KR102256000B1 - 분극화된 강유전성 중합체를 이용하여 cvd 그래핀의 결함 없는 직접적인 건조 박리 - Google Patents

분극화된 강유전성 중합체를 이용하여 cvd 그래핀의 결함 없는 직접적인 건조 박리 Download PDF

Info

Publication number
KR102256000B1
KR102256000B1 KR1020177024699A KR20177024699A KR102256000B1 KR 102256000 B1 KR102256000 B1 KR 102256000B1 KR 1020177024699 A KR1020177024699 A KR 1020177024699A KR 20177024699 A KR20177024699 A KR 20177024699A KR 102256000 B1 KR102256000 B1 KR 102256000B1
Authority
KR
South Korea
Prior art keywords
graphene
ferroelectric polymer
layer
substrate
graphene layer
Prior art date
Application number
KR1020177024699A
Other languages
English (en)
Korean (ko)
Other versions
KR20170110133A (ko
Inventor
발바로스 외질마즈
퍼난데즈 이니고 마틴
치 타트 토
Original Assignee
싱가포르국립대학교
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 싱가포르국립대학교 filed Critical 싱가포르국립대학교
Publication of KR20170110133A publication Critical patent/KR20170110133A/ko
Application granted granted Critical
Publication of KR102256000B1 publication Critical patent/KR102256000B1/ko

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B32B27/304—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • B32B37/025—Transfer laminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • B32B37/18—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of discrete sheets or panels only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/10—Interconnection of layers at least one layer having inter-reactive properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
    • B32B9/007—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile comprising carbon, e.g. graphite, composite carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B9/045—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C01B32/19—Preparation by exfoliation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/194—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
    • C09D127/02—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
    • C09D127/12—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C09D127/16—Homopolymers or copolymers of vinylidene fluoride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • B32B2037/246—Vapour deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00—Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/02—Synthetic macromolecular fibres
    • B32B2262/0223—Vinyl resin fibres
    • B32B2262/0238—Vinyl halide, e.g. PVC, PVDC, PVF, PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2313/00—Elements other than metals
    • B32B2313/04—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Laminated Bodies (AREA)
KR1020177024699A 2015-02-03 2016-02-03 분극화된 강유전성 중합체를 이용하여 cvd 그래핀의 결함 없는 직접적인 건조 박리 KR102256000B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562111195P 2015-02-03 2015-02-03
US62/111,195 2015-02-03
PCT/SG2016/050057 WO2016126208A1 (fr) 2015-02-03 2016-02-03 Délaminage direct par voie sèche sans défauts de graphène déposé par dépôt chimique en phase vapeur à l'aide d'un polymère ferroélectrique polarisé

Publications (2)

Publication Number Publication Date
KR20170110133A KR20170110133A (ko) 2017-10-10
KR102256000B1 true KR102256000B1 (ko) 2021-05-25

Family

ID=56564424

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177024699A KR102256000B1 (ko) 2015-02-03 2016-02-03 분극화된 강유전성 중합체를 이용하여 cvd 그래핀의 결함 없는 직접적인 건조 박리

Country Status (4)

Country Link
JP (1) JP6749942B2 (fr)
KR (1) KR102256000B1 (fr)
CN (2) CN112194120B (fr)
WO (1) WO2016126208A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106587040B (zh) * 2016-12-29 2019-02-15 浙江合特光电有限公司 石墨烯薄膜的衬底转移方法
GB2570127B (en) * 2018-01-11 2022-06-22 Paragraf Ltd A method of making graphene structures
US20220119262A1 (en) * 2018-11-30 2022-04-21 The Research Foundation for The State of University New york Method for transferring graphene from metal substrates
KR102319610B1 (ko) 2020-04-10 2021-10-29 서울대학교산학협력단 잔류물 없이 그래핀을 전사하는 방법
WO2022086449A1 (fr) * 2020-10-22 2022-04-28 National University Of Singapore Photodétecteur à polymère ferroélectrique, points quantiques et graphène
US20240164948A1 (en) * 2021-03-12 2024-05-23 National University Of Singapore A multilayer composite

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2637862B1 (fr) * 2010-11-10 2017-07-26 National University of Singapore Conducteur transparent au graphène à couche dipolaire permanente
WO2013141817A1 (fr) * 2012-03-23 2013-09-26 National University Of Singapore Cellule photovoltaïque comportant une électrode de graphène-ferroélectrique
SG11201406194WA (en) * 2012-06-06 2014-10-30 Univ Singapore Gate-tunable graphene-ferroelectric hybrid structure for photonics and plasmonics
US9715247B2 (en) * 2012-10-03 2017-07-25 National University Of Singapore Touch screen devices employing graphene networks with polyvinylidene fluoride films
CN103318879B (zh) * 2013-06-28 2015-09-09 重庆墨希科技有限公司 基于转移薄膜的石墨烯制备方法
US20160304352A1 (en) * 2013-12-05 2016-10-20 National University Of Singapore Graphene tape
CN104016335B (zh) * 2014-05-30 2016-01-20 无锡格菲电子薄膜科技有限公司 一种石墨烯的转移方法
CN104016340B (zh) * 2014-06-30 2017-01-11 上海集成电路研发中心有限公司 一种转移石墨烯薄膜的方法

Also Published As

Publication number Publication date
CN107406258A (zh) 2017-11-28
WO2016126208A1 (fr) 2016-08-11
CN112194120A (zh) 2021-01-08
KR20170110133A (ko) 2017-10-10
JP6749942B2 (ja) 2020-09-02
JP2018512370A (ja) 2018-05-17
CN112194120B (zh) 2022-06-10

Similar Documents

Publication Publication Date Title
KR102256000B1 (ko) 분극화된 강유전성 중합체를 이용하여 cvd 그래핀의 결함 없는 직접적인 건조 박리
US8753468B2 (en) Method for the reduction of graphene film thickness and the removal and transfer of epitaxial graphene films from SiC substrates
US9105378B2 (en) Graphene transparent electrode and method for manufacturing the same
US20160304352A1 (en) Graphene tape
JP7410028B2 (ja) ３ｄグラフェン
KR101984694B1 (ko) 실리콘 카바이드 웨이퍼 상의 단일층 그래핀의 제조방법
Kostogrud et al. The main sources of graphene damage at transfer from copper to PET/EVA polymer
US20140299975A1 (en) Method and Board for Growing High-Quality Graphene Layer Using High Pressure Annealing
KR101504956B1 (ko) 그래핀을 이용한 액정 디스플레이 배향막의 형성 방법
CN112850696A (zh) 一种石墨烯薄膜的转移方法、石墨烯薄膜及石墨烯复合结构
TWI520901B (zh) 石墨烯層轉印之方法
US20150270358A1 (en) Fabrication of graphene electrodes on diamond substrate
Chu et al. Recent advances in synthesis and assembly of van der Waals materials
KR102283976B1 (ko) 결함 없는 그래핀 전사방법
JP2008544945A (ja) 酸素感受性の高いケイ素層及び該ケイ素層を得るための方法
KR101990192B1 (ko) 그래핀 박막 제조방법
KR101804819B1 (ko) 박리 조력층의 전사 과정을 포함하는 플렉시블 정보 표시 소자의 제조 방법
KR20140108829A (ko) 롤투롤 방식을 이용한 그래핀 필름의 분리, 전사 방법
CN113683083A (zh) 一种高洁净无损转移石墨烯纳米带的方法
EP3548431B1 (fr) Procede d'exfoliation de graphene
CN113555497A (zh) 一种高迁移率的SiC基石墨烯器件及其制备方法
TWI545217B (zh) 碳、金屬雙層形成於基板及碳、金屬、碳三層形成於基板的低溫製造方法及其結構
US11890846B2 (en) Method of transferring graphene and flexible transparent electrode using the same
CN118159117A (zh) 铁磁电极转移方法、自旋电子器件及存储介质
KR102564206B1 (ko) 표면에너지 조절층을 이용한 플렉서블 금속 필름의 제조 방법

Legal Events

Date Code Title Description
A201 Request for examination
A302 Request for accelerated examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant