JP6462283B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- JP6462283B2 JP6462283B2 JP2014184744A JP2014184744A JP6462283B2 JP 6462283 B2 JP6462283 B2 JP 6462283B2 JP 2014184744 A JP2014184744 A JP 2014184744A JP 2014184744 A JP2014184744 A JP 2014184744A JP 6462283 B2 JP6462283 B2 JP 6462283B2
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- 235000012431 wafers Nutrition 0.000 claims description 171
- 239000002245 particle Substances 0.000 claims description 136
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 23
- 239000010453 quartz Substances 0.000 claims description 22
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- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 13
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
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- 238000009832 plasma treatment Methods 0.000 description 2
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- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32504—Means for preventing sputtering of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32577—Electrical connecting means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
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Description
Claims (6)
- 真空容器内部に配置され減圧された内側の空間でプラズマが形成される処理室と、この処理室内に配置され前記プラズマを用いた処理対象のウエハがその上面に載せられるステージと、前記ステージの上部に配置され前記ウエハを当該ステージ上面に静電吸着して保持する電力が供給される電極と、前記プラズマを用いた処理中に前記ステージに高周波電力を供給する高周波電源とを備え、複数枚の前記ウエハを一枚ずつ連続的に処理するプラズマ処理装置であって、
前記プラズマを用いた処理が異なる条件で実施される複数の処理ステップとこれら処理ステップ同士の間でプラズマの形成が停止されている複数の期間とを有し、
各々の前記プラズマの形成が停止されている期間において前記電極に供給される電圧を前記処理室内に浮遊して帯電した粒子の各極性のバランスに応じて変化させるプラズマ処理装置。
- 請求項1に記載のプラズマ処理装置であって、
前記ステージの上方でその上面に対向して配置され前記処理室の天井面を構成する石英製のプレートと、前記ステージの上面の上方であって前記処理室の内側壁を構成する石英製の円筒部材とを備え、
任意の前記ウエハの前記処理の開始前に少なくとも前記プレート及び円筒部材の表面に皮膜を形成する工程が実施されるものであって、
前記任意のウエハの処理中の前記複数のプラズマが停止されている期間において前記電極に供給される所定の電圧により前記ウエハに電位が形成され、これら期間のうち任意の1つの期間における前記電位は当該期間の直前の期間における電位より大きくされるプラズマ処理装置。
- 請求項1または2に記載のプラズマ処理装置であって、
前記複数のプラズマが停止されている期間において前記電極に供給される所定の電圧により前記ウエハに形成される電位が前記ウエハの処理の枚数の増加に伴って低下させるプラズマ処理装置。
- 真空容器内部に配置され減圧された処理室の内側に配置されたステージ上面に処理対象のウエハを載せ、前記ステージの上部に配置された電極に電力を供給して前記ウエハを当該ステージ上面に静電吸着して保持し、前記処理室内にプラズマを形成して前記ステージに高周波電力を供給して前記ウエハの処理を実施するプラズマ処理方法であって、
前記ウエハの処理が異なる条件で実施される複数の処理ステップとこれら処理ステップ同士の間でプラズマの形成が停止される複数の期間とを有して構成され、
各々の前記プラズマの形成が停止される期間において前記電極に供給される電圧を前記処理室内に浮遊して帯電した粒子の各極性のバランスに応じて変化させるプラズマ処理方法。
- 請求項4に記載のプラズマ処理方法であって、
任意の前記ウエハの前記処理の開始前に少なくとも前記ステージの上方でその上面に対向して配置され前記処理室の天井面を構成する石英製のプレートと、前記ステージの上面の上方であって前記処理室の内側壁を構成する石英製の円筒部材との表面に皮膜を形成する工程を備え、
前記複数のプラズマが停止されている期間同士の間で前記電極に供給される所定の電圧により前記ウエハに形成される電位が一様に大きくされるプラズマ処理方法。
- 請求項4または5に記載のプラズマ処理方法であって、
前記複数のプラズマが停止されている期間において前記電極に供給される所定の電圧により前記ウエハに形成される電位が前記ウエハの処理の枚数の増加に伴って低下させるプラズマ処理方法。
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JP2014184744A JP6462283B2 (ja) | 2014-09-11 | 2014-09-11 | プラズマ処理装置 |
US14/851,996 US9607874B2 (en) | 2014-09-11 | 2015-09-11 | Plasma processing apparatus |
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JP6462283B2 true JP6462283B2 (ja) | 2019-01-30 |
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JP7189762B2 (ja) | 2018-12-26 | 2022-12-14 | 株式会社Subaru | スポット溶接ガン及びスポット溶接方法 |
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JP6407694B2 (ja) * | 2014-12-16 | 2018-10-17 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP6371354B2 (ja) * | 2016-09-30 | 2018-08-08 | 本田技研工業株式会社 | 被膜形成装置 |
WO2018204500A1 (en) * | 2017-05-02 | 2018-11-08 | Tokyo Electron Limited | Manufacturing methods to reduce surface particle impurities after a plasma process |
JP7325294B2 (ja) * | 2019-10-17 | 2023-08-14 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP7390219B2 (ja) | 2020-03-11 | 2023-12-01 | 東京エレクトロン株式会社 | エッジリングの保持方法、プラズマ処理装置、及び基板処理システム |
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JP2006269556A (ja) * | 2005-03-22 | 2006-10-05 | Elpida Memory Inc | プラズマ処理装置、及び半導体装置の製造方法 |
JP5976377B2 (ja) | 2012-04-25 | 2016-08-23 | 東京エレクトロン株式会社 | 被処理基体に対する微粒子付着の制御方法、及び、処理装置 |
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US9607874B2 (en) | 2017-03-28 |
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