KR101940011B1 - 블록 코폴리머 및 이와 관련한 방법 - Google Patents

블록 코폴리머 및 이와 관련한 방법 Download PDF

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KR101940011B1
KR101940011B1 KR1020130014258A KR20130014258A KR101940011B1 KR 101940011 B1 KR101940011 B1 KR 101940011B1 KR 1020130014258 A KR1020130014258 A KR 1020130014258A KR 20130014258 A KR20130014258 A KR 20130014258A KR 101940011 B1 KR101940011 B1 KR 101940011B1
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film
methyl methacrylate
poly
substrate
copolymer
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KR20130092489A (ko
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에린 보겔
발레리 긴즈버그
시-웨이 챙
다니엘 머레이
필립 허스태드
피터 트레포나스
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롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨
다우 글로벌 테크놀로지스 엘엘씨
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
    • C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
    • C08F297/026—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type polymerising acrylic acid, methacrylic acid or derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F230/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing phosphorus, selenium, tellurium or a metal
    • C08F230/04—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing phosphorus, selenium, tellurium or a metal containing a metal
    • C08F230/08—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing phosphorus, selenium, tellurium or a metal containing a metal containing silicon
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • C08L33/04—Homopolymers or copolymers of esters
    • C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
    • C08L33/10—Homopolymers or copolymers of methacrylic acid esters
    • C08L33/12—Homopolymers or copolymers of methyl methacrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L43/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing boron, silicon, phosphorus, selenium, tellurium or a metal; Compositions of derivatives of such polymers
    • C08L43/04—Homopolymers or copolymers of monomers containing silicon
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D133/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/04—Homopolymers or copolymers of esters
    • C09D133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09D133/10—Homopolymers or copolymers of methacrylic acid esters
    • C09D133/12—Homopolymers or copolymers of methyl methacrylate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0018—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular optical properties, e.g. fluorescent or phosphorescent
    • B29K2995/0026—Transparent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/30—Vehicles, e.g. ships or aircraft, or body parts thereof

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Graft Or Block Polymers (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020130014258A 2012-02-10 2013-02-08 블록 코폴리머 및 이와 관련한 방법 Active KR101940011B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/370,588 US8697810B2 (en) 2012-02-10 2012-02-10 Block copolymer and methods relating thereto
US13/370,588 2012-02-10

Publications (2)

Publication Number Publication Date
KR20130092489A KR20130092489A (ko) 2013-08-20
KR101940011B1 true KR101940011B1 (ko) 2019-01-18

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Country Link
US (1) US8697810B2 (enExample)
JP (1) JP6120591B2 (enExample)
KR (1) KR101940011B1 (enExample)
CN (1) CN103289285B (enExample)
TW (1) TWI485171B (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014111292A1 (en) 2013-01-18 2014-07-24 Basf Se Acrylic dispersion-based coating compositions
US9382444B2 (en) * 2013-06-24 2016-07-05 Dow Global Technologies Llc Neutral layer polymers, methods of manufacture thereof and articles comprising the same
FR3010414B1 (fr) * 2013-09-09 2015-09-25 Arkema France Procede d'obtention de films epais nano-structures obtenus a partir d'une composition de copolymeres a blocs
CN105916904B (zh) 2013-12-06 2018-11-09 株式会社Lg化学 嵌段共聚物
JP6432847B2 (ja) 2013-12-06 2018-12-05 エルジー・ケム・リミテッド ブロック共重合体
EP3078686B1 (en) * 2013-12-06 2018-10-31 LG Chem, Ltd. Block copolymer
JP6402867B2 (ja) 2013-12-06 2018-10-10 エルジー・ケム・リミテッド ブロック共重合体
US10202480B2 (en) 2013-12-06 2019-02-12 Lg Chem, Ltd. Block copolymer
WO2015084120A1 (ko) 2013-12-06 2015-06-11 주식회사 엘지화학 단량체 및 블록 공중합체
EP3078695B1 (en) 2013-12-06 2020-11-04 LG Chem, Ltd. Block copolymer
WO2015084133A1 (ko) 2013-12-06 2015-06-11 주식회사 엘지화학 블록 공중합체
CN105899560B (zh) 2013-12-06 2018-01-12 株式会社Lg化学 嵌段共聚物
CN105934454B (zh) 2013-12-06 2019-01-18 株式会社Lg化学 嵌段共聚物
CN105934455B (zh) 2013-12-06 2019-01-18 株式会社Lg化学 嵌段共聚物
US10239980B2 (en) 2013-12-06 2019-03-26 Lg Chem, Ltd. Block copolymer
JP6361893B2 (ja) 2013-12-06 2018-07-25 エルジー・ケム・リミテッド ブロック共重合体
EP3078685B1 (en) 2013-12-06 2020-09-09 LG Chem, Ltd. Block copolymer
JP6702649B2 (ja) * 2013-12-31 2020-06-03 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ ブロックコポリマーの性質を制御する方法及びブロックコポリマーから製造された物品
JP6558894B2 (ja) 2013-12-31 2019-08-14 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ コポリマーの設計、その製造方法およびそれを含む物品
JP2015129261A (ja) * 2013-12-31 2015-07-16 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ ブロックコポリマーのアニール方法およびブロックコポリマーから製造する物品
FR3017395B1 (fr) * 2014-02-11 2017-11-03 Arkema France Procede de controle de l'energie de surface d'un substrat
JP6394042B2 (ja) 2014-02-13 2018-09-26 Jsr株式会社 パターン形成用組成物及びパターン形成方法
CN107075051B (zh) 2014-09-30 2019-09-03 株式会社Lg化学 嵌段共聚物
WO2016053000A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
US10281820B2 (en) 2014-09-30 2019-05-07 Lg Chem, Ltd. Block copolymer
WO2016053005A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
WO2016052994A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
WO2016053009A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
WO2016053001A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
WO2016053014A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 패턴화 기판의 제조 방법
EP3203497B1 (en) 2014-09-30 2023-11-29 LG Chem, Ltd. Method for producing patterned substrate
US10377894B2 (en) 2014-09-30 2019-08-13 Lg Chem, Ltd. Block copolymer
US9505945B2 (en) * 2014-10-30 2016-11-29 Az Electronic Materials (Luxembourg) S.A.R.L. Silicon containing block copolymers for direct self-assembly application
WO2016133115A1 (ja) * 2015-02-20 2016-08-25 Jsr株式会社 自己組織化膜の形成方法、パターン形成方法及び自己組織化膜形成用組成物
JP6413888B2 (ja) 2015-03-30 2018-10-31 Jsr株式会社 パターン形成用組成物、パターン形成方法及びブロック共重合体
TW201700595A (zh) 2015-04-01 2017-01-01 Jsr Corp 圖案形成用組成物及圖案形成方法
KR101910147B1 (ko) * 2015-05-27 2018-10-19 주식회사 엘지화학 가교성 조성물
CN105384952B (zh) * 2015-09-15 2018-01-23 北京航空航天大学 一种利用机械剪切力对嵌段共聚物自组装取向的调控方法
EP3275909A1 (en) 2016-07-27 2018-01-31 Clariant Plastics & Coatings Ltd Novel polyacrylate-polysilane block copolymers
CN106478975B (zh) * 2016-10-21 2019-10-25 苏州科技大学 双功能嵌段聚合物的制备方法及其改性聚偏氟乙烯微滤膜的方法
KR102183698B1 (ko) * 2016-11-30 2020-11-26 주식회사 엘지화학 고분자막의 제조 방법
FR3089982A1 (fr) * 2018-12-12 2020-06-19 Arkema France Procédé de fabrication d’un copolymère à blocs contenant du silicium
US11920023B2 (en) 2022-04-28 2024-03-05 Rohm And Haas Electronic Materials Llc. Composite materials for dielectric applications

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050113475A1 (en) 2002-02-19 2005-05-26 Haruo Nishida Preparation of copolymers by gas phase polymerization
US20070254169A1 (en) 2006-04-28 2007-11-01 Kamins Theodore I Structures including organic self-assembled monolayers and methods of making the structures
US7560141B1 (en) 2008-11-11 2009-07-14 International Business Machines Corporation Method of positioning patterns from block copolymer self-assembly

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005008701A (ja) * 2003-06-17 2005-01-13 Ube Ind Ltd 高分子膜及びその作製方法
JP4673266B2 (ja) * 2006-08-03 2011-04-20 日本電信電話株式会社 パターン形成方法及びモールド
ES2483944T3 (es) * 2007-12-28 2014-08-08 Bridgestone Corporation Interpolímeros que contienen unidades méricas de isobutileno y dieno
JP4654280B2 (ja) * 2008-08-28 2011-03-16 株式会社日立製作所 微細構造体の製造方法
US8247033B2 (en) 2008-09-19 2012-08-21 The University Of Massachusetts Self-assembly of block copolymers on topographically patterned polymeric substrates
US8349203B2 (en) 2009-09-04 2013-01-08 International Business Machines Corporation Method of forming self-assembled patterns using block copolymers, and articles thereof
JP5671302B2 (ja) * 2009-11-10 2015-02-18 富士フイルム株式会社 インプリント用硬化性組成物、パターン形成方法およびパターン

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050113475A1 (en) 2002-02-19 2005-05-26 Haruo Nishida Preparation of copolymers by gas phase polymerization
US20070254169A1 (en) 2006-04-28 2007-11-01 Kamins Theodore I Structures including organic self-assembled monolayers and methods of making the structures
US7560141B1 (en) 2008-11-11 2009-07-14 International Business Machines Corporation Method of positioning patterns from block copolymer self-assembly

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US20130209693A1 (en) 2013-08-15
KR20130092489A (ko) 2013-08-20
US8697810B2 (en) 2014-04-15
JP2013166932A (ja) 2013-08-29
CN103289285A (zh) 2013-09-11
TWI485171B (zh) 2015-05-21
JP6120591B2 (ja) 2017-04-26
TW201335205A (zh) 2013-09-01
CN103289285B (zh) 2016-03-30

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