JP5976377B2 - 被処理基体に対する微粒子付着の制御方法、及び、処理装置 - Google Patents
被処理基体に対する微粒子付着の制御方法、及び、処理装置 Download PDFInfo
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- JP5976377B2 JP5976377B2 JP2012100213A JP2012100213A JP5976377B2 JP 5976377 B2 JP5976377 B2 JP 5976377B2 JP 2012100213 A JP2012100213 A JP 2012100213A JP 2012100213 A JP2012100213 A JP 2012100213A JP 5976377 B2 JP5976377 B2 JP 5976377B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32642—Focus rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49998—Work holding
Description
Claims (6)
- 処理容器内に被処理基体を収容していない状態で、前記処理容器の内部をクリーニングする工程と、
前記処理容器の内部をクリーニングする工程の後、被処理基体を前記処理容器内に搬入する前に、該処理容器内において被処理基体を静電吸着する静電チャックに電圧を与える工程と、
前記静電チャックに電圧を与える工程の後に、前記処理容器内に被処理基体を搬入する工程と、
を含み、
前記静電チャックに電圧を与える工程では、前記静電チャックを囲むように設けられたフォーカスリングと被処理基体との間の電位差を低減するよう、前記静電チャックに電圧が与えられる、
被処理基体に対する微粒子付着の制御方法。 - 被処理基体を搬入する前記工程の前に毎回、前記静電チャックに電圧を与える工程が行われる、請求項1に記載の被処理基体に対する微粒子付着の制御方法。
- 前記静電チャックに電圧を与える工程では、前記静電チャックが被処理基体を静電吸着するときに前記静電チャックに与えられる電圧の絶対値よりも小さい絶対値を有する負の電圧が前記静電チャックに与えられる、請求項1又は2に記載の被処理基体に対する微粒子付着の制御方法。
- 処理容器と、
前記処理容器内に設けられた静電チャックと、
前記静電チャックに直流電圧を与える直流電源と、
前記直流電源を制御する制御部と、
前記処理容器内にクリーニングガスを供給するガス供給部と、
を備え、
前記制御部は、
前記処理容器内に被処理基体が搬入される前であり、且つ、前記直流電源によって前記電圧が与えられる前に、前記ガス供給部に前記クリーニングガスを供給させ、
前記処理容器内にクリーニングガスが供給された後、前記処理容器内に被処理基体が搬送される前に、前記静電チャックを囲むように設けられたフォーカスリングと被処理基体との間の電位差を低減する電圧が前記静電チャックに与えられるよう、前記直流電源を制御する、
処理装置。 - 前記制御部は、被処理基体が搬入される前に毎回、前記フォーカスリングと被処理基体との間の電位差を低減する電圧が前記静電チャックに与えられるよう、前記直流電源を制御する、請求項4に記載の処理装置。
- 前記フォーカスリングと被処理基体との間の電位差を低減する電圧は、前記静電チャックによって被処理基体を静電吸着するときに前記静電チャックに与えられる電圧の絶対値よりも小さい絶対値を有する負の電圧である、請求項4又は5に記載の処理装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012100213A JP5976377B2 (ja) | 2012-04-25 | 2012-04-25 | 被処理基体に対する微粒子付着の制御方法、及び、処理装置 |
CN201280071768.7A CN104205306B (zh) | 2012-04-25 | 2012-11-07 | 控制微粒附着在被处理基体上的方法和处理装置 |
PCT/JP2012/078875 WO2013161106A1 (ja) | 2012-04-25 | 2012-11-07 | 被処理基体に対する微粒子付着の制御方法、及び、処理装置 |
US14/387,654 US9892951B2 (en) | 2012-04-25 | 2012-11-07 | Method of controlling adherence of microparticles to substrate to be processed, and processing apparatus |
EP12875448.8A EP2843690B1 (en) | 2012-04-25 | 2012-11-07 | Method for control of adherence of microparticles to base material to be processed, and processing device |
KR1020147026974A KR102036944B1 (ko) | 2012-04-25 | 2012-11-07 | 피처리 기체에 대한 미립자 부착의 제어 방법, 및 처리 장치 |
TW102114510A TWI567862B (zh) | 2012-04-25 | 2013-04-24 | A particle adhesion control method and a processing device for the substrate to be processed |
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JP2012100213A JP5976377B2 (ja) | 2012-04-25 | 2012-04-25 | 被処理基体に対する微粒子付着の制御方法、及び、処理装置 |
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JP5976377B2 true JP5976377B2 (ja) | 2016-08-23 |
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US (1) | US9892951B2 (ja) |
EP (1) | EP2843690B1 (ja) |
JP (1) | JP5976377B2 (ja) |
KR (1) | KR102036944B1 (ja) |
CN (1) | CN104205306B (ja) |
TW (1) | TWI567862B (ja) |
WO (1) | WO2013161106A1 (ja) |
Families Citing this family (11)
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JP6397680B2 (ja) * | 2014-07-24 | 2018-09-26 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置およびプラズマ処理装置の運転方法 |
JP6357436B2 (ja) * | 2014-07-25 | 2018-07-11 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP6462283B2 (ja) | 2014-09-11 | 2019-01-30 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
TWI593473B (zh) * | 2015-10-28 | 2017-08-01 | 漢辰科技股份有限公司 | 清潔靜電吸盤的方法 |
TWM563652U (zh) * | 2016-10-13 | 2018-07-11 | 美商應用材料股份有限公司 | 用於電漿處理裝置的腔室部件及包含其之裝置 |
JP6861579B2 (ja) * | 2017-06-02 | 2021-04-21 | 東京エレクトロン株式会社 | プラズマ処理装置、静電吸着方法および静電吸着プログラム |
JP6851270B2 (ja) * | 2017-06-16 | 2021-03-31 | 東京エレクトロン株式会社 | 静電吸着方法 |
JP7122864B2 (ja) * | 2018-05-14 | 2022-08-22 | 東京エレクトロン株式会社 | クリーニング方法及び基板処理装置 |
CN112789718A (zh) * | 2018-10-01 | 2021-05-11 | 东京毅力科创株式会社 | 静电去除基材表面异物的装置和方法 |
US20210210355A1 (en) * | 2020-01-08 | 2021-07-08 | Tokyo Electron Limited | Methods of Plasma Processing Using a Pulsed Electron Beam |
US20220119952A1 (en) * | 2020-10-20 | 2022-04-21 | Applied Materials, Inc. | Method of reducing defects in a multi-layer pecvd teos oxide film |
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- 2012-04-25 JP JP2012100213A patent/JP5976377B2/ja active Active
- 2012-11-07 EP EP12875448.8A patent/EP2843690B1/en active Active
- 2012-11-07 WO PCT/JP2012/078875 patent/WO2013161106A1/ja active Application Filing
- 2012-11-07 US US14/387,654 patent/US9892951B2/en active Active
- 2012-11-07 CN CN201280071768.7A patent/CN104205306B/zh active Active
- 2012-11-07 KR KR1020147026974A patent/KR102036944B1/ko active IP Right Grant
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Also Published As
Publication number | Publication date |
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TWI567862B (zh) | 2017-01-21 |
KR20150011794A (ko) | 2015-02-02 |
CN104205306A (zh) | 2014-12-10 |
US9892951B2 (en) | 2018-02-13 |
EP2843690A1 (en) | 2015-03-04 |
EP2843690B1 (en) | 2020-01-22 |
WO2013161106A1 (ja) | 2013-10-31 |
TW201401425A (zh) | 2014-01-01 |
US20150075566A1 (en) | 2015-03-19 |
JP2013229445A (ja) | 2013-11-07 |
CN104205306B (zh) | 2017-07-18 |
KR102036944B1 (ko) | 2019-10-25 |
EP2843690A4 (en) | 2015-10-21 |
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