KR102110585B1 - 측면 개방형 기판 캐리어 및 로드 포트 - Google Patents

측면 개방형 기판 캐리어 및 로드 포트 Download PDF

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Publication number
KR102110585B1
KR102110585B1 KR1020187036800A KR20187036800A KR102110585B1 KR 102110585 B1 KR102110585 B1 KR 102110585B1 KR 1020187036800 A KR1020187036800 A KR 1020187036800A KR 20187036800 A KR20187036800 A KR 20187036800A KR 102110585 B1 KR102110585 B1 KR 102110585B1
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KR
South Korea
Prior art keywords
carrier
interface
load port
load
load lock
Prior art date
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KR1020187036800A
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English (en)
Korean (ko)
Other versions
KR20180137047A (ko
Inventor
다니엘 밥스
윌리엄 포스나잇
로버트 씨. 메이
윌리엄 위버
Original Assignee
브룩스 오토메이션 인코퍼레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 브룩스 오토메이션 인코퍼레이티드 filed Critical 브룩스 오토메이션 인코퍼레이티드
Priority claimed from US12/123,391 external-priority patent/US9105673B2/en
Priority claimed from PCT/US2008/064163 external-priority patent/WO2008144668A1/en
Publication of KR20180137047A publication Critical patent/KR20180137047A/ko
Application granted granted Critical
Publication of KR102110585B1 publication Critical patent/KR102110585B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
KR1020187036800A 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트 KR102110585B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US93063407P 2007-05-17 2007-05-17
US60/930,634 2007-05-17
US12/123,391 US9105673B2 (en) 2007-05-09 2008-05-19 Side opening unified pod
PCT/US2008/064163 WO2008144668A1 (en) 2007-05-17 2008-05-19 Side opening substrate carrier and load port
US12/123,391 2008-05-19

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020177023439A Division KR101932265B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트

Publications (2)

Publication Number Publication Date
KR20180137047A KR20180137047A (ko) 2018-12-26
KR102110585B1 true KR102110585B1 (ko) 2020-05-13

Family

ID=42090842

Family Applications (6)

Application Number Title Priority Date Filing Date
KR1020147020420A KR101613836B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020097026242A KR20100020968A (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020157033677A KR20150140395A (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020187036800A KR102110585B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020167009733A KR101772600B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020177023439A KR101932265B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트

Family Applications Before (3)

Application Number Title Priority Date Filing Date
KR1020147020420A KR101613836B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020097026242A KR20100020968A (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020157033677A KR20150140395A (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020167009733A KR101772600B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트
KR1020177023439A KR101932265B1 (ko) 2007-05-17 2008-05-19 측면 개방형 기판 캐리어 및 로드 포트

Country Status (2)

Country Link
JP (5) JP6027303B2 (ja)
KR (6) KR101613836B1 (ja)

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KR20220120714A (ko) 2013-08-12 2022-08-30 어플라이드 머티어리얼스, 인코포레이티드 팩토리 인터페이스 환경 제어들을 갖는 기판 프로세싱 시스템들, 장치, 및 방법들
KR20210080633A (ko) 2014-11-25 2021-06-30 어플라이드 머티어리얼스, 인코포레이티드 기판 캐리어 및 퍼지 챔버 환경 제어들을 이용하는 기판 프로세싱 시스템들, 장치, 및 방법들
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Also Published As

Publication number Publication date
JP6568921B2 (ja) 2019-08-28
KR20180137047A (ko) 2018-12-26
KR20170098991A (ko) 2017-08-30
KR20100020968A (ko) 2010-02-23
JP6324178B2 (ja) 2018-05-16
KR20150140395A (ko) 2015-12-15
JP6482506B2 (ja) 2019-03-13
KR20160047589A (ko) 2016-05-02
KR101932265B1 (ko) 2018-12-24
KR101772600B1 (ko) 2017-08-29
JP6027303B2 (ja) 2016-11-16
JP2019197921A (ja) 2019-11-14
JP7134928B2 (ja) 2022-09-12
JP2014146832A (ja) 2014-08-14
KR20140097594A (ko) 2014-08-06
JP2016195281A (ja) 2016-11-17
JP2011512642A (ja) 2011-04-21
JP2018032880A (ja) 2018-03-01
KR101613836B1 (ko) 2016-04-21

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