KR101988538B1 - X선 발생 장치 - Google Patents

X선 발생 장치 Download PDF

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Publication number
KR101988538B1
KR101988538B1 KR1020130121249A KR20130121249A KR101988538B1 KR 101988538 B1 KR101988538 B1 KR 101988538B1 KR 1020130121249 A KR1020130121249 A KR 1020130121249A KR 20130121249 A KR20130121249 A KR 20130121249A KR 101988538 B1 KR101988538 B1 KR 101988538B1
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South Korea
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electron beam
target
ray
permanent magnet
lens
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KR1020130121249A
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Korean (ko)
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KR20140049471A (ko
Inventor
마틴 호바스
지리 마르시크
라디슬라프 피나
바츨라프 옐리네크
나오히사 오사카
카즈히코 오모테
마코토 캄베
리차이 장
봉례 김
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가부시키가이샤 리가쿠
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate

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  • X-Ray Techniques (AREA)
KR1020130121249A 2012-10-17 2013-10-11 X선 발생 장치 Active KR101988538B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012230115A JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置
JPJP-P-2012-230115 2012-10-17

Publications (2)

Publication Number Publication Date
KR20140049471A KR20140049471A (ko) 2014-04-25
KR101988538B1 true KR101988538B1 (ko) 2019-06-12

Family

ID=49630365

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130121249A Active KR101988538B1 (ko) 2012-10-17 2013-10-11 X선 발생 장치

Country Status (5)

Country Link
US (1) US9159524B2 (https=)
JP (1) JP6114981B2 (https=)
KR (1) KR101988538B1 (https=)
GB (1) GB2508707B (https=)
TW (1) TWI576885B (https=)

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ES1154460Y (es) 2012-02-14 2016-07-08 American Science & Eng Inc Dispositivo de portal de inspección por rayos X
US10670740B2 (en) 2012-02-14 2020-06-02 American Science And Engineering, Inc. Spectral discrimination using wavelength-shifting fiber-coupled scintillation detectors
US9666322B2 (en) * 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US10228487B2 (en) 2014-06-30 2019-03-12 American Science And Engineering, Inc. Rapidly relocatable modular cargo container scanner
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
DE102015203459A1 (de) * 2015-02-26 2016-09-01 Siemens Aktiengesellschaft Röntgenröhre
JP6746603B2 (ja) 2015-03-20 2020-08-26 ラピスカン システムズ、インコーポレイテッド 手持ち式携帯型後方散乱検査システム
JP6377572B2 (ja) * 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
EP3520120A4 (en) * 2016-09-30 2020-07-08 American Science & Engineering, Inc. X-RAY RADIATION SOURCE FOR TWO-DIMENSIONAL SCANNING RADIATION
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
CN112424644A (zh) 2018-06-20 2021-02-26 美国科学及工程股份有限公司 波长偏移片耦合的闪烁检测器
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11164713B2 (en) * 2020-03-31 2021-11-02 Energetiq Technology, Inc. X-ray generation apparatus
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
US11193898B1 (en) 2020-06-01 2021-12-07 American Science And Engineering, Inc. Systems and methods for controlling image contrast in an X-ray system
US11175245B1 (en) 2020-06-15 2021-11-16 American Science And Engineering, Inc. Scatter X-ray imaging with adaptive scanning beam intensity
US11340361B1 (en) 2020-11-23 2022-05-24 American Science And Engineering, Inc. Wireless transmission detector panel for an X-ray scanner
JP7549538B2 (ja) * 2021-01-22 2024-09-11 浜松ホトニクス株式会社 Ｘ線モジュール
CN118235216A (zh) 2021-10-01 2024-06-21 拉皮斯坎控股公司 用于并发产生多个基本相似的x射线束的方法和系统
CN115394619B (zh) * 2022-08-08 2025-03-25 无锡日联科技股份有限公司 一种使开放式x射线管具有多种工作模式的方法
KR102914390B1 (ko) * 2022-09-15 2026-01-20 캐논 아네르바 가부시키가이샤 X선 발생 장치, x선 촬상 장치, 및, x선 발생 장치의 조정 방법
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

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JP2009212058A (ja) * 2008-03-06 2009-09-17 Rigaku Corp Ｘ線発生装置ならびにｘ線分析装置、ｘ線透過像計測装置及びｘ線干渉計

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GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
US5128977A (en) * 1990-08-24 1992-07-07 Michael Danos X-ray tube
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JPH0799027A (ja) * 1993-08-05 1995-04-11 Mitsubishi Electric Corp 電子ビーム集束装置
GB9620160D0 (en) 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
JP2000082430A (ja) * 1998-09-08 2000-03-21 Hamamatsu Photonics Kk Ｘ線発生用ターゲット及びこれを用いたｘ線管
GB9906886D0 (en) 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
US6421422B1 (en) 1999-08-25 2002-07-16 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
EP1146542A1 (en) * 2000-04-11 2001-10-17 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
JP3481186B2 (ja) * 2000-06-08 2003-12-22 メディエックステック株式会社 Ｘ線発生器、ｘ線検査装置およびｘ線発生方法
JP4772212B2 (ja) * 2001-05-31 2011-09-14 浜松ホトニクス株式会社 Ｘ線発生装置
NL1023260C1 (nl) * 2003-04-24 2004-10-27 Fei Co Deeltjes-optisch apparaat met een permanent magnetische lens en een elektrostatische lens.
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US7443953B1 (en) * 2005-12-09 2008-10-28 Xradia, Inc. Structured anode X-ray source for X-ray microscopy
DE102006036694A1 (de) * 2006-08-05 2008-02-07 Carl Zeiss Industrielle Messtechnik Gmbh Fokussiervorrichtung
WO2011065240A1 (ja) * 2009-11-26 2011-06-03 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
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JP2009212058A (ja) * 2008-03-06 2009-09-17 Rigaku Corp Ｘ線発生装置ならびにｘ線分析装置、ｘ線透過像計測装置及びｘ線干渉計

Also Published As

Publication number Publication date
JP6114981B2 (ja) 2017-04-19
JP2014082130A (ja) 2014-05-08
GB2508707A (en) 2014-06-11
GB201317784D0 (en) 2013-11-20
KR20140049471A (ko) 2014-04-25
US20140105367A1 (en) 2014-04-17
TW201423819A (zh) 2014-06-16
TWI576885B (zh) 2017-04-01
GB2508707B (en) 2017-07-19
US9159524B2 (en) 2015-10-13

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