JP2015523306A5 - - Google Patents
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- Publication number
- JP2015523306A5 JP2015523306A5 JP2015515104A JP2015515104A JP2015523306A5 JP 2015523306 A5 JP2015523306 A5 JP 2015523306A5 JP 2015515104 A JP2015515104 A JP 2015515104A JP 2015515104 A JP2015515104 A JP 2015515104A JP 2015523306 A5 JP2015523306 A5 JP 2015523306A5
- Authority
- JP
- Japan
- Prior art keywords
- glass
- factor
- range
- concentration
- etchant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 16
- 239000002253 acid Substances 0.000 claims 7
- 239000011521 glass Substances 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 3
- 102000003712 Complement factor B Human genes 0.000 claims 2
- 108090000056 Complement factor B Proteins 0.000 claims 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 239000000075 oxide glass Substances 0.000 claims 2
- 238000001556 precipitation Methods 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 150000007513 acids Chemical class 0.000 claims 1
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001340 alkali metals Chemical class 0.000 claims 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims 1
- 150000001342 alkaline earth metals Chemical class 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000005407 aluminoborosilicate glass Substances 0.000 claims 1
- 239000005388 borosilicate glass Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 claims 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000006060 molten glass Substances 0.000 claims 1
- 239000002244 precipitate Substances 0.000 claims 1
- 239000005368 silicate glass Substances 0.000 claims 1
- 239000010802 sludge Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261653705P | 2012-05-31 | 2012-05-31 | |
| US61/653,705 | 2012-05-31 | ||
| PCT/US2013/042810 WO2013181123A1 (en) | 2012-05-31 | 2013-05-28 | Method for sludge control in wet acid etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015523306A JP2015523306A (ja) | 2015-08-13 |
| JP2015523306A5 true JP2015523306A5 (https=) | 2016-07-14 |
Family
ID=48614160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015515104A Pending JP2015523306A (ja) | 2012-05-31 | 2013-05-28 | ウエット酸エッチングにおけるスラッジ制御のための方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9290410B2 (https=) |
| EP (1) | EP2855385A1 (https=) |
| JP (1) | JP2015523306A (https=) |
| KR (1) | KR101971316B1 (https=) |
| CN (1) | CN104684859B (https=) |
| TW (1) | TWI555712B (https=) |
| WO (1) | WO2013181123A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013181213A1 (en) * | 2012-05-31 | 2013-12-05 | Corning Incorporated | Systems and methods for acid-treating glass articles |
| CN111499210A (zh) | 2014-07-30 | 2020-08-07 | 康宁股份有限公司 | 超声槽和均匀玻璃基板蚀刻方法 |
| WO2021030122A1 (en) | 2019-08-13 | 2021-02-18 | Corning Incorporated | Textured glass articles and methods of making the same |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3917320A1 (de) | 1989-05-27 | 1990-12-20 | Bayer Ag | Harnstoffgruppen enthaltende (meth)-acrylsaeure-derivate von triisocyanaten und ihre verwendung |
| JPH07215736A (ja) * | 1994-01-31 | 1995-08-15 | Hoya Corp | ガラス体表面の化学的研磨法 |
| JP3523239B2 (ja) * | 2001-04-12 | 2004-04-26 | 西山ステンレスケミカル株式会社 | ガラス基板の化学加工方法及びガラス基板 |
| JP4370737B2 (ja) | 2001-06-27 | 2009-11-25 | 三菱化学エンジニアリング株式会社 | フッ酸の供給方法 |
| JP5132859B2 (ja) * | 2001-08-24 | 2013-01-30 | ステラケミファ株式会社 | 多成分を有するガラス基板用の微細加工表面処理液 |
| JP5197902B2 (ja) * | 2001-08-31 | 2013-05-15 | ステラケミファ株式会社 | 多成分を有するガラス基板用の微細加工表面処理液 |
| JP2006326444A (ja) * | 2005-05-25 | 2006-12-07 | Sony Corp | エッチングシステム |
| CN1990402A (zh) * | 2005-12-28 | 2007-07-04 | 庄大建 | 防飓风玻璃生产工艺 |
| KR20080022917A (ko) * | 2006-09-08 | 2008-03-12 | 삼성전자주식회사 | 식각액 공급장치, 식각장치 및 식각방법 |
| CN101295673B (zh) * | 2007-04-27 | 2010-11-03 | 南亚科技股份有限公司 | 一种形成位线接触插塞的方法与晶体管结构 |
| CN101868428A (zh) * | 2007-11-19 | 2010-10-20 | 旭硝子株式会社 | 玻璃基板的蚀刻处理方法 |
| KR100943321B1 (ko) | 2008-03-03 | 2010-02-19 | (주)세미로드 | 유리 식각 장치와 유리 기판의 슬러지 제거 방법 |
| CN102076625A (zh) * | 2008-06-25 | 2011-05-25 | 旭硝子株式会社 | 无碱玻璃基板的蚀刻方法及显示装置 |
| KR101093362B1 (ko) | 2009-09-23 | 2011-12-14 | 호서대학교 산학협력단 | 유리 식각액 |
| KR20110056095A (ko) | 2009-11-20 | 2011-05-26 | 타코마테크놀러지 주식회사 | 식각액 조성물 |
| JP5573219B2 (ja) * | 2010-02-18 | 2014-08-20 | ソニー株式会社 | 薄膜トランジスタ、ならびに電子機器およびその製造方法 |
| US9309921B2 (en) | 2011-07-29 | 2016-04-12 | Harmonic Drive Systems Inc. | Internally-toothed gear unit with composite roller bearing, and wave gear device |
| US9926225B2 (en) | 2011-12-30 | 2018-03-27 | Corning Incorporated | Media and methods for etching glass |
-
2013
- 2013-05-28 KR KR1020147036499A patent/KR101971316B1/ko not_active Expired - Fee Related
- 2013-05-28 CN CN201380028674.6A patent/CN104684859B/zh not_active Expired - Fee Related
- 2013-05-28 US US14/403,680 patent/US9290410B2/en not_active Expired - Fee Related
- 2013-05-28 EP EP13728610.0A patent/EP2855385A1/en not_active Withdrawn
- 2013-05-28 JP JP2015515104A patent/JP2015523306A/ja active Pending
- 2013-05-28 WO PCT/US2013/042810 patent/WO2013181123A1/en not_active Ceased
- 2013-05-31 TW TW102119382A patent/TWI555712B/zh not_active IP Right Cessation
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