KR102081378B1 - 초음파 세정장치 및 세정방법 - Google Patents

초음파 세정장치 및 세정방법 Download PDF

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Publication number
KR102081378B1
KR102081378B1 KR1020157031754A KR20157031754A KR102081378B1 KR 102081378 B1 KR102081378 B1 KR 102081378B1 KR 1020157031754 A KR1020157031754 A KR 1020157031754A KR 20157031754 A KR20157031754 A KR 20157031754A KR 102081378 B1 KR102081378 B1 KR 102081378B1
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KR
South Korea
Prior art keywords
cleaning
tank
washing
tanks
ultrasonic
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KR1020157031754A
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English (en)
Korean (ko)
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KR20160008535A (ko
Inventor
히토시 카바사와
타츠오 아베
Original Assignee
신에쯔 한도타이 가부시키가이샤
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Application filed by 신에쯔 한도타이 가부시키가이샤 filed Critical 신에쯔 한도타이 가부시키가이샤
Publication of KR20160008535A publication Critical patent/KR20160008535A/ko
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Classifications

    • H01L21/02052—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H01L21/463—
    • H01L21/67057—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels

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  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
KR1020157031754A 2013-05-14 2014-04-09 초음파 세정장치 및 세정방법 Active KR102081378B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2013-102431 2013-05-14
JP2013102431A JP5892109B2 (ja) 2013-05-14 2013-05-14 超音波洗浄装置及び洗浄方法
PCT/JP2014/002032 WO2014184999A1 (ja) 2013-05-14 2014-04-09 超音波洗浄装置及び洗浄方法

Publications (2)

Publication Number Publication Date
KR20160008535A KR20160008535A (ko) 2016-01-22
KR102081378B1 true KR102081378B1 (ko) 2020-02-25

Family

ID=51897993

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157031754A Active KR102081378B1 (ko) 2013-05-14 2014-04-09 초음파 세정장치 및 세정방법

Country Status (8)

Country Link
US (1) US20160067749A1 (https=)
JP (1) JP5892109B2 (https=)
KR (1) KR102081378B1 (https=)
CN (1) CN105164792B (https=)
DE (1) DE112014002047T5 (https=)
SG (1) SG11201508731RA (https=)
TW (1) TWI555586B (https=)
WO (1) WO2014184999A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9687885B2 (en) * 2015-07-17 2017-06-27 Taiwan Semiconductor Manufacturing Co., Ltd. Multi-cycle wafer cleaning method
CN109631365B (zh) * 2018-12-17 2020-04-17 沧州天瑞星光热技术有限公司 一种太阳能真空集热管玻璃外管的清洗方法
CN110756513A (zh) * 2019-09-19 2020-02-07 上海提牛机电设备有限公司 一种以声波作为动能的晶圆清洗装置
JP7308182B2 (ja) * 2020-12-21 2023-07-13 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄装置および塗布装置
CN112974396B (zh) * 2021-01-22 2022-07-22 北京北方华创微电子装备有限公司 半导体清洗设备及晶片清洗方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002093765A (ja) * 2000-09-20 2002-03-29 Kaijo Corp 基板洗浄方法および基板洗浄装置
JP2008227300A (ja) * 2007-03-14 2008-09-25 Kaijo Corp 超音波洗浄装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418229A (en) * 1987-07-14 1989-01-23 Oki Electric Ind Co Ltd Super-ultrasonic cleaning device
JPH079900B2 (ja) * 1990-01-29 1995-02-01 株式会社国際電気エルテック 超音波洗浄装置
JP4752117B2 (ja) * 2001-02-08 2011-08-17 日本テキサス・インスツルメンツ株式会社 半導体ウェハ上の粒子を除去する方法
JP2007044662A (ja) 2005-08-12 2007-02-22 Kaijo Corp 超音波洗浄装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002093765A (ja) * 2000-09-20 2002-03-29 Kaijo Corp 基板洗浄方法および基板洗浄装置
JP2008227300A (ja) * 2007-03-14 2008-09-25 Kaijo Corp 超音波洗浄装置

Also Published As

Publication number Publication date
JP2014222738A (ja) 2014-11-27
JP5892109B2 (ja) 2016-03-23
CN105164792A (zh) 2015-12-16
CN105164792B (zh) 2017-08-04
SG11201508731RA (en) 2015-11-27
US20160067749A1 (en) 2016-03-10
TW201501824A (zh) 2015-01-16
WO2014184999A1 (ja) 2014-11-20
KR20160008535A (ko) 2016-01-22
DE112014002047T5 (de) 2016-01-14
TWI555586B (zh) 2016-11-01

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