KR102301413B1 - 웨이퍼의 배면측의 에지 상의 막을 제거하는 장치 및 방법 - Google Patents

웨이퍼의 배면측의 에지 상의 막을 제거하는 장치 및 방법 Download PDF

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Publication number
KR102301413B1
KR102301413B1 KR1020177000377A KR20177000377A KR102301413B1 KR 102301413 B1 KR102301413 B1 KR 102301413B1 KR 1020177000377 A KR1020177000377 A KR 1020177000377A KR 20177000377 A KR20177000377 A KR 20177000377A KR 102301413 B1 KR102301413 B1 KR 102301413B1
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KR
South Korea
Prior art keywords
wafer
vacuum chuck
vacuum
groove
seal ring
Prior art date
Application number
KR1020177000377A
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English (en)
Korean (ko)
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KR20170013996A (ko
Inventor
시아오얀 장
후에이 왕
준 우
청 청
푸파 첸
푸핑 첸
Original Assignee
에이씨엠 리서치 (상하이) 인코포레이티드
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Publication of KR20170013996A publication Critical patent/KR20170013996A/ko
Application granted granted Critical
Publication of KR102301413B1 publication Critical patent/KR102301413B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02082—Cleaning product to be cleaned
    • H01L21/02087—Cleaning of wafer edges

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Weting (AREA)
KR1020177000377A 2014-06-06 2014-06-06 웨이퍼의 배면측의 에지 상의 막을 제거하는 장치 및 방법 KR102301413B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2014/079323 WO2015184628A1 (en) 2014-06-06 2014-06-06 Apparatus and method for removing film on edge of backside of wafer

Publications (2)

Publication Number Publication Date
KR20170013996A KR20170013996A (ko) 2017-02-07
KR102301413B1 true KR102301413B1 (ko) 2021-09-14

Family

ID=54765965

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177000377A KR102301413B1 (ko) 2014-06-06 2014-06-06 웨이퍼의 배면측의 에지 상의 막을 제거하는 장치 및 방법

Country Status (3)

Country Link
KR (1) KR102301413B1 (zh)
CN (1) CN107615443B (zh)
WO (1) WO2015184628A1 (zh)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
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JP6726473B2 (ja) * 2016-02-15 2020-07-22 株式会社ディスコ チャックテーブル機構
JP6758587B2 (ja) * 2016-07-06 2020-09-23 エーシーエム リサーチ （シャンハイ） インコーポレーテッド 基板支持装置
CN106684018B (zh) * 2016-11-18 2019-04-09 中国电子科技集团公司第四十一研究所 一种生瓷片去膜装置及方法
CN108375626B (zh) * 2018-04-18 2024-05-31 融智生物科技（青岛）有限公司 用于基质辅助激光解析电离飞行时间质谱的加载装置
CN108588802B (zh) * 2018-05-29 2019-12-24 江苏爱矽半导体科技有限公司 一种半导体晶圆电镀设备
CN108695179B (zh) * 2018-05-29 2020-03-03 深圳市冠禹半导体有限公司 一种芯片的导电线路制作工艺
CN109244029B (zh) * 2018-09-28 2022-12-02 上海微松工业自动化有限公司 一种晶圆平整固定装置
CN109599355B (zh) * 2019-01-10 2024-05-03 江苏汇成光电有限公司 一种晶圆合框撕胶装置
JP2020116692A (ja) * 2019-01-24 2020-08-06 東京エレクトロン株式会社 加工装置及び加工方法
TWI837277B (zh) * 2019-01-24 2024-04-01 日商東京威力科創股份有限公司 加工裝置及加工方法
CN110052370B (zh) * 2019-05-15 2024-04-02 苏州美图半导体技术有限公司 匀胶机真空匀胶装置
KR102372418B1 (ko) * 2019-11-28 2022-03-08 한국생산기술연구원 회전형 진공 공정챔버의 씰링 구조
CN111069163B (zh) * 2019-12-04 2021-12-10 惠州易晖光电材料股份有限公司 纳米掩膜材料去除生产线及其生产工艺
CN111863696A (zh) * 2020-08-05 2020-10-30 西安奕斯伟硅片技术有限公司 真空吸盘、真空吸附装置及其工作方法
CN112071782B (zh) * 2020-09-16 2024-03-15 沈阳芯源微电子设备股份有限公司 一种晶圆背面清洗装置、方法及清洗单元
CN116259571A (zh) * 2021-12-09 2023-06-13 盛美半导体设备(上海)股份有限公司 晶圆保持装置及其旋转轴
CN114850924B (zh) * 2022-07-11 2022-09-16 宜宾职业技术学院 一种五轴机床快换夹具
CN115332129B (zh) * 2022-10-17 2023-02-21 宁波润华全芯微电子设备有限公司 一种晶圆增粘装置
CN118136569B (zh) * 2024-03-29 2024-08-09 苏州冠礼科技有限公司 一种多尺寸半导体干燥装置

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JP2001070859A (ja) * 1999-09-06 2001-03-21 Takata Corp 薄板円板素材の保持構造
JP2003273063A (ja) * 2002-03-13 2003-09-26 Komatsu Electronic Metals Co Ltd 半導体ウェーハのエッジ部の酸化膜除去装置および方法
JP2005123387A (ja) 2003-10-16 2005-05-12 Seiko Epson Corp 基板保持具及び基板の表面処理方法

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JP2615317B2 (ja) * 1992-08-05 1997-05-28 東京応化工業株式会社 スピンナーチャック
JPH11274280A (ja) * 1998-03-20 1999-10-08 Speedfam Co Ltd ワーク用バキュームチャック装置
US6579408B1 (en) * 2002-04-22 2003-06-17 Industrial Technology Research Institute Apparatus and method for etching wafer backside
US20040137745A1 (en) * 2003-01-10 2004-07-15 International Business Machines Corporation Method and apparatus for removing backside edge polymer
JP3890026B2 (ja) * 2003-03-10 2007-03-07 東京エレクトロン株式会社 液処理装置および液処理方法
JP4464293B2 (ja) * 2005-02-28 2010-05-19 株式会社高田工業所 半導体基板処理装置及び半導体基板処理方法
US7967996B2 (en) * 2007-01-30 2011-06-28 Applied Materials, Inc. Process for wafer backside polymer removal and wafer front side photoresist removal
US20080179008A1 (en) * 2007-01-30 2008-07-31 Collins Kenneth S Reactor for wafer backside polymer removal using an etch plasma feeding a lower process zone and a scavenger plasma feeding an upper process zone
JP2008218545A (ja) * 2007-03-01 2008-09-18 Sumco Corp ウェーハの枚葉式エッチング装置
JP2008251806A (ja) * 2007-03-30 2008-10-16 Sumco Corp ウェーハの枚葉式エッチング方法及びそのエッチング装置
US8329593B2 (en) * 2007-12-12 2012-12-11 Applied Materials, Inc. Method and apparatus for removing polymer from the wafer backside and edge
US10242890B2 (en) * 2011-08-08 2019-03-26 Applied Materials, Inc. Substrate support with heater
CN203542342U (zh) * 2013-11-14 2014-04-16 中芯国际集成电路制造(北京)有限公司 晶圆背面研磨装置的真空吸盘

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001070859A (ja) * 1999-09-06 2001-03-21 Takata Corp 薄板円板素材の保持構造
JP2003273063A (ja) * 2002-03-13 2003-09-26 Komatsu Electronic Metals Co Ltd 半導体ウェーハのエッジ部の酸化膜除去装置および方法
JP2005123387A (ja) 2003-10-16 2005-05-12 Seiko Epson Corp 基板保持具及び基板の表面処理方法

Also Published As

Publication number Publication date
KR20170013996A (ko) 2017-02-07
CN107615443B (zh) 2021-06-18
WO2015184628A1 (en) 2015-12-10
CN107615443A (zh) 2018-01-19

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