KR101790367B1 - 가압 롤러를 사용한 미세 접촉 인쇄 장치 및 방법 - Google Patents

가압 롤러를 사용한 미세 접촉 인쇄 장치 및 방법 Download PDF

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Publication number
KR101790367B1
KR101790367B1 KR1020127018974A KR20127018974A KR101790367B1 KR 101790367 B1 KR101790367 B1 KR 101790367B1 KR 1020127018974 A KR1020127018974 A KR 1020127018974A KR 20127018974 A KR20127018974 A KR 20127018974A KR 101790367 B1 KR101790367 B1 KR 101790367B1
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South Korea
Prior art keywords
stamp
substrate
roller
inflatable bladder
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020127018974A
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English (en)
Korean (ko)
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KR20120112606A (ko
Inventor
트레이시 제이 베르니아르드
맷튜 에이치 프레이
랜스 이 베하이머
미하일 엘 페쿠로브스키
리차드 더블유 그레거
다니엘 피 미한
조나단 제이 오하레
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
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Publication of KR20120112606A publication Critical patent/KR20120112606A/ko
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Publication of KR101790367B1 publication Critical patent/KR101790367B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
    • B41K3/26—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located below article-supporting surface
    • B41K3/28—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located below article-supporting surface and bearing a positive image
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F31/00—Inking arrangements or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F33/00—Indicating, counting, warning, control or safety devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
    • B41K3/32—Apparatus for stamping articles having integral means for supporting the articles to be stamped with co-operating stamping and counter-stamping members
    • B41K3/34—Apparatus for stamping articles having integral means for supporting the articles to be stamped with co-operating stamping and counter-stamping members in the form of indexable cylinders, e.g. of curved or polygonal cross-section, or of movable chains or bands
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
KR1020127018974A 2009-12-22 2010-12-17 가압 롤러를 사용한 미세 접촉 인쇄 장치 및 방법 Expired - Fee Related KR101790367B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US28894509P 2009-12-22 2009-12-22
US61/288,945 2009-12-22
PCT/US2010/060912 WO2011079032A1 (en) 2009-12-22 2010-12-17 Apparatus and method for microcontact printing using a pressurized roller

Publications (2)

Publication Number Publication Date
KR20120112606A KR20120112606A (ko) 2012-10-11
KR101790367B1 true KR101790367B1 (ko) 2017-10-25

Family

ID=44196105

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127018974A Expired - Fee Related KR101790367B1 (ko) 2009-12-22 2010-12-17 가압 롤러를 사용한 미세 접촉 인쇄 장치 및 방법

Country Status (6)

Country Link
US (1) US8950324B2 (enExample)
EP (1) EP2516162A4 (enExample)
JP (1) JP5843784B2 (enExample)
KR (1) KR101790367B1 (enExample)
CN (1) CN102666103B (enExample)
WO (1) WO2011079032A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230025041A (ko) 2021-08-13 2023-02-21 한국기계연구원 롤러에 대한 가압장치 및 이를 포함하는 패터닝 장치

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CN103135338B (zh) * 2012-10-12 2015-04-22 苏州富鑫林光电科技有限公司 纳米级软性模具制作方法与装置
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US8899738B2 (en) 2013-01-21 2014-12-02 Xerox Corporation Pressure roller containing a volume of fluid
JP6265127B2 (ja) * 2013-08-14 2018-01-24 三菱ケミカル株式会社 円柱状ナノインプリント用モールドの製造方法、およびナノインプリント用再生モールドの製造方法
US10118426B2 (en) 2014-11-25 2018-11-06 Massachusetts Institute Of Technology Nanoporous stamp for flexographic printing
US10583677B2 (en) 2014-11-25 2020-03-10 Massachusetts Institute Of Technology Nanoporous stamp printing of nanoparticulate inks
KR102684910B1 (ko) * 2016-11-18 2024-07-15 에스케이온 주식회사 이차전지 압착용 롤러
CN107627716A (zh) * 2017-09-26 2018-01-26 平湖纬宸机械科技有限公司 一种印刷机
CN107554047A (zh) * 2017-09-26 2018-01-09 平湖纬宸机械科技有限公司 一种印刷机的压紧辊筒
CN111526990B (zh) * 2017-12-29 2022-09-27 3M创新有限公司 非平面图案化纳米结构表面及用于其制造的印刷方法
US11396196B2 (en) 2018-01-05 2022-07-26 Massachusetts Institute Of Technology Apparatus and methods for contact-printing using electrostatic nanoporous stamps
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KR102689451B1 (ko) * 2020-06-03 2024-07-30 주식회사 엘지에너지솔루션 유체를 포함하는 가압장치 및 이를 이용한 전극 및 전극 및 전극조립체 제조방법
CN112432562B (zh) * 2020-11-24 2023-06-27 河南中南工业有限责任公司 一种特种烟火药智能混药机
US20240231220A9 (en) * 2022-10-24 2024-07-11 Canon Kabushiki Kaisha Planarization process, apparatus and method of manufacturing an article
WO2024256009A1 (de) * 2023-06-15 2024-12-19 Ev Group E. Thallner Gmbh Rollvorrichtung sowie anlage und verfahren zum einlassen einer oberflächenstruktur in einem objekt

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Publication number Priority date Publication date Assignee Title
KR20230025041A (ko) 2021-08-13 2023-02-21 한국기계연구원 롤러에 대한 가압장치 및 이를 포함하는 패터닝 장치
KR102561765B1 (ko) * 2021-08-13 2023-08-02 한국기계연구원 롤러에 대한 가압장치 및 이를 포함하는 패터닝 장치

Also Published As

Publication number Publication date
US20120247355A1 (en) 2012-10-04
EP2516162A4 (en) 2015-10-28
CN102666103A (zh) 2012-09-12
JP2013515378A (ja) 2013-05-02
KR20120112606A (ko) 2012-10-11
US8950324B2 (en) 2015-02-10
WO2011079032A1 (en) 2011-06-30
JP5843784B2 (ja) 2016-01-13
EP2516162A1 (en) 2012-10-31
CN102666103B (zh) 2016-04-06

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