KR101887730B1 - 표면-아래 결함 검토를 위한 샘플들의 준비를 위한 시스템들 및 방법들 - Google Patents

표면-아래 결함 검토를 위한 샘플들의 준비를 위한 시스템들 및 방법들 Download PDF

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KR101887730B1
KR101887730B1 KR1020147017909A KR20147017909A KR101887730B1 KR 101887730 B1 KR101887730 B1 KR 101887730B1 KR 1020147017909 A KR1020147017909 A KR 1020147017909A KR 20147017909 A KR20147017909 A KR 20147017909A KR 101887730 B1 KR101887730 B1 KR 101887730B1
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defect
marking
result file
defects
review
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KR20140108662A (ko
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세실리아 캄포치아로
홍 시아오
리에트 마이클 반
벤자민 클라크
하쉬 신하
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케이엘에이-텐코 코포레이션
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/31—Electron-beam or ion-beam tubes for localised treatment of objects for cutting or drilling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020147017909A 2011-11-29 2012-11-28 표면-아래 결함 검토를 위한 샘플들의 준비를 위한 시스템들 및 방법들 Active KR101887730B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161564733P 2011-11-29 2011-11-29
US61/564,733 2011-11-29
US13/687,244 2012-11-28
US13/687,244 US9318395B2 (en) 2011-11-29 2012-11-28 Systems and methods for preparation of samples for sub-surface defect review
PCT/US2012/066887 WO2013082181A1 (en) 2011-11-29 2012-11-28 Systems and methods for preparation of samples for sub-surface defect review

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KR20140108662A KR20140108662A (ko) 2014-09-12
KR101887730B1 true KR101887730B1 (ko) 2018-08-10

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US (1) US9318395B2 (https=)
EP (1) EP2789008A4 (https=)
JP (1) JP6244307B2 (https=)
KR (1) KR101887730B1 (https=)
IL (1) IL232703B (https=)
SG (1) SG11201402475YA (https=)
TW (1) TWI608232B (https=)
WO (1) WO2013082181A1 (https=)

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SG11201402475YA (en) 2014-06-27
JP2014534452A (ja) 2014-12-18
EP2789008A4 (en) 2015-07-22
WO2013082181A1 (en) 2013-06-06
US20130137193A1 (en) 2013-05-30
TW201333457A (zh) 2013-08-16
EP2789008A1 (en) 2014-10-15
JP6244307B2 (ja) 2017-12-06
US9318395B2 (en) 2016-04-19
TWI608232B (zh) 2017-12-11
IL232703B (en) 2018-03-29
IL232703A0 (en) 2014-07-31
KR20140108662A (ko) 2014-09-12

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