KR102414029B1 - 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템 - Google Patents

로드 포트 및 로드 포트를 구비하는 기판 반송 시스템 Download PDF

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Publication number
KR102414029B1
KR102414029B1 KR1020170084623A KR20170084623A KR102414029B1 KR 102414029 B1 KR102414029 B1 KR 102414029B1 KR 1020170084623 A KR1020170084623 A KR 1020170084623A KR 20170084623 A KR20170084623 A KR 20170084623A KR 102414029 B1 KR102414029 B1 KR 102414029B1
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South Korea
Prior art keywords
load port
loading
door
container
loading part
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KR1020170084623A
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English (en)
Korean (ko)
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KR20180006312A (ko
Inventor
미츠오 나츠메
야스시 다니야마
마사요시 요시카와
Original Assignee
신포니아 테크놀로지 가부시끼가이샤
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Publication of KR20180006312A publication Critical patent/KR20180006312A/ko
Priority to KR1020220076561A priority Critical patent/KR102481186B1/ko
Application granted granted Critical
Publication of KR102414029B1 publication Critical patent/KR102414029B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020170084623A 2016-07-08 2017-07-04 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템 KR102414029B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020220076561A KR102481186B1 (ko) 2016-07-08 2022-06-23 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016136175A JP6882656B2 (ja) 2016-07-08 2016-07-08 ロードポート及びロードポートを備える基板搬送システム
JPJP-P-2016-136175 2016-07-08

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020220076561A Division KR102481186B1 (ko) 2016-07-08 2022-06-23 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템

Publications (2)

Publication Number Publication Date
KR20180006312A KR20180006312A (ko) 2018-01-17
KR102414029B1 true KR102414029B1 (ko) 2022-06-29

Family

ID=60946489

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020170084623A KR102414029B1 (ko) 2016-07-08 2017-07-04 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템
KR1020220076561A KR102481186B1 (ko) 2016-07-08 2022-06-23 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020220076561A KR102481186B1 (ko) 2016-07-08 2022-06-23 로드 포트 및 로드 포트를 구비하는 기판 반송 시스템

Country Status (4)

Country Link
JP (2) JP6882656B2 (zh)
KR (2) KR102414029B1 (zh)
CN (2) CN116978843A (zh)
TW (2) TWI765896B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10403514B1 (en) * 2018-04-12 2019-09-03 Asm Ip Holding B.V. Substrate transporting system, storage medium and substrate transporting method
JP7256358B2 (ja) * 2018-05-24 2023-04-12 シンフォニアテクノロジー株式会社 基板収納容器管理システム、基板収納容器管理方法
JP7085467B2 (ja) * 2018-12-11 2022-06-16 平田機工株式会社 ロードロックチャンバ
JP6856692B2 (ja) * 2019-03-28 2021-04-07 平田機工株式会社 ロードポート
CN110406910B (zh) * 2019-07-10 2021-02-02 深圳市华星光电半导体显示技术有限公司 高空环形台车系统
JP7422577B2 (ja) 2020-03-23 2024-01-26 平田機工株式会社 ロードポート及び制御方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013074183A (ja) * 2011-09-28 2013-04-22 Sinfonia Technology Co Ltd サイド用ロードポート、ｅｆｅｍ
JP2015035612A (ja) * 2014-09-24 2015-02-19 シンフォニアテクノロジー株式会社 ノズル駆動ユニットおよびガス注入装置

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JPS4816637B1 (zh) 1969-02-28 1973-05-23
US5443348A (en) * 1993-07-16 1995-08-22 Semiconductor Systems, Inc. Cassette input/output unit for semiconductor processing system
US5944475A (en) * 1996-10-11 1999-08-31 Asyst Technologies, Inc. Rotated, orthogonal load compatible front-opening interface
JPH11129175A (ja) * 1997-10-30 1999-05-18 Sankyo Seiki Mfg Co Ltd 多関節ロボット
JP4168724B2 (ja) 2002-10-15 2008-10-22 神鋼電機株式会社 ロードポート
US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
US20060045663A1 (en) * 2004-08-05 2006-03-02 Ravinder Aggarwal Load port with manual FOUP door opening mechanism
US20090053019A1 (en) * 2005-03-08 2009-02-26 Kabushiki Kaisha Yaskawa Denki Load port and load port control method
US8821099B2 (en) * 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
JP4904995B2 (ja) * 2006-08-28 2012-03-28 シンフォニアテクノロジー株式会社 ロードポート装置
JP4848916B2 (ja) * 2006-10-02 2011-12-28 シンフォニアテクノロジー株式会社 クランプ機構
US7585142B2 (en) * 2007-03-16 2009-09-08 Asm America, Inc. Substrate handling chamber with movable substrate carrier loading platform
JP5338335B2 (ja) * 2008-08-13 2013-11-13 東京エレクトロン株式会社 搬送容器の開閉装置及びプローブ装置
JP6038476B2 (ja) * 2012-04-07 2016-12-07 平田機工株式会社 基板収納用の容器の搬入出装置及び搬入出方法
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JP6260109B2 (ja) * 2013-05-16 2018-01-17 シンフォニアテクノロジー株式会社 ロードポート装置
JP5776828B1 (ja) * 2014-08-08 2015-09-09 Tdk株式会社 ガスパージユニット、ロードポート装置およびパージ対象容器の設置台
WO2016098930A1 (ko) * 2014-12-19 2016-06-23 주식회사 썬닉스 다방향 웨이퍼 이송 시스템

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Publication number Priority date Publication date Assignee Title
JP2013074183A (ja) * 2011-09-28 2013-04-22 Sinfonia Technology Co Ltd サイド用ロードポート、ｅｆｅｍ
JP2015035612A (ja) * 2014-09-24 2015-02-19 シンフォニアテクノロジー株式会社 ノズル駆動ユニットおよびガス注入装置

Also Published As

Publication number Publication date
JP6882656B2 (ja) 2021-06-02
JP2021119617A (ja) 2021-08-12
KR20180006312A (ko) 2018-01-17
CN107591352A (zh) 2018-01-16
TW201804556A (zh) 2018-02-01
KR20220097367A (ko) 2022-07-07
TW202234565A (zh) 2022-09-01
CN116978843A (zh) 2023-10-31
JP2018006705A (ja) 2018-01-11
JP7148825B2 (ja) 2022-10-06
CN107591352B (zh) 2023-08-15
KR102481186B1 (ko) 2022-12-26
TWI765896B (zh) 2022-06-01

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