TWI585883B - Plasma processing device - Google Patents

Plasma processing device Download PDF

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Publication number
TWI585883B
TWI585883B TW104121119A TW104121119A TWI585883B TW I585883 B TWI585883 B TW I585883B TW 104121119 A TW104121119 A TW 104121119A TW 104121119 A TW104121119 A TW 104121119A TW I585883 B TWI585883 B TW I585883B
Authority
TW
Taiwan
Prior art keywords
plasma
wafer
potential
plasma processing
processing apparatus
Prior art date
Application number
TW104121119A
Other languages
English (en)
Chinese (zh)
Other versions
TW201604988A (zh
Inventor
石黒正貴
角屋誠浩
白米茂
池永和幸
田村智行
Original Assignee
日立全球先端科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立全球先端科技股份有限公司 filed Critical 日立全球先端科技股份有限公司
Publication of TW201604988A publication Critical patent/TW201604988A/zh
Application granted granted Critical
Publication of TWI585883B publication Critical patent/TWI585883B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32146—Amplitude modulation, includes pulsing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW104121119A 2014-07-25 2015-06-30 Plasma processing device TWI585883B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014151449 2014-07-25
JP2015046627A JP6357436B2 (ja) 2014-07-25 2015-03-10 プラズマ処理装置

Publications (2)

Publication Number Publication Date
TW201604988A TW201604988A (zh) 2016-02-01
TWI585883B true TWI585883B (zh) 2017-06-01

Family

ID=55167284

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104121119A TWI585883B (zh) 2014-07-25 2015-06-30 Plasma processing device

Country Status (4)

Country Link
US (2) US11257661B2 (https=)
JP (1) JP6357436B2 (https=)
KR (2) KR101947537B1 (https=)
TW (1) TWI585883B (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6357436B2 (ja) * 2014-07-25 2018-07-11 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6708358B2 (ja) * 2016-08-03 2020-06-10 株式会社日立ハイテク プラズマ処理装置及び試料の離脱方法
JP6727068B2 (ja) * 2016-08-08 2020-07-22 株式会社日立ハイテク プラズマ処理装置およびプラズマ処理方法
JP6703508B2 (ja) * 2017-09-20 2020-06-03 株式会社日立ハイテク プラズマ処理装置及びプラズマ処理方法
US10991591B2 (en) * 2018-01-29 2021-04-27 Ulvac, Inc. Reactive ion etching apparatus
JP7059064B2 (ja) * 2018-03-26 2022-04-25 株式会社日立ハイテク プラズマ処理装置
JP7306886B2 (ja) * 2018-07-30 2023-07-11 東京エレクトロン株式会社 制御方法及びプラズマ処理装置
JP7089977B2 (ja) * 2018-08-02 2022-06-23 東京エレクトロン株式会社 プラズマエッチング方法及びプラズマ処理装置
CN112424911B (zh) * 2019-06-20 2023-09-22 株式会社日立高新技术 等离子体处理装置以及等离子体处理方法
CN117293008A (zh) 2019-08-05 2023-12-26 株式会社日立高新技术 等离子处理装置
TWI796593B (zh) * 2019-09-06 2023-03-21 美商應用材料股份有限公司 用於不同基板的共同靜電吸盤
US11551961B2 (en) 2020-05-06 2023-01-10 Sandisk Technologies Llc Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
US11538708B2 (en) * 2020-05-06 2022-12-27 Sandisk Technologies Llc Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
US11594440B2 (en) * 2020-10-21 2023-02-28 Applied Materials, Inc. Real time bias detection and correction for electrostatic chuck
CN115250648B (zh) * 2021-02-25 2025-11-11 株式会社日立高新技术 等离子处理装置
JP7717265B2 (ja) * 2022-04-11 2025-08-01 三菱電機株式会社 プラズマ処理システム及び学習済モデルの製造方法
KR20250030431A (ko) * 2023-08-23 2025-03-05 주식회사 히타치하이테크 플라스마 처리 장치, 및 플라스마 처리 방법

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US20130081761A1 (en) * 2011-09-29 2013-04-04 Tokyo Electron Limited Radical passing device and substrate processing apparatus
JP2013191857A (ja) * 2004-06-21 2013-09-26 Tokyo Electron Ltd プラズマ処理装置およびプラズマ処理方法、ならびにコンピュータ読み取り可能な記憶媒体
JP2014063918A (ja) * 2012-09-21 2014-04-10 Tokyo Electron Ltd ガス供給方法及びプラズマ処理装置

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JP2586768B2 (ja) * 1991-10-31 1997-03-05 株式会社日立製作所 静電吸着装置
JP3458548B2 (ja) * 1995-08-11 2003-10-20 日新電機株式会社 ワーク電位の測定方法
JPH09106899A (ja) * 1995-10-11 1997-04-22 Anelva Corp プラズマｃｖｄ装置及び方法並びにドライエッチング装置及び方法
JP3911787B2 (ja) 1996-09-19 2007-05-09 株式会社日立製作所 試料処理装置及び試料処理方法
TW334609B (en) 1996-09-19 1998-06-21 Hitachi Ltd Electrostatic chuck, method and device for processing sanyle use the same
JP3792865B2 (ja) * 1997-10-30 2006-07-05 松下電器産業株式会社 半導体装置の製造装置およびドライエッチング方法
JP3990076B2 (ja) 1999-06-30 2007-10-10 株式会社東芝 半導体装置の製造方法
JP2001176958A (ja) * 1999-12-15 2001-06-29 Hitachi Ltd プラズマ処理方法
JP4657473B2 (ja) 2001-03-06 2011-03-23 東京エレクトロン株式会社 プラズマ処理装置
JP3555084B2 (ja) * 2001-06-11 2004-08-18 Ｎｅｃエレクトロニクス株式会社 半導体基板に対するプラズマ処理方法及び半導体基板のためのプラズマ処理装置
JP3578739B2 (ja) 2001-09-27 2004-10-20 Ｎｅｃエレクトロニクス株式会社 プラズマ装置
JP2004047511A (ja) * 2002-07-08 2004-02-12 Tokyo Electron Ltd 離脱方法、処理方法、静電吸着装置および処理装置
JP4468194B2 (ja) 2005-01-28 2010-05-26 株式会社日立ハイテクノロジーズ プラズマ処理方法およびプラズマ処理装置
JP2007073568A (ja) * 2005-09-05 2007-03-22 Hitachi High-Technologies Corp プラズマ処理装置
JP4709047B2 (ja) * 2006-03-28 2011-06-22 東京エレクトロン株式会社 基板処理装置及び側壁部品
JP5315942B2 (ja) 2008-05-21 2013-10-16 東京エレクトロン株式会社 載置台機構、これを用いたプラズマ処理装置及び静電チャックへの電圧印加方法
JP5976377B2 (ja) * 2012-04-25 2016-08-23 東京エレクトロン株式会社 被処理基体に対する微粒子付着の制御方法、及び、処理装置
JP6088780B2 (ja) * 2012-10-02 2017-03-01 株式会社アルバック プラズマ処理方法及びプラズマ処理装置
JP6357436B2 (ja) * 2014-07-25 2018-07-11 株式会社日立ハイテクノロジーズ プラズマ処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013191857A (ja) * 2004-06-21 2013-09-26 Tokyo Electron Ltd プラズマ処理装置およびプラズマ処理方法、ならびにコンピュータ読み取り可能な記憶媒体
US20130081761A1 (en) * 2011-09-29 2013-04-04 Tokyo Electron Limited Radical passing device and substrate processing apparatus
JP2014063918A (ja) * 2012-09-21 2014-04-10 Tokyo Electron Ltd ガス供給方法及びプラズマ処理装置

Also Published As

Publication number Publication date
US12112925B2 (en) 2024-10-08
KR20160012904A (ko) 2016-02-03
JP6357436B2 (ja) 2018-07-11
JP2016032096A (ja) 2016-03-07
KR101947539B1 (ko) 2019-02-13
US20220139678A1 (en) 2022-05-05
KR20170077078A (ko) 2017-07-05
US20160027615A1 (en) 2016-01-28
US11257661B2 (en) 2022-02-22
TW201604988A (zh) 2016-02-01
KR101947537B1 (ko) 2019-02-13

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