KR101213150B1

KR101213150B1 - Apparatus for removing moisture

Info

Publication number: KR101213150B1
Application number: KR1020100119460A
Authority: KR
Inventors: 신종수
Original assignee: 신종수
Priority date: 2010-11-29
Filing date: 2010-11-29
Publication date: 2012-12-18
Also published as: WO2012074191A2; KR20120057902A; WO2012074191A3

Abstract

The present invention relates to a water removal device that separates and removes water from a fluid discharged by a scrubber to remove waste gas generated during semiconductor manufacturing, and more particularly, the water removal device is connected to a sieve standing upright in an exhaust pipe of the scrubber. An inlet pipe through which the fluid discharged from the scrubber is introduced; Located at the upper side of the scrubber, the water separation passage for separating the water from the fluid introduced through the inlet pipe; A water collecting tube connected to a lower surface of the water separator and draining the separated water to the outside; Is connected to the upper surface of the water separator, the discharge pipe for discharging the fluid from which the water is removed to the outside; The water separator is protruded from one side of the inner surface is extended in a predetermined direction in the opposite direction, the inlet pipe Including a contact plate which is inclined toward the end toward the end so as to have an intersection angle of the center line and the acute angle, to contact the fluid introduced through the inlet pipe to form a vortex; It is possible to effectively prevent the corrosion of the inlet pipe, and by maximizing the contact area with the incoming fluid is scattered to remove moisture that can effectively separate and remove not only the moisture in the liquid state but also the moisture in the form of the liquid sucked with the fluid To provide a device.

Description

Apparatus for removing moisture

In the semiconductor manufacturing process, various types of semiconductor gases used for forming thin films on wafers or for etching have oxidizing components, flammable components, and toxic components. Thus, semiconductor gases (hereinafter referred to as "waste gases") are used as they are. Emissions to the atmosphere are not only harmful to the human body but also cause environmental pollution. Therefore, a scrubber is installed in the exhaust line of the semiconductor equipment to remove the oxidized component, the flammable component, the toxic component of the waste gas and the like, and to discharge it to the atmosphere.

The scrubber is a device for discharging the purified fluid by treating the waste gas used during the semiconductor manufacturing process. The scrubber burns the waste gas by using an induction heating method in an indirect combustion wet type and filters the waste gas once more using water. The waste gas is collected by using a scrubber and water as a wet type, and the scrubber is purified by using a wet scrubber and a direct combustion wet type. There is a burn-wet scrubber and the like by using a collection method. Regardless of the type, the scrubber uses water in the process of treating waste gas, and since the used water contains many contaminants, the scrubber is discharged to the outside through a drain pipe by treating with a filter, etc., in the process of treating the waste gas of the scrubber. Some of the water used is not discharged through the drain pipe but is discharged to the outside with the liquid or gaseous purified liquid to corrode the pipe and reduce the purification effect of the waste gas. Therefore, a water removal device for removing water from the fluid purified from the scrubber is provided.

FIG. 1 is a perspective view schematically illustrating a coupling relationship between a scrubber and a conventional water removing device. Hereinafter, a conventional water removing device 3 will be described with reference to FIG. 1. An inlet pipe 31 is connected to the exhaust pipe 21 of the scrubber 2 so that the fluid discharged from the scrubber 2 flows into the water separator 32. The liquid or gaseous water is separated from the fluid introduced into the water separator 32 to be discharged through the water collecting pipe 33, and only the fluid from which the water is removed is discharged through the discharge pipe 34.

However, in the conventional water removal device 3, the fluid is introduced into one side and the fluid from which the water has been removed is discharged to the other side, so that the water removal device 3 is more efficient than the scrubber 2. Since it cannot be positioned without reduction, it must be disposed on the side of the scrubber 2, and thus, space cannot be effectively used, and there is a problem of impairing aesthetics. In addition, the scrubber (2) is the exhaust pipe 21 is located on the upper surface for efficiency, in order to connect the inlet pipe (31) to the water removal device (3) in which fluid is introduced to one side of the inlet pipe (31) Including the bent portion and the length is inevitably long, when the fluid passes through the inlet pipe 31 is subjected to a load and a large pressure drop occurs that the water contained in the fluid is stuck to the inlet pipe 31 and the inlet Pipe 31 is easily corroded, there is a problem that the cost is increased because many materials must be used. In addition, the moisture removal device 3 has a problem that the efficiency of the water can not be removed effectively in the gaseous state.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems,

The present invention provides a moisture removal device that can prevent the corrosion of the pipe generated when the fluid containing the corrosive water passes through the pipe by separating and discharging the corrosive water contained in the fluid treated in the scrubber. There is a purpose.

In addition, an object of the present invention is to provide a water removal device that can be located on the upper side of the scrubber, to minimize the space occupied by the water removal device to efficiently utilize the space and provide improved aesthetics.

In addition, since the present invention connects the lower surface of the scrubber and the water separator through an upright inlet pipe, there is no bent portion in the inlet pipe to minimize the pressure drop of the fluid passing through the inlet pipe to minimize corrosion of the inlet pipe. It is an object of the present invention to provide a water removal device that can effectively block and shorten the length of the inlet pipe to reduce the amount of material used.

In addition, an object of the present invention is to provide a moisture removal device that can effectively separate and remove not only the moisture in the liquid state but also the moisture in the liquid state scattered by the fluid by maximizing the contact area with the incoming fluid.

In addition, an object of the present invention is to provide a water removal device, characterized in that the water collecting tube includes a funnel having a truncated cone shape, it is possible to effectively discharge the water separated from the water separator to the outside.

In order to achieve the above object, the present invention is implemented by the following embodiments.

According to an embodiment of the present invention, the water removal device according to the present invention is a water removal device for separating and removing water from the fluid discharged from the scrubber, the water removal device is connected to the sieve upright to the exhaust pipe of the scrubber An inlet pipe through which the fluid discharged from the scrubber is introduced; Located at the upper side of the scrubber, the water separation passage for separating the water from the fluid introduced through the inlet pipe; A water collecting tube connected to a lower surface of the water separator and draining the separated water to the outside; Is connected to the upper surface of the water separator, the discharge pipe for discharging the fluid from which the water is removed to the outside; The water separator is protruded from one side of the inner surface is extended in a predetermined direction in the opposite direction, the inlet pipe Including a contact plate which is inclined toward the end toward the end so as to have an intersection angle of the center line and the acute angle, to contact the fluid introduced through the inlet pipe to form a vortex; It can be characterized in that it can effectively prevent the corrosion of the inlet pipe.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the water separator is connected to the end of the contact plate. It is characterized in that it further comprises a collector.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the water separator is located on the upper side of the collector and the contact plate and protrudes from the other side opposite to one side from which the contact plate protrudes. And a lower plate extending in a predetermined length in an opposite direction, and an upper plate positioned on an upper side of the lower plate and protruding from the other side facing the one side from which the lower plate protrudes. It is done.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the lower plate and the upper plate are characterized in that inclined downward toward the end respectively.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the water collecting tube includes one or more funnels having a truncated cone shape in which the diameter of the upper surface is larger than the diameter of the lower surface.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the collector is characterized in that it comprises at least one multi-faceted member therein.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the multi-faceted member is formed in a three-dimensional shape made of a net, and is characterized in that the area in which the fluid is contacted while passing therethrough is maximized.

According to another embodiment of the present invention, in the water removing apparatus according to the present invention, the bottom surface of the water separator is inclined downwardly extending from one side of the water separator and extending vertically downward from the end of the inclined surface. And a horizontal plane extending from the end of the vertical plane to another side opposite to the one side of the water separator that starts the inclined surface.

According to another embodiment of the present invention, in the water removal apparatus according to the present invention, the inlet pipe is in communication with the inclined surface, the water collection pipe is characterized in that in communication with the horizontal plane.

The present invention can obtain the following effects by the above-described embodiment, the constitution described below, the combination, and the use relationship.

According to the present invention, by separating and discharging corrosive water contained in the fluid treated in the scrubber, there is an effect of preventing corrosion of the pipe generated when the fluid containing the corrosive water passes through the pipe.

In addition, the present invention is to position the water separator in the upper side of the scrubber, there is an effect that can minimize the space occupied by the water removal device to efficiently utilize the space and provide improved aesthetics.

In addition, since the present invention connects the lower surface of the scrubber and the water separator through an upright inlet pipe, there is no bent portion in the inlet pipe to minimize the pressure drop of the fluid passing through the inlet pipe to minimize corrosion of the inlet pipe. It can effectively prevent, it is possible to shorten the length of the inlet pipe has the effect of reducing the amount of material used.

In addition, the present invention has the effect of effectively separating and removing not only the moisture in the liquid form but also the moisture in the liquid state scattered by the fluid by maximizing the contact area with the incoming fluid.

In addition, the present invention includes a funnel having a truncated cone shape of the water collecting tube, there is an effect that can effectively discharge the water separated from the water separator to the outside.

1 is a perspective view schematically showing a coupling relationship between a scrubber and a conventional water removal device.
Figure 2 is a perspective view of the water removal device according to an embodiment of the present invention.
3 is a cross-sectional view of the water removal device according to an embodiment of the present invention.
Figure 4 is a perspective view of a multi-faceted member included in the water removal device according to an embodiment of the present invention.
5 is a perspective view of a water collecting tube included in a water removing device according to an embodiment of the present invention.
Figure 6 is a perspective view schematically showing the coupling relationship between the scrubber and the water removal device according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, the water removal device according to the present invention will be described in detail. It should be noted that the same elements in the figures are represented by the same numerals wherever possible. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. Unless defined otherwise, all terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs and, if conflict with the meaning of the terms used herein, It follows the definition used in the specification.

2 is a perspective view of a water removal device according to an embodiment of the present invention, Figure 3 is a cross-sectional view of the water removal device according to an embodiment of the present invention, Figure 4 is a water removal device according to an embodiment of the present invention 5 is a perspective view of a multi-faceted member included in, Figure 5 is a perspective view of the water collecting tube included in the water removal device according to an embodiment of the present invention, Figure 6 is a scrubber and the water removal device according to an embodiment of the present invention A perspective view schematically showing a coupling relationship.

2 to 6, the water removal device according to an embodiment of the present invention will be described. The water removal device 1 is connected to an upright body in an exhaust pipe 21 of the scrubber 2 so that the scrubber 2 Inlet pipe 11 through which the fluid discharged from the inlet flows, and a water separator (12) located above the scrubber (2) to separate the water from the fluid introduced through the inlet pipe (11), and The water collecting pipe 13 connected to the bottom surface of the water separator 12 to drain the separated water to the outside, and the fluid is removed to the outside connected to the top surface of the water separator 12 Including a discharge pipe 14, it is possible to minimize the volume occupied by the water removal device 1 and characterized in that it can effectively prevent the corrosion of the inlet pipe (11).

The inlet pipe (11) is a pipe that is a passage for the flow of the fluid after the treatment process in the scrubber (2) to the water separator 12, one end is connected to the exhaust pipe (21) of the scrubber (2) The other end is connected to the bottom surface 121 of the water separator 12. The inlet pipe 11 uses an upright tube that is not bent, thereby preventing the fluid discharged from the scrubber 2 from being loaded while passing through the inlet pipe 11 and preventing a large pressure drop from occurring. Make sure

The water separator 12 is a three-dimensional cylinder that separates the water from the fluid flowing from the inlet pipe 11, the lower surface 121 is attached to the inlet pipe 11 and the water collecting pipe 13, the The upper surface 122 to which the discharge pipe 14 is attached, the front surface 123, the rear surface 124, the left surface 125a, the right surface 125b between the lower surface 121 and the upper surface 122 is defined. An inclined surface 1211 extending inclined downward from the right surface 125b, a vertical surface 1212 vertically extending downward from the distal end of the inclined surface 1211, and the left surface at the end of the vertical surface 1212. Including the horizontal surface 1213 leading to (125a), the left surface 125a may be formed in a trapezoidal shape having a larger area than the right surface 125b, the inclined surface 1211 is the inlet pipe 11 ) Is attached and the water collecting tube 13 is attached to the horizontal surface (1213). The inner surface of the water separator (12) is located on the upper side of the inlet pipe (11) protruding from the right side (125b) of the water separator (12) to extend a predetermined length in the direction of the left surface (125a) ( 126, a collector 127 connected to an end of the contact plate 126, and an upper side of the collector 127 and the contact plate 126 and protrude from the left side 125a and the right side ( A lower plate 128 extending a predetermined length in a direction 125b, and an upper plate 129 positioned above the lower plate 128 and protruding from the right surface 125b to extend a predetermined length in a direction toward the left surface 125a. Include. The water separator 12 is located on the upper side of the scrubber (2), it is to be connected to the scrubber (2) in the upright inlet pipe (11).

The contact plate 126 is positioned above the inlet pipe 11 and protrudes from the right side surface 125b and extends a predetermined length in the direction of the left side surface 125a and is inclined toward the bottom surface 121 toward the end thereof. As a member having a shape, it is preferable that the crossing angle α formed by the center line b of the inlet pipe 11 and the contact plate 126 has an acute angle. The contact plate 126 not only collides with the fluid introduced from the inlet pipe 11, but also guides the fluid toward the collector 127, and forms a vortex around it to form moisture contained in the fluid. To allow for easy separation.

The collector 127 is a part for separating water from the fluid flowing along the contact plate 126 and extends from the end of the contact plate 126 to the left side surface 125a. It is preferable to be formed in a mesh shape so that the fluid can pass therethrough, and according to an embodiment, two or more collectors 127 may be formed in a layer. One or more multifaceted members 1271 may be included in the collector 127 to increase an area in contact with the fluid passing therethrough.

The multifaceted member 1271 is a member included between the collector 127 in order to increase the contact area with the fluid passing through the collector 127, preferably formed in a three-dimensional shape made of a net. As the fluid passes through it, it is possible to maximize the area of contact. Referring to FIG. 4, the multifaceted member 1271 may be formed in a three-dimensional shape of a spherical shape in which an outer surface and an inside are formed in a net and the inside is not filled. Since the inner surface of the multi-faceted member 1271 passes through the inside of the outer surface and passes through the outer surface of the multi-faceted member 1271, the contact area increases accordingly, and the pressure and speed decrease so that the moisture contained in the fluid becomes the multi-faceted member 1271 to It is formed in the collecting body 127 and when it condenses, it falls freely and collects in the moisture collecting tube 13.

The lower plate 128 is positioned above the collector 127 and the contact plate 126 and protrudes from the left side 125a to extend a predetermined length in the direction of the right side 125b and toward the end 121. A plate-shaped member inclined in the direction, the lower plate 128 is in contact with the fluid passing through the collector 127. The fluid passing through the collector 127 hits the lower plate 128 and is directed toward the first separation gap h1 formed between the right side surface 125b and the lower plate 128 to generate a vortex and generate pressure. There is a loss of speed.

The upper plate 129 is positioned above the lower plate 128 and protrudes from the right side surface 125b to extend a predetermined length in the direction of the left side surface 125a and inclined toward the bottom surface 121 toward the end thereof. With the member, it is encountered with the fluid introduced through the first spacing (h1). The fluid introduced from the first spacing h1 is vortexed while facing the top plate 129 and directed toward the second spacing gap h2 formed between the left surface 125a and the top plate 129. And loss of pressure and speed occur. The principle of removing the water contained in the fluid flowing into the water separator 12 will be described in detail below.

The water collecting tube 13 is fixed to the horizontal surface 1213 of the lower surface 121 of the water separator 12, the contact plate 126, the collector 127, the lower plate 128, the upper plate 129 It is a member for discharging the free-falling water separated by) and the like to the outside, although not shown, the end is connected to the drain pipe of the scrubber (2). The moisture collecting tube 13 may include a body 131, a diaphragm 132, and one or more funnels 133.

The body 131 is generally cylindrical as a tube having a hollow formed therein, which is attached to a horizontal surface 1213 of the lower surface 121 of the water separator 12 and extends a predetermined length downward.

The diaphragm 132 is installed to partition up and down at a predetermined position of the body 131 and includes one or more through holes 1321 so that the funnel 133 may be fixed.

The funnel 133 is a truncated cone-shaped tube is fixedly located in the through-hole 1321, the upper surface 1331 has a larger cross-sectional area than the lower surface 1332. According to the continuous equation in the basic equation of fluid dynamics, since the product of the cross-sectional area and the velocity is constant, the velocity of the lower surface 1332 having a diameter smaller than the upper surface 1331 is larger than the upper surface 1331. In addition, the Bernoulli equation causes the upper surface 1331 to be slower than the lower surface 1332, so the pressure is higher than the upper surface 1331 to the lower surface 1332, and the funnel 133 because the fluid flows from the high pressure to the low pressure. ), The liquid can be easily discharged to the outside by the pressure difference.

The discharge pipe 14 is fixed to the upper surface 122 of the water separator 12 is a tube that is a passage for discharging the separated fluid to the outside, one end of the water separator 12 It is connected to the upper surface 122 and the other end is connected to the pipe (not shown).

The water removal device 1 according to the present invention is to position the water separator 12 in the upper side of the scrubber (2), to minimize the space occupied by the water removal device (1) to effectively utilize the space and improved Aesthetic appearance can be provided, and since the scrubber 2 and the lower surface 121 of the water separator 12 are connected through an upright inflow pipe 11, the inflow pipe 11 has no bent portion. The load of the fluid passing through the inlet pipe 11 is made small and the pressure drop can be minimized to effectively prevent corrosion of the inlet pipe 11, and the length of the inlet pipe 11 can be shortened. There is a characteristic that can reduce the amount of use.

In the water removal device 1 having the above configuration, the principle of removing water contained in the fluid discharged from the scrubber 2 will be described with reference to FIGS. 2 to 6, the exhaust pipe of the scrubber 2. The fluid discharged through the 21 is introduced into the water separator 12 through the inlet pipe 11 and hit the contact plate 126 and then passes through the collector 127. As it strikes the contact plate 126, vortices occur and pressure and speed decrease. The fluid is vortexed and hits the contact plate 126 several times, resulting in a large contact area, and a decrease in pressure and speed resulting in a long contact time with the contact plate 126. A part of is formed on the contact plate 126 and is driven down the contact plate 126 by gravity to be collected in the moisture collecting tube 13 to be discharged to the outside.

Since the smoke flowing into the collector 127 passes through the mesh of the outer surface of the multifaceted member 1271 and passes through the mesh of the outer surface again, the area of contact is increased and the pressure and speed decrease. Moisture contained in the multi-faceted member 1271 or the collector 127 is formed and when this is agglomerated free fall and collect in the moisture collecting tube 13 is discharged to the outside.

The fluid passing through the collector 127 is discharged through the first spacing h1 after hitting the lower plate 128. As the fluid strikes the lower plate 128, vortex occurs and pressure and speed Will decrease. The fluid is vortexed and hits the bottom plate 128 several times, resulting in a large contact area, and a decrease in pressure and speed resulting in a long time of contact with the bottom plate 128, whereby a small size contained in the fluid Moisture is formed in the lower plate 128 and falls down by gravity and flows down the upper surface of the contact plate 126, passes through the collector 127, and is collected in the moisture collecting tube 13 to be discharged to the outside. .

The fluid passing through the first spacing h1 is discharged through the second spacing h2 after striking the top plate 129. Vortex is generated while the fluid strikes the top plate 129. Pressure and speed will decrease. The fluid is vortexed and hits the top plate 129 several times, resulting in a large contact area, and a decrease in pressure and speed resulting in a long contact time with the top plate 129. Moisture of a small size is formed in the upper portion and gathered in the water collecting tube 13 through the upper surface of the lower plate 128, the upper surface of the contact plate 126, the collector 127 in order to the lower side by gravity. Will be discharged. The fluid passing through the second spacing h2 is discharged to the outside through the discharge pipe 14. The fluid introduced into the water separator 12 passes through the contact plate 126, the collecting network, the lower plate 128, and the upper plate 129 in turn, as well as the liquid state of the liquid state contained in the fluid as well as the gaseous state. Effectively removes moisture.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Should be interpreted as belonging to the scope.

1: water removal device 11: inlet pipe 12: water separator
13: water collection pipe 14: discharge pipe 121: lower surface
122: top 123: front 124: back
125a: Left side 125b: Right side 126: Contact plate
127: collector 128: bottom plate 129: top plate
131: body 132: plate 133: funnel
1211: slope 1212: vertical plane 1213: horizontal plane
1271: faceted member 1321: through hole 1331: upper surface
1332:

Claims

A water separation passage located above the scrubber to separate water from the introduced fluid; An inlet pipe having one end connected to a sieve standing upright at a bottom surface of the water separation tube at the other end of the exhaust pipe of the scrubber; A water collection pipe spaced apart from the inflow pipe by a predetermined distance and connected to a lower surface of the water separation tube to drain the separated water to the outside; And a discharge pipe connected to an upper surface of the water separator and discharging the fluid from which water is removed to the outside.
The water separator is protruded from one side of the inner side is formed to extend a predetermined length in the opposite side of the inner side is located on the upper side of the inlet pipe, the lower direction toward the end to have a cross angle of the center line and the acute angle of the inlet pipe A contact plate which is inclined toward the surface; A collector formed extending from the end of the contact plate to the other side of the inner surface and allowing all of the fluid introduced into the water separator to pass therethrough; A lower plate positioned above the collector and the contact plate and protruding from the other side of the inner surface to extend a predetermined length in one direction of the inner surface; Located on the upper side of the lower plate, the upper plate protruding from one side of the inner surface extending a predetermined length in the other side of the inner surface;
The lower plate and the upper plate are inclined downward toward the end, respectively,
The fluid introduced into the water separator through the inlet pipe is moved to the upper side through the collector after hitting the contact plate, the fluid passing through the collector hit the lower plate through the first spacing The fluid moving upwards, and the fluid passing through the first spacing gap hits the upper plate and then moves upward through the second spacing gap to reach the discharge pipe.

delete

The method of claim 1,
The water collecting pipe is a water removal device, characterized in that the diameter of the upper surface includes one or more funnels of truncated cone shape larger than the diameter of the lower surface.

The method of claim 1,
And said collector comprises at least one multi-faceted member therein.

The method of claim 6, wherein the multi-faceted member
It is formed in a three-dimensional shape consisting of a net water removal device, characterized in that to maximize the area that the fluid is in contact with the passage.

The method of claim 1,
A bottom surface of the water separator is an inclined surface extending inclined downward from one side of the water separator, a vertical surface extending vertically from the end of the inclined surface to the bottom, and the water separator can start the inclined surface at the end of the vertical surface Water removal device comprising a horizontal plane leading to the other side opposite to one side of the.

9. The method of claim 8,
The inlet pipe is in communication with the inclined surface,
The water collecting pipe is characterized in that in communication with the horizontal plane water removal apparatus.