TWI584376B - Plasma processing device - Google Patents
Plasma processing device Download PDFInfo
- Publication number
- TWI584376B TWI584376B TW104130143A TW104130143A TWI584376B TW I584376 B TWI584376 B TW I584376B TW 104130143 A TW104130143 A TW 104130143A TW 104130143 A TW104130143 A TW 104130143A TW I584376 B TWI584376 B TW I584376B
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- Taiwan
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- 238000012545 processing Methods 0.000 title claims description 65
- 238000000034 method Methods 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 10
- 229920006395 saturated elastomer Polymers 0.000 claims description 8
- 238000003672 processing method Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 description 41
- 238000001228 spectrum Methods 0.000 description 29
- 238000009825 accumulation Methods 0.000 description 22
- 238000004020 luminiscence type Methods 0.000 description 17
- 230000003595 spectral effect Effects 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 12
- 230000000295 complement effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000001748 luminescence spectrum Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
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- 239000013589 supplement Substances 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 238000004422 calculation algorithm Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
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- 238000012360 testing method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
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- 230000003247 decreasing effect Effects 0.000 description 1
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- 239000003989 dielectric material Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000504 luminescence detection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015007360 | 2015-01-19 | ||
| JP2015113580A JP6560909B2 (ja) | 2015-01-19 | 2015-06-04 | プラズマ処理方法およびプラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201628086A TW201628086A (zh) | 2016-08-01 |
| TWI584376B true TWI584376B (zh) | 2017-05-21 |
Family
ID=56513113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104130143A TWI584376B (zh) | 2015-01-19 | 2015-09-11 | Plasma processing device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6560909B2 (enExample) |
| KR (1) | KR101750001B1 (enExample) |
| TW (1) | TWI584376B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10215704B2 (en) * | 2017-03-02 | 2019-02-26 | Tokyo Electron Limited | Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing |
| US10319649B2 (en) * | 2017-04-11 | 2019-06-11 | Applied Materials, Inc. | Optical emission spectroscopy (OES) for remote plasma monitoring |
| JP6832800B2 (ja) * | 2017-06-21 | 2021-02-24 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| KR102510305B1 (ko) * | 2020-03-11 | 2023-03-17 | 주식회사 히타치하이테크 | 플라스마 처리 장치 및 플라스마 처리 방법 |
| JP7630371B2 (ja) * | 2021-06-21 | 2025-02-17 | 東京エレクトロン株式会社 | 測定方法および測定装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030085198A1 (en) * | 2001-11-08 | 2003-05-08 | Yi Hun Jung | Method of detecting etching process end point in semiconductor fabricating equipment and detector therefor |
| US20040175913A1 (en) * | 2003-02-14 | 2004-09-09 | David Johnson | End point detection in time division multiplexed etch processes |
| US20080261335A1 (en) * | 2006-10-30 | 2008-10-23 | Michael Grimbergen | Endpoint detection for photomask etching |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57128823A (en) * | 1981-02-02 | 1982-08-10 | Shimadzu Corp | Spectrum measuring device |
| JPS6111622A (ja) * | 1984-06-27 | 1986-01-20 | Hitachi Ltd | 分光光度計 |
| JP3217581B2 (ja) * | 1994-02-25 | 2001-10-09 | 東京エレクトロン株式会社 | エッチング終点検出方法 |
| WO1999040617A1 (en) * | 1998-02-03 | 1999-08-12 | Tokyo Electron Yamanashi Limited | End point detecting method for semiconductor plasma processing |
| TW560080B (en) * | 2002-09-12 | 2003-11-01 | Winbond Electronics Corp | A method for detecting the end point of plasma etching process by using matrix |
| JP2009231718A (ja) * | 2008-03-25 | 2009-10-08 | Renesas Technology Corp | ドライエッチング終点検出方法 |
| JP5458693B2 (ja) | 2009-06-26 | 2014-04-02 | 凸版印刷株式会社 | 終点検出装置 |
-
2015
- 2015-06-04 JP JP2015113580A patent/JP6560909B2/ja active Active
- 2015-09-07 KR KR1020150126202A patent/KR101750001B1/ko active Active
- 2015-09-11 TW TW104130143A patent/TWI584376B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030085198A1 (en) * | 2001-11-08 | 2003-05-08 | Yi Hun Jung | Method of detecting etching process end point in semiconductor fabricating equipment and detector therefor |
| US20040175913A1 (en) * | 2003-02-14 | 2004-09-09 | David Johnson | End point detection in time division multiplexed etch processes |
| US20080261335A1 (en) * | 2006-10-30 | 2008-10-23 | Michael Grimbergen | Endpoint detection for photomask etching |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201628086A (zh) | 2016-08-01 |
| KR20160089262A (ko) | 2016-07-27 |
| KR101750001B1 (ko) | 2017-06-22 |
| JP2016136607A (ja) | 2016-07-28 |
| JP6560909B2 (ja) | 2019-08-14 |
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