KR101889366B1 - 탄소 나노튜브 칼럼 및 프로브로서의 탄소 나노튜브 칼럼 제조방법과 사용방법 - Google Patents

탄소 나노튜브 칼럼 및 프로브로서의 탄소 나노튜브 칼럼 제조방법과 사용방법 Download PDF

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KR101889366B1
KR101889366B1 KR1020127009762A KR20127009762A KR101889366B1 KR 101889366 B1 KR101889366 B1 KR 101889366B1 KR 1020127009762 A KR1020127009762 A KR 1020127009762A KR 20127009762 A KR20127009762 A KR 20127009762A KR 101889366 B1 KR101889366 B1 KR 101889366B1
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column
carbon nanotube
columns
substrate
metal
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KR20120082427A (ko
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벤자민 엔. 엘드리지
트릴리언트 팽
개탄 엘. 매튜
오닉 야글리오글루
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폼팩터, 인크.
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020127009762A 2009-09-14 2010-09-08 탄소 나노튜브 칼럼 및 프로브로서의 탄소 나노튜브 칼럼 제조방법과 사용방법 Expired - Fee Related KR101889366B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24220609P 2009-09-14 2009-09-14
US61/242,206 2009-09-14
US12/632,428 2009-12-07
US12/632,428 US8354855B2 (en) 2006-10-16 2009-12-07 Carbon nanotube columns and methods of making and using carbon nanotube columns as probes
PCT/US2010/048129 WO2011031759A2 (en) 2009-09-14 2010-09-08 Carbon nanotube columns and methods of making and using carbon nanotube columns as probes

Related Child Applications (1)

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KR1020187022982A Division KR20180095099A (ko) 2009-09-14 2010-09-08 탄소 나노튜브 칼럼 및 프로브로서의 탄소 나노튜브 칼럼 제조방법과 사용방법

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KR20120082427A KR20120082427A (ko) 2012-07-23
KR101889366B1 true KR101889366B1 (ko) 2018-08-17

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KR1020127009762A Expired - Fee Related KR101889366B1 (ko) 2009-09-14 2010-09-08 탄소 나노튜브 칼럼 및 프로브로서의 탄소 나노튜브 칼럼 제조방법과 사용방법
KR1020187022982A Ceased KR20180095099A (ko) 2009-09-14 2010-09-08 탄소 나노튜브 칼럼 및 프로브로서의 탄소 나노튜브 칼럼 제조방법과 사용방법

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US (1) US8354855B2 (https=)
JP (1) JP5796013B2 (https=)
KR (2) KR101889366B1 (https=)
TW (1) TWI526689B (https=)
WO (1) WO2011031759A2 (https=)

Cited By (1)

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KR20200117505A (ko) * 2019-04-04 2020-10-14 연세대학교 산학협력단 금속 나노입자가 코팅된 탄소나노튜브 네트워크를 포함하는 접촉식 마이크로 소자 및 이의 제조 방법

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Publication number Priority date Publication date Assignee Title
KR20200117505A (ko) * 2019-04-04 2020-10-14 연세대학교 산학협력단 금속 나노입자가 코팅된 탄소나노튜브 네트워크를 포함하는 접촉식 마이크로 소자 및 이의 제조 방법
KR102221162B1 (ko) 2019-04-04 2021-02-26 연세대학교 산학협력단 금속 나노입자가 코팅된 탄소나노튜브 네트워크를 포함하는 접촉식 마이크로 소자 및 이의 제조 방법

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US8354855B2 (en) 2013-01-15
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