TWI576885B - Ｘ射線產生裝置 - Google Patents

Ｘ射線產生裝置 Download PDF

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Publication number
TWI576885B
TWI576885B TW102134248A TW102134248A TWI576885B TW I576885 B TWI576885 B TW I576885B TW 102134248 A TW102134248 A TW 102134248A TW 102134248 A TW102134248 A TW 102134248A TW I576885 B TWI576885 B TW I576885B
Authority
TW
Taiwan
Prior art keywords
ray
target
electron beam
permanent magnet
lens
Prior art date
Application number
TW102134248A
Other languages
English (en)
Chinese (zh)
Other versions
TW201423819A (zh
Inventor
馬丁 霍瓦特
吉利 馬爾斯克
拉迪斯拉芙 平納
瓦克拉芙 杰利內克
大坂尚久
表和彥
神戶亮
姜立財
金鳳來
Original Assignee
理學股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 理學股份有限公司 filed Critical 理學股份有限公司
Publication of TW201423819A publication Critical patent/TW201423819A/zh
Application granted granted Critical
Publication of TWI576885B publication Critical patent/TWI576885B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate

Landscapes

  • X-Ray Techniques (AREA)
TW102134248A 2012-10-17 2013-09-24 Ｘ射線產生裝置 TWI576885B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012230115A JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置

Publications (2)

Publication Number Publication Date
TW201423819A TW201423819A (zh) 2014-06-16
TWI576885B true TWI576885B (zh) 2017-04-01

Family

ID=49630365

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102134248A TWI576885B (zh) 2012-10-17 2013-09-24 Ｘ射線產生裝置

Country Status (5)

Country Link
US (1) US9159524B2 (https=)
JP (1) JP6114981B2 (https=)
KR (1) KR101988538B1 (https=)
GB (1) GB2508707B (https=)
TW (1) TWI576885B (https=)

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ES1154460Y (es) 2012-02-14 2016-07-08 American Science & Eng Inc Dispositivo de portal de inspección por rayos X
US10670740B2 (en) 2012-02-14 2020-06-02 American Science And Engineering, Inc. Spectral discrimination using wavelength-shifting fiber-coupled scintillation detectors
US9666322B2 (en) * 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US10228487B2 (en) 2014-06-30 2019-03-12 American Science And Engineering, Inc. Rapidly relocatable modular cargo container scanner
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
DE102015203459A1 (de) * 2015-02-26 2016-09-01 Siemens Aktiengesellschaft Röntgenröhre
JP6746603B2 (ja) 2015-03-20 2020-08-26 ラピスカン システムズ、インコーポレイテッド 手持ち式携帯型後方散乱検査システム
JP6377572B2 (ja) * 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
EP3520120A4 (en) * 2016-09-30 2020-07-08 American Science & Engineering, Inc. X-RAY RADIATION SOURCE FOR TWO-DIMENSIONAL SCANNING RADIATION
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
CN112424644A (zh) 2018-06-20 2021-02-26 美国科学及工程股份有限公司 波长偏移片耦合的闪烁检测器
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11164713B2 (en) * 2020-03-31 2021-11-02 Energetiq Technology, Inc. X-ray generation apparatus
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
US11193898B1 (en) 2020-06-01 2021-12-07 American Science And Engineering, Inc. Systems and methods for controlling image contrast in an X-ray system
US11175245B1 (en) 2020-06-15 2021-11-16 American Science And Engineering, Inc. Scatter X-ray imaging with adaptive scanning beam intensity
US11340361B1 (en) 2020-11-23 2022-05-24 American Science And Engineering, Inc. Wireless transmission detector panel for an X-ray scanner
JP7549538B2 (ja) * 2021-01-22 2024-09-11 浜松ホトニクス株式会社 Ｘ線モジュール
CN118235216A (zh) 2021-10-01 2024-06-21 拉皮斯坎控股公司 用于并发产生多个基本相似的x射线束的方法和系统
CN115394619B (zh) * 2022-08-08 2025-03-25 无锡日联科技股份有限公司 一种使开放式x射线管具有多种工作模式的方法
KR102914390B1 (ko) * 2022-09-15 2026-01-20 캐논 아네르바 가부시키가이샤 X선 발생 장치, x선 촬상 장치, 및, x선 발생 장치의 조정 방법
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

Citations (3)

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Publication number Priority date Publication date Assignee Title
TW580721B (en) * 2001-05-31 2004-03-21 Hamamatsu Photonics Kk Device for generating X-ray
US20120269326A1 (en) * 2011-04-21 2012-10-25 Adler David L X-ray source with high-temperature electron emitter
CN103038855A (zh) * 2010-10-27 2013-04-10 株式会社Param 电子透镜和电子束装置

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GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
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JP2551867Y2 (ja) * 1991-03-29 1997-10-27 日本電気ホームエレクトロニクス株式会社 フォーカスマグネット
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US6421422B1 (en) 1999-08-25 2002-07-16 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
EP1146542A1 (en) * 2000-04-11 2001-10-17 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
JP3481186B2 (ja) * 2000-06-08 2003-12-22 メディエックステック株式会社 Ｘ線発生器、ｘ線検査装置およびｘ線発生方法
NL1023260C1 (nl) * 2003-04-24 2004-10-27 Fei Co Deeltjes-optisch apparaat met een permanent magnetische lens en een elektrostatische lens.
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US7443953B1 (en) * 2005-12-09 2008-10-28 Xradia, Inc. Structured anode X-ray source for X-ray microscopy
DE102006036694A1 (de) * 2006-08-05 2008-02-07 Carl Zeiss Industrielle Messtechnik Gmbh Fokussiervorrichtung
JP5153388B2 (ja) * 2008-03-06 2013-02-27 株式会社リガク Ｘ線発生装置ならびにｘ線分析装置、ｘ線透過像計測装置及びｘ線干渉計
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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW580721B (en) * 2001-05-31 2004-03-21 Hamamatsu Photonics Kk Device for generating X-ray
CN103038855A (zh) * 2010-10-27 2013-04-10 株式会社Param 电子透镜和电子束装置
US20120269326A1 (en) * 2011-04-21 2012-10-25 Adler David L X-ray source with high-temperature electron emitter

Also Published As

Publication number Publication date
JP6114981B2 (ja) 2017-04-19
JP2014082130A (ja) 2014-05-08
GB2508707A (en) 2014-06-11
GB201317784D0 (en) 2013-11-20
KR101988538B1 (ko) 2019-06-12
KR20140049471A (ko) 2014-04-25
US20140105367A1 (en) 2014-04-17
TW201423819A (zh) 2014-06-16
GB2508707B (en) 2017-07-19
US9159524B2 (en) 2015-10-13

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