KR101750001B1 - 플라즈마 처리 방법 및 플라즈마 처리 장치 - Google Patents

플라즈마 처리 방법 및 플라즈마 처리 장치 Download PDF

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KR101750001B1
KR101750001B1 KR1020150126202A KR20150126202A KR101750001B1 KR 101750001 B1 KR101750001 B1 KR 101750001B1 KR 1020150126202 A KR1020150126202 A KR 1020150126202A KR 20150126202 A KR20150126202 A KR 20150126202A KR 101750001 B1 KR101750001 B1 KR 101750001B1
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KR20160089262A (ko
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시게루 나카모토
다테히토 우스이
사토미 이노우에
고스케 후쿠치
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가부시키가이샤 히다치 하이테크놀로지즈
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    • H01L21/3065—
    • H01L21/02315—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Drying Of Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
KR1020150126202A 2015-01-19 2015-09-07 플라즈마 처리 방법 및 플라즈마 처리 장치 Active KR101750001B1 (ko)

Applications Claiming Priority (4)

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JPJP-P-2015-007360 2015-01-19
JP2015007360 2015-01-19
JPJP-P-2015-113580 2015-06-04
JP2015113580A JP6560909B2 (ja) 2015-01-19 2015-06-04 プラズマ処理方法およびプラズマ処理装置

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KR20160089262A KR20160089262A (ko) 2016-07-27
KR101750001B1 true KR101750001B1 (ko) 2017-06-22

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JP (1) JP6560909B2 (enExample)
KR (1) KR101750001B1 (enExample)
TW (1) TWI584376B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10215704B2 (en) * 2017-03-02 2019-02-26 Tokyo Electron Limited Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing
US10319649B2 (en) * 2017-04-11 2019-06-11 Applied Materials, Inc. Optical emission spectroscopy (OES) for remote plasma monitoring
JP6832800B2 (ja) * 2017-06-21 2021-02-24 東京エレクトロン株式会社 プラズマ処理装置
KR102510305B1 (ko) * 2020-03-11 2023-03-17 주식회사 히타치하이테크 플라스마 처리 장치 및 플라스마 처리 방법
JP7630371B2 (ja) * 2021-06-21 2025-02-17 東京エレクトロン株式会社 測定方法および測定装置

Citations (1)

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Publication number Priority date Publication date Assignee Title
KR100411318B1 (ko) * 1998-02-03 2003-12-18 가가쿠 기쥬츠 신코 지교단 반도체 플라즈마 처리에 있어서의 종점 검출 방법

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JPS57128823A (en) * 1981-02-02 1982-08-10 Shimadzu Corp Spectrum measuring device
JPS6111622A (ja) * 1984-06-27 1986-01-20 Hitachi Ltd 分光光度計
JP3217581B2 (ja) * 1994-02-25 2001-10-09 東京エレクトロン株式会社 エッチング終点検出方法
KR100426988B1 (ko) * 2001-11-08 2004-04-14 삼성전자주식회사 반도체 제조장비의 식각 종말점 검출장치 및 그에 따른검출방법
TW560080B (en) * 2002-09-12 2003-11-01 Winbond Electronics Corp A method for detecting the end point of plasma etching process by using matrix
US6982175B2 (en) * 2003-02-14 2006-01-03 Unaxis Usa Inc. End point detection in time division multiplexed etch processes
US20080176149A1 (en) * 2006-10-30 2008-07-24 Applied Materials, Inc. Endpoint detection for photomask etching
JP2009231718A (ja) * 2008-03-25 2009-10-08 Renesas Technology Corp ドライエッチング終点検出方法
JP5458693B2 (ja) 2009-06-26 2014-04-02 凸版印刷株式会社 終点検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100411318B1 (ko) * 1998-02-03 2003-12-18 가가쿠 기쥬츠 신코 지교단 반도체 플라즈마 처리에 있어서의 종점 검출 방법

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TW201628086A (zh) 2016-08-01
JP2016136607A (ja) 2016-07-28
TWI584376B (zh) 2017-05-21
JP6560909B2 (ja) 2019-08-14
KR20160089262A (ko) 2016-07-27

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