TW202033261A - Exhaust gas purifier and exhaust gas detoxifier in which same is used - Google Patents

Exhaust gas purifier and exhaust gas detoxifier in which same is used Download PDF

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TW202033261A
TW202033261A TW108127454A TW108127454A TW202033261A TW 202033261 A TW202033261 A TW 202033261A TW 108127454 A TW108127454 A TW 108127454A TW 108127454 A TW108127454 A TW 108127454A TW 202033261 A TW202033261 A TW 202033261A
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exhaust gas
exhaust
impeller
dust
purification device
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TW108127454A
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Chinese (zh)
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TWI704953B (en
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今村啓志
原口秀夫
佐藤康弘
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日商康肯環保設備有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L15/00—Heating of air supplied for combustion
    • F23L15/04—Arrangements of recuperators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/34—Indirect CO2mitigation, i.e. by acting on non CO2directly related matters of the process, e.g. pre-heating or heat recovery

Abstract

The present invention provides an exhaust gas purifier capable of improving the rate of removal of, inter alia, fine dust in exhaust gas. Specifically, this exhaust gas purifier comprises a casing (12) having an exhaust gas intake port (12a) and an exhaust gas discharge port (12b), an impeller (14) disposed in the casing (12) and supported by a rotating shaft (18), and a nozzle (16) through which a cleaning solution (20) is ejected into the impeller (14), the impeller (14) being caused to rotate to draw in a dust-containing exhaust gas (E) via the exhaust gas intake port (12a), and the cleaning solution (20) ejected from the nozzle (16) being caused to capture the dust in the exhaust gas (E) to remove the dust included in the exhaust gas (E), wherein the exhaust gas purifying device is characterized in that the rotating shaft (18) is disposed vertically, the impeller (14) rotates horizontally, and the exhaust gas intake port (12a) opens in the bottom surface of the casing (12).

Description

排氣淨化裝置以及使用此裝置之排氣除害裝置Exhaust gas purification device and exhaust gas detoxification device using this device

本發明是關於：可很有效率地除去排氣中之細微的粉塵及洗淨液可溶性成分(以下，也簡稱為「粉塵等」)之排氣淨化裝置；以及使用這種裝置之排氣除害裝置。The present invention relates to: an exhaust gas purification device that can efficiently remove fine dust and detergent soluble components (hereinafter, also referred to as "dust, etc.") in exhaust gas; and exhaust gas removal devices using this device Harm device.

習知的這種排氣淨化裝置，係有下列的專利文獻1(日本國特開2003-144826號公報)所揭示的風扇型除塵機。這種習知技術是具有下列的構成要素。 具備：具有排氣吸入口及排氣吐出口之外殼；配置在該外殼內之可旋轉的葉輪；以及對於該葉輪內噴出洗淨液之噴嘴。將來自排氣吸入口之含有粉塵的排氣吸入上述葉輪的中心部的同時，又從噴嘴噴出洗淨液，利用該洗淨液的微粒來捕捉含在排氣中的粉塵，進而將該排氣中的粉塵予以除去的時候，係在外殼內之葉輪的近乎整個周圍呈連續地配置有一個撞擊板，可供從該葉輪出來的排氣及洗淨液的微粒衝撞到該撞擊板。A conventional exhaust purification device of this kind is a fan-type dust collector disclosed in the following Patent Document 1 (Japanese Patent Laid-Open No. 2003-144826). This conventional technology has the following constituent elements. Equipped with: a housing with an exhaust suction port and an exhaust outlet; a rotatable impeller arranged in the housing; and a nozzle for spraying cleaning liquid into the impeller. While sucking the dust-containing exhaust gas from the exhaust suction port into the center of the impeller, the cleaning liquid is sprayed from the nozzle. The particles of the cleaning liquid are used to capture the dust contained in the exhaust gas, and then the exhaust When the dust in the air is removed, an impact plate is continuously arranged around the impeller in the casing, and particles of the exhaust gas and cleaning liquid from the impeller can collide with the impact plate.

根據上述習知技術，因為是在外殼內之葉輪的近乎整個周圍配置了可供從該葉輪出來的排氣及洗淨液的微粒進行衝撞的撞擊板，因而從葉輪出來排氣及洗淨液的微粒將會衝撞該撞擊板，而會在該葉輪之近乎整個周圍都產生亂流。並且因為這個亂流的緣故，在排氣與洗淨液的微粒進行混合時、還有在較大的洗淨液的液滴衝撞到撞擊板時，將會促進飛濺之細微液滴的生成，進而可提昇排氣中之細微的粉塵等的除去率。 [先前技術文獻] [專利文獻]According to the above-mentioned conventional technology, because the impeller in the casing is provided with an impact plate that can collide with the particles of the exhaust gas and the cleaning liquid from the impeller, the exhaust gas and the cleaning liquid are discharged from the impeller. The particles will collide with the impact plate, and turbulence will be generated almost all around the impeller. And because of this turbulent flow, when the exhaust gas is mixed with the particles of the cleaning liquid, and when the larger liquid droplets collide with the impact plate, it will promote the formation of splashing fine droplets. Furthermore, the removal rate of fine dust in the exhaust gas can be improved. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本特開2003-144826號公報[Patent Document 1] JP 2003-144826 A

[發明所欲解決的技術課題][Technical Problem to be Solved by Invention]

然而，上述的習知技術係存在著下列的問題。 雖然是在外殼內之葉輪的近乎整個外周配置了撞擊板，但是，即使沒有設置撞擊板，也會因為從葉輪送出來的排氣及洗淨液之微粒與外殼的內壁進行撞擊，而可獲得與配置了該撞擊板的情況大致上相同的效果，因此還是存在著：其除去粉塵的效率並沒有提昇到達原本所期待的程度之問題。 其次，在外殼內設置了這種固定式的撞擊板的情況下，被洗淨液所捕捉到的粉塵將會逐漸地堆積在這個撞擊板的表面上，最壞的情況下，則是必須將裝置停止運轉而做定期性且頻繁地實施維修保養，這個也算是其中的一種問題。 此外，從葉輪送出的排氣，其全部的排氣量是全都經由排氣吐出口的單一通道排放到外部，因此，在這個裝置的後面如果未設置另外一個排氣處理裝置的情況下，依然還是會有：將含有許多粉塵的排氣排放到大氣中之問題。However, the above-mentioned conventional technology has the following problems. Although the impeller in the casing is equipped with an impact plate on almost the entire outer circumference, even if there is no impact plate, the particles of the exhaust gas and cleaning liquid sent from the impeller collide with the inner wall of the casing. The effect is almost the same as that in the case where the impact plate is arranged. Therefore, there is still a problem that the efficiency of removing dust is not improved to the originally expected level. Secondly, when such a fixed impact plate is installed in the housing, the dust captured by the cleaning solution will gradually accumulate on the surface of the impact plate. In the worst case, it must be The device is shut down and maintenance is performed regularly and frequently. This is also one of the problems. In addition, all of the exhaust gas sent from the impeller is discharged to the outside through a single channel of the exhaust outlet. Therefore, if another exhaust treatment device is not installed behind this device, it is still There will still be the problem of discharging exhaust gas containing a lot of dust into the atmosphere.

有鑑於此，本發明之主要目的是要提供：可提昇排氣中的細微的粉塵等的除去率之排氣淨化裝置；以及使用了這種裝置之排氣的除害效率優異的排氣除害裝置。 [用以解決課題之技術方案]In view of this, the main purpose of the present invention is to provide: an exhaust gas purification device that can improve the removal rate of fine dust and the like in the exhaust gas; and an exhaust gas purification device that uses such a device to have excellent detoxification efficiency. Harm device. [Technical solution to solve the problem]

為了達成上述目的，本發明的排氣淨化裝置10係如第1圖及第2圖所示般地，具有下列的構成要件。 亦即，本發明的排氣淨化裝置10係具備：具有排氣吸入口12a及排氣吐出口12b之外殼12；配置在該外殼12內，並且被支承在旋轉軸18上的葉輪14；以及用來將洗淨液20噴出到該葉輪14內之噴嘴16；並且是使上述葉輪14進行旋轉而經由上述排氣吸入口12a吸入含有粉塵及洗淨液可溶性成分之排氣E，利用從上述噴嘴16噴出的洗淨液20來捕捉含在排氣E中的粉塵及洗淨液可溶性成分，而將含在排氣E中的這些成分予以除去。其特徵為：將上述旋轉軸18配置在鉛直方向上，來使上述葉輪14在水平方向上進行旋轉，並且將上述排氣吸入口12a開設在上述外殼12的底面。In order to achieve the above-mentioned object, the exhaust purification device 10 of the present invention has the following constituent elements as shown in Figs. 1 and 2. That is, the exhaust purification device 10 of the present invention includes: a housing 12 having an exhaust gas suction port 12a and an exhaust gas discharge port 12b; an impeller 14 arranged in the housing 12 and supported on a rotating shaft 18; and The nozzle 16 is used to spray the cleaning solution 20 into the impeller 14; and the impeller 14 is rotated to inhale exhaust gas E containing dust and soluble components of the cleaning solution through the exhaust suction port 12a, and use The cleaning liquid 20 sprayed from the nozzle 16 captures the dust contained in the exhaust gas E and the soluble components of the cleaning liquid, and removes these components contained in the exhaust gas E. It is characterized in that the rotating shaft 18 is arranged in the vertical direction to rotate the impeller 14 in the horizontal direction, and the exhaust suction port 12a is opened on the bottom surface of the housing 12.

本發明的排氣淨化裝置10，係可達成例如：下列的作用。 用來支承葉輪14的旋轉軸18是配置在朝鉛直方向上，而使得上述葉輪14在水平方向上進行旋轉，因此從葉輪14送出的排氣E及洗淨液20是一邊進行氣液接觸一邊朝水平方向飛濺，並且朝向外殼12的內壁進行撞擊。如此一來，撞擊到該內壁的壁面上之洗淨液20以及被該洗淨液20所捕捉到的粉塵，將會因為反覆地進行上述的撞擊，而導致其粒徑逐漸變大，其結果，將會因為重力而沿著內壁往下流。此外，在這個粒徑逐漸變大的同時，洗淨液可溶性成分將會溶解且累積在洗淨液20內。此外，因為是在外殼12的底面開設了排氣吸入口12a，因而在外殼12的內壁面所累積的洗淨液20和被洗淨液20所捕捉到的粉塵及洗淨液可溶性成分的大部分將會經由該排氣吸入口12a而排出到外殼12的外部。The exhaust purification device 10 of the present invention can achieve, for example, the following functions. The rotating shaft 18 for supporting the impeller 14 is arranged in the vertical direction, so that the impeller 14 rotates in the horizontal direction. Therefore, the exhaust gas E and the cleaning solution 20 sent from the impeller 14 are in contact with each other while gas-liquid It splashes in the horizontal direction and strikes toward the inner wall of the housing 12. As a result, the cleaning solution 20 that hits the wall surface of the inner wall and the dust captured by the cleaning solution 20 will gradually increase in particle size due to repeated impacts. As a result, it will flow down the inner wall due to gravity. In addition, as the particle size gradually increases, the soluble components of the cleaning solution will dissolve and accumulate in the cleaning solution 20. In addition, because the exhaust suction port 12a is opened on the bottom surface of the housing 12, the cleaning solution 20 accumulated on the inner wall surface of the housing 12 and the dust captured by the cleaning solution 20 and the soluble components of the cleaning solution are large. Part will be discharged to the outside of the housing 12 through the exhaust suction port 12a.

在本發明中，優選是在前述葉輪14的側周面配設有網狀聚結器22為宜。 在這種情況下，係可更一步促進被葉輪14所吸引的排氣E與洗淨液20的氣液接觸，而可更提昇洗淨液20捕捉粉塵及洗淨液可溶性成分的效率。 此外，因為是將網狀聚結器22配設在葉輪14的側周面上，因此這個網狀聚結器22一直都有離心力作用在其身上。因此，可很有效地預防由排氣E中的粉塵所導致的這個網狀聚結器22之網孔的堵塞。In the present invention, it is preferable to arrange the mesh coalescer 22 on the side peripheral surface of the impeller 14 described above. In this case, the exhaust gas E attracted by the impeller 14 can be further promoted to contact the gas and liquid of the cleaning solution 20, and the efficiency of the cleaning solution 20 in capturing dust and the soluble components of the cleaning solution can be further improved. In addition, because the net-like coalescer 22 is arranged on the side circumferential surface of the impeller 14, the net-like coalescer 22 always has centrifugal force acting on it. Therefore, the clogging of the mesh of the mesh coalescer 22 caused by the dust in the exhaust gas E can be effectively prevented.

此外，在本發明中，優選是將從前述排氣吐出口12b排出到外殼12的外部之排氣E的一部分再度送回到前述排氣吸入口12a內為宜。 在這種情況下，排氣E的一部分將會反覆地通過葉輪14，而可更進一步地提昇排氣E中的粉塵及洗淨液可溶性成分之除去率。In addition, in the present invention, it is preferable that a part of the exhaust gas E discharged from the exhaust gas outlet 12b to the outside of the casing 12 is returned to the exhaust gas inlet 12a again. In this case, part of the exhaust gas E will pass through the impeller 14 repeatedly, and the removal rate of dust and detergent soluble components in the exhaust gas E can be further improved.

此外，本案的第2發明的排氣除害裝置，是具備：上述之本發明的排氣淨化裝置10；以及將排氣E予以熱分解的分解爐之排氣除害裝置，其特徵為：至少是在上述分解爐的前段，設置了上述排氣淨化裝置10。In addition, the exhaust gas detoxification device of the second invention of the present application includes: the above-mentioned exhaust gas purification device 10 of the present invention; and the exhaust gas detoxification device of a decomposition furnace that thermally decomposes exhaust gas E, and is characterized by: At least in the front stage of the decomposition furnace, the exhaust gas purifying device 10 is installed.

根據這種發明，因為至少是在分解爐的前段設置了粉塵及洗淨液可溶性成分之除去效率極高的排氣淨化裝置10，因此即使分解爐是具備了由許多小口徑的配管所構成的多管式熱交換器等的情況下，也是可以很有效地防止粉塵堆積在這種配管內，其結果，係可提昇排氣的除害效率。According to this invention, because the exhaust gas purification device 10 with extremely high removal efficiency of dust and washing liquid soluble components is installed at least at the front stage of the decomposition furnace, even if the decomposition furnace is equipped with many small-diameter pipes In the case of multi-tube heat exchangers, etc., it is also possible to effectively prevent dust from accumulating in such piping, and as a result, it is possible to improve the detoxification efficiency of exhaust gas.

此外，本發明優選是再附加上記載於後述的實施方式中之特有的構成要件為宜。 [發明之效果]In addition, it is preferable for the present invention to further add specific constituent elements described in the embodiments described later. [Effects of Invention]

根據本發明，係可提供：可提昇排氣中的細微的粉塵等之除去率的排氣淨化裝置；以及使用了這種裝置之排氣的除害效率優異的排氣除害裝置。According to the present invention, it is possible to provide: an exhaust gas purification device that can improve the removal rate of fine dust and the like in the exhaust gas; and an exhaust gas purification device that uses such a device to have an excellent exhaust gas purification efficiency.

佐以第1圖及第2圖來說明本發明的其中一種實施方式如下。 第1圖是顯示本發明的其中一種實施方式的排氣淨化裝置10的概要之說明圖。如第1圖所示，本實施方式的排氣淨化裝置10是在不鏽鋼之類的金屬製的氣密且堅固的槽體24內收容著：具有排氣吸入口12a及排氣吐出口12b之外殼12；配置在該外殼12內並且被支承於旋轉軸18上之葉輪14；以及用來將洗淨液20噴出到該葉輪14內之噴嘴16，而構成的。此外，這個槽體24的形狀並未特別地限定，可以是四角柱狀，也可以是圓柱狀。在圖示的實施方式中，槽體24是形成四角柱狀，在構成其頂面的頂部板26的對角線上之互相分開的位置上，係穿設著：排氣導入口26a及排氣排出口26b。在排氣導入口26a係嵌插著進氣短管28，該進氣短管28係用來與連通於未圖示的排氣發生源的配管進行連接。在排氣排出口26b則是嵌插著排氣用雙重管30，該排氣用雙重管30係用來將已經處理過的排氣E排出到槽體24的外部。至於這個排氣用雙重管30的構造，容後詳細說明。One of the embodiments of the present invention will be described with reference to Figures 1 and 2 as follows. Fig. 1 is an explanatory diagram showing the outline of an exhaust purification device 10 according to one embodiment of the present invention. As shown in Figure 1, the exhaust purification device 10 of the present embodiment is housed in an airtight and strong tank body 24 made of metal such as stainless steel: one of which has an exhaust inlet 12a and an exhaust outlet 12b The casing 12; the impeller 14 arranged in the casing 12 and supported on the rotating shaft 18; and the nozzle 16 used to spray the cleaning liquid 20 into the impeller 14, and constituted. In addition, the shape of the groove body 24 is not particularly limited, and it may be a square column shape or a cylindrical shape. In the illustrated embodiment, the trough body 24 is formed in a quadrangular column shape, and at positions separated from each other on the diagonal of the top plate 26 constituting the top surface, the exhaust inlet 26a and the exhaust Discharge outlet 26b. A short intake pipe 28 is inserted into the exhaust inlet 26a, and the short intake pipe 28 is connected to a pipe communicating with an exhaust gas generating source (not shown). In the exhaust outlet 26b, a double exhaust pipe 30 is inserted, and the exhaust double pipe 30 is used to discharge the processed exhaust gas E to the outside of the tank 24. As for the structure of this double exhaust pipe 30, it will be described in detail later.

在頂部板26之中央部設有開口26c，並且在該頂部板26中央的上部設置了：以將旋轉軸18穿插過該開口26c的狀態下來旋轉驅動葉輪14之馬達32。 在這個頂部板26之中央下部，垂設著：短圓筒狀的管壁34也就是當作外殼12之側周壁的管壁34。因此，在本實施方式中，係將槽體24之頂部板26的中央部分兼用作為外殼12的頂部板。又，先在管壁34內收容著後述之葉輪14之後，在上述管壁34的下端部安裝一個在中央開設有作為排氣吸入口12a的開口之呈環狀的底板36，即可完成了外殼12的組裝。並且在靠近外殼12的側周壁也就是管壁34之排氣排出口26b的位置，穿設了一個與上述排氣用雙重管30相連通，可將通過了葉輪14之後的排氣E從外殼12內往外吐出之排氣吐出口12b。An opening 26c is provided at the center of the top plate 26, and at the upper part of the center of the top plate 26 is provided a motor 32 that rotates and drives the impeller 14 in a state where the rotating shaft 18 is inserted through the opening 26c. At the lower central part of the top plate 26, there is a short cylindrical tube wall 34, which is the tube wall 34 serving as the side peripheral wall of the housing 12. Therefore, in this embodiment, the central part of the top plate 26 of the tank body 24 is also used as the top plate of the housing 12. In addition, after the impeller 14 described later is housed in the pipe wall 34, a ring-shaped bottom plate 36 with an opening as the exhaust suction port 12a at the center is installed on the lower end of the pipe wall 34 to complete the process. Assembly of the housing 12. And at the position close to the side wall of the casing 12, that is, the exhaust outlet 26b of the pipe wall 34, a double pipe 30 for exhaust is provided to communicate with the above-mentioned exhaust gas E, which can remove the exhaust gas E from the casing after passing through the impeller 14 12 Exhaust gas outlet 12b for venting from inside to outside.

此處，針對於與排氣吐出口12b相連通的排氣用雙重管30進一步詳細說明的話，這個排氣用雙重管30係具備：短管狀的第1管體30a與第2管體30b，該第1管體30a是嵌插在排氣排出口26b並且利用其本身的側周面來與排氣吐出口12b相連通；而該第2管體30b，其上部是由與第1管體30a相同口徑的管體所構成，透過異徑管接頭38將其下部的口徑縮小，並且將縮徑後的下部從第1管體30的上側插入到其內部，且將第1管體30a的上端40予以氣密性地封閉起來。而第2管體30b的下端42是配置在較之排氣吐出口12b的下端更下側，且較之第1管體30a的下端44更上側的位置。因此，從排氣吐出口12b吐出來的排氣E的其中一部分將會從第2管體30b的下端42往第2管體30b內流入(逆流而上)，而其餘的部分(排氣E之其餘部分以及已經通過排氣吐出口12b後的洗淨液20)將會受到重力的影響而沿著第1管體30a往下流動，而從第1管體30a的下端44回到槽體24內。此外，在已經通過了葉輪14且從排氣吐出口12b吐出後的排氣E之中，到底是要將多少的量給送到第2管體30b這一側呢?則是可以藉由將例如：槽體24的容量、可使葉輪14旋轉之馬達32的迴轉數、第1管體30a及/或第2管體30b的長度、口徑等等的各種參數做適當的設定來進行調節。Here, the exhaust double pipe 30 communicating with the exhaust outlet 12b will be described in further detail. This exhaust double pipe 30 is provided with a short tubular first pipe body 30a and a second pipe body 30b, The first tube 30a is inserted into the exhaust outlet 26b and communicates with the exhaust outlet 12b by its own side surface; and the second tube 30b is connected to the first tube at its upper part. 30a is composed of a pipe body of the same diameter, the diameter of the lower part is reduced through the reducing pipe joint 38, and the reduced diameter is inserted from the upper side of the first pipe body 30 into its interior, and the first pipe body 30a The upper end 40 is hermetically closed. On the other hand, the lower end 42 of the second pipe body 30b is arranged at a position lower than the lower end of the exhaust gas outlet 12b and higher than the lower end 44 of the first pipe body 30a. Therefore, part of the exhaust gas E discharged from the exhaust gas outlet 12b will flow into the second tube body 30b from the lower end 42 of the second tube body 30b (backflow up), and the rest (exhaust gas E) The remaining part and the cleaning solution 20) that has passed through the exhaust outlet 12b will be affected by gravity and flow down the first pipe 30a, and return to the tank from the lower end 44 of the first pipe 30a. Within 24. In addition, of the exhaust gas E that has passed through the impeller 14 and is discharged from the exhaust gas outlet 12b, how much is it to be sent to the second pipe body 30b side? For example, various parameters such as the capacity of the tank body 24, the number of revolutions of the motor 32 that can rotate the impeller 14, the length and the diameter of the first tube body 30a and/or the second tube body 30b, etc. are adjusted by appropriate settings.

葉輪14是具備：圓盤狀的頂部板46；在頂部板46的周緣部的下面，相對於該頂部板46的半徑方向以一定的角度形成傾斜並且是以既定的間隔均等地配置在該頂部板46的外周部之葉片板48；以及用來將該葉片板48的下端部彼此連結在一起之呈環狀的底板50(請參照第2圖)。 在上述頂部板46的中央部係穿設有一個可供旋轉軸18穿插過去的軸孔46a，將旋轉軸18穿插過這個軸孔46a之後的葉輪14係如第1圖所示般地，係從旋轉軸18的前端側安裝了一個固定構件52，藉以固定於該旋轉軸18上。The impeller 14 is provided with: a disk-shaped top plate 46; on the lower surface of the peripheral portion of the top plate 46, the top plate 46 is inclined at a certain angle with respect to the radial direction of the top plate 46 and is evenly arranged on the top at a predetermined interval The blade plate 48 on the outer periphery of the plate 46; and the annular bottom plate 50 for connecting the lower ends of the blade plate 48 to each other (please refer to FIG. 2). A shaft hole 46a through which the rotating shaft 18 can be inserted is inserted in the center of the top plate 46. The impeller 14 after the rotating shaft 18 is inserted through the shaft hole 46a is as shown in Figure 1. A fixing member 52 is installed from the front end side of the rotating shaft 18 so as to be fixed to the rotating shaft 18.

本實施方式的葉輪14，是在頂部板46的外周緣與底板50的外周緣之間的整個外周圍，都架設著：由全面性地打孔之不鏽鋼穿孔薄板之類的透氣性壁材54，並且在其內側配設了網狀聚結器22。 此處所稱的「網狀聚結器22」，係指例如：為了既可減少壓力損失又可增大與流體的接觸面而將金屬線、樹脂單絲之類的細線堆疊成複數層而形成毛毯狀之液滴分離器的其中一種。本發明所使用的網狀聚結器22的種類並未特別地限定，係可使用篩網狀聚結器或鐵絲網狀聚結器等。In the impeller 14 of this embodiment, the entire outer periphery between the outer peripheral edge of the top plate 46 and the outer peripheral edge of the bottom plate 50 is erected: a permeable wall material 54 such as a stainless steel perforated sheet that is perforated comprehensively. , And a mesh coalescer 22 is arranged inside. The "mesh coalescer 22" referred to here refers to, for example, that thin wires such as metal wires and resin monofilaments are stacked in multiple layers in order to reduce the pressure loss and increase the contact surface with the fluid. One of the carpet-like droplet separators. The type of the mesh coalescer 22 used in the present invention is not particularly limited, and a mesh coalescer, a wire mesh coalescer, or the like can be used.

噴嘴16是用來將洗淨液20噴出到葉輪14內，而且是其噴頭部分配設在葉輪14的底部附近之噴霧型噴嘴。從這個噴嘴16所噴出的洗淨液20是可因應處理對象物之排氣E的種類來做合宜的設定。本實施方式所舉出的例子，係採用從槽體24的外部所供給的水(洗淨水)來當作這個洗淨液20。 此外，本實施方式的排氣淨化裝置10，從噴嘴16所噴出的洗淨液20的大多數，是伴隨著例如：SiO2 之類的粉塵、例如：氯氣(Cl2 )之類的水溶性成分(洗淨液可溶性成分)沿著槽體24內面往下流，而累積在該槽體24的底部。因此，是在槽體24的底部安裝著：排液用的管線56、以及用來調整累積的洗淨液20的液面高度之配管系58等。此處，可藉由洽當地操作用來調整累積在槽體24底部之洗淨液20的液面之配管系58或者洽當地調整從噴嘴16所噴出的洗淨液20(洗淨水)的量，即使在於例如：利用洗淨液20來吸收含在排氣E中之大量的氯氣(Cl2 )而將其削減到達TLV(閾限值；Threshold Limit Values)以下的濃度的情況下，還是能夠將流下到槽體24底部之洗淨液20的含氯濃度抑制在極低濃度的水準，其結果，被當成廢液處分而從槽體24底部排放出來的洗淨液20，不必再經過廢水處理，直接就可以流放到排水溝。The nozzle 16 is used to spray the cleaning liquid 20 into the impeller 14, and is a spray type nozzle whose spray head is distributed near the bottom of the impeller 14. The cleaning liquid 20 sprayed from this nozzle 16 can be appropriately set according to the type of exhaust E of the object to be processed. In the example given in this embodiment, water (washing water) supplied from the outside of the tank 24 is used as the washing liquid 20. In addition, in the exhaust purification device 10 of this embodiment, most of the cleaning liquid 20 sprayed from the nozzle 16 is accompanied by, for example, SiO 2 and other dust, such as chlorine gas (Cl 2 ), and other water-soluble water. The components (the soluble components of the washing liquid) flow downward along the inner surface of the tank body 24 and accumulate at the bottom of the tank body 24. Therefore, at the bottom of the tank 24, a pipe 56 for draining a liquid, a piping 58 for adjusting the height of the accumulated cleaning liquid 20, and the like are installed. Here, the piping system 58 used to adjust the liquid level of the washing liquid 20 accumulated at the bottom of the tank 24 can be adjusted by a local operation or the washing liquid 20 (washing water) sprayed from the nozzle 16 can be adjusted accordingly. Even if, for example, the cleaning liquid 20 is used to absorb a large amount of chlorine (Cl 2 ) contained in the exhaust gas E and reduce it to a concentration below TLV (Threshold Limit Values), it is still The chlorine concentration of the cleaning solution 20 flowing down to the bottom of the tank body 24 can be suppressed to an extremely low concentration level. As a result, the cleaning solution 20 discharged from the bottom of the tank body 24 as a waste liquid treatment does not need to pass through Waste water treatment can be directly discharged into the drainage ditch.

接下來，在使用具有上述的結構之本實施方式的排氣淨化裝置10的時候，首先一開始是對於馬達32供給電力使其進行作動，並且從噴嘴16噴出洗淨液20。如此一來，葉輪14將會依既定的迴轉數(例如：3000～4000rpm前後)進行高速旋轉，因而讓外殼12之排氣吸入口12a的附近產生負壓，同時又在排氣吐出口12b的附近產生朝向該排氣吐出口12b的正壓，進而使得外殼12內生成氣流。Next, when using the exhaust purification device 10 of the present embodiment having the above-mentioned structure, first, electric power is supplied to the motor 32 to operate it, and the cleaning liquid 20 is sprayed from the nozzle 16. As a result, the impeller 14 will rotate at a high speed at a predetermined number of revolutions (for example, around 3000 to 4000 rpm), so that negative pressure is generated near the exhaust suction port 12a of the casing 12, and at the same time, the exhaust port 12b A positive pressure toward the exhaust gas outlet 12b is generated in the vicinity, thereby generating airflow in the housing 12.

接下來，使得設置在較之排氣排出口26b更位於排氣流動方向的下游側之未圖示的風扇之類的吸氣裝置進行作動，開始將含有粉塵之排氣E導入到排氣淨化裝置10內。如此一來，經由進氣短管28而被導入到槽體24內之排氣E，將會從已經成為負壓的排氣吸入口12a進入到外殼12內，一方面與成為微粒狀態的洗淨液20進行接觸，一方面通過葉輪14，而朝向外殼12的側周壁也就是管壁34進行撞擊。 在本實施方式的排氣淨化裝置10中，因為是在葉輪14的側周面配設了網狀聚結器22，所以能夠更進一步促進被葉輪14所吸引的排氣E與洗淨液20之間的氣液接觸，而可提昇洗淨液20捕捉粉塵的效率及洗淨液20對於水溶性氣體的吸收效率。Next, an air suction device such as a fan (not shown) installed on the downstream side of the exhaust gas flow direction than the exhaust outlet 26b is activated to start introducing the exhaust gas E containing dust to the exhaust gas purification装置10内。 In the device 10. In this way, the exhaust gas E introduced into the tank body 24 through the short intake pipe 28 will enter the housing 12 from the exhaust suction port 12a that has become negative pressure, and on the one hand, it will be in a particulate state. The clean liquid 20 makes contact, on the one hand, it passes through the impeller 14 and strikes against the side wall of the casing 12, that is, the pipe wall 34. In the exhaust gas purification device 10 of the present embodiment, since the mesh coalescer 22 is arranged on the side peripheral surface of the impeller 14, the exhaust gas E and the cleaning liquid 20 sucked by the impeller 14 can be further promoted. The gas-liquid contact between the two can improve the efficiency of the cleaning solution 20 in capturing dust and the absorption efficiency of the cleaning solution 20 for water-soluble gas.

接下來，撞擊到管壁34的壁面(以下，也稱為「內壁面」)後的洗淨液20與被洗淨液20所捕捉到的排氣E中的粉塵，將會因為不斷反覆地重覆上述的撞擊而導致該粉塵的粒徑逐漸變大，其結果，將會因為重力而沿著內壁面往下流動。然後，在外殼12的內壁面累積的洗淨液20以及被洗淨液20所捕捉到的粉塵的大部分將會經由該排氣吸入口12a而排出到外殼12的外部。Next, the cleaning solution 20 that hits the wall surface of the pipe wall 34 (hereinafter, also referred to as the "inner wall surface") and the dust in the exhaust gas E captured by the cleaning solution 20 will continue to be repeatedly Repeating the above collisions causes the particle size of the dust to gradually increase, and as a result, it will flow downward along the inner wall surface due to gravity. Then, most of the washing liquid 20 accumulated on the inner wall surface of the casing 12 and most of the dust captured by the washing liquid 20 will be discharged to the outside of the casing 12 through the exhaust suction port 12a.

另一方面，洗淨液20以及大部分的粉塵已經被除去後的排氣E則是從排氣吐出口12b吐出到外殼12的外部。 在本實施方式的排氣淨化裝置10中，因為是在排氣排出口26b設置了上述的排氣用雙重管30，所以從排氣吐出口12b排出到外殼12的外部之排氣E的其中一部分會再度回到前述的排氣吸入口12a。因而，可以將排氣E的其中一部分不斷反覆地通過葉輪14，而可更進一步提昇排氣E中的粉塵之除去率。此外，在第1圖中，是以實線加箭頭來表示尚未通過葉輪14之排氣E的流動路徑，以虛線加箭頭來表示已經通過了葉輪14後之排氣E的流動路徑。On the other hand, the exhaust gas E from which the cleaning liquid 20 and most of the dust has been removed is discharged from the exhaust gas discharge port 12b to the outside of the housing 12. In the exhaust purification device 10 of the present embodiment, since the above-mentioned double exhaust pipe 30 is provided at the exhaust outlet 26b, the exhaust gas E discharged from the exhaust outlet 12b to the outside of the casing 12 A part will return to the aforementioned exhaust suction port 12a again. Therefore, a part of the exhaust gas E can be repeatedly passed through the impeller 14 and the dust removal rate in the exhaust gas E can be further improved. In addition, in Figure 1, the flow path of the exhaust gas E that has not passed through the impeller 14 is indicated by a solid line and an arrow, and the flow path of the exhaust gas E that has passed through the impeller 14 is indicated by a dotted line and an arrow.

再者，因為是將排氣用雙重管30之第2管體30b的下端42配置在較之排氣吐出口12b的下端更下側而且較之第1管體30a的下端44更上側的位置，因此可減少從槽體24內釋放出來的洗淨液20及粉塵。特別是想要更加抑制從槽體24內釋放出來的洗淨液20及粉塵的量的情況下，係在排氣用雙重管30之第2管體30b的內部也設置網狀聚結器等的裝置為宜。Furthermore, because the lower end 42 of the second pipe body 30b of the exhaust double pipe 30 is arranged below the lower end of the exhaust outlet 12b and above the lower end 44 of the first pipe body 30a Therefore, the washing liquid 20 and dust released from the tank body 24 can be reduced. In particular, when it is desired to further suppress the amount of cleaning solution 20 and dust released from the tank 24, a mesh coalescer etc. are also installed inside the second pipe body 30b of the exhaust double pipe 30 The device is suitable.

利用本實施方式的排氣淨化裝置10來進行排氣淨化處理之排氣E是從半導體製造工序所排出的氣體的情況下，優選是又與可將排氣E予以熱分解之分解爐組合在一起來構成排氣除害裝置為宜。用來作為上述分解爐的熱源，只要是能夠將爐內昇溫到達排氣E之熱分解溫度的話，無論是哪一種熱源均可，可適合採用例如：電熱式加熱器、火炎式燃燒裝置、非移動型或移動型的電漿炬等。又，如果熱分解爐是以小口徑的許多個配管所構成之具備多管式的熱交換器之高效率型熱分解爐的話，只要將本實施方式的排氣淨化裝置10至少設置在該分解爐的前段(換言之，上游側)的話，即可如以下所述般地，更進一步地彰顯兩者之相乘效果。亦即，本實施方式的排氣淨化裝置10係可從排氣E除去在排氣E內的粉塵中之主要的0.1μm起迄60μm程度的粉塵之95%以上，因此可以防止多管式的熱交換器中的配管堵塞，而可長期間穩定地將分解爐連續地進行運轉。其結果，可顯著地提昇排氣E的除害效率。In the case where the exhaust gas E to be subjected to the exhaust gas purification treatment by the exhaust gas purification device 10 of this embodiment is the gas discharged from the semiconductor manufacturing process, it is preferable to combine it with a decomposition furnace capable of thermally decomposing the exhaust gas E. It is advisable to form an exhaust detox device together. As the heat source of the above-mentioned calcining furnace, any heat source can be used as long as it can raise the temperature in the furnace to the thermal decomposition temperature of the exhaust gas E. For example, electric heaters, flame-type combustion devices, non-heating Mobile or mobile plasma torch, etc. In addition, if the thermal decomposition furnace is a high-efficiency thermal decomposition furnace with a multi-tube heat exchanger composed of a large number of small-diameter pipes, the exhaust gas purification device 10 of this embodiment should be installed at least in the decomposition furnace. In the front section of the furnace (in other words, the upstream side), the synergistic effect of the two can be further demonstrated as described below. That is, the exhaust gas purification device 10 of the present embodiment can remove 95% or more of dust from 0.1 μm to 60 μm, which is the main dust in the exhaust gas E, from the exhaust gas E, thereby preventing multi-tube The pipes in the heat exchanger are clogged, and the decomposition furnace can be continuously operated stably for a long period of time. As a result, the detoxification efficiency of exhaust gas E can be significantly improved.

再者，在上述的實施方式中所舉出之葉輪14的例子，是將葉片板48設置成：相對於頂部板46的半徑方向形成一定角度的傾斜，但並不限於此，例如：亦可如第3圖所示般地，將設置於葉輪14上的葉片板48的軸與半徑方向保持一致。 這種情況下，雖然將葉輪14進行高速旋轉時所產生的排氣E的吸引力是較之上述的實施方式更弱，但是，如果在葉輪14的側周面配設有網狀聚結器22的情況下，在這個網狀聚結器22內之排氣E及洗淨液20的滯留時間與移動距離則是變得比較長。如此一來，在這個網狀聚結器22內，排氣E與洗淨液20係可充分地進行氣液接觸，在利用洗淨液20來捕捉粉塵及洗淨液可溶性成分的捕捉效率之中，尤其是可以更進一步地提昇對於洗淨液可溶性成分的捕捉效率。Furthermore, in the example of the impeller 14 cited in the above-mentioned embodiment, the blade plate 48 is arranged to be inclined at a certain angle with respect to the radial direction of the top plate 46, but it is not limited to this, for example: As shown in FIG. 3, the axis of the blade plate 48 provided on the impeller 14 is aligned with the radial direction. In this case, although the suction force of the exhaust gas E generated when the impeller 14 is rotated at a high speed is weaker than that of the above-mentioned embodiment, if a mesh coalescer is provided on the side surface of the impeller 14 In the case of 22, the residence time and moving distance of the exhaust gas E and the cleaning solution 20 in the mesh coalescer 22 become relatively long. In this way, in this mesh coalescer 22, the exhaust gas E and the cleaning liquid 20 can be fully gas-liquid contact, and the cleaning liquid 20 is used to capture dust and the soluble components of the cleaning liquid. In particular, the efficiency of capturing the soluble components of the cleaning solution can be further improved.

此外，在上述的實施方式所舉出的嵌插在排氣排出口26b之排氣用雙重管30的例子，是由：在側周面與排氣吐出口12b相連通之短管狀的第1管體30a；以及從該第1管體30a的上側插入到其內部並且將第1管體30a的上端40予以氣密性地封閉的第2管體30b所構成的，但並不限定於此，例如：亦可採用如第4圖所示之由：在側周面與排氣吐出口12b相連通之短管狀的第1管體30a；與配設在該第1管體30a的內部，並且上端是直接連結在排氣吐出口12b而下端42是配置在較之排氣吐出口12b的下端更下側且較之第1管體30a的下端44更上側的位置之呈彎管形狀的第2管體30b所構成的排氣用雙重管30。 這種情況下，也是與上述的實施方式同樣地，從排氣吐出口12b吐出後的排氣E的其中一部分，從第2管體30b的下端42出來之後，隨即沿著第1管體30a內部逆流而上，其餘的部分(排氣E之其餘部分與通過排氣吐出口12b之後的洗淨液20)則是受到重力的影響而沿著第1管體30a往下流動而從其下端44流回到槽體24內。In addition, the example of the exhaust double pipe 30 inserted into the exhaust outlet 26b in the above-mentioned embodiment is composed of a short tube-shaped first pipe that communicates with the exhaust outlet 12b on the side surface. The pipe body 30a; and the second pipe body 30b that is inserted into the inside from the upper side of the first pipe body 30a and airtightly closes the upper end 40 of the first pipe body 30a, but it is not limited to this For example, as shown in Fig. 4, a short tube-shaped first pipe body 30a communicating with the exhaust outlet 12b on the side circumference can also be used; and the first pipe body 30a is arranged inside the first pipe body 30a, And the upper end is directly connected to the exhaust outlet 12b, and the lower end 42 is arranged at a position lower than the lower end of the exhaust outlet 12b and higher than the lower end 44 of the first pipe body 30a. The double pipe 30 for exhaust gas constituted by the second pipe body 30b. In this case, as in the above-mentioned embodiment, part of the exhaust gas E discharged from the exhaust gas outlet 12b exits the lower end 42 of the second pipe body 30b and then follows the first pipe body 30a. The interior flows upward, and the rest (the rest of the exhaust gas E and the cleaning liquid 20 after passing through the exhaust gas outlet 12b) are affected by gravity and flow downward along the first pipe body 30a from its lower end 44 flows back into the tank body 24.

此外，在上述的實施方式中，雖然是舉出在排氣淨化裝置10之較排氣排出口26b更位於排氣流動方向的下游側設置了用來給送排氣E之未圖示的風扇的例子，然而，這個風扇只是因應必要而設置的裝置，其設置的位置並不限定於上述的態樣，亦可以是設置在例如：排氣淨化裝置10之較排氣導入口26a更位於排氣流動方向的上游側。In addition, in the above-mentioned embodiment, although the exhaust purification device 10 is located on the downstream side of the exhaust gas flow direction than the exhaust outlet 26b, a fan (not shown) for feeding the exhaust gas E is provided. However, this fan is only a device set up as necessary, and its location is not limited to the above-mentioned aspect. For example, it may be set in the exhaust purification device 10, which is more located than the exhaust inlet 26a. The upstream side of the gas flow direction.

至於其他方面，當然也可以在此項行業者能夠想到的範圍內進行各種的變更。As for other aspects, of course, various changes can be made within the scope of this industry.

10:排氣淨化裝置 12:外殼 12a:排氣吸入口 12b:排氣吐出口 14:葉輪 16:噴嘴 18:旋轉軸 20:洗淨液 22:網狀聚結器 24:槽體 26:頂部板 26a:排氣導入口 26b:排氣排出口 26c:開口 28:進氣短管 30:排氣用雙重管 30a:第1管體 30b:第2管體 32:馬達 34:管壁 36:底板 38:異徑管接頭 40:上端 42:下端 44:下端 46:頂部板 46a:軸孔 48:葉片板 52:固定構件 54:透氣性壁材 56:管線 58:配管系 E:排氣10: Exhaust purification device 12: Shell 12a: Exhaust suction port 12b: Exhaust outlet 14: Impeller 16: nozzle 18: Rotation axis 20: Washing liquid 22: Mesh coalescer 24: tank 26: top plate 26a: Exhaust inlet 26b: Exhaust outlet 26c: opening 28: Short intake pipe 30: Double pipe for exhaust 30a: 1st tube body 30b: 2nd tube body 32: Motor 34: pipe wall 36: bottom plate 38: Reducing pipe joint 40: upper end 42: bottom 44: bottom 46: top plate 46a: Shaft hole 48: blade plate 52: fixed component 54: Breathable wall material 56: Pipeline 58: Piping system E: exhaust

第1圖是顯示本發明的其中一種實施方式的排氣淨化裝置的概要之說明圖。 第2圖是將本發明的其中一種實施方式中的葉輪的頂部板的其中一部分切除後之局部切除平面圖。 第3圖是將本發明的其他實施方式中的葉輪的頂部板的其中一部分切除後的局部切除平面圖。 第4圖是顯示本發明的其他實施方式的排氣淨化裝置的概要之說明圖。Fig. 1 is an explanatory diagram showing the outline of an exhaust gas purification device according to one embodiment of the present invention. Fig. 2 is a partial cutaway plan view of a part of the top plate of the impeller in one embodiment of the present invention. Fig. 3 is a partial cutaway plan view of a part of the top plate of the impeller in another embodiment of the present invention. Fig. 4 is an explanatory diagram showing the outline of an exhaust purification device according to another embodiment of the present invention.

10:排氣淨化裝置 10: Exhaust purification device

12:外殼 12: Shell

12a:排氣吸入口 12a: Exhaust suction port

12b:排氣吐出口 12b: Exhaust outlet

14:葉輪 14: Impeller

16:噴嘴 16: nozzle

18:旋轉軸 18: Rotation axis

20:洗淨液 20: Washing liquid

22:網狀聚結器 22: Mesh coalescer

24:槽體 24: tank

26:頂部板 26: top plate

26a:排氣導入口 26a: Exhaust inlet

26b:排氣排出口 26b: Exhaust outlet

26c:開口 26c: opening

28:進氣短管 28: Short intake pipe

30:排氣用雙重管 30: Double pipe for exhaust

30a:第1管體 30a: 1st tube body

30b:第2管體 30b: 2nd tube body

32:馬達 32: Motor

34:管壁 34: pipe wall

36:底板 36: bottom plate

38:異徑管接頭 38: Reducing pipe joint

40:上端 40: upper end

42:下端 42: bottom

44:下端 44: bottom

46:頂部板 46: top plate

46a:軸孔 46a: Shaft hole

48:葉片板 48: blade plate

52:固定構件 52: fixed component

54:透氣性壁材 54: Breathable wall material

56:管線 56: Pipeline

58:配管系 58: Piping system

E:排氣 E: exhaust

Claims (4)

一種排氣淨化裝置，其係具備： 具有排氣吸入口(12a)及排氣吐出口(12b)之外殼(12)； 配置在該外殼(12)內並且被支承在旋轉軸(18)之葉輪(14)；以及 用來將洗淨液(20)噴出到該葉輪(14)內之噴嘴(16)； 並且是使上述葉輪(14)進行旋轉而經由上述排氣吸入口(12a)吸入含有粉塵及洗淨液可溶性成分之排氣(E)，利用從上述噴嘴(16)噴出的洗淨液(20)來捕捉含在排氣(E)中的粉塵及洗淨液可溶性成分，而將含在排氣(E)中的這些成分予以除去之排氣淨化裝置，其特徵為： 將上述旋轉軸(18)配置在鉛直方向上，來使上述葉輪(14)在水平方向上進行旋轉，並且 將上述排氣吸入口(12a)開設在上述外殼(12)的底面。An exhaust purification device, which is provided with: A housing (12) with an exhaust air inlet (12a) and an exhaust air outlet (12b); The impeller (14) arranged in the casing (12) and supported on the rotating shaft (18); and The nozzle (16) used to spray the cleaning liquid (20) into the impeller (14); In addition, the impeller (14) is rotated to suck exhaust gas (E) containing dust and soluble components of the washing liquid through the exhaust suction port (12a), and the washing liquid (20) sprayed from the nozzle (16) is used. ) To capture the dust contained in the exhaust gas (E) and the soluble components of the cleaning liquid, and to remove these components contained in the exhaust gas (E), the exhaust purification device is characterized by: The rotation shaft (18) is arranged in the vertical direction to rotate the impeller (14) in the horizontal direction, and The exhaust suction port (12a) is opened on the bottom surface of the housing (12). 如申請專利範圍第1項所述的排氣淨化裝置，其中，在前述葉輪(14)的側周面配設有網狀聚結器(22)。The exhaust gas purification device described in the first item of the scope of patent application, wherein a mesh coalescer (22) is arranged on the side peripheral surface of the impeller (14). 如申請專利範圍第1項或第2項所述的排氣淨化裝置，其中，係將從前述排氣吐出口(12b)排出到外殼(12)外部的排氣(E)的一部分予以再度送回到前述排氣吸入口(12a)。The exhaust gas purification device described in item 1 or item 2 of the scope of patent application, wherein a part of the exhaust gas (E) discharged from the aforementioned exhaust gas outlet (12b) to the outside of the housing (12) is sent again Return to the aforementioned exhaust suction port (12a). 一種排氣除害裝置，其係具備：如申請專利範圍第1項至第3項之任一項所述的排氣淨化裝置；及對於排氣進行熱分解的分解爐之排氣除害裝置，其特徵為： 至少是在上述分解爐的前段，設置了上述排氣淨化裝置。An exhaust gas detoxification device comprising: the exhaust gas purification device as described in any one of items 1 to 3 in the scope of the patent application; and an exhaust gas detoxification device of a decomposition furnace that thermally decomposes exhaust gas , Its characteristics are: The exhaust gas purifying device is installed at least in the front stage of the calciner.
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