
US20160281235A1 (en) * 2015-03-26 2016-09-29 SCREEN Holdings Co., Ltd. Substrate treating apparatus and treatment gas supplying nozzle
KR102346208B1 (en) * 2020-07-07 2022-01-03 신종수 Liquid Collecting Device with Improved Space Efficiency

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KR100432895B1 (en) 2001-12-20 2004-05-22 동부전자 주식회사 Powder trap device of a semiconductor manufacture equipment

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980074701A (en) * 1997-03-26 1998-11-05 윤종용 Motor Pump for Semiconductor Manufacturing
KR100682621B1 (en) * 2006-08-18 2007-02-16 신종수 Liquid collector
KR20090005367U (en) * 2007-11-30 2009-06-03 주식회사 케이씨텍 Heat treatment equipment for substrate
US20160281235A1 (en) * 2015-03-26 2016-09-29 SCREEN Holdings Co., Ltd. Substrate treating apparatus and treatment gas supplying nozzle
KR102346208B1 (en) * 2020-07-07 2022-01-03 신종수 Liquid Collecting Device with Improved Space Efficiency

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