CN101126482A - Liquid collector - Google Patents
Liquid collector Download PDFInfo
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- CN101126482A CN101126482A CNA200710142509XA CN200710142509A CN101126482A CN 101126482 A CN101126482 A CN 101126482A CN A200710142509X A CNA200710142509X A CN A200710142509XA CN 200710142509 A CN200710142509 A CN 200710142509A CN 101126482 A CN101126482 A CN 101126482A
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- fluid
- inlet tube
- fluid collection
- upper flange
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
Abstract
The invention relates to a liquid collecting device, especially a liquid collecting device for separating the liquid generated in a wet working station of semiconductor production line into liquid and gas and discharging. The said device comprises: an inlet tube, wherein one end thereof is mounted on a gas tube of the wet working station and the other end thereof is mounted on a collector drum; a collector drum for collecting splashing liquid component in gas flowing through the said inlet tube; a liquid header mounted at the undersurface of the said collector drum and for discharging the collected liquid component into outside; and an exhaust tube at the opposite direction of the said inlet tube and mounted on the collector drum. The said collector drum is composed of an upper flange mounted on the upside of the said inlet tube and extending to a certain diameter area of the said inlet tube and lower flange separated with the said top flange.
Description
Technical field
The present invention relates to a kind of fluid collection device, especially so a kind of fluid collection device, it does not directly discharge the fluid that wet type work station (wet station) is generated, but it is separated into liquid and gas, thereby when the gas stream that comprises the liquid that splashes is crossed pipeline, prevent to flow because of corroding the pipeline and the overslaugh of getting rusty.
In general, in semiconductor fabrication, for being grown up, film carries out evaporation on semiconductor wafer, then in order on the film after the growth, to form needed pattern, carry out following a series of pattern treating process: at first be coated with photoactive substance, make photoactive substance exposure after the coating by patterned mask, use chemicals to carry out etching afterwards and remove remaining photoactive substance, thereby form needed pattern.Above-mentioned pattern treating process is in the post-treatment procedures such as cleaning that need to remove impurity on the wafer after the etching, and above-mentioned washing process is carried out at the wet type work station, and uses the gas of harmful human body and chemical substance etc. in said process.After cleaning finished, the liquid in the wet type work station discharged by liquid line, and gas then discharges by gas piping, at this moment, liquid splash in the wafer cleaning process, the above-mentioned liquid that splashes then mixes with gas, discharges together by gas piping.When liquid phase fluid contains moisture, during especially highly acid chemical substance, interior wall and the connecting tube and the connecting part etc. of corrosion main exhaust, it is got rusty, thereby not only hinder flowing of fluid, also become the pollution sources that pollute dust free room, and need to change continually or the maintenance pipeline.
As shown in Figure 1, existing vent systems is the tubulose that can be discharged into gases such as chemical substance from the wet type workstation1 main exhaust 57, the rondelle exhaust screen 51 that flows that just is used for control gaseous is installed changeably in cylindrical baffle shell (damperhousing) 53 inside of complications, one end of above-mentioned baffle plate shell 53 is connected to the wet type workstation1, the other end is connected on the main exhaust 57 by connecting tube 55, thereby can will be discharged to main exhaust 57 by the gas that the wet type workstation1 generates by connecting tube 55; Main exhaust 57 extends to the outside of the dust free room that is provided with semiconductor production line, thereby can all be discharged into the dust free room outside to the gas that the wet type workstation1 emits.Carry out in the semiconductor production equipment of wet processed as the wet type work station with wafer to the semiconductor manufacturing, only the gas componant in the various chemical substances that are applicable to device interior is discharged into the outside, the liquid phase chemical material after the use etc. are then in the inner removing of wet type work station; Yet, the releasing system of above-mentioned existing semiconductor production line will discharge the liquid phase chemical material that splashes simultaneously when discharging gas chemistry material, therefore, because above-mentioned fluid, phenomenon occurs getting rusty at the positions such as other joints of main exhaust 57, connecting tube 55 and main exhaust 57 and connecting tube 55, and corrosion outlet pipe inside, thereby not only make the impaired of pipeline, but also need change pipeline continually.
Summary of the invention
In order to address the above problem, the object of the present invention is to provide a kind of fluid collection device, the aforesaid liquid gathering-device does not directly discharge the fluid that the wet type work station is generated, but the chemical substances such as Chemicals that are included in the liquid that splashes are separated, thereby when the gas that comprises the liquid that splashes passes through pipeline, prevent to hinder mobile phenomenon, prevent the liquid corrosion pipeline because of getting rusty.
In order to realize aforementioned purpose, fluid collection device has following array structure.
According to one embodiment of the invention, fluid collection device according to the present invention comprises: inlet tube, one end are installed on the gas pipeline of wet type work station, and the other end then is installed on the surge drum; Surge drum is used for collecting the liquid constituent that splashes through the gas of above-mentioned inlet tube inflow; Fluid collection tube is positioned at the lower surface of above-mentioned surge drum, and the liquid constituent discharging (drain) that is used for collecting is to outside; And outlet pipe, be installed on the above-mentioned surge drum in the opposite direction of above-mentioned inlet tube, wherein, above-mentioned surge drum also comprises: upper flange is installed in the top of above-mentioned inlet tube, and extends to certain diameter region of above-mentioned inlet tube; And lower wing plate, be spaced a distance with above-mentioned upper flange.
According to another embodiment of the present invention, have stero shape according to the above-mentioned surge drum of fluid collection device of the present invention, this stero shape comprises: the front is equipped with above-mentioned inlet tube; The back side is equipped with above-mentioned outlet pipe; And upper surface, bi-side and lower surface, respectively around the above-mentioned front and the back side.
According to another embodiment of the present invention, the above-mentioned lower surface that relates to fluid collection device of the present invention comprises: the plane of inclination, from above-mentioned face down diagonally extending; Junction surface, outstanding down at an end of above-mentioned plane of inclination; And horizontal plane, from an end horizontal-extending of above-mentioned junction surface and be connected to the other end at the above-mentioned back side.
According to another embodiment of the present invention, form waveform shape according to the above-mentioned upper flange of fluid collection device of the present invention, to increase the area of contact between itself and the fluid.
According to another embodiment of the present invention, form waveform shape according to the above-mentioned lower wing plate of fluid collection device of the present invention, to increase the area of contact between itself and the fluid.
According to another embodiment of the present invention, also comprise the aggegation parts according to the above-mentioned upper flange of fluid collection device of the present invention, be positioned at the tail end of above-mentioned upper flange and contain a plurality of spaces.
According to another embodiment of the present invention, on left side substantially horizontal and downside Vertical direction, keep at a certain distance away with the other end of upper flange according to an end of the above-mentioned lower wing plate of fluid collection device of the present invention; The other end then keeps at a certain distance away with above-mentioned lower surface.
According to another embodiment of the present invention, also comprise the funnel of more than one frusto-conical according to the aforesaid liquid collecting pipe of fluid collection device of the present invention.
Because the present invention has above-mentioned structure and marriage relation, so can realize following effect.
At because the fluid that generates at the wet type work station contains chemical substances such as Chemicals, so this fluid is during along exhaust pipe flow, make pipeline or joint get rusty, not only hinder fluid to flow, but also need change pipeline continually, the fluid breakdown that fluid collection device of the present invention generates the wet type work station becomes to splash and discharges behind liquid and the gas, has not only prevented the corrosion of pipe phenomenon, can also reduce pollution.
Description of drawings
Fig. 1 is the stereogram that is used to discharge the outlet pipe of effulent in the existing wet type work station;
Fig. 2 is the stereogram according to fluid collection device of the present invention;
Fig. 3 is the sectional view according to the fluid collection device of the flowing state of effulent of the present invention; And
Fig. 4 is the stereogram according to the fluid collection tube of fluid collection device of the present invention.
Embodiment
Below, with reference to accompanying drawing the preferred embodiment according to fluid collection device of the present invention is further specified.
Fig. 2 is the stereogram according to fluid collection device of the present invention; Fig. 3 is the sectional view that the fluid collection device that relates to exhaust flows state of the present invention is shown.
Above-mentioned inlet tube 31 flows into the fluid that generates and exports above-mentioned surge drum 33 in the wet type workstation1, an end of above-mentioned inlet tube 31 is fixed on a side of above-mentioned wet type workstation1, and the other end then is fixed on the front 332 of above-mentioned surge drum 33.
Above-mentioned surge drum 33 is tubes of a stero shape, is used for collecting liquid from the fluid that inlet tube 31 flows into, and comprising: front 332 is equipped with inlet tube; The back side 335 is equipped with outlet pipe 37; And upper surface 337, bi-side 336 and lower surface 334, respectively around above-mentioned positive 332 with the back side 335.Above-mentioned lower surface 334 comprises: plane of inclination 334a, from above-mentioned positive 332 diagonally extendings down; Junction surface 334b, outstanding down at the end of above-mentioned plane of inclination 334a; And horizontal plane 334c, from the end horizontal-extending of above-mentioned junction surface 334b and be connected to the other end at the above-mentioned back side 335, above-mentioned surge drum be shaped as above-mentioned positive 332 areas trapezoidal less than the back side 335 areas, its inboard comprises upper flange 331 and lower wing plate 333.
Above-mentioned upper flange 331 is plate-shaped members, one end 331a is installed in above-mentioned positive 332 upper side edge 332a, its the other end 331b extends to the certain diameter region that is installed in above-mentioned positive 332 inlet tube 31 toward the direction of lower surface 334, thereby make the above-mentioned upper flange 331 of a part (A direction fluid) collision of the fluid that flows out by above-mentioned inlet tube 31, a part of then under the situation of not colliding above-mentioned upper flange 331, pass through, and also glibly fluid is guided into lower surface 334 smoothly for the above-mentioned upper flange 331 of best assurance and from the area of contact between the fluid of inlet tube 31 inflows, preferred above-mentioned upper flange 331 has waveform shape.Therefore, the fluid that flows into from above-mentioned inlet tube 31 bumps against above-mentioned upper flange 331, thereby turns to lower surface 334 directions, has reduced its pressure and speed, and above-mentioned upper flange 331 comprises aggegation parts 331d.
Above-mentioned aggegation parts 331d is positioned at the tail end of above-mentioned upper flange 331 and comprises a plurality of spaces, above-mentioned space is connected to each other the back and forms reticular structure, it has high liquid absorptivity and enters between the space to impel liquid, the liquid that condenses on the above-mentioned upper flange 331 flows along above-mentioned upper flange 331, thereby is absorbed in the liquid among the above-mentioned aggegation parts 331d.The liquid that is absorbed in above-mentioned aggegation parts 331d will be gathered into the liquid pearl gradually, and freely fall aforesaid liquid collecting pipe 35 along with the increase of load.So long as have the material in a plurality of spaces, just can be used as above-mentioned aggegation parts 331d, the sponge that can absorb liquid is the preferred embodiment of above-mentioned aggegation parts 331d.
Above-mentioned lower wing plate 333 is plate-shaped members, one end 333a is positioned at the position from the other end 331b of above-mentioned upper flange 331 along horizontal interval, left side a and perpendicular separation b, and extend towards lower surface 334 directions, its the other end 333b then keeps at a certain distance away with above-mentioned lower surface 334, and successfully fluid is guided into above-mentioned lower surface 334 in the time of for the area of contact between the fluid that farthest guarantees above-mentioned lower wing plate 333 and flow into, preferably, above-mentioned lower wing plate 333 has waveform shape.Therefore, the part of the C direction fluid that flows into from above-mentioned inlet tube 31 is not only collided above-mentioned lower wing plate 333, can also play the effect of the fluid that guiding flows along above-mentioned upper flange 331, and around it, form eddy current, and then collect the liquid in the fluid easily.
As shown in Figure 3, preferably will be set at: make the A direction fluid that flows along above-mentioned upper flange 331 successfully flow to above-mentioned lower wing plate 333 apart from a, and can before flowing to lower wing plate 333, be minimized by the flow of B direction fluid removal at above-mentioned A direction fluid, and can be with the maximization of the collision strength of A direction fluid and above-mentioned lower wing plate 333, above-mentioned B direction fluid refers to the mode of not colliding above-mentioned upper flange 331 and lower wing plate 333 outlet pipe 37 of flowing through; Distance b is the above-mentioned inlet tube 31 and directly flow to the distance that the B direction fluid of outlet pipe 37 passes through in the mode of not colliding above-mentioned upper flange 331 and lower wing plate 333 of flowing through, B direction fluid is flow through betwixt, thereby cause the pressure and the speed difference of D direction fluid and produce eddy current, and then improve the liquid collecting efficiency.
Fig. 4 is the stereogram according to the fluid collection tube 35 of fluid collection device 3 of the present invention.
As shown in Figures 3 and 4, aforesaid liquid collecting pipe 35 is fixed on the horizontal plane 334c of above-mentioned surge drum 33, be used for and will separate the free-falling fluid discharge in back to outside by above-mentioned upper flange 331 and lower wing plate 333, aforesaid liquid collecting pipe 35 comprises hollow tube 355, more than one funnel 351 and dividing plate 353.
Above-mentioned hollow tube 355 is installed in the lower surface of above-mentioned surge drum 33, is a hollow type pipe that extends certain-length down, preferably, is generally cylindric.
Above-mentioned funnel 351 is pipes of frusto-conical and is fixed on the above-mentioned through hole 353a that section area of S1 is greater than the section area of bottom surface S2 above it.According to the continuity equation in the fluid mechanics fundamental equation, the product of section area and speed is fixed, so section area is less than the speed of the bottom surface S2 of the top S1 speed greater than top S1.And according to bernoulli's equation, above the speed of S1 less than bottom surface S2, therefore above the pressure of S1 greater than the pressure of bottom surface S2.Fluid has from the character of high-pressure spray to low pressure, and therefore, the liquid that accumulates in above-mentioned funnel 351 is owing to the influence of pressure difference is discharged into the outside.
Above-mentioned outlet pipe 37 is fixed on the above-mentioned back side 335, the gas that flows into from above-mentioned inlet tube 31 and above-mentioned surge drum 33 in the gas behind the collection liquid will be discharged into the outside by above-mentioned outlet pipe 37.
Fig. 3 is the sectional view that the fluid collection device of another fluid flow state of the present invention is shown.
Below with reference to the process of Fig. 3 explanation by fluid flow collection liquid.To form three kinds of circulation paths and pass through above-mentioned outlet pipe 37 discharges by the gas in the fluid of inlet tube 31 inflows, in said process, condensing in above-mentioned upper flange 331 will be by 35 discharge of aforesaid liquid collecting pipe with the liquid on the lower wing plate 333.Below at forming three kinds of circulation paths and comprising that the gas flow of the liquid that splashes further specifies.
Pressure and speed reduced when first, the fluid of A direction collided above-mentioned upper flange 331.At this moment, part liquid will condense on the above-mentioned upper flange 331, the liquid that condenses on the above-mentioned upper flange 331 flows and is absorbed by aggegation parts 331d along above-mentioned upper flange 331, be absorbed in liquid among the above-mentioned aggegation parts 331d by aggegation, and down freely fall along with the increase of load, and gather horizontal plane 334c along plane of inclination 334a.And an other part that collides the fluid of above-mentioned upper flange 331 then flows along the circulation path of above-mentioned upper flange 331 regulations, (that is, flowing along B direction described later or D direction circulation path).
The second, will after flowing between above-mentioned upper flange 331 and the lower wing plate 333, directly enter outlet pipe 37 to the fluid that the B direction flows.Above-mentioned fluid is along with the minimizing of friction, the narrow down speed and the pressure increase of circulation path.
Three, the fluid that flows to the C direction collides above-mentioned lower wing plate 333 and reduces its pressure and speed, then with above-mentioned A direction fluid in the fluid that moves along the circulation path of above-mentioned upper flange 331 converge, flow along above-mentioned lower wing plate 333 again, thereby form D direction fluid.
Therefore, behind the A direction fluid collision upper flange 331, liquid in the fluid will flow also along upper flange 331, and aggegation freely falls behind the aggegation parts down, flow and flow into lower wing plate 333 along the wavy surface of above-mentioned upper flange 331 then, mixes with fluid that the C direction flows into and mobile along above-mentioned lower wing plate 333.In addition, owing to formed span b between above-mentioned upper flange 331 and the lower wing plate 333, so B direction fluid will run through above-mentioned interval, will sneak into wherein along the part of the A direction fluid that above-mentioned upper flange 331 flows this moment.
Fluid along A direction and the inflow of C direction collides above-mentioned upper flange 331 and lower wing plate 333, thereby liquid constituent is collected, and in striking process, form eddy current and liquid constituent is freely fallen or condense in respectively on the wing plate, thereby further improved the collecting efficiency of liquid constituent.The liquid that freely falls or gather on the horizontal plane 334c along wing plate will flow to the outside along aforesaid liquid collecting pipe 35.Here, aforesaid liquid collecting pipe 35 comprises funnel and works that therefore according to aforesaid fluid continuity equation and Bernoulli's therem, the liquid of collection is discharged into the outside easily along with pressure difference as nozzle.
To the experimental example of present embodiment be described below.
Experimental condition
As the experimental facilities of above-mentioned experiment, in the inlet tube side sprayer is installed, the IND46360 pressure gauge of Dwyer Instrument Inc. (USA) is installed respectively on inlet tube and outlet pipe in order to press in measuring; For the fluid forced discharge in the wet type work station is installed the GS83 pump of NILFISK (Denmark) in the outlet pipe side to the outside.And, diameter is that 20mm, bottom surface diameter are 4 funnels of 3mm above being equipped with on the fluid collection tube of the outlet pipe of the inlet tube of diameter 100mm, diameter 100mm and diameter 50mm, be supplied to inlet tube after using sprayer to make the moisture particle artificially, measure the amount of liquid of discharging then to the fluid collection tube inner funnel.In addition, change the pumping pressure of pump, measure the moisture collection rate behind the pressure of change inlet tube as shown in the table and outlet pipe side.The interior pressure here refers to negative pressure (minus pressure).And negative pressure shape become 20～40 column that are similar to the pressure in the actual wet type work station.
Experimental result
Following table is the experimental result of above-mentioned experimental example.
| Experimental example | The inlet tube side | The outlet pipe side | Supply (ml) | Collecting amount d (ml) |
| IN pressure column | OUT pressure column | |||
| 1 | 15 | 10 | 1000 | 987 |
| 2 | 20 | 10 | 1000 | 990 |
| 3 | 25 | 20 | 1000 | 987 |
| 4 | 30 | 10 | 1000 | 985 |
| 5 | 35 | 35 | 1000 | 985 |
| 6 | 42 | 42 | 1000 | 984 |
| 7 | 48 | 40 | 1000 | 982 |
| 8 | 50 | 45 | 1000 | 983 |
| 9 | 50 | 45 | 1000 | 985 |
By above-mentioned table as can be known, the yield of water is different with the pressure of outlet pipe side and a little difference occurs along with inlet tube, yet can reach the recovery rate more than 98% in the experiment of downforce being lower than the 50mm water column.
Though the applicant only has been described in detail at one embodiment of the invention, but in technological thought category of the present invention, various distortion and modification can occur, this is very tangible for a person skilled in the art, and therefore this distortion and modification belong to claim scope of the present invention.
Claims (8)
1. fluid collection device is characterized in that comprising:
Inlet tube, one end are installed on the gas piping of wet type work station, and the other end then is installed on the surge drum;
Surge drum, the collection that is used for collecting the gas that flows into by the described inlet tube liquid constituent that splashes;
Fluid collection tube is arranged on the lower surface of described surge drum, and the liquid constituent that is used for collecting is discharged into the outside; And
Outlet pipe in the opposite direction of described inlet tube, is installed on the described surge drum,
Wherein, described surge drum also comprises: upper flange is installed in the top of described inlet tube and extends to certain diameter region of described inlet tube; And lower wing plate, spaced apart with described upper flange.
2. fluid collection device according to claim 1 is characterized in that,
Described surge drum has stero shape, comprising:
The front is equipped with described inlet tube;
The back side is equipped with described outlet pipe; And
Above, bi-side and lower surface, around the described front and the back side.
3. fluid collection device according to claim 2 is characterized in that,
Described lower surface comprises:
The plane of inclination is from described face down diagonally extending;
Junction surface, outstanding down from an end of described plane of inclination; And
Horizontal plane from an end horizontal-extending of described junction surface, is connected to the other end at the described back side.
4. fluid collection device according to claim 1 is characterized in that,
Described upper flange forms waveform shape, to increase the area of contact between itself and the fluid.
5. fluid collection device according to claim 1 is characterized in that,
Described lower wing plate forms waveform shape, to increase the area of contact between itself and the fluid.
6. fluid collection device according to claim 1 is characterized in that,
Described upper flange also comprises the aggegation parts, and it is positioned at the tail end of described upper flange and comprises a plurality of spaces.
7. fluid collection device according to claim 1 is characterized by:
One end of described lower wing plate keeps at a certain distance away at the other end of left side substantially horizontal and downside Vertical direction and upper flange; The other end then keeps at a certain distance away with described lower surface.
8. according to each described fluid collection device in claim 1 to 3 and the claim 5 to 8, it is characterized in that,
Described fluid collection tube also comprises the funnel of more than one frusto-conical.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060078373 | 2006-08-18 | ||
| KR10-2006-0078373 | 2006-08-18 | ||
| KR1020060078373A KR100682621B1 (en) | 2006-08-18 | 2006-08-18 | Liquid collector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101126482A true CN101126482A (en) | 2008-02-20 |
| CN101126482B CN101126482B (en) | 2011-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710142509XA Active CN101126482B (en) | 2006-08-18 | 2007-08-15 | Liquid collector |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100682621B1 (en) |
| CN (1) | CN101126482B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109442217A (en) * | 2018-12-17 | 2019-03-08 | 江苏丰东热技术有限公司 | It is a kind of to nitrogenize two-way feeder and the two-way air supply system of nitridation |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101025881B1 (en) * | 2009-02-09 | 2011-03-30 | 신종수 | Liquid Collector |
| KR101057086B1 (en) | 2009-08-31 | 2011-08-16 | 주식회사 미래보 | Residual Byproduct Collector in Semiconductor Process |
| KR101213150B1 (en) | 2010-11-29 | 2012-12-18 | 신종수 | Apparatus for removing moisture |
| JP6486770B2 (en) * | 2015-05-20 | 2019-03-20 | 株式会社ディスコ | Cutting equipment |
| KR102346208B1 (en) * | 2020-07-07 | 2022-01-03 | 신종수 | Liquid Collecting Device with Improved Space Efficiency |
| KR102346207B1 (en) * | 2020-07-07 | 2022-01-03 | 신종수 | Liquid Collecting Device |
| KR20230035995A (en) * | 2021-09-06 | 2023-03-14 | 신종수 | Liquid Collection Device With Increased Space Efficiency And Collection Efficiency |
| KR20240032508A (en) * | 2022-09-02 | 2024-03-12 | 주식회사 신양 | A Collection Device That Uses The Vortex of The Fluid to Increase The Collection Efficiency |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2722207A1 (en) * | 1977-05-17 | 1978-11-30 | Maschf Augsburg Nuernberg Ag | Liquefied gas pipeline tapping off system - includes collection vessel at highest point in system for dissolved gases coming out of solution |
| DE3527689C1 (en) * | 1985-07-30 | 1986-10-09 | Beutler Maschinenbau- und Vertriebsgesellschaft Inhaber Wolfgang Beutler, 1000 Berlin | Device for determining the presence of a gas |
| KR100432895B1 (en) | 2001-12-20 | 2004-05-22 | 동부전자 주식회사 | Powder trap device of a semiconductor manufacture equipment |
| CN2602402Y (en) * | 2003-02-10 | 2004-02-04 | 扬博科技股份有限公司 | Eliminating bubble device for the printed circuit board developing machine |
| CN2622200Y (en) * | 2003-03-10 | 2004-06-30 | 金道永 | Hydrogen and oxygen generator |
-
2006
- 2006-08-18 KR KR1020060078373A patent/KR100682621B1/en active IP Right Grant
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2007
- 2007-08-15 CN CN200710142509XA patent/CN101126482B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109442217A (en) * | 2018-12-17 | 2019-03-08 | 江苏丰东热技术有限公司 | It is a kind of to nitrogenize two-way feeder and the two-way air supply system of nitridation |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100682621B1 (en) | 2007-02-16 |
| CN101126482B (en) | 2011-09-07 |
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