TWI823262B - Gas purification device - Google Patents

Abstract

That is to say, the gas purification device of the present invention is equipped with: a casing (12), an impeller (14), and a nozzle (16); the casing (12) has a gas suction port (12a) opened on the bottom surface, and a gas suction port (12a) on the side. The opening has a gas discharge port (12b); the above-mentioned impeller (14) is fixed to a rotation axis (18) arranged along the vertical direction inside the above-mentioned casing (12), and rotates around the above-mentioned rotation axis (18); the above-mentioned nozzle (18) 16), spray the cleaning liquid (20) into the above-mentioned impeller (14). The impeller (14) is rotated and the gas (E) to be processed is sucked into the casing (12) through the gas inlet (12a), and the cleaning liquid (20) sprayed from the nozzle (16) is sprayed. After the above-mentioned gas (E) is purified, it is discharged from the above-mentioned gas discharge port (12b). It has an inner cylinder member (12c) that protrudes upward in the vertical direction from the periphery of the gas suction port (12a) and has an upper end disposed at a height that does not contact the lower end of the impeller (14). ; A liquid storage portion (12d) is provided between the inner cylinder member (12c) and the inner surface of the side wall of the housing (12). The liquid storage portion (12d) is used to spray and spray from the nozzle (16). The cleaning liquid (20) passing through the above-mentioned impeller (14) is temporarily stored.

Description

Gas purification device

The present invention relates to a gas purification device that includes not only exhaust gas but also fine dust, gaseous air pollutants, viruses, etc. (hereinafter, simply referred to as "dust, etc.") existing in a wide range of gas environments such as indoor air. Removed from gas environment.

Such a gas purification device has conventionally been described in the following Patent Document 1 (International Publication No. 2020/183537). The conventional technical structure is as follows. It is equipped with: a casing having an exhaust gas inlet and an exhaust gas discharge port, an impeller arranged in the casing and supported by a rotating shaft, and a nozzle for spraying cleaning liquid into the impeller. The impeller is rotated to inhale exhaust gas containing dust and cleaning liquid-soluble components through the exhaust gas inlet. The cleaning liquid sprayed from the nozzle captures the dust and cleaning liquid-soluble components in the exhaust gas, and removes the dust contained in the exhaust gas. These ingredients are removed. The rotation shaft is arranged in a vertical direction to rotate the impeller in a horizontal direction, and the exhaust gas inlet is opened on the bottom surface of the casing.

With the above-mentioned conventional technology, since the rotating shaft used to support the impeller is arranged in the vertical direction and the impeller is rotated in the horizontal direction, the exhaust gas and cleaning liquid leaving the impeller will come into gas-liquid contact and scatter in the horizontal direction, colliding with each other. The inner wall of the shell. Then, the particle size of the cleaning liquid that collides with the inner wall surface and the dust captured by the cleaning liquid gradually increases through repeated collisions. As a result, the dust flows down along the inner wall due to gravity. At the same time, the cleaning fluid will dissolve and accumulate the soluble components of the cleaning fluid. Moreover, since there is an exhaust gas inlet on the bottom surface of the casing, most of the cleaning liquid stored on the inner wall of the casing, as well as the dust captured by the cleaning liquid and the soluble components of the cleaning liquid, will pass through the exhaust gas inlet. discharged out of the housing 12. [Prior technical literature] [Patent Document]

[Patent Document 1] International Publication No. 2020/183537

[Problem to be solved by the invention]

The above-mentioned conventional technology has the following problems. In other words, since the impeller is rotated within the casing, a gap is provided between the rotating impeller and the casing so that the rotating impeller does not come into contact with the casing. Therefore, there is no problem when the purification target of the exhaust gas is only dust or components easily soluble in the cleaning liquid. However, it is not a problem when the purification target of the exhaust gas is gaseous air that requires a certain amount of time to dissolve the cleaning liquid or capture the cleaning liquid. In the case of pollutants (such as NOx, etc.), if part of the exhaust gas does not pass through the above-mentioned impeller, but directly takes a shortcut from the above-mentioned clearance to the exhaust gas outlet, there may be a problem of reduced exhaust gas purification efficiency. This problem is more likely to occur especially when the clearance between the periphery of the exhaust gas inlet and the lower surface of the impeller is large. In addition, when this device is used not only to purify exhaust gas but also to reduce the amount of viruses in indoor air, it is a big problem that the gas to be treated takes a shortcut from the above-mentioned gap directly to the exhaust gas outlet.

The main object of the present invention is to provide a gas purification device that can remove not only exhaust gas but also fine dust, gaseous air pollutants, viruses, etc. existing in a wide range of gas environments including indoor air, etc. from the gas environment. Effectively remove and reduce. [Means used to solve problems]

In order to achieve the above object, in the present invention, as shown in FIGS. 1 and 2 , the gas purification device 10 is configured as follows. That is to say, the gas purification device of the present invention is equipped with: a casing 12, an impeller 14, and a nozzle 16; the casing 12 has a gas suction port 12a opened on the bottom surface and a gas discharge port 12b opened on the side; and the impeller 14 , is fixed to the rotating shaft 18 arranged along the vertical direction inside the housing 12 and rotates around the rotating shaft 18; the nozzle 16 sprays the cleaning liquid 20 into the impeller 14. The impeller 14 is rotated and the gas E to be processed is sucked into the casing 12 through the gas inlet 12a. After the gas E is purified with the cleaning liquid 20 sprayed from the nozzle 16, the gas E is discharged from the gas inlet 12a. Discharge from outlet 12b. It has an inner cylindrical member 12c which protrudes upward in the vertical direction from the periphery of the gas suction port 12a and whose upper end is set at a height that does not contact the lower end of the impeller 14; between the inner cylindrical member 12c and A liquid storage portion 12d is provided between the inner surfaces of the side walls of the housing 12. The liquid storage portion 12d is used to temporarily store the cleaning liquid 20 sprayed from the nozzle 16 and passed through the impeller 14.

This invention can achieve the following effects, for example. Since the inner cylinder member 12c is provided, the inner cylinder member 12c protrudes upward in the vertical direction from the periphery of the gas suction port 12a, and its upper end is provided at a height that does not contact the lower end of the impeller 14. Therefore, the periphery of the gas suction port 12a can be By narrowing the clearance between the lower surface of the impeller 14 and the lower surface of the impeller 14, the amount of gas E that takes a shortcut to the gas discharge port 12b via the clearance can be reduced as much as possible. Since the liquid storage part 12d is provided between the inner cylinder member 12c and the inner surface of the side wall of the housing 12, the liquid storage part 12d is used to temporarily store the cleaning liquid 20 sprayed from the nozzle 16 and passed through the impeller 14, so through The gas E in the gap between the upper end of the inner cylinder member 12c and the lower surface of the impeller 14 can also come into gas-liquid contact with the cleaning liquid 20 to a certain extent.

In the present invention, it is preferable to provide a demister 22 on the side peripheral surface of the impeller 14 . In this case, the gas-liquid contact between the gas E sucked by the impeller 14 and the cleaning liquid 20 can be further promoted, and the efficiency of capturing dust and the like by the cleaning liquid 20 can be improved. Moreover, by arranging the demister 22 on the side peripheral surface of the impeller 14, centrifugal force can act on the demister 22 at any time. Therefore, the dust in the gas E can be effectively prevented from clogging the mist eliminator 22 .

In the present invention, it is preferable that a part of the gas E discharged from the gas discharge port 12b to the outside of the casing 12 is returned to the gas inlet 12a. In this case, a part of the gas E can be allowed to pass through the impeller 14 repeatedly, thereby further improving the removal rate of dust and the like in the gas E.

It is preferable that the present invention is added with a unique structure described in the embodiments described below. [Effects of the invention]

The present invention can provide a gas purification device that can effectively remove not only exhaust gas, but also fine dust, gaseous air pollutants, viruses, etc. present in a wide range of gas environments including indoor air. , reduce.

An embodiment of the present invention will be described below based on FIGS. 1 and 2 . FIG. 1 is a display diagram showing an outline of a gas purification device 10 according to an embodiment of the present invention. As shown in the figure, the gas purification device 10 of the present embodiment houses a housing having a gas inlet 12a and a gas discharge port 12b in an airtight and strong frame 24 made of metal such as stainless steel. The cover 12 , the impeller 14 disposed in the cover 12 and supported by the rotating shaft 18 , and the nozzle 16 that sprays the cleaning liquid 20 into the impeller 14 . The shape of the frame 24 is not particularly limited, and may be a square prism or a cylinder. In the illustrated embodiment, the frame 24 is formed in a quadrangular column shape, and a gas inlet 26a and a gas outlet 26b are drilled in the top plate 26 constituting the ceiling surface at diagonally spaced apart positions. An inlet short pipe 28 is inserted into the gas inlet 26a, and the inlet short pipe 28 is connected to a pipe communicating with the gas environment (not shown) of the processing object; an outlet double pipe 30 is inserted into the gas discharge port 26b, and the outlet double pipe 30 is inserted into the gas discharge port 26b. 30 discharges the processed gas E out of the frame 24. The outlet double pipe 30 will be described in detail later.

An opening 26 c is provided in the center of the top plate 26 , and a motor 32 for rotating and driving the impeller 14 with the rotating shaft 18 inserted into the opening 26 c is disposed above the center of the top plate 26 . At the lower center of the top plate 26, a short cylindrical tube wall 34, which is the side wall of the housing 12, hangs vertically. Therefore, in this embodiment, the central portion of the top plate 26 of the frame 24 is shared as the top plate of the housing 12 . After the impeller 14 (described later) is accommodated in the tube wall 34, an annular bottom plate 36 is installed on the lower end of the tube wall 34 to complete the casing 12. The bottom plate 36 is provided with an opening serving as the gas inlet 12a in the center. In addition, on the inner periphery of the bottom plate 36 serving as the periphery of the gas inlet 12a, an inner cylindrical member 12c is installed water-tightly by welding or the like. The inner cylindrical member 12c protrudes upward in the vertical direction, and its upper end It is installed at a height that does not contact the lower end of the impeller 14 . Therefore, a liquid storage portion 12d is formed between the inner cylinder member 12c and the inner peripheral surface of the tube wall 34 as the inner surface of the side wall of the housing 12. The liquid storage portion 12d is used for spraying from the nozzle 16 through the impeller 14 The cleaning solution 20 is temporarily stored. A gas discharge port 12b is opened in the tube wall 34 as the side wall of the casing 12 at a position close to the gas discharge port 26b. The gas discharge port 12b is connected to the above-mentioned outlet double pipe 30 and is used to discharge the gas E passing through the impeller 14 from the casing. discharged from the cover 12.

Here, the outlet double pipe 30 connected to the gas discharge port 12b is explained. The outlet double pipe 30 is provided with: a first pipe body 30a and a second pipe body 30b; the first pipe body 30a is a short tube shape and is inserted into the gas. The discharge port 26b is connected to the gas discharge port 12b on its side peripheral surface; the upper part of the second pipe body 30b is composed of a pipe body with the same diameter as the first pipe body 30a, and the diameter of the lower part is reduced through the reducer tube 38 , and insert the lower part of the reduced diameter into the inside of the first pipe body 30a from the upper side, and airtightly seal the upper end 40 of the first pipe body 30a. The lower end 42 of the second pipe body 30b is disposed below the lower end of the gas discharge port 12b and above the lower end 44 of the first pipe body 30a. Therefore, a part of the gas E discharged from the gas discharge port 12b flows (rises up) into the second pipe body 30b from the lower end 42 of the second pipe body 30b, and the remaining part (the remaining gas E and the gas E discharged from the gas discharge port 12b The cleaning liquid 20) will flow down the first tube 30a due to the influence of gravity and return to the frame 24 from its lower end 44. How much of the gas E discharged from the gas discharge port 12b through the impeller 14 is sent to the second pipe body 30b side can be determined by appropriately setting the capacity of the frame 24 and the rotation speed of the motor 32 that rotates the impeller 14. The number, length or diameter of the first tube body 30a and/or the second tube body 30b can be adjusted.

The impeller 14 is provided with a disk-shaped top plate 46 and blades 48 whose lower surface at the peripheral edge of the top plate 46 is inclined at a certain angle with respect to the radial direction of the top plate 46 and which are evenly arranged at predetermined intervals on the outer peripheral portion of the top plate 46 . , and an annular bottom plate 50 (see FIG. 2 ) that connects the lower ends of the blades 48 to each other.

A shaft hole 46a through which the rotating shaft 18 is inserted is drilled through the center of the top plate 46. The impeller 14 of the rotating shaft 18 is inserted into the shaft hole 46a. As shown in FIG. 1, it is installed from the front end side of the rotating shaft 18. The member 52 is fixed and fixed to the rotating shaft 18 .

The inner diameter of the annular bottom plate 50 connecting the lower ends of the blades 48 is set to be larger than the diameter of the gas inlet 12 a opened on the bottom surface of the casing 12 .

In the impeller 14 of this embodiment, a breathable wall material 54 made of stainless steel stamped metal is installed covering the entire circumference between the outer periphery of the top plate 46 and the outer periphery of the bottom plate 50, and a demister is arranged inside the impeller 14. twenty two. The so-called mist eliminator 22 is a mist separator. For example, metal wires or resin filaments are laminated in multiple layers to form a mat shape to increase the contact surface with the fluid and have smaller pressure loss. It can be installed as needed. The type of demister 22 used in the present invention is not particularly limited, and a mesh demister, a linear demister, etc. can be used.

The nozzle 16 is a spray nozzle used to spray the cleaning liquid 20 into the impeller 14 , and its head is arranged near the bottom of the impeller 14 . The cleaning liquid 20 sprayed from the nozzle 16 can be appropriately set according to the type of gas E to be processed. For example, when the gas E to be processed is waste gas containing water-soluble components such as dust or chlorine (Cl ₂ ), water (fresh water) is mainly used as the cleaning liquid 20 . When the gas E to be processed is exhaust gas containing NOx, a hydrogen peroxide aqueous solution is suitably used as the cleaning liquid 20 . In addition, when the gas E to be processed is indoor air and it is desired to remove viruses floating in the air, hypochlorine water is suitable as the cleaning liquid 20 . In the gas purification device 10 of this embodiment, most of the cleaning liquid 20 sprayed from the nozzle 16 will flow down the frame 24 along with dust and the like, and be stored at the bottom of the frame 24 . Therefore, a drainage line 56 or a piping system 58 for adjusting the liquid level of the stored cleaning liquid 20 is installed at the bottom of the frame 24 .

Next, when the gas purification device 10 of the present embodiment configured as above is used, electric power is first supplied to the motor 32 to operate, and the cleaning liquid 20 is sprayed from the nozzle 16 . Then, by causing the impeller 14 to rotate at a predetermined speed (for example, about 3000 to 4000 rpm) at a high speed, a negative pressure is generated near the gas inlet 12a of the casing 12, and a negative pressure is generated near the gas outlet 12b toward the gas outlet 12b. The positive pressure generates air flow in the housing 12.

Next, although not shown in the figure, the suction means such as a fan provided on the downstream side of the gas discharge port 26b in the gas flow direction is operated to start introducing the gas E, which is the process target, into the gas purification device 10 . Then, the gas E introduced into the frame 24 through the inlet short pipe 28 enters the housing 12 from the gas suction port 12a that becomes a negative pressure, and is brought into contact with the cleaning liquid 20 that becomes particles and passes through the impeller 14. The side wall of the impact housing 12 is the tube wall 34 . In the gas purification device 10 of this embodiment, since the mist eliminator 22 is disposed on the side peripheral surface of the impeller 14, it is possible to further promote the gas-liquid contact between the gas E sucked by the impeller 14 and the cleaning liquid 20, thereby enabling The cleaning fluid 20 improves the removal efficiency of dust, etc.

Next, the cleaning liquid 20 that collides with the wall surface of the tube wall 34 (hereinafter also referred to as the “inner wall surface”) and the dust in the gas E captured by the cleaning liquid 20 gradually increase in particle size by repeating the above collision. , as a result, it flows down along the above-mentioned inner wall surface due to gravity. Furthermore, after the cleaning liquid 20 and the dust and the like captured by the cleaning liquid 20 are temporarily stored in the liquid storage portion 12d in the housing cover 12, they overflow over the upper end of the inner cylinder member 12c and are discharged to the gas suction port 12a through the gas suction port 12a. outside the housing 12.

On the other hand, the gas E from which most of the cleaning liquid 20, dust, etc. have been removed is discharged to the outside of the casing 12 through the gas discharge port 12b. In the gas purification device 10 of this embodiment, the gas discharge port 26b is equipped with the outlet double pipe 30. Therefore, a part of the gas E discharged from the gas discharge port 12b to the outside of the casing 12 can be returned to the gas inlet. 12a. In this case, a part of the gas E can be allowed to pass through the impeller 14 repeatedly, thereby further improving the removal rate of dust and the like in the gas E. In FIG. 1 , regarding the arrows showing the flow of the gas E, the solid lines represent the gas E that has not passed through the impeller 14 , and the dashed lines represent the gas E that has passed through the impeller 14 .

In addition, the lower end 42 of the second pipe body 30b of the outlet double pipe 30 is disposed below the lower end of the gas discharge port 12b and above the lower end 44 of the first pipe body 30a, so that the number of leaks from the outlet double pipe 30 can be reduced. The cleaning liquid 20 and dust etc. are discharged from the frame 24 . If it is more necessary to reduce the release of cleaning liquid 20 and dust from the frame 24, it is better to provide a demister or the like inside the second pipe body 30b of the outlet double pipe 30.

If the gas E subjected to gas purification processing by the gas purification apparatus 10 of this embodiment is, for example, waste gas discharged from a semiconductor manufacturing process, the greenhouse effect gas components (such as PFCs (perfluorinated compounds), etc.) in the gas E will be heated. It is better to combine decomposed decomposition furnaces to form a waste gas removal device. The heat source of the above-mentioned decomposition furnace can be any heat source, as long as the temperature in the furnace can be raised to the thermal decomposition temperature of the greenhouse effect gas component in the gas E. For example, electric heaters, flame burners, non-transitional heaters, etc. are suitable for use. Type or transition type plasma torch, etc. In addition, if the thermal decomposition furnace has a high-efficiency structure including a multi-tube heat exchanger composed of a plurality of small-diameter pipes, the gas purification device 10 of this embodiment is installed at least in the front stage (in other words, the upstream side) of the decomposition furnace. If so, the additive effect of the two can be made more significant as described below. That is to say, in the gas purification device 10 of this embodiment, more than 95% of the dust in the gas E can be removed from the gas E, which is mainly about 0.1 μm to 60 μm. Therefore, the multi-tube heat exchanger can be prevented from being damaged. The pipes are blocked and the decomposition furnace can be operated stably and continuously for a long time. As a result, the removal efficiency of greenhouse effect gas components or air pollutants in the gas E can be significantly improved.

In the above-described embodiment, the impeller 14 is shown to have blades 48 inclined at a certain angle with respect to the radial direction of the top plate 46. However, for example, although not shown, the shaft portion of the blades 48 provided in the impeller 14 may be aligned with the radial direction. In this case, the attraction force of the gas E generated when the impeller 14 is rotated at high speed is weaker than in the above embodiment. Therefore, if a demister 22 is provided on the side peripheral surface of the impeller 14, the number of demisters can be increased. The residence time and moving distance of gas E and cleaning liquid 20 in 22. In this way, the gas E can be fully in gas-liquid contact with the cleaning liquid 20 in the demister 22, which can improve the capture efficiency of dust and the like by the cleaning liquid 20, especially gaseous air pollutants or gaseous air pollutants. Capture efficiency of tiny viruses, etc.

In the above-mentioned embodiment, the outlet double pipe 30 inserted into the gas discharge port 26b is shown as a short tubular first pipe body 30a communicating with the gas discharge port 12b on the side peripheral surface, and a short pipe-shaped first pipe body 30a connected from the first pipe body The upper side of the pipe 30a is inserted into the second pipe body 30b to airtightly seal the upper end 40 of the first pipe body 30a. For example, as shown in Figure 3, the outlet double pipe 30 can be made so that: on the side circumference A short tubular first pipe body 30a whose surface communicates with the gas discharge port 12b is disposed inside the first pipe body 30a. Its upper end is directly connected to the gas discharge port 12b, and its lower end 42 is located farther than the gas discharge port 12b. The lower end of the first pipe body 30a is lower and is arranged above the lower end 44 of the first pipe body 30a. In this case, as in the above embodiment, a part of the gas E discharged from the gas discharge port 12b is discharged from the lower end 42 of the second pipe body 30b and then directly rises back into the first pipe body 30a, while the remaining gas E is discharged from the lower end 42 of the second pipe body 30b. Part (the remaining gas E and the cleaning liquid 20 passing through the gas discharge port 12b) will flow down the first tube 30a due to the influence of gravity and return to the frame 24 from its lower end 44.

In the above embodiment, although it is shown that a fan (not shown) for transporting the gas E is provided on the downstream side in the gas flow direction of the gas purification device 10 than the gas discharge port 26b, the fan may be provided as needed. , its installation position is not limited to the above type, for example, it may also be installed on the upstream side of the gas inlet 26a of the gas purification device 10 in the gas flow direction.

Of course, various other changes can be made within the scope that those skilled in the art can imagine.

10: Gas purification device 12: Shell cover 12a:Gas suction port 12b:Gas discharge port 12c: Inner cylinder component 12d: Liquid storage part 14: Impeller 16:Nozzle 18:Rotation axis 20:Cleaning liquid 22:demister E:gas

[Fig. 1] is an explanatory diagram showing an outline of a gas purification device according to an embodiment of the present invention. 2 is a partially notched plan view of a top plate of an impeller according to an embodiment of the present invention, in which a portion of the top plate is notched. [Fig. 3] is an explanatory diagram showing an outline of a gas purification device according to another embodiment of the present invention.

10: Gas purification device

12: Shell cover

12a:Gas suction port

12b:Gas discharge port

12c: Inner cylinder component

12d: Liquid storage part

14: Impeller

16:Nozzle

18:Rotation axis

20:Cleaning liquid

22:demister

24:Frame

26:top plate

26a:Gas inlet

26b:Gas discharge port

26c:Open your mouth

28:Inlet short pipe

30:Export double pipe

30a: 1st tube body

30b: 2nd tube body

32: Motor

34: Pipe wall

36: Bottom plate

38:Reducing tube

40: upper end

42:lower end

44:lower end

46:top plate

46a: Shaft hole

48:Blade

50: base plate

52: Fixed components

54: Breathable wall material

56: Drainage line

58:Piping system

E:gas

Claims (2)

A gas purification device is provided with: a casing (12), an impeller (14), and a nozzle (16); the casing (12) has a gas suction port (12a) opened on the bottom surface and a gas discharge port (12a) opened on the side. 12b); the above-mentioned impeller (14) is fixed to the rotation axis (18) arranged along the vertical direction inside the above-mentioned casing (12), and rotates around the above-mentioned rotation axis (18); the above-mentioned nozzle (16) will clean the The liquid (20) is sprayed into the above-mentioned impeller (14); the above-mentioned impeller (14) is rotated and the gas (E) to be processed is inhaled into the above-mentioned casing (12) through the above-mentioned gas inlet (12a), so as to pass the above-mentioned gas suction port (12a). The above-mentioned cleaning liquid (20) sprayed by the nozzle (16) purifies the above-mentioned gas (E) and then discharges it from the above-mentioned gas discharge port (12b); it is characterized by: having an inner cylinder member (12c); the above-mentioned inner cylinder member (12c) 12c) protrudes upward in the vertical direction from the periphery of the gas inlet (12a), and its upper end is set at a height that does not contact the lower end of the impeller (14); between the inner cylinder member (12c) and the casing A liquid storage part (12d) is provided between the inner surfaces of the side walls of (12). The liquid storage part (12d) is used for the cleaning liquid (20) sprayed from the above-mentioned nozzle (16) and passed through the above-mentioned impeller (14). Temporarily store; a part of the gas (E) discharged from the gas discharge port (12b) to the outside of the casing (12) is returned to the gas inlet (12a). The gas purification device of claim 1, wherein a demister (22) is provided on the side peripheral surface of the impeller (14).