KR102418497B1 - 물품 수납 설비 - Google Patents

물품 수납 설비 Download PDF

Info

Publication number
KR102418497B1
KR102418497B1 KR1020160041596A KR20160041596A KR102418497B1 KR 102418497 B1 KR102418497 B1 KR 102418497B1 KR 1020160041596 A KR1020160041596 A KR 1020160041596A KR 20160041596 A KR20160041596 A KR 20160041596A KR 102418497 B1 KR102418497 B1 KR 102418497B1
Authority
KR
South Korea
Prior art keywords
storage
movable support
stop position
target stop
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020160041596A
Other languages
English (en)
Korean (ko)
Other versions
KR20160119714A (ko
Inventor
야스시 모리카와
Original Assignee
가부시키가이샤 다이후쿠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 다이후쿠 filed Critical 가부시키가이샤 다이후쿠
Publication of KR20160119714A publication Critical patent/KR20160119714A/ko
Application granted granted Critical
Publication of KR102418497B1 publication Critical patent/KR102418497B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
    • H01L21/6773—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
    • B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
    • B66F9/075—Constructional features or details
    • B66F9/0755—Position control; Position detectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
    • B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
    • B66F9/075—Constructional features or details
    • B66F9/20—Means for actuating or controlling masts, platforms, or forks
    • B66F9/24—Electrical devices or systems
    • H01L21/67712—
    • H01L21/67715—
    • H01L22/30—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3206—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3208—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/27—Structural arrangements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing & Machinery (AREA)
KR1020160041596A 2015-04-06 2016-04-05 물품 수납 설비 Active KR102418497B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015077897A JP6332115B2 (ja) 2015-04-06 2015-04-06 物品収納設備
JPJP-P-2015-077897 2015-04-06

Publications (2)

Publication Number Publication Date
KR20160119714A KR20160119714A (ko) 2016-10-14
KR102418497B1 true KR102418497B1 (ko) 2022-07-06

Family

ID=57016898

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160041596A Active KR102418497B1 (ko) 2015-04-06 2016-04-05 물품 수납 설비

Country Status (4)

Country Link
US (1) US9669996B2 (https=)
JP (1) JP6332115B2 (https=)
KR (1) KR102418497B1 (https=)
TW (1) TWI667180B (https=)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6891898B2 (ja) * 2016-10-07 2021-06-18 村田機械株式会社 自動倉庫
SG11201903280XA (en) * 2016-10-18 2019-05-30 Murata Machinery Ltd Stacker crane
JP6597551B2 (ja) * 2016-10-21 2019-10-30 株式会社ダイフク 物品搬送設備
EP3453646A1 (en) * 2017-09-11 2019-03-13 Nekos Oy System for storing storage units
JP6924112B2 (ja) * 2017-09-29 2021-08-25 川崎重工業株式会社 基板搬送装置及び基板搬送ロボットと基板載置部との位置関係を求める方法
DE202018006724U1 (de) 2017-11-14 2022-06-02 Hai Robotics Co., Ltd. Handhabungsroboter
US11396424B2 (en) 2017-11-14 2022-07-26 Hai Robotics Co., Ltd. Handling robot
US11465840B2 (en) 2017-11-14 2022-10-11 Hai Robotics Co., Ltd. Handling robot
US12006143B2 (en) 2017-11-14 2024-06-11 Hai Robotics Co., Ltd. Handling robot
US12103771B2 (en) 2017-11-14 2024-10-01 Hai Robotics Co., Ltd. Handling robot
US12330870B2 (en) 2017-11-14 2025-06-17 Hai Robotics Co., Ltd. Handling robot
US11542135B2 (en) 2019-02-01 2023-01-03 Hai Robotics Co., Ltd. Handling robot
US11597598B2 (en) 2019-02-01 2023-03-07 Hai Robotics Co., Ltd. Handling robot
JP7238612B2 (ja) * 2019-06-04 2023-03-14 村田機械株式会社 カメラの姿勢ずれ評価方法及びカメラシステム
JP7453114B2 (ja) * 2020-09-29 2024-03-19 株式会社Fuji 測定装置、移載装置、及び測定方法
CN114646498B (zh) * 2020-12-21 2025-06-17 山东金钟科技集团股份有限公司 一种巷道式一体化粮食智能快检系统自动留样装置
CN113086467B (zh) * 2021-03-24 2023-05-23 北京极智嘉科技股份有限公司 机器人以及基于机器人的料箱检测方法
JP7322924B2 (ja) * 2021-05-28 2023-08-08 株式会社ダイフク 物品収容設備
EP4116230A1 (en) * 2021-07-09 2023-01-11 Dematic GmbH Storage system with a multi-level storage rack, a vertical lift connecting the levels of the multi-level storage rack and method of operation
US12528645B2 (en) 2021-09-09 2026-01-20 Murata Machinery, Ltd. Traveling vehicle system and traveling vehicle
KR102685300B1 (ko) * 2021-12-28 2024-07-16 주식회사 인스턴 사용자 단말기와 연동되는 딥러닝 기반 스마트 자동물류 적재창고 시스템
KR102685530B1 (ko) * 2021-12-30 2024-07-15 국립금오공과대학교 산학협력단 처리속도가 향상된 딥러닝 기반 스마트 자동물류 적재창고 시스템
KR102668615B1 (ko) * 2022-01-17 2024-05-22 국립금오공과대학교 산학협력단 주변환경과 연동되는 딥러닝 기반 스마트 자동물류 적재창고 시스템
KR102896486B1 (ko) * 2022-12-02 2025-12-05 현대무벡스 주식회사 승강 판 수평 보정 방법
KR102838956B1 (ko) * 2022-12-02 2025-07-28 현대무벡스 주식회사 데이터 매트릭스 태그를 이용한 캐리지 정위치 제어 방법
CN116409573B (zh) * 2023-02-27 2025-09-30 极研生物(上海)有限公司 一种全自动样本低温存取系统
KR102944841B1 (ko) * 2023-10-23 2026-03-27 주식회사 에스에프에이 학습시간이 단축된 자동티칭 시스템 및 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002002909A (ja) * 2000-06-19 2002-01-09 Shinko Electric Co Ltd ストッカ用ロボットの教示確認方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940006241A (ko) * 1992-06-05 1994-03-23 이노우에 아키라 기판이재장치 및 이재방법
TW314630B (https=) * 1994-06-30 1997-09-01 Hitachi Ltd
JP2001225909A (ja) 2000-02-10 2001-08-21 Daifuku Co Ltd 荷出し入れ装置の学習方法
DE60235963D1 (de) * 2001-02-16 2010-05-27 Toyoda Automatic Loom Works Kamerahebevorrichtung und lasthandhabungstragvorrichtung eines hubwagens und hubwagen
JP4696373B2 (ja) * 2001-02-20 2011-06-08 東京エレクトロン株式会社 処理システム及び被処理体の搬送方法
WO2003062127A1 (en) * 2002-01-23 2003-07-31 Kabushiki Kaisha Toyota Jidoshokki Position control device and position control method of stevedoring apparatus in industrial vehicle
JP4573105B2 (ja) * 2004-12-10 2010-11-04 株式会社ダイフク 物品搬送装置
TW200736870A (en) * 2005-11-04 2007-10-01 Murata Machinery Ltd Control device for movable body
JP5170554B2 (ja) * 2008-09-29 2013-03-27 株式会社ダイフク 物品収納設備における学習装置
JP5524139B2 (ja) * 2010-09-28 2014-06-18 東京エレクトロン株式会社 基板位置検出装置、これを備える成膜装置、および基板位置検出方法
US9056719B2 (en) * 2011-03-29 2015-06-16 Murata Machinery, Ltd. Automatic storage system
JP5800193B2 (ja) * 2011-11-07 2015-10-28 株式会社ダイフク 物品収納設備
US9171278B1 (en) * 2013-09-25 2015-10-27 Amazon Technologies, Inc. Item illumination based on image recognition
US9959610B2 (en) * 2014-10-30 2018-05-01 Applied Materials, Inc. System and method to detect substrate and/or substrate support misalignment using imaging

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002002909A (ja) * 2000-06-19 2002-01-09 Shinko Electric Co Ltd ストッカ用ロボットの教示確認方法

Also Published As

Publication number Publication date
TW201643088A (zh) 2016-12-16
JP6332115B2 (ja) 2018-05-30
KR20160119714A (ko) 2016-10-14
JP2016196360A (ja) 2016-11-24
TWI667180B (zh) 2019-08-01
US20160289002A1 (en) 2016-10-06
US9669996B2 (en) 2017-06-06

Similar Documents

Publication Publication Date Title
KR102418497B1 (ko) 물품 수납 설비
US12145827B2 (en) Automatic guided vehicle for the handling of shuttles and/or loading units in automatic warehouses and related control method
CN109665307B (zh) 作业系统、对物品的作业实施方法以及机器人
US9352466B2 (en) Robot positioning system for semiconductor tools
KR101647923B1 (ko) 카세트 수납을 위한 스토커 및 그 내부에 배치된 스토커 로봇의 티칭 방법
JP7557954B2 (ja) 制御装置、移動制御システム、制御方法及びプログラム
KR20190002560A (ko) 자동 카세트 이송장치 및 카세트 홀딩을 위한 로봇 암.
US20130283594A1 (en) Component mounting method and component mounting apparatus
KR100680413B1 (ko) 로보트를 교시하는 로보트 교시용 프로그램, 및 이것에사용하는 카세트, 위치 측정 기구 및 이것들을 이용한로보트 작동 방법
JP6664830B2 (ja) 製造システム
CN105514010B (zh) 一种硅片安全运输方法
JP2003321102A (ja) 無人搬送車システム
CN112010176A (zh) 集卡自动抓放箱系统和集装箱装载纠正方法
KR20190047902A (ko) 호이스트 모듈의 위치 보정 방법
US12466074B2 (en) Image processing method, image processing apparatus, robot-mounted transfer device, and system
JP4468159B2 (ja) 基板処理装置及びその搬送位置合わせ方法
JP2020026339A (ja) 計測用カメラのキャリブレーション装置
JP5118896B2 (ja) 搬送ロボットシステム
JP2020193081A (ja) ティーチングシステム、搬送システム、及びティーチングデータ生成方法
US20170259997A1 (en) Method for a fully automatic and/or semiautomatic setup or calibration of a pick and/or place position
JP7633314B2 (ja) メモリモジュール実装テストシステム及び方法
JP7724684B2 (ja) 組み付け方法
TWI866306B (zh) 機器人系統及機器人
JP7582489B2 (ja) 天井搬送車システム
CN121332298A (zh) 一种充气式环网柜拼柜装置及方法

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000