KR101947537B1 - 플라즈마 처리 장치 - Google Patents

플라즈마 처리 장치 Download PDF

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Publication number
KR101947537B1
KR101947537B1 KR1020150091294A KR20150091294A KR101947537B1 KR 101947537 B1 KR101947537 B1 KR 101947537B1 KR 1020150091294 A KR1020150091294 A KR 1020150091294A KR 20150091294 A KR20150091294 A KR 20150091294A KR 101947537 B1 KR101947537 B1 KR 101947537B1
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wafer
potential
plasma
voltage
variable
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KR20160012904A (ko
Inventor
마사키 이시구로
마사히로 스미야
시게루 시라요네
가즈유키 이케나가
도모유키 다무라
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가부시키가이샤 히다치 하이테크놀로지즈
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01L21/3065—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32146—Amplitude modulation, includes pulsing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020150091294A 2014-07-25 2015-06-26 플라즈마 처리 장치 Active KR101947537B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2014-151449 2014-07-25
JP2014151449 2014-07-25
JPJP-P-2015-046627 2015-03-10
JP2015046627A JP6357436B2 (ja) 2014-07-25 2015-03-10 プラズマ処理装置

Related Child Applications (1)

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KR1020170078366A Division KR101947539B1 (ko) 2014-07-25 2017-06-21 플라즈마 처리 장치

Publications (2)

Publication Number Publication Date
KR20160012904A KR20160012904A (ko) 2016-02-03
KR101947537B1 true KR101947537B1 (ko) 2019-02-13

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KR1020150091294A Active KR101947537B1 (ko) 2014-07-25 2015-06-26 플라즈마 처리 장치
KR1020170078366A Active KR101947539B1 (ko) 2014-07-25 2017-06-21 플라즈마 처리 장치

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US (2) US11257661B2 (https=)
JP (1) JP6357436B2 (https=)
KR (2) KR101947537B1 (https=)
TW (1) TWI585883B (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6357436B2 (ja) * 2014-07-25 2018-07-11 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6708358B2 (ja) * 2016-08-03 2020-06-10 株式会社日立ハイテク プラズマ処理装置及び試料の離脱方法
JP6727068B2 (ja) * 2016-08-08 2020-07-22 株式会社日立ハイテク プラズマ処理装置およびプラズマ処理方法
JP6703508B2 (ja) * 2017-09-20 2020-06-03 株式会社日立ハイテク プラズマ処理装置及びプラズマ処理方法
US10991591B2 (en) * 2018-01-29 2021-04-27 Ulvac, Inc. Reactive ion etching apparatus
JP7059064B2 (ja) * 2018-03-26 2022-04-25 株式会社日立ハイテク プラズマ処理装置
JP7306886B2 (ja) * 2018-07-30 2023-07-11 東京エレクトロン株式会社 制御方法及びプラズマ処理装置
JP7089977B2 (ja) * 2018-08-02 2022-06-23 東京エレクトロン株式会社 プラズマエッチング方法及びプラズマ処理装置
CN112424911B (zh) * 2019-06-20 2023-09-22 株式会社日立高新技术 等离子体处理装置以及等离子体处理方法
CN117293008A (zh) 2019-08-05 2023-12-26 株式会社日立高新技术 等离子处理装置
TWI796593B (zh) * 2019-09-06 2023-03-21 美商應用材料股份有限公司 用於不同基板的共同靜電吸盤
US11551961B2 (en) 2020-05-06 2023-01-10 Sandisk Technologies Llc Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
US11538708B2 (en) * 2020-05-06 2022-12-27 Sandisk Technologies Llc Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
US11594440B2 (en) * 2020-10-21 2023-02-28 Applied Materials, Inc. Real time bias detection and correction for electrostatic chuck
CN115250648B (zh) * 2021-02-25 2025-11-11 株式会社日立高新技术 等离子处理装置
JP7717265B2 (ja) * 2022-04-11 2025-08-01 三菱電機株式会社 プラズマ処理システム及び学習済モデルの製造方法
KR20250030431A (ko) * 2023-08-23 2025-03-05 주식회사 히타치하이테크 플라스마 처리 장치, 및 플라스마 처리 방법

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KR100232040B1 (ko) * 1995-10-11 1999-12-01 니시히라 순지 플라즈마 cvd장치 및 방법과 드라이에칭장치 및 방법
JP2001176958A (ja) 1999-12-15 2001-06-29 Hitachi Ltd プラズマ処理方法
US6333246B1 (en) 1999-06-30 2001-12-25 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system
US6373681B2 (en) 1996-09-19 2002-04-16 Hitachi, Ltd. Electrostatic chuck, and method of and apparatus for processing sample using the chuck
JP2004047511A (ja) * 2002-07-08 2004-02-12 Tokyo Electron Ltd 離脱方法、処理方法、静電吸着装置および処理装置
JP2007266296A (ja) * 2006-03-28 2007-10-11 Tokyo Electron Ltd 基板処理装置及び側壁部品

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JP2586768B2 (ja) * 1991-10-31 1997-03-05 株式会社日立製作所 静電吸着装置
JP3458548B2 (ja) * 1995-08-11 2003-10-20 日新電機株式会社 ワーク電位の測定方法
JP3911787B2 (ja) 1996-09-19 2007-05-09 株式会社日立製作所 試料処理装置及び試料処理方法
JP3792865B2 (ja) * 1997-10-30 2006-07-05 松下電器産業株式会社 半導体装置の製造装置およびドライエッチング方法
JP4657473B2 (ja) 2001-03-06 2011-03-23 東京エレクトロン株式会社 プラズマ処理装置
JP3555084B2 (ja) * 2001-06-11 2004-08-18 Ｎｅｃエレクトロニクス株式会社 半導体基板に対するプラズマ処理方法及び半導体基板のためのプラズマ処理装置
JP3578739B2 (ja) 2001-09-27 2004-10-20 Ｎｅｃエレクトロニクス株式会社 プラズマ装置
KR101247857B1 (ko) * 2004-06-21 2013-03-26 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치
JP4468194B2 (ja) 2005-01-28 2010-05-26 株式会社日立ハイテクノロジーズ プラズマ処理方法およびプラズマ処理装置
JP2007073568A (ja) * 2005-09-05 2007-03-22 Hitachi High-Technologies Corp プラズマ処理装置
JP5315942B2 (ja) 2008-05-21 2013-10-16 東京エレクトロン株式会社 載置台機構、これを用いたプラズマ処理装置及び静電チャックへの電圧印加方法
JP2013084552A (ja) * 2011-09-29 2013-05-09 Tokyo Electron Ltd ラジカル選択装置及び基板処理装置
JP5976377B2 (ja) * 2012-04-25 2016-08-23 東京エレクトロン株式会社 被処理基体に対する微粒子付着の制御方法、及び、処理装置
JP6140412B2 (ja) 2012-09-21 2017-05-31 東京エレクトロン株式会社 ガス供給方法及びプラズマ処理装置
JP6088780B2 (ja) * 2012-10-02 2017-03-01 株式会社アルバック プラズマ処理方法及びプラズマ処理装置
JP6357436B2 (ja) * 2014-07-25 2018-07-11 株式会社日立ハイテクノロジーズ プラズマ処理装置

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Publication number Priority date Publication date Assignee Title
KR100232040B1 (ko) * 1995-10-11 1999-12-01 니시히라 순지 플라즈마 cvd장치 및 방법과 드라이에칭장치 및 방법
US6373681B2 (en) 1996-09-19 2002-04-16 Hitachi, Ltd. Electrostatic chuck, and method of and apparatus for processing sample using the chuck
US6333246B1 (en) 1999-06-30 2001-12-25 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system
JP2001176958A (ja) 1999-12-15 2001-06-29 Hitachi Ltd プラズマ処理方法
JP2004047511A (ja) * 2002-07-08 2004-02-12 Tokyo Electron Ltd 離脱方法、処理方法、静電吸着装置および処理装置
JP2007266296A (ja) * 2006-03-28 2007-10-11 Tokyo Electron Ltd 基板処理装置及び側壁部品

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US12112925B2 (en) 2024-10-08
KR20160012904A (ko) 2016-02-03
JP6357436B2 (ja) 2018-07-11
TWI585883B (zh) 2017-06-01
JP2016032096A (ja) 2016-03-07
KR101947539B1 (ko) 2019-02-13
US20220139678A1 (en) 2022-05-05
KR20170077078A (ko) 2017-07-05
US20160027615A1 (en) 2016-01-28
US11257661B2 (en) 2022-02-22
TW201604988A (zh) 2016-02-01

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