KR102044229B1 - 흡인 척, 및 이것을 구비한 이송 장치 - Google Patents

흡인 척, 및 이것을 구비한 이송 장치 Download PDF

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Publication number
KR102044229B1
KR102044229B1 KR1020130100809A KR20130100809A KR102044229B1 KR 102044229 B1 KR102044229 B1 KR 102044229B1 KR 1020130100809 A KR1020130100809 A KR 1020130100809A KR 20130100809 A KR20130100809 A KR 20130100809A KR 102044229 B1 KR102044229 B1 KR 102044229B1
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KR
South Korea
Prior art keywords
metal plate
suction
path
supply path
gas chamber
Prior art date
Application number
KR1020130100809A
Other languages
English (en)
Korean (ko)
Other versions
KR20140036110A (ko
Inventor
히로키 타카시마
히데아키 나카니시
Original Assignee
무라다기카이가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 무라다기카이가부시끼가이샤 filed Critical 무라다기카이가부시끼가이샤
Publication of KR20140036110A publication Critical patent/KR20140036110A/ko
Application granted granted Critical
Publication of KR102044229B1 publication Critical patent/KR102044229B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Manipulator (AREA)
KR1020130100809A 2012-09-13 2013-08-26 흡인 척, 및 이것을 구비한 이송 장치 KR102044229B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-201880 2012-09-13
JP2012201880A JP5979594B2 (ja) 2012-09-13 2012-09-13 吸引チャック、及びこれを備えた移載装置

Publications (2)

Publication Number Publication Date
KR20140036110A KR20140036110A (ko) 2014-03-25
KR102044229B1 true KR102044229B1 (ko) 2019-11-13

Family

ID=50301852

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130100809A KR102044229B1 (ko) 2012-09-13 2013-08-26 흡인 척, 및 이것을 구비한 이송 장치

Country Status (4)

Country Link
JP (1) JP5979594B2 (zh)
KR (1) KR102044229B1 (zh)
CN (1) CN103662884B (zh)
TW (1) TWI576299B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104803270B (zh) * 2015-03-31 2017-03-15 武汉桑普瑞奇科技有限公司 气旋致异形物件吸附装置
JP7033303B2 (ja) * 2018-01-31 2022-03-10 三星ダイヤモンド工業株式会社 基板搬送装置
CN108927820B (zh) * 2018-08-24 2022-01-25 深圳蓝胖子机器人有限公司 末端执行器、机器人及翻转物品的方法
US11371148B2 (en) * 2020-08-24 2022-06-28 Applied Materials, Inc. Fabricating a recursive flow gas distribution stack using multiple layers
CN112960393B (zh) * 2021-02-09 2022-08-09 河南科技大学 一种双孢菇抓取装置用末端执行器
CN114552022B (zh) * 2021-09-02 2023-09-05 万向一二三股份公司 一种固体电池的制造装置和制造方法
JP2024143492A (ja) * 2023-03-30 2024-10-11 日本発條株式会社 ステージ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009028862A (ja) 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
JP2011060849A (ja) * 2009-09-07 2011-03-24 Murata Machinery Ltd 基板移載装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB327619A (en) * 1929-05-16 1930-04-10 William Gibson Thomlinson Improvements relating to vacuum nozzles for feeding paper sheets
FI84463C (fi) * 1988-10-27 1991-12-10 Cimcorp Oy Foerfarande och anordning foer plockning och hantering av lappar speciellt av poroest och boejligt material.
US5687766A (en) * 1996-01-18 1997-11-18 B. W. Vortex, Inc. Apparatus for forming a vortex
JPH11236136A (ja) * 1998-02-19 1999-08-31 Ueda Japan Radio Co Ltd 吸引機構によるワーク分離装置
JP3981241B2 (ja) 2000-06-09 2007-09-26 株式会社ハーモテック 旋回流形成体および非接触搬送装置
JP2003174077A (ja) * 2001-12-04 2003-06-20 Lintec Corp 吸着保持装置
CN2554138Y (zh) * 2002-06-15 2003-06-04 由田新技股份有限公司 自动调整吸附范围的真空吸附装置
JP2006156692A (ja) * 2004-11-29 2006-06-15 Smc Corp 非接触搬送装置
JP2007324442A (ja) * 2006-06-02 2007-12-13 Smc Corp 非接触搬送装置
CN101117181A (zh) * 2006-08-04 2008-02-06 达信科技股份有限公司 移载装置与移载方法
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置
JP5159528B2 (ja) * 2008-09-09 2013-03-06 リンテック株式会社 板状部材の支持装置および支持方法
JP5928691B2 (ja) * 2012-01-20 2016-06-01 村田機械株式会社 吸引チャック及び移載装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009028862A (ja) 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
JP2011060849A (ja) * 2009-09-07 2011-03-24 Murata Machinery Ltd 基板移載装置

Also Published As

Publication number Publication date
CN103662884A (zh) 2014-03-26
CN103662884B (zh) 2017-03-01
JP2014054710A (ja) 2014-03-27
TW201416307A (zh) 2014-05-01
KR20140036110A (ko) 2014-03-25
TWI576299B (zh) 2017-04-01
JP5979594B2 (ja) 2016-08-24

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