JP6566051B2 - 保管装置及び搬送システム - Google Patents
保管装置及び搬送システム Download PDFInfo
- Publication number
- JP6566051B2 JP6566051B2 JP2017567975A JP2017567975A JP6566051B2 JP 6566051 B2 JP6566051 B2 JP 6566051B2 JP 2017567975 A JP2017567975 A JP 2017567975A JP 2017567975 A JP2017567975 A JP 2017567975A JP 6566051 B2 JP6566051 B2 JP 6566051B2
- Authority
- JP
- Japan
- Prior art keywords
- foup
- port
- container
- storage
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/16—Special arrangements of articles in storage spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Description
図1〜図5に示すように、第1実施形態の保管装置1は、複数の半導体ウェハを収容する容器としてのFOUP90を複数収納可能とされている。FOUP90は、SEMIスタンダードにおいて規定されている、ミニエンバイロメント方式の半導体製造工場で使用される300mm半導体ウェハ用の搬送及び保管等を目的としたキャリアである。本実施形態では一例として、FOUP90は、本体部91と、扉92と、フランジ部93と、一対の取っ手部94,94と、を備える。本体部91は、半導体ウェハを収容する箱状の筐体である。本体部91の前面側には、半導体ウェハを出し入れするための開口が設けられており、本体部91の背面側は、平面視上丸みを帯びた湾曲形状をなしている(図1参照)。扉92は、本体部91の開口を塞ぐ部材であり、本体部91に対して着脱自在とされている。フランジ部93は、本体部91の上面に設けられている。フランジ部93は、後述する天井搬送車10の把持機構11によって把持される部分である。取っ手部94,94は、本体部91の両側面に設けられている。作業者は、例えば、本体部91の背面側からFOUP90を抱え込み、取っ手部94を両手で掴んでFOUP90を持ち上げることにより、FOUP90を容易に持ち運ぶことができる。また、FOUP90の前後幅w1は、FOUP90の左右幅w2よりも小さい。
図6を用いて、第2実施形態の保管装置1Aについて説明する。保管装置1Aは、収納部3Aの左から2列目の最上段の棚がFOUP90の入庫又は出庫のためのポート32Cとして利用可能に構成されている点で、保管装置1と主に相違する。保管装置1Aでは、収納部3Aは、2つのポート32A,32Cを有する。ポート32Aとポート32Cとは、高さ位置(上下方向における位置)及び水平位置(左右方向における位置)の両方において互いに異なるように設けられている。具体的には、ポート32Cは、ポート32Aよりも1つ上の段の1つ右側の列に位置している。
Claims (6)
- 箱状の筐体であり前方に開口が設けられた本体部を有する容器であって前後幅が左右幅よりも小さい前記容器が載置される複数の棚を有し、水平方向である第1の方向に対向して配置される一対の収納部と、
前記一対の収納部の間に設けられ、前記一対の収納部の前記棚同士の間で前記容器を移載する移載装置と、を備え、
前記一対の収納部の各々において、同一の高さ位置に配置される前記複数の棚は、前記第1の方向に直交する水平方向である第2の方向に配列され、
前記移載装置は、前記複数の棚の各々に、前記容器の前面が前記第2の方向を向く状態で前記容器を載置する、
保管装置。 - 前記移載装置は、前記一対の収納部のうち一方の収納部の前記棚から受け取った前記容器を180度水平旋回させて、前記一対の収納部のうち他方の収納部の前記棚へ受け渡す、
請求項1に記載の保管装置。 - 前記一対の収納部の各々は、前記第1の方向に沿って前記容器を搬送する天井搬送車がアクセス可能なポートを有し、
一方の前記収納部の前記ポートは、当該ポートに載置された前記容器を180度水平旋回させる旋回機構を有する、
請求項2に記載の保管装置。 - 前記一対の収納部のうち一方の収納部の前記ポートは、入庫用のポートであり、
前記一対の収納部のうち他方の収納部の前記ポートは、出庫用のポートである、
請求項3に記載の保管装置。 - 前記一対の収納部のうち少なくとも一方の前記収納部は、
前記容器を搬送する天井搬送車が所定の停止位置において前記容器を上下方向に移動させることで、前記容器の入庫又は出庫が行われる第1のポートと、
前記天井搬送車が前記所定の停止位置において前記容器を水平方向及び上下方向に移動させることで、前記容器の入庫又は出庫が行われる第2のポートと、を有する、
請求項1又は2に記載の保管装置。 - 請求項1に記載の保管装置と、
前記一対の収納部のうち少なくとも一方の収納部にアクセス可能であり、前記容器の前面が前記第2の方向を向く状態で該容器を前記第1の方向に沿って搬送する天井搬送車と、
を含む搬送システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016025471 | 2016-02-15 | ||
JP2016025471 | 2016-02-15 | ||
PCT/JP2016/089084 WO2017141555A1 (ja) | 2016-02-15 | 2016-12-28 | 保管装置及び搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017141555A1 JPWO2017141555A1 (ja) | 2018-06-28 |
JP6566051B2 true JP6566051B2 (ja) | 2019-08-28 |
Family
ID=59625806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017567975A Active JP6566051B2 (ja) | 2016-02-15 | 2016-12-28 | 保管装置及び搬送システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190031440A1 (ja) |
JP (1) | JP6566051B2 (ja) |
CN (1) | CN108290687B (ja) |
TW (1) | TW201730067A (ja) |
WO (1) | WO2017141555A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10643877B2 (en) * | 2015-08-27 | 2020-05-05 | Murata Machinery, Ltd. | Retrieving device and storing device |
US11261024B2 (en) * | 2017-04-20 | 2022-03-01 | Daifuku America Corporation | High density stocker |
JP6801640B2 (ja) * | 2017-12-21 | 2020-12-16 | 株式会社ダイフク | 収納棚及び物品収納設備 |
US11876009B2 (en) | 2018-11-06 | 2024-01-16 | Murata Machinery, Ltd. | Overhead transport vehicle |
JP7458760B2 (ja) * | 2019-12-03 | 2024-04-01 | 株式会社ディスコ | 加工装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0755548B2 (ja) * | 1987-09-02 | 1995-06-14 | 株式会社アイジー技術研究所 | 耐火、断熱パネル |
JPH0163137U (ja) * | 1987-10-16 | 1989-04-24 | ||
KR0179405B1 (ko) * | 1993-04-12 | 1999-04-15 | 마스다 쇼오이치로오 | 크린장치가 부착된 하물보관설비 |
JPH0885603A (ja) * | 1994-09-16 | 1996-04-02 | Daifuku Co Ltd | 保管装置 |
JP3640184B2 (ja) * | 2001-12-04 | 2005-04-20 | 村田機械株式会社 | 自動倉庫 |
JP4967318B2 (ja) * | 2005-11-18 | 2012-07-04 | ムラテックオートメーション株式会社 | ストッカ |
JP2008108765A (ja) * | 2006-10-23 | 2008-05-08 | Toshiba Corp | 位置調整治具、位置調整方法及び電子装置の製造方法 |
JP5284808B2 (ja) * | 2009-01-26 | 2013-09-11 | 株式会社Sokudo | ストッカー装置及び基板処理装置 |
JP5674041B2 (ja) * | 2011-08-11 | 2015-02-18 | 株式会社ダイフク | 物品搬送設備 |
US8888434B2 (en) * | 2011-09-05 | 2014-11-18 | Dynamic Micro System | Container storage add-on for bare workpiece stocker |
JP5713203B2 (ja) * | 2012-03-27 | 2015-05-07 | 株式会社ダイフク | 物品収納設備 |
KR102174332B1 (ko) * | 2014-07-30 | 2020-11-04 | 삼성전자주식회사 | 반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법 |
-
2016
- 2016-12-28 CN CN201680068103.9A patent/CN108290687B/zh active Active
- 2016-12-28 US US16/072,519 patent/US20190031440A1/en not_active Abandoned
- 2016-12-28 WO PCT/JP2016/089084 patent/WO2017141555A1/ja active Application Filing
- 2016-12-28 JP JP2017567975A patent/JP6566051B2/ja active Active
-
2017
- 2017-02-07 TW TW106103964A patent/TW201730067A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN108290687A (zh) | 2018-07-17 |
US20190031440A1 (en) | 2019-01-31 |
TW201730067A (zh) | 2017-09-01 |
JPWO2017141555A1 (ja) | 2018-06-28 |
CN108290687B (zh) | 2020-04-28 |
WO2017141555A1 (ja) | 2017-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6566051B2 (ja) | 保管装置及び搬送システム | |
TWI770232B (zh) | 搬送車及搬送設備 | |
JP4967318B2 (ja) | ストッカ | |
JP6229729B2 (ja) | 保管庫 | |
US8944739B2 (en) | Loadport bridge for semiconductor fabrication tools | |
JP5369419B2 (ja) | 保管庫、保管庫セット及び保管庫付き搬送システム | |
JP2015170623A (ja) | 搬送方法及び基板処理装置 | |
KR102450289B1 (ko) | 용기 반송 장치 및 용기 반송 설비 | |
JP2009062153A (ja) | 保管庫 | |
US7806648B2 (en) | Transportation system and transportation method | |
TW201810496A (zh) | 搬送系統 | |
TW201022114A (en) | Transporting carrier | |
JP2016216137A5 (ja) | ||
JP5401842B2 (ja) | 搬送システム | |
JP2006049454A (ja) | ストッカ | |
TW201100309A (en) | Conveyance cart | |
TW200418697A (en) | Processing and keeping apparatus | |
WO2013150841A1 (ja) | 搬送システム | |
KR20170051641A (ko) | 기판 이송 용기 저장 장치 | |
JP2010241547A (ja) | 走行車システム | |
JP2005136294A (ja) | 移載装置 | |
JP2000124284A (ja) | 搬送装置 | |
JP2010137961A (ja) | 保管庫及び入出庫方法 | |
JP4737713B2 (ja) | ストッカー | |
JP2013165177A (ja) | ストッカー装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180308 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190205 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190327 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190702 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190715 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6566051 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |