CN115193207A - Water-steam separating device - Google Patents
Water-steam separating device Download PDFInfo
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- CN115193207A CN115193207A CN202110383446.7A CN202110383446A CN115193207A CN 115193207 A CN115193207 A CN 115193207A CN 202110383446 A CN202110383446 A CN 202110383446A CN 115193207 A CN115193207 A CN 115193207A
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 113
- 238000009833 condensation Methods 0.000 claims abstract description 107
- 230000005494 condensation Effects 0.000 claims abstract description 107
- 238000000926 separation method Methods 0.000 claims abstract description 65
- 239000000498 cooling water Substances 0.000 claims description 10
- 238000010992 reflux Methods 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 65
- 238000000034 method Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 5
- 230000001174 ascending effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000008236 heating water Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 231100000021 irritant Toxicity 0.000 description 1
- 239000002085 irritant Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/265—Drying gases or vapours by refrigeration (condensation)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- Chemical & Material Sciences (AREA)
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- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Separating Particles In Gases By Inertia (AREA)
Abstract
A moisture separation device comprising: the backflow cavity is positioned in the cavity and communicated with the water tank, the backflow cavity extends in the direction vertical to the horizontal plane, and the side wall of the backflow cavity is provided with a plurality of backflow holes communicated with the inside of the backflow cavity and the inside of the cavity; be located a plurality of condensation pieces of backward flow chamber outer wall, a plurality of condensation pieces are arranged along perpendicular to horizontal plane direction, and each condensation piece is adjacent with a backflow hole and is located backward flow hole top, each condensation piece have be fixed in the first end of backward flow chamber outer wall and for the second end of first end towards the direction slope of keeping away from the basin, each condensation piece has certainly first end link up the breach of second end, and a plurality of the breach projection of condensation piece is in the figure of horizontal plane mutually not overlapping, the condensation piece reaches the setting up of backward flow chamber has increased tail gas exhaust's route to make tail gas through many times steam separation, reduce the steam content in the tail gas after the tail gas exhaust.
Description
Technical Field
The invention relates to the field of processing of production waste materials in semiconductor manufacturing, chemical manufacturing, biological medicine manufacturing and the like, in particular to a water-vapor separation device.
Background
In the industrial production process in the manufacturing field such as semiconductor, chemical industry, biological medicine, etc., various poisonous and irritant exhaust gas can be generated, and in order to avoid pollution to the environment, the exhaust gas needs to be purified to be discharged into the atmosphere.
At present, an electric heating water washing type waste gas treatment device (thermo-wet scrubber) is adopted in a tail gas treatment device, after tail gas is treated through electric heating, a cooling water spraying mode is adopted on one side of a cooling cavity body by filling engineering plastics, condensed water automatically flows back, and therefore water and vapor separation of the tail gas is carried out.
With the development of semiconductor technology, the air pressure of the exhaust pipe of the plant is increased due to the large amount of gas generated in the process of manufacturing some devices in the advanced manufacturing process, so that excessive water vapor in the exhaust gas treatment device is sucked into the exhaust pipe in the using process, and the exhaust of the pipeline is influenced. Therefore, the pipeline needs to be drained frequently, and the working efficiency is greatly reduced.
Therefore, the existing water-vapor separation device is yet to be further improved.
Disclosure of Invention
The invention aims to provide a water-steam separation device to improve the water-steam separation effect in tail gas treatment.
In order to solve the above technical problems, a technical solution of the present invention provides a water-steam separation device, including: a cavity having an air inlet in communication with the exterior and an air outlet in communication with the exterior; the water tank is positioned at the bottom in the cavity; the backflow cavity is positioned in the cavity and provided with a first bottom port, the first bottom port extends into the water tank, the backflow cavity extends in the direction perpendicular to the horizontal plane, and the side wall of the backflow cavity is provided with a plurality of backflow holes communicating the inside of the backflow cavity with the inside of the cavity; be located a plurality of condensation pieces of backward flow chamber outer wall, a plurality of condensation pieces are arranged along perpendicular to horizontal plane direction, and each condensation piece is adjacent with a backflow hole and is located backward flow hole top, each condensation piece have be fixed in the first end of backward flow chamber outer wall and for the second end of first end towards the direction slope of keeping away from the basin, each condensation piece has certainly first end link up the breach of second end, and a plurality of the breach projection of condensation piece is in the figure of horizontal plane each other not overlapping.
Optionally, the method further includes: and the pressure difference backflow cavity is communicated with the backflow cavity, the bottom of the pressure difference backflow cavity is communicated with the bottom of the backflow cavity, and the pressure difference backflow cavity extends into the water tank.
Optionally, the ratio of the diameter of the cross section of the differential pressure return cavity to the diameter of the cross section of the return cavity is 1:1 to 5:4.
optionally, the method further includes: and the exhaust pipe is positioned outside the cavity and communicated with the air outlet, and the pressure value in the exhaust pipe is smaller than that in the cavity.
Optionally, the differential pressure return chamber has a second bottom port, and the second bottom port is lower than the top of the water tank.
Optionally, the method further includes: the guide plate is fixed on the inner side wall of the bottom of the backflow cavity and provided with a third end fixed on the side wall of the bottom of the backflow cavity and a fourth end which is inclined relative to the third end towards the direction close to the water tank surface and the direction of the differential pressure backflow cavity.
Optionally, a gap is formed between the condensation sheet and the cavity wall of the cavity.
Optionally, the backflow cavity is a cylinder, the projection of the notch of each condensation sheet on the horizontal plane is fan-shaped, and the projection of the notch of each adjacent condensation sheet on the horizontal plane is fan-shaped and does not overlap.
Optionally, the number of the condensation sheets is 4, and the projection area of the notch on the horizontal plane is 1/3 of the projection area of the condensation sheet on the horizontal plane.
Optionally, an angle between the condensation sheet and a direction perpendicular to the horizontal plane ranges from 40 degrees to 60 degrees.
Optionally, the method further includes: and the water-vapor primary separation unit comprises a cooling water spray head and water-vapor separation filling particles below the cooling water spray head.
Compared with the prior art, the technical scheme of the embodiment of the invention has the following beneficial effects:
in the water-vapor separation device provided by the technical scheme of the invention, the plurality of condensation sheets are arranged on the outer wall of the backflow cavity, the condensation sheets are arranged in the direction vertical to the horizontal plane, the condensation sheets are adjacent to the backflow hole and are positioned above the backflow hole, each condensation sheet is provided with a first end fixed on the outer wall of the backflow cavity and a second end inclined relative to the first end in the direction away from the water tank, each condensation sheet penetrates through a notch of the second end from the first end, the patterns of the notches of the condensation sheets projected on the horizontal plane are not overlapped with each other, after the tail gas is subjected to water-vapor separation for multiple times, the generated condensed water flows into the backflow cavity through the backflow hole, and the rest tail gas is upwards discharged by bypassing the condensation sheet and finally discharged through the gas outlet.
Further, be located still have the preliminary separation unit of steam between condensation piece and the basin, the preliminary separation unit of steam includes the cooling water shower nozzle, and is located the particle is filled in the steam separation of cooling water shower nozzle below, the preliminary separation unit of steam is used for carrying out preliminary separation to tail gas.
Further, the bottom of the pressure difference backflow cavity is communicated with the bottom of the backflow cavity, and the bottom of the pressure difference backflow cavity extends into the water tank, so that condensed water can enter the backflow cavity by utilizing the pressure difference between the inside of the cavity and the inside of the air exhaust pipe.
Further, because the guide plate is fixed in the inside wall of backward flow chamber bottom, just the guide plate has and is fixed in the third end of backward flow chamber bottom lateral wall and for the third end is towards being close to the basin surface with the fourth end of pressure differential backward flow chamber direction slope, consequently, through the guide plate is favorable to the comdenstion water to flow into in the basin, thereby, reduced the comdenstion water and passed through the probability that the exhaust pipe was brought into in the pressure differential backward flow chamber.
Furthermore, the number of the fan blades is 4, the projection area of the notch on the horizontal plane is 1/3 of the projection area of the condensation sheet on the horizontal plane, so that part of tail gas is discharged upwards in a spiral ascending trend, and the placement mode of the fan blades increases the path of water-vapor separation, thereby realizing the effect of increasing the water-vapor separation.
Drawings
Fig. 1 to 3 are schematic structural views of a water-vapor separation device according to an embodiment of the present invention;
fig. 4 is a schematic view showing the operation of the water-vapor separating apparatus of fig. 1.
Detailed Description
As described in the background art, the technology for separating water from steam in the tail gas treatment is in urgent need of improvement by using the existing water-steam separation device and working method.
In order to solve the above problems, in the water-vapor separation device provided by the invention, the plurality of condensation sheets are arranged on the outer wall of the backflow cavity, the plurality of condensation sheets are arranged in a direction perpendicular to the horizontal plane, each condensation sheet is adjacent to the backflow hole and is positioned above the backflow hole, each condensation sheet is provided with a first end fixed on the outer wall of the backflow cavity and a second end inclined relative to the first end in a direction away from the water tank, each condensation sheet penetrates through a notch of the second end from the first end, the patterns of the notches of the plurality of condensation sheets projected on the horizontal plane are not overlapped with each other, after the tail gas is subjected to multiple water-vapor separation processes, the generated condensed water flows into the backflow cavity through the backflow hole, and the rest tail gas bypasses the condensation sheets to be upwards discharged and is finally discharged through the tail gas discharge port, the path of the tail gas increased by the condensation sheets is subjected to multiple water-vapor separation processes, so that the deep water-vapor separation is realized, and the water-vapor content in the tail gas after the tail gas discharge is reduced.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Fig. 1 to 3 are schematic structural views of a water-vapor separation device according to an embodiment of the present invention.
Referring to fig. 1 to 3, fig. 2 is a projection of each condensing plate in fig. 1 on a horizontal plane S, and fig. 3 is a partially enlarged view of the bottom of the return chamber and the differential pressure return chamber in fig. 1. The structure includes: a chamber 10, the chamber 10 having an inlet 101 communicating with the outside and an outlet 102 communicating with the outside; a water tank 103 positioned at the bottom in the cavity 10; the backflow cavity 104 is positioned in the cavity 10, the backflow cavity 104 is provided with a first bottom port 1041, the first bottom port 1041 extends into the water tank 103, the backflow cavity 104 extends in a direction perpendicular to a horizontal plane, and the side wall of the backflow cavity 104 is provided with a plurality of backflow holes 105 communicating the inside of the backflow cavity 104 with the inside of the cavity 10; the condensation sheets 106 are positioned on the outer wall of the backflow cavity 104, the condensation sheets 106 are arranged in the direction perpendicular to the horizontal plane, each condensation sheet 106 is adjacent to the backflow hole 105 and positioned above the backflow hole 105, each condensation sheet 106 is provided with a first end 1061 fixed on the outer wall of the backflow cavity 104 and a second end 1062 inclined relative to the first end 1061 in the direction away from the water tank 103, each condensation sheet 106 is provided with a notch from the first end 1061 to penetrate through the second end 1062, and the projection of the notch of the condensation sheet 106 on the horizontal plane is not overlapped with each other.
The water tank 103 is configured to receive the condensed water from the return chamber 104.
When the tail gas passes through the condensing sheet 106 from bottom to top, part of the tail gas meets the condensing sheet 106 to generate condensed water, and due to the inclined arrangement of the condensing sheet 106, the generated condensed water flows into the backflow hole 105 below the condensing sheet 106 under the action of gravity, so that the tail gas generates first water-vapor separation in the process; because the condensation sheet 106 has a gap, another portion of the exhaust gas bypasses the condensation sheet 106 and continues to be discharged upwards, and meets another condensation sheet 106 located on the outer wall of the reflow chamber 104 again to perform a second water-vapor separation. Then, through be in the backward flow chamber 104 outer wall sets up a plurality of condensation sheets 106, make tail gas is through a lot of water vapor separation backs, and the comdenstion water of production passes through each the backward flow hole 105 flows into in the backward flow chamber 104, and all the other tail gases bypass condensation sheet 106 upwards discharges, finally discharges through the gas outlet, condensation sheet 106 and the setting of backward flow chamber 104 has increased tail gas exhaust's route to make tail gas through a lot of water vapor separation, thereby realize the water vapor separation of degree of depth, reduce the steam content in the tail gas after the tail gas discharge.
In this embodiment, the method further includes: and the water-vapor primary separation unit is positioned between the condensation sheet 106 and the water tank 103 and comprises a cooling water spray head 107 and water-vapor separation filling particles 108 positioned below the cooling water spray head 107.
Steam primary separation unit is used for carrying out preliminary steam separation to tail gas, and tail gas passes through steam separation filler particles 108, with cooling water shower nozzle 107 spun water carries out abundant contact, makes the comdenstion water of production flow back by oneself in the tail gas, can get rid of partial steam in the tail gas.
In this embodiment, the method further includes: and the pressure difference backflow cavity 109 is communicated with the backflow cavity 104, the bottom of the pressure difference backflow cavity 109 is communicated with the bottom of the backflow cavity 104, and the bottom of the pressure difference backflow cavity 109 extends into the water tank 103.
In this embodiment, the method further includes: and the exhaust pipe 11 is positioned outside the cavity 10 and communicated with the air outlet 102, and the pressure value in the exhaust pipe 11 is smaller than the pressure value in the cavity 10.
The differential pressure return chamber 109 has a second bottom port 1091, and the second bottom port 1091 is lower than the top of the water tank 103. In practical use, the pressure difference reflux cavity 109 and the bottom of the reflux cavity 104 can be extended to the position below the liquid level in the water tank 103, so that the bottom of the pressure difference reflux cavity 109 is hermetically communicated with the bottom of the reflux cavity 104, the bottom of the pressure difference reflux cavity 109 is hermetically communicated with the water tank 103, the exhaust pipe 11 is communicated with the reflux cavity 104, and condensed water can conveniently enter the reflux cavity 104 through the reflux hole 105 by utilizing the pressure difference between the exhaust pipe 11 and the cavity 10.
The ratio of the cross-sectional diameter size range of the differential pressure return cavity 109 to the return cavity 104 is 1:1 to 5:4. the significance of selecting the size range ratio is that the pressure difference between the inside and the outside of the backflow hole 105 can be caused by the difference between the pressure inside the exhaust pipe 11 and the pressure inside the cavity 10, the pressure difference backflow cavity 109 is too small to form the pressure difference between the inside and the outside of the backflow hole 105, and the pressure difference backflow cavity 109 is too large to affect the installation of the condensation sheet 106, so that the gap between the condensation sheet 106 and the cavity 10 is too large, and the tail gas can be directly discharged upwards through the gap. In particular, the pressure difference is large enough to facilitate the inflow of the condensed water into the return hole 105. In this embodiment, the cross-sectional diameter size ratio of the differential pressure return cavity 109 to the return cavity 104 is 1:1.
in this embodiment, the method further includes: a baffle 110 fixed to an inner sidewall of the bottom of the reflow chamber 104, wherein the baffle 110 has a third end 1101 fixed to the bottom sidewall of the reflow chamber 104 and a fourth end 1102 inclined toward the surface of the water tank 103 and the differential pressure reflow chamber 109 with respect to the third end 1101.
The flow guide plate 110 facilitates the condensed water to flow into the water tank 103, thereby reducing the probability that the condensed water is brought into the exhaust duct 11 through the differential pressure return chamber 109. Specifically, when the distance difference between the liquid level in the water tank 103 and the fourth end 1102 is greater than 5cm, the baffle 110 can achieve a better effect.
In this embodiment, a gap is formed between the condensation sheet 106 and the wall of the chamber 10. Specifically, the distance X between the condensation sheet 106 and the cavity wall of the cavity 10 is 3cm to 8cm, which is beneficial for part of the tail gas to bypass the condensation sheet 106 and be discharged upwards, and the upwards discharged tail gas can be subjected to multiple water-vapor separation.
In this embodiment, the reflow chamber 104 is a cylinder, the projection of the notch of the condensation plate 106 on the horizontal plane is a fan shape, and the fan shapes of the notches of the adjacent condensation plates 106 on the horizontal plane are not overlapped. In other embodiments, the cross section of the backflow cavity may be in other polygonal shapes such as a square, the condensing sheet surrounds the backflow cavity in shape, the projection of the condensing sheet on the horizontal plane may be in a polygon, the backflow cavity guides condensed water into the water tank, and the condensing sheet is used for blocking the tail gas and generating condensed water, so that the condensing sheet is not limited to the above shape.
The sector of the gap projection of the adjacent condensing sheet 106 on the horizontal plane is not overlapped, which is beneficial to increasing the upward exhaust path of the tail gas and realizing the water-vapor separation.
In this embodiment, the number of the condensation sheets 106 is 4, and the projection area of the notch on the horizontal plane is 1/3 of the projection area of the condensation sheet 106 on the horizontal plane. The gaps of the adjacent condensing sheets 106, such as the condensing sheet a and the condensing sheet B, have a rotation angle of 90 degrees with respect to each other in the fan shape projected on the horizontal plane. In this embodiment, the projection of tail gas path from bottom to top on the horizontal plane is a circumference to make partial tail gas be the ascending trend of helix and upwards discharge, the mode of placing of fan piece has increased the route of steam-water separation, thereby realizes increasing the effect of steam-water separation, condensation piece 106 is less in quantity, but can accomplish better steam-water separation effect.
In other embodiments, the number of the condensation sheets 106 may be increased to 8, the projection of the tail gas from the bottom to the top on the horizontal plane is two circles, so that part of the tail gas is discharged upwards in a spiral ascending trend, and the fan sheets are arranged in a manner of increasing the path of water-vapor separation, thereby achieving the effect of increasing the water-vapor separation. The number of the condensation sheets is not limited to an integral multiple of 4, and may be any number of sheets larger than 1. That is, the number of the condensation sheets may not be limited, and the greater the number of the condensation sheets, the more the water vapor separation is facilitated, but the greater the number of the condensation sheets, the more the installation and production costs are increased, and a trade-off needs to be made between the cost and the water vapor separation effect.
The angle between the condensation sheet 106 and the direction perpendicular to the horizontal plane ranges from 40 degrees to 60 degrees. The different inclination angles of the condensation sheets 106 have different blocking abilities for the exhaust gas, which also determines different water-vapor separation effects. Within the angle range, a better tail gas water-vapor separation effect can be achieved. In other embodiments, the angle range may not be adopted, and an extreme example includes that the condensation sheets are distributed in a direction parallel to the horizontal direction, so that the formed condensation water is not easy to flow into the backflow holes; another extreme example includes that the condensation sheets are distributed along the direction perpendicular to the horizontal direction, so that no barrier is formed on the tail gas, and further condensed water is generated. When the angle range between the condensation sheet 106 and the direction perpendicular to the horizontal plane is greater than 0 degree but smaller than 90 degrees, the condensation sheet blocks the tail gas to form condensed water, and the condensed water flows into the backflow hole due to the inclined arrangement of the condensation sheet, so that the effect of water-vapor separation is generated.
The tail gas is easily discharged upwards by increasing the size of the notch of the condensation sheet 106, reducing the size of the condensation sheet 10, increasing the inclination angle of the condensation sheet 10, reducing the size of the backflow hole 105, increasing the size of the gap between the condensation sheet 106 and the cavity wall of the cavity 10, and the like. Conversely, reducing the size of the notch of the condensation sheet 106, increasing the size of the condensation sheet 10, reducing the inclination angle of the condensation sheet 10, increasing the size of the backflow hole 105, and reducing the size of the gap between the condensation sheet 106 and the cavity wall of the cavity 10 will increase the amount of the condensed tail gas entering the backflow hole 105. In short, the size of the gap of the condensation sheet 106, the size of the condensation sheet 10, the inclination angle of the condensation sheet 10, the size of the backflow hole 105, the size of the gap between the condensation sheet 106 and the cavity wall of the cavity 10, and the like, jointly determine the exhaust path, and the effect of water-vapor separation can be further optimized by optimizing the above parameters. Therefore, in other embodiments, the above parameter values may not be limited.
Fig. 4 is a schematic view showing the operation of the water-vapor separating apparatus of fig. 1.
The working process comprises the following steps: tail gas I enters the cavity 10 from the gas inlet 101, primary water-vapor separation is completed through the water-vapor primary separation unit, the tail gas I is continuously discharged from bottom to top, when the tail gas I passes through the condensing sheet 106, a part of tail gas II meets the condensing sheet 106 and then generates condensed water, due to the inclined arrangement of the condensing sheet 106, the generated condensed water flows into the backflow hole 105 below the condensing sheet 106 to form condensed water III, and the tail gas generates first water-vapor separation in the above process; another portion of the tail gas IV bypasses the condensation plate 106, i.e. it is continuously discharged upwards through the gap of the condensation plate 106 or the gap between the condensation plate 106 and the cavity wall of the cavity 10, and meets another condensation plate 106 on the outer wall of the reflow cavity 104 again for performing a second water-vapor separation. Then, through set up a plurality of condensation pieces 106 at the backward flow chamber 104 outer wall, make tail gas behind a lot of steam separation, the comdenstion water that produces passes through each the backward flow hole 105 flows into in the backward flow chamber 104, and all the other tail gases bypass condensation piece 106 upwards discharges, finally discharges through the gas outlet, condensation piece 106 and the setting of backward flow wall 104 has increased tail gas exhaust's route to make tail gas through a lot of steam separation, thereby realize the steam separation of degree of depth, reduce the steam content in the tail gas after the tail gas discharge.
In this embodiment, after the tail gas I sequentially passes through the condensation sheet a, the condensation sheet B, the condensation sheet C, and the condensation sheet D to complete the water-vapor separation for four times, the condensed water II further flows into the water tank 103 through the flow guide plate 110.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the invention, as defined in the appended claims.
Claims (11)
1. A water-vapor separator device, comprising:
a cavity having an air inlet in communication with the exterior and an air outlet in communication with the exterior;
the water tank is positioned at the bottom in the cavity;
the backflow cavity is positioned in the cavity and provided with a first bottom port, the first bottom port extends into the water tank, the backflow cavity extends in the direction perpendicular to the horizontal plane, and the side wall of the backflow cavity is provided with a plurality of backflow holes communicating the inside of the backflow cavity with the inside of the cavity;
be located a plurality of condensation pieces of backward flow chamber outer wall, a plurality of condensation pieces are arranged along perpendicular to horizontal plane direction, and each condensation piece is adjacent with a backflow hole and is located backward flow hole top, each condensation piece have be fixed in the first end of backward flow chamber outer wall and for the second end of first end towards the direction slope of keeping away from the basin, each condensation piece has certainly first end link up the breach of second end, and a plurality of the breach projection of condensation piece is in the figure of horizontal plane each other not overlapping.
2. The water vapor separator according to claim 1, further comprising: and the bottom of the pressure difference backflow cavity is communicated with the bottom of the backflow cavity, and the bottom of the pressure difference backflow cavity extends into the water tank.
3. The water vapor separation device of claim 2 wherein the ratio of the cross-sectional diameter dimensions of said differential pressure return chamber to said return chamber is in the range of 1:1 to 5:4.
4. the water vapor separator according to claim 2, further comprising: and the exhaust pipe is positioned outside the cavity and communicated with the air outlet, and the pressure value in the exhaust pipe is smaller than that in the cavity.
5. The water vapor separation device of claim 2, wherein said differential pressure return chamber has a second bottom port, and said second bottom port is lower than the top of said water tank.
6. The water vapor separation device of claim 1, further comprising: the guide plate is fixed on the inner side wall of the bottom of the backflow cavity and provided with a third end fixed on the side wall of the bottom of the backflow cavity and a fourth end which is inclined relative to the third end towards the direction close to the water tank surface and the direction of the differential pressure backflow cavity.
7. The water vapor separator according to claim 1, wherein a gap is provided between said condensation sheet and a wall of said chamber.
8. The water vapor separation device according to claim 1, wherein the reflux cavity is a cylinder, the pattern of the notches of the condensation plates projected on the horizontal plane is a sector, and the sectors of the notches of the adjacent condensation plates projected on the horizontal plane do not overlap.
9. The water-vapor separation device according to claim 8, wherein the number of said condensation sheets is 4, and the projected area of said notches in the horizontal plane is 1/3 of the projected area of said condensation sheets in the horizontal plane.
10. The water vapor separator according to claim 1 wherein said condensation sheet is oriented at an angle in the range of 40 degrees to 60 degrees from perpendicular to the horizontal.
11. The water vapor separation device of claim 1, further comprising: and the water-vapor primary separation unit comprises a cooling water spray head and water-vapor separation filling particles below the cooling water spray head.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110383446.7A CN115193207B (en) | 2021-04-09 | 2021-04-09 | Water-steam separator |
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| CN202110383446.7A CN115193207B (en) | 2021-04-09 | 2021-04-09 | Water-steam separator |
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| CN115193207A true CN115193207A (en) | 2022-10-18 |
| CN115193207B CN115193207B (en) | 2024-06-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115747853A (en) * | 2022-11-21 | 2023-03-07 | 时代氢源(深圳)科技有限公司 | Multiple circulating cooling system of small hydrogen production equipment |
Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990017596A (en) * | 1997-08-25 | 1999-03-15 | 정몽규 | Automotive Chiller |
| US20020011075A1 (en) * | 2000-07-27 | 2002-01-31 | Faqih Abdul-Rahman Abdul-Kader M. | Production of potable water and freshwater needs for human, animal and plants from hot and humid air |
| US6528420B1 (en) * | 2002-01-18 | 2003-03-04 | Chartered Semiconductor Manufacturing Ltd. | Double acting cold trap |
| KR20110076627A (en) * | 2009-12-29 | 2011-07-06 | 주식회사 포스코 | Apparatus for eliminating white-smoke |
| KR20110112684A (en) * | 2010-04-07 | 2011-10-13 | (주)대일아쿠아 | Evaporated water recovery and plume abatement apparatus from the evaporated water vapor using condensing device and method using the same |
| KR101629794B1 (en) * | 2016-01-06 | 2016-06-13 | 전세진 | Cleaning device using cooling spraying method |
| CN205448326U (en) * | 2016-03-09 | 2016-08-10 | 中山冠霸厨卫有限公司 | Comdenstion water discharging equipment of condensing hanging stove |
| KR101692830B1 (en) * | 2016-05-17 | 2017-01-06 | 주식회사 삼우티씨씨 | Organic waste dry system |
| CN107966041A (en) * | 2017-11-27 | 2018-04-27 | 安徽寅时压缩机制造有限公司 | A kind of gas dewatering device |
| CN108201704A (en) * | 2016-12-19 | 2018-06-26 | 泰奥星（天津）有限公司 | A kind of distilling apparatus of OIL IN LUBRICATING OIL PRODUCTION equipment |
| WO2018127331A1 (en) * | 2017-01-06 | 2018-07-12 | Avl Emission Test Systems Gmbh | Condensate separator for exhaust gas measuring systems |
| CN207694292U (en) * | 2017-11-16 | 2018-08-07 | 镓特半导体科技（上海）有限公司 | Cold-trap device, exhaust treatment system and semiconductor production equipment |
| CN208720259U (en) * | 2018-06-26 | 2019-04-09 | 贵州千村节能环保科技开发有限公司 | A kind of smoke discharge, condensation structure of biomass gas stove |
| CN110624355A (en) * | 2018-06-21 | 2019-12-31 | 深圳市永盛隆科技有限公司 | Exhaust gas treatment device, vacuum coating system, and method for operating exhaust gas treatment device |
| CN210409573U (en) * | 2019-07-29 | 2020-04-28 | 福建云驰智能装备制造有限公司 | Water proof processing device of spray baking finish house |
| CN210814600U (en) * | 2019-08-09 | 2020-06-23 | 台州森林造纸有限公司 | Papermaking stoving tail gas recovery system |
| CN211530097U (en) * | 2019-12-26 | 2020-09-18 | 浙江氢谷新能源汽车有限公司 | Gas-water separation device for anode tail gas of vertical fuel cell |
| CN211530089U (en) * | 2019-12-26 | 2020-09-18 | 浙江氢谷新能源汽车有限公司 | Horizontal fuel cell anode tail gas-water separation device |
| US20200324232A1 (en) * | 2019-04-15 | 2020-10-15 | Aisin Seiki Kabushiki Kaisha | Gas-liquid separator |
| CN212227778U (en) * | 2020-03-30 | 2020-12-25 | 浙江嘉化能源化工股份有限公司 | VCM dehydration condenser |
| CN112206630A (en) * | 2020-11-02 | 2021-01-12 | 上海大屯能源股份有限公司江苏分公司 | Wind-water separator |
| CN212369606U (en) * | 2020-04-07 | 2021-01-19 | 天津九州大地饲料有限公司 | Condensation drainage device of cooling tower |
| CN212417551U (en) * | 2020-05-27 | 2021-01-29 | 宜昌慧正环保工程有限公司 | Waste gas treatment system |
-
2021
- 2021-04-09 CN CN202110383446.7A patent/CN115193207B/en active Active
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990017596A (en) * | 1997-08-25 | 1999-03-15 | 정몽규 | Automotive Chiller |
| US20020011075A1 (en) * | 2000-07-27 | 2002-01-31 | Faqih Abdul-Rahman Abdul-Kader M. | Production of potable water and freshwater needs for human, animal and plants from hot and humid air |
| US6528420B1 (en) * | 2002-01-18 | 2003-03-04 | Chartered Semiconductor Manufacturing Ltd. | Double acting cold trap |
| KR20110076627A (en) * | 2009-12-29 | 2011-07-06 | 주식회사 포스코 | Apparatus for eliminating white-smoke |
| KR20110112684A (en) * | 2010-04-07 | 2011-10-13 | (주)대일아쿠아 | Evaporated water recovery and plume abatement apparatus from the evaporated water vapor using condensing device and method using the same |
| KR101629794B1 (en) * | 2016-01-06 | 2016-06-13 | 전세진 | Cleaning device using cooling spraying method |
| CN205448326U (en) * | 2016-03-09 | 2016-08-10 | 中山冠霸厨卫有限公司 | Comdenstion water discharging equipment of condensing hanging stove |
| KR101692830B1 (en) * | 2016-05-17 | 2017-01-06 | 주식회사 삼우티씨씨 | Organic waste dry system |
| CN108201704A (en) * | 2016-12-19 | 2018-06-26 | 泰奥星（天津）有限公司 | A kind of distilling apparatus of OIL IN LUBRICATING OIL PRODUCTION equipment |
| WO2018127331A1 (en) * | 2017-01-06 | 2018-07-12 | Avl Emission Test Systems Gmbh | Condensate separator for exhaust gas measuring systems |
| CN207694292U (en) * | 2017-11-16 | 2018-08-07 | 镓特半导体科技（上海）有限公司 | Cold-trap device, exhaust treatment system and semiconductor production equipment |
| CN107966041A (en) * | 2017-11-27 | 2018-04-27 | 安徽寅时压缩机制造有限公司 | A kind of gas dewatering device |
| CN110624355A (en) * | 2018-06-21 | 2019-12-31 | 深圳市永盛隆科技有限公司 | Exhaust gas treatment device, vacuum coating system, and method for operating exhaust gas treatment device |
| CN208720259U (en) * | 2018-06-26 | 2019-04-09 | 贵州千村节能环保科技开发有限公司 | A kind of smoke discharge, condensation structure of biomass gas stove |
| US20200324232A1 (en) * | 2019-04-15 | 2020-10-15 | Aisin Seiki Kabushiki Kaisha | Gas-liquid separator |
| CN210409573U (en) * | 2019-07-29 | 2020-04-28 | 福建云驰智能装备制造有限公司 | Water proof processing device of spray baking finish house |
| CN210814600U (en) * | 2019-08-09 | 2020-06-23 | 台州森林造纸有限公司 | Papermaking stoving tail gas recovery system |
| CN211530097U (en) * | 2019-12-26 | 2020-09-18 | 浙江氢谷新能源汽车有限公司 | Gas-water separation device for anode tail gas of vertical fuel cell |
| CN211530089U (en) * | 2019-12-26 | 2020-09-18 | 浙江氢谷新能源汽车有限公司 | Horizontal fuel cell anode tail gas-water separation device |
| CN212227778U (en) * | 2020-03-30 | 2020-12-25 | 浙江嘉化能源化工股份有限公司 | VCM dehydration condenser |
| CN212369606U (en) * | 2020-04-07 | 2021-01-19 | 天津九州大地饲料有限公司 | Condensation drainage device of cooling tower |
| CN212417551U (en) * | 2020-05-27 | 2021-01-29 | 宜昌慧正环保工程有限公司 | Waste gas treatment system |
| CN112206630A (en) * | 2020-11-02 | 2021-01-12 | 上海大屯能源股份有限公司江苏分公司 | Wind-water separator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115747853A (en) * | 2022-11-21 | 2023-03-07 | 时代氢源(深圳)科技有限公司 | Multiple circulating cooling system of small hydrogen production equipment |
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