CN102666103B - 用于使用增压辊的微接触印刷的装置及方法 - Google Patents

用于使用增压辊的微接触印刷的装置及方法 Download PDF

Info

Publication number
CN102666103B
CN102666103B CN201080058886.5A CN201080058886A CN102666103B CN 102666103 B CN102666103 B CN 102666103B CN 201080058886 A CN201080058886 A CN 201080058886A CN 102666103 B CN102666103 B CN 102666103B
Authority
CN
China
Prior art keywords
roller
substrate
pressing mold
stamp
inflatable bladder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080058886.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN102666103A (zh
Inventor
特雷西·J·贝尼纳德
马修·H·弗雷
兰斯·E·柏和曼
米哈伊尔·L·佩库罗夫斯基
理查德·W·格里格
丹尼尔·P·梅汉
乔纳森·J·欧哈雷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN102666103A publication Critical patent/CN102666103A/zh
Application granted granted Critical
Publication of CN102666103B publication Critical patent/CN102666103B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F31/00—Inking arrangements or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F33/00—Indicating, counting, warning, control or safety devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
    • B41K3/26—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located below article-supporting surface
    • B41K3/28—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located below article-supporting surface and bearing a positive image
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
    • B41K3/32—Apparatus for stamping articles having integral means for supporting the articles to be stamped with co-operating stamping and counter-stamping members
    • B41K3/34—Apparatus for stamping articles having integral means for supporting the articles to be stamped with co-operating stamping and counter-stamping members in the form of indexable cylinders, e.g. of curved or polygonal cross-section, or of movable chains or bands
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
CN201080058886.5A 2009-12-22 2010-12-17 用于使用增压辊的微接触印刷的装置及方法 Expired - Fee Related CN102666103B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US28894509P 2009-12-22 2009-12-22
US61/288,945 2009-12-22
PCT/US2010/060912 WO2011079032A1 (en) 2009-12-22 2010-12-17 Apparatus and method for microcontact printing using a pressurized roller

Publications (2)

Publication Number Publication Date
CN102666103A CN102666103A (zh) 2012-09-12
CN102666103B true CN102666103B (zh) 2016-04-06

Family

ID=44196105

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080058886.5A Expired - Fee Related CN102666103B (zh) 2009-12-22 2010-12-17 用于使用增压辊的微接触印刷的装置及方法

Country Status (6)

Country Link
US (1) US8950324B2 (enExample)
EP (1) EP2516162A4 (enExample)
JP (1) JP5843784B2 (enExample)
KR (1) KR101790367B1 (enExample)
CN (1) CN102666103B (enExample)
WO (1) WO2011079032A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07114412B2 (ja) 1989-01-09 1995-12-06 富士通株式会社 メッセージ識別処理方法
US8747599B2 (en) * 2008-05-29 2014-06-10 Chidella Krishna Sastry Process for making self-patterning substrates and the product thereof
CN103135338B (zh) * 2012-10-12 2015-04-22 苏州富鑫林光电科技有限公司 纳米级软性模具制作方法与装置
DE102012112030A1 (de) * 2012-12-10 2014-06-12 Ev Group E. Thallner Gmbh Verfahren zum Mikrokontaktprägen
WO2014105633A1 (en) * 2012-12-31 2014-07-03 3M Innovative Properties Company Microcontact printing with high relief stamps in a roll-to-roll process
US10081174B2 (en) * 2012-12-31 2018-09-25 3M Innovative Properties Company Re-inking roller for microcontact printing in a roll-to-roll process
US8899738B2 (en) 2013-01-21 2014-12-02 Xerox Corporation Pressure roller containing a volume of fluid
JP6265127B2 (ja) * 2013-08-14 2018-01-24 三菱ケミカル株式会社 円柱状ナノインプリント用モールドの製造方法、およびナノインプリント用再生モールドの製造方法
US10118426B2 (en) 2014-11-25 2018-11-06 Massachusetts Institute Of Technology Nanoporous stamp for flexographic printing
US10583677B2 (en) 2014-11-25 2020-03-10 Massachusetts Institute Of Technology Nanoporous stamp printing of nanoparticulate inks
KR102684910B1 (ko) * 2016-11-18 2024-07-15 에스케이온 주식회사 이차전지 압착용 롤러
CN107627716A (zh) * 2017-09-26 2018-01-26 平湖纬宸机械科技有限公司 一种印刷机
CN107554047A (zh) * 2017-09-26 2018-01-09 平湖纬宸机械科技有限公司 一种印刷机的压紧辊筒
CN111526990B (zh) * 2017-12-29 2022-09-27 3M创新有限公司 非平面图案化纳米结构表面及用于其制造的印刷方法
US11396196B2 (en) 2018-01-05 2022-07-26 Massachusetts Institute Of Technology Apparatus and methods for contact-printing using electrostatic nanoporous stamps
US10934454B2 (en) * 2019-01-22 2021-03-02 Amazon Technologies, Inc. Coating composition for a metal substrate
KR102689451B1 (ko) * 2020-06-03 2024-07-30 주식회사 엘지에너지솔루션 유체를 포함하는 가압장치 및 이를 이용한 전극 및 전극 및 전극조립체 제조방법
CN112432562B (zh) * 2020-11-24 2023-06-27 河南中南工业有限责任公司 一种特种烟火药智能混药机
KR102561765B1 (ko) 2021-08-13 2023-08-02 한국기계연구원 롤러에 대한 가압장치 및 이를 포함하는 패터닝 장치
US20240231220A9 (en) * 2022-10-24 2024-07-11 Canon Kabushiki Kaisha Planarization process, apparatus and method of manufacturing an article
WO2024256009A1 (de) * 2023-06-15 2024-12-19 Ev Group E. Thallner Gmbh Rollvorrichtung sowie anlage und verfahren zum einlassen einer oberflächenstruktur in einem objekt

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050193905A1 (en) * 2004-03-04 2005-09-08 Exatec Llc Method of transferring a membrane image to an article in a membrane image transfer printing process
CN1688395A (zh) * 2002-10-23 2005-10-26 3M创新有限公司 具有可膨胀室装置的涂覆模具
US20090025595A1 (en) * 2007-07-25 2009-01-29 Nano Terra Inc. Contact Printing Method Using an Elastomeric Stamp Having a Variable Surface Area and Variable Shape

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866572A (en) * 1973-05-29 1975-02-18 Xerox Corp Foraminous electrostatographic transfer system
NL8003895A (nl) 1980-07-04 1982-02-01 Stork Screens Bv Huls voor een drukcilinder alsmede werkwijze en inrichting voor het vervaardigen van een dergelijke huls.
US4672893A (en) * 1985-03-21 1987-06-16 Paramount Packaging Flexo-gravure printing
US4903579A (en) 1987-02-25 1990-02-27 Hamilton Harry J Pressure-release valve and conduit for preventing damage to seal of hydraulic power drive unit
JPH0561767U (ja) * 1992-01-23 1993-08-13 株式会社ジャパンイメージングシステム 加圧ローラ
US5415612A (en) 1992-06-12 1995-05-16 American Roller Company Compressible roller
US5481341A (en) 1993-08-18 1996-01-02 Xerox Corporation Roller for controlling application of carrier liquid
JPH0893748A (ja) * 1994-09-28 1996-04-09 Sumitomo Chem Co Ltd ロールおよびラミネーター
US5612773A (en) 1995-08-18 1997-03-18 Xerox Corporation Intermediate transfer member
WO1997007429A1 (en) 1995-08-18 1997-02-27 President And Fellows Of Harvard College Self-assembled monolayer directed patterning of surfaces
US5813961A (en) 1995-09-01 1998-09-29 Diamond Holding Corporation Inking, water form and metering roller
JPH09106585A (ja) * 1995-10-06 1997-04-22 Sony Corp 光学記録媒体の製造方法
JPH09330660A (ja) * 1996-06-10 1997-12-22 Sony Corp 印刷器具及び印刷方法
US5777650A (en) 1996-11-06 1998-07-07 Tektronix, Inc. Pressure roller
JPH10166550A (ja) * 1996-12-11 1998-06-23 Sony Corp 印刷用転写パッド及びその製造方法、印刷器具並びに印刷方法
US6006665A (en) 1997-10-30 1999-12-28 Didde Web Press Corporation Pliable anilox roller
US5947027A (en) 1998-09-08 1999-09-07 Motorola, Inc. Printing apparatus with inflatable means for advancing a substrate towards the stamping surface
JP4255157B2 (ja) * 1999-03-04 2009-04-15 横浜ゴム株式会社 空気入りタイヤ及びタイヤ成形用金型
US6257133B1 (en) 1999-03-15 2001-07-10 International Paper Method and apparatus for controlling cross directional nip dynamics
JP2001058352A (ja) 1999-06-14 2001-03-06 Dainippon Printing Co Ltd 密着転写方法および装置ならびに転写型
TW562755B (en) * 1999-12-31 2003-11-21 Ibm Stamp device for printing a pattern on a surface of a substrate
JP3969942B2 (ja) * 2000-09-01 2007-09-05 キヤノン株式会社 ローラとその製造方法、及び加熱定着装置
KR100358095B1 (ko) 2001-02-20 2002-10-25 삼성전자 주식회사 정착기용 가압롤러 및 그 제조방법
US6939279B2 (en) 2001-05-01 2005-09-06 Ten Cate Enbi Tire for skew reducing roller
US7338613B2 (en) 2001-09-10 2008-03-04 Surface Logix, Inc. System and process for automated microcontact printing
AU2003217184A1 (en) 2002-01-11 2003-09-02 Massachusetts Institute Of Technology Microcontact printing
US7296519B2 (en) 2002-05-27 2007-11-20 Koninklijke Philips Electronics N.V. Method and device for transferring a pattern from stamp to a substrate
US6792856B2 (en) * 2002-07-16 2004-09-21 International Business Machines Corporation Method and apparatus for accurate, micro-contact printing
US6923921B2 (en) 2002-12-30 2005-08-02 3M Innovative Properties Company Fluorinated polyether compositions
US6981445B2 (en) 2003-12-24 2006-01-03 Axela Biosensors Inc. Method and apparatus for micro-contact printing
EP1804979A1 (en) 2004-10-22 2007-07-11 Koninklijke Philips Electronics N.V. Roller micro-contact printer with pressure control
TWI271777B (en) * 2005-04-27 2007-01-21 Ind Tech Res Inst Uniform pressing micro-nano transfer printing apparatus
EP1890887B1 (en) * 2005-05-03 2015-10-28 Koninklijke Philips N.V. Method and device for transferring a pattern from a stamp to a substrate
GB2426486A (en) 2005-05-27 2006-11-29 Microsaic Systems Ltd Self-aligning micro-contact print engine
FR2900596B1 (fr) * 2006-05-04 2010-12-17 Michelin Soc Tech Procede de surveillance de l'etat operationnel d'un pneumatique
JP4755045B2 (ja) * 2006-08-02 2011-08-24 住友ゴム工業株式会社 紙送りローラ
JP4849617B2 (ja) * 2006-11-17 2012-01-11 信越ポリマー株式会社 ローラの製造方法及びローラ製造装置
WO2008091571A2 (en) * 2007-01-22 2008-07-31 Nano Terra Inc. High-throughput apparatus for patterning flexible substrates and method of using the same
US8726807B2 (en) 2007-06-04 2014-05-20 Goss International Americas, Inc. Smooth roller with low line load and methods
US9027480B2 (en) 2007-12-19 2015-05-12 3M Innovative Properties Company Ink solutions for microcontact printing
BRPI0822215A2 (pt) 2008-02-27 2015-06-23 Sharp Kk Aparelho de nanolitografia de rolo, rolo de molde para utilização em aparelho de nanolitografia de rolo, rolo de fixação para utilização em aparelho de nanolitografia de rolo, e método de produção de folha de nanolitografia
KR101397200B1 (ko) * 2008-02-28 2014-05-20 쓰리엠 이노베이티브 프로퍼티즈 컴파니 저 가시성 도체를 구비한 터치 스크린 센서
JP5101343B2 (ja) * 2008-03-03 2012-12-19 株式会社ダイセル 微細構造物の製造方法
US8858813B2 (en) 2008-12-11 2014-10-14 3M Innovative Properties Company Patterning process
WO2010151471A1 (en) 2009-06-25 2010-12-29 3M Innovative Properties Company Methods of wet etching a self-assembled monolayer patterned substrate and metal patterned articles

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1688395A (zh) * 2002-10-23 2005-10-26 3M创新有限公司 具有可膨胀室装置的涂覆模具
US20050193905A1 (en) * 2004-03-04 2005-09-08 Exatec Llc Method of transferring a membrane image to an article in a membrane image transfer printing process
US20090025595A1 (en) * 2007-07-25 2009-01-29 Nano Terra Inc. Contact Printing Method Using an Elastomeric Stamp Having a Variable Surface Area and Variable Shape

Also Published As

Publication number Publication date
US20120247355A1 (en) 2012-10-04
EP2516162A4 (en) 2015-10-28
CN102666103A (zh) 2012-09-12
JP2013515378A (ja) 2013-05-02
KR20120112606A (ko) 2012-10-11
US8950324B2 (en) 2015-02-10
WO2011079032A1 (en) 2011-06-30
KR101790367B1 (ko) 2017-10-25
JP5843784B2 (ja) 2016-01-13
EP2516162A1 (en) 2012-10-31

Similar Documents

Publication Publication Date Title
CN102666103B (zh) 用于使用增压辊的微接触印刷的装置及方法
John et al. Large-area, continuous roll-to-roll nanoimprinting with PFPE composite molds
TWI653155B (zh) 卷對卷製程中具有高浮雕印章之微接觸印刷方法及使用彼之系統
US20040197712A1 (en) System for contact printing
CN1299165C (zh) 印模,方法和设备
US8691134B2 (en) Roll-to-roll imprint lithography and purging system
TWI658944B (zh) 用於卷對卷製程中微接觸印刷的再上墨輥
US20080271625A1 (en) High-Throughput Apparatus for Patterning Flexible Substrates and Method of Using the Same
CN111526990B (zh) 非平面图案化纳米结构表面及用于其制造的印刷方法
KR101652590B1 (ko) 인쇄용 블랭킷 및 이의 제조방법
CN218938765U (zh) 一种纳米压印设备
US20210008866A1 (en) Nonplanar patterned nanostructured surface and printing methods for making thereof
Lee et al. Development of an UV rolling system for fabrication of micro/nano structure on polymeric films using a gas-roller-sustained seamless PDMS mold
CN112313080B (zh) 非平面图案化纳米结构表面及用于其制造的印刷方法
JP4523056B2 (ja) 転写体の製造法
CN118169961A (zh) 一种纳米压印设备
Caballero et al. Submerged nanocontact printing (SnCP) of thiols
Cui Nanofabrication by Replication
Lääniläinen Pehmeä litografia pinnan mikrokuvioinnissa
Lääniläinen of thesis: Soft Lithography for Surface Micropatterning
Pandya et al. Process Development for Conformable, Capillary-Driven, Continuous Roll-to-Roll Nanoimprint Lithography
KR20110035840A (ko) 용제 흡수체

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160406

Termination date: 20191217