KR101971316B1 - 습식 산 에칭시 슬러지 조절 방법 - Google Patents

습식 산 에칭시 슬러지 조절 방법 Download PDF

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Publication number
KR101971316B1
KR101971316B1 KR1020147036499A KR20147036499A KR101971316B1 KR 101971316 B1 KR101971316 B1 KR 101971316B1 KR 1020147036499 A KR1020147036499 A KR 1020147036499A KR 20147036499 A KR20147036499 A KR 20147036499A KR 101971316 B1 KR101971316 B1 KR 101971316B1
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South Korea
Prior art keywords
glass
sludge
concentration
factor
amount
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Expired - Fee Related
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KR1020147036499A
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English (en)
Korean (ko)
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KR20150027133A (ko
Inventor
준 호우
위후이 진
샤말라 샨무감
메흐멧 데르야 테티케르
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코닝 인코포레이티드
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Publication of KR20150027133A publication Critical patent/KR20150027133A/ko
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
KR1020147036499A 2012-05-31 2013-05-28 습식 산 에칭시 슬러지 조절 방법 Expired - Fee Related KR101971316B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261653705P 2012-05-31 2012-05-31
US61/653,705 2012-05-31
PCT/US2013/042810 WO2013181123A1 (en) 2012-05-31 2013-05-28 Method for sludge control in wet acid etching

Publications (2)

Publication Number Publication Date
KR20150027133A KR20150027133A (ko) 2015-03-11
KR101971316B1 true KR101971316B1 (ko) 2019-04-22

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ID=48614160

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147036499A Expired - Fee Related KR101971316B1 (ko) 2012-05-31 2013-05-28 습식 산 에칭시 슬러지 조절 방법

Country Status (7)

Country Link
US (1) US9290410B2 (https=)
EP (1) EP2855385A1 (https=)
JP (1) JP2015523306A (https=)
KR (1) KR101971316B1 (https=)
CN (1) CN104684859B (https=)
TW (1) TWI555712B (https=)
WO (1) WO2013181123A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013181213A1 (en) * 2012-05-31 2013-12-05 Corning Incorporated Systems and methods for acid-treating glass articles
CN111499210A (zh) 2014-07-30 2020-08-07 康宁股份有限公司 超声槽和均匀玻璃基板蚀刻方法
WO2021030122A1 (en) 2019-08-13 2021-02-18 Corning Incorporated Textured glass articles and methods of making the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003020255A (ja) 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
US20070215835A1 (en) 2001-08-31 2007-09-20 Hirohisa Kikuyama Surface treating fluid for fine processing of multi-component glass substrate
US20090110914A1 (en) 2005-12-28 2009-04-30 Dajian Zhuang Process for Producing Hurricane-Resistant Glass
WO2009157378A1 (ja) 2008-06-25 2009-12-30 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917320A1 (de) 1989-05-27 1990-12-20 Bayer Ag Harnstoffgruppen enthaltende (meth)-acrylsaeure-derivate von triisocyanaten und ihre verwendung
JPH07215736A (ja) * 1994-01-31 1995-08-15 Hoya Corp ガラス体表面の化学的研磨法
JP4370737B2 (ja) 2001-06-27 2009-11-25 三菱化学エンジニアリング株式会社 フッ酸の供給方法
JP5132859B2 (ja) * 2001-08-24 2013-01-30 ステラケミファ株式会社 多成分を有するガラス基板用の微細加工表面処理液
JP2006326444A (ja) * 2005-05-25 2006-12-07 Sony Corp エッチングシステム
KR20080022917A (ko) * 2006-09-08 2008-03-12 삼성전자주식회사 식각액 공급장치, 식각장치 및 식각방법
CN101295673B (zh) * 2007-04-27 2010-11-03 南亚科技股份有限公司 一种形成位线接触插塞的方法与晶体管结构
CN101868428A (zh) * 2007-11-19 2010-10-20 旭硝子株式会社 玻璃基板的蚀刻处理方法
KR100943321B1 (ko) 2008-03-03 2010-02-19 (주)세미로드 유리 식각 장치와 유리 기판의 슬러지 제거 방법
KR101093362B1 (ko) 2009-09-23 2011-12-14 호서대학교 산학협력단 유리 식각액
KR20110056095A (ko) 2009-11-20 2011-05-26 타코마테크놀러지 주식회사 식각액 조성물
JP5573219B2 (ja) * 2010-02-18 2014-08-20 ソニー株式会社 薄膜トランジスタ、ならびに電子機器およびその製造方法
US9309921B2 (en) 2011-07-29 2016-04-12 Harmonic Drive Systems Inc. Internally-toothed gear unit with composite roller bearing, and wave gear device
US9926225B2 (en) 2011-12-30 2018-03-27 Corning Incorporated Media and methods for etching glass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003020255A (ja) 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
US20070215835A1 (en) 2001-08-31 2007-09-20 Hirohisa Kikuyama Surface treating fluid for fine processing of multi-component glass substrate
US20090110914A1 (en) 2005-12-28 2009-04-30 Dajian Zhuang Process for Producing Hurricane-Resistant Glass
WO2009157378A1 (ja) 2008-06-25 2009-12-30 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス

Also Published As

Publication number Publication date
EP2855385A1 (en) 2015-04-08
CN104684859A (zh) 2015-06-03
TWI555712B (zh) 2016-11-01
US9290410B2 (en) 2016-03-22
CN104684859B (zh) 2019-07-12
WO2013181123A1 (en) 2013-12-05
JP2015523306A (ja) 2015-08-13
US20150136736A1 (en) 2015-05-21
KR20150027133A (ko) 2015-03-11
TW201410629A (zh) 2014-03-16

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