CN105164792B - 超声波清洗装置及清洗方法 - Google Patents

超声波清洗装置及清洗方法 Download PDF

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Publication number
CN105164792B
CN105164792B CN201480023016.2A CN201480023016A CN105164792B CN 105164792 B CN105164792 B CN 105164792B CN 201480023016 A CN201480023016 A CN 201480023016A CN 105164792 B CN105164792 B CN 105164792B
Authority
CN
China
Prior art keywords
cleaning
tank
ultrasonic
tanks
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201480023016.2A
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English (en)
Chinese (zh)
Other versions
CN105164792A (zh
Inventor
椛澤均
阿部达夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of CN105164792A publication Critical patent/CN105164792A/zh
Application granted granted Critical
Publication of CN105164792B publication Critical patent/CN105164792B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
CN201480023016.2A 2013-05-14 2014-04-09 超声波清洗装置及清洗方法 Expired - Fee Related CN105164792B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-102431 2013-05-14
JP2013102431A JP5892109B2 (ja) 2013-05-14 2013-05-14 超音波洗浄装置及び洗浄方法
PCT/JP2014/002032 WO2014184999A1 (ja) 2013-05-14 2014-04-09 超音波洗浄装置及び洗浄方法

Publications (2)

Publication Number Publication Date
CN105164792A CN105164792A (zh) 2015-12-16
CN105164792B true CN105164792B (zh) 2017-08-04

Family

ID=51897993

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480023016.2A Expired - Fee Related CN105164792B (zh) 2013-05-14 2014-04-09 超声波清洗装置及清洗方法

Country Status (8)

Country Link
US (1) US20160067749A1 (https=)
JP (1) JP5892109B2 (https=)
KR (1) KR102081378B1 (https=)
CN (1) CN105164792B (https=)
DE (1) DE112014002047T5 (https=)
SG (1) SG11201508731RA (https=)
TW (1) TWI555586B (https=)
WO (1) WO2014184999A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9687885B2 (en) * 2015-07-17 2017-06-27 Taiwan Semiconductor Manufacturing Co., Ltd. Multi-cycle wafer cleaning method
CN109631365B (zh) * 2018-12-17 2020-04-17 沧州天瑞星光热技术有限公司 一种太阳能真空集热管玻璃外管的清洗方法
CN110756513A (zh) * 2019-09-19 2020-02-07 上海提牛机电设备有限公司 一种以声波作为动能的晶圆清洗装置
JP7308182B2 (ja) * 2020-12-21 2023-07-13 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄装置および塗布装置
CN112974396B (zh) * 2021-01-22 2022-07-22 北京北方华创微电子装备有限公司 半导体清洗设备及晶片清洗方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050121051A1 (en) * 2000-09-20 2005-06-09 Kaijo Corporation Method for cleaning substrate and apparatus therefor
US20100108111A1 (en) * 2007-03-14 2010-05-06 Hiroshi Hasegawa Ultrasonic cleaning apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418229A (en) * 1987-07-14 1989-01-23 Oki Electric Ind Co Ltd Super-ultrasonic cleaning device
JPH079900B2 (ja) * 1990-01-29 1995-02-01 株式会社国際電気エルテック 超音波洗浄装置
JP4752117B2 (ja) * 2001-02-08 2011-08-17 日本テキサス・インスツルメンツ株式会社 半導体ウェハ上の粒子を除去する方法
JP2007044662A (ja) 2005-08-12 2007-02-22 Kaijo Corp 超音波洗浄装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050121051A1 (en) * 2000-09-20 2005-06-09 Kaijo Corporation Method for cleaning substrate and apparatus therefor
US20100108111A1 (en) * 2007-03-14 2010-05-06 Hiroshi Hasegawa Ultrasonic cleaning apparatus

Also Published As

Publication number Publication date
JP2014222738A (ja) 2014-11-27
JP5892109B2 (ja) 2016-03-23
CN105164792A (zh) 2015-12-16
SG11201508731RA (en) 2015-11-27
US20160067749A1 (en) 2016-03-10
KR102081378B1 (ko) 2020-02-25
TW201501824A (zh) 2015-01-16
WO2014184999A1 (ja) 2014-11-20
KR20160008535A (ko) 2016-01-22
DE112014002047T5 (de) 2016-01-14
TWI555586B (zh) 2016-11-01

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Granted publication date: 20170804