KR101744606B1 - Film defect inspection device, defect inspection method, and release film - Google Patents
Film defect inspection device, defect inspection method, and release film Download PDFInfo
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- KR101744606B1 KR101744606B1 KR1020127027351A KR20127027351A KR101744606B1 KR 101744606 B1 KR101744606 B1 KR 101744606B1 KR 1020127027351 A KR1020127027351 A KR 1020127027351A KR 20127027351 A KR20127027351 A KR 20127027351A KR 101744606 B1 KR101744606 B1 KR 101744606B1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N2021/8908—Strip illuminator, e.g. light tube
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N21/8903—Optical details; Scanning details using a multiple detector array
Abstract
An inspection apparatus for detecting a defect in a film of an elongate product, comprising: illuminating means for illuminating the film on one side of the film; a first polarizing plate provided between the illuminating means and the film; And a light receiving means which is provided on the other surface side of the film and is illuminated from the illuminating means and receives the transmitted light transmitted through the first polarizing plate, the film and the second polarizing plate, and the angle of the first polarizing plate is And an angle adjusting means for adjusting the angle of the second polarizing plate independently in the plane of the second polarizing plate within the plane of the first polarizing plate.
Description
The present invention relates to a defect inspection apparatus and a defect inspection method for a polarizing plate release film for continuously performing defect inspection before a polarizing plate processing process of a polarizing plate release film used in a polarizing plate production process, Method of the present invention.
In recent years, the demand for a liquid crystal display (LCD) having advantages such as thinness, light weight, low power consumption and high image quality is rapidly expanding as compared with a conventional CRT, and in particular, a large- It is rapidly expanding. In many cases, the LCD is made to have sufficient brightness even on the large screen by increasing the brightness of the backlight according to the large screen of the LCD, or attaching the functional film for improving the brightness. In such a high-luminance type LCD, since the brightness is high, small defects present in the display often become a problem. In the case of a component having optical characteristics such as a polarizing plate and a retardation plate, defects This is becoming a problem. For this reason, it is important to prevent the occurrence of defects in the manufacturing process of each optical member, and to improve the inspection property which can be reliably recognized as a defect even if defects occur.
Although visual inspection by the cross-Nicol method is common in the inspection of defects of the polarizing plate, inspection by an automatic inspection machine using the cross-Nicol method is also being investigated in various ways in a polarizing plate used for a large-screen TV of 32 inches or more.
This cross-Nicol method is a method in which two polarizing plates are orthogonalized with their alignment principal axes to make a dark field, and a measurement product such as a film is sandwiched therebetween and observed with transmitted light. By arranging the cross nicols, if there is no defect, the image of the front black is inputted from the image pickup portion, but if there is a defect, the portion does not become black. That is, if foreign matters or defects exist in the polarizing plate, defects can be detected because they appear as bright spots. Since the uniaxially or biaxially stretched oriented polyethylene terephthalate film is bonded to the polarizing plate as a release film through the pressure-sensitive adhesive layer, if the optical defects of the release film are added, the brightness point of the release film increases, do. It is known that foreign matter in the release film or scratches on the surface is a bright spot at the time of defect inspection.
However, since the orientation film has a birefringence (phase difference) due to orientation by stretching, the incident linearly polarized light is elliptically polarized by transmission, and is substantially in the state of crossed nicols It does not. That is, only the two polarizing plates are orthogonalized, the light receiving amount of the visible light input to the image sensing unit is affected by the birefringence of the film.
In the film produced by stretching, as described in
As a defect detection apparatus for a film which solves such a problem, an inspection apparatus disclosed in
However, in
Further, according to the knowledge of the present inventors, in the case of a defect which causes only a small amount of light change regardless of a defect causing a large light quantity change, when the polarizing plate is arranged such that the field of view at the cross-Nicol inspection becomes the darkest, the contrast difference is smaller Which makes detection difficult.
An object of the present invention is to provide a defect inspection apparatus capable of precisely inspecting a defect even in a film having a birefringence deviation in the film width direction and increasing the contrast of the defect portion and the top portion and inspecting the defect with high precision.
In order to achieve the above object, according to the present invention, there is provided an inspection apparatus for detecting defects in a film of a long product having a predetermined width, comprising: illumination means for illuminating the film on one side of the film; A second polarizing plate provided on the other side of the film and being illuminated from the illuminating means and being incident on the first polarizing plate, the film, and the second polarizing plate, And angle adjusting means for adjusting the angle of the first polarizing plate independently in the plane of the first polarizing plate and independently of the angle of the second polarizing plate in the plane of the second polarizing plate There is provided a defect inspection apparatus for a film.
According to a preferred embodiment of the present invention, a plurality of the second polarizing plate and the light receiving means are arranged in the width direction of the film, and the second angle adjusting means is provided to each of the plurality of second polarizing plates There is provided a film defect inspection apparatus.
According to a preferred embodiment of the present invention, the angle adjusting means for adjusting the angle of the first polarizing plate in the first plane includes a shaft serving as a point for rotating the first polarizing plate, And a linear motion mechanism that pushes and pulls the film in a substantially rotating direction as a force point.
According to a preferred embodiment of the present invention, there is provided a film defect inspection apparatus characterized in that the angle of the first and second polarizing plates is adjusted to a range of at least -8 ° to + 8 ° with a rotation accuracy of 1 ° or less .
According to another aspect of the present invention, there is provided a defect inspection method for detecting a defect in a film of a long film having a predetermined width, the method comprising: illuminating the film with illumination means provided on one side of the film; A second polarizing plate is provided on the other side of the film, and the transmitted light, which has been illuminated from the illuminating means and transmitted through the first polarizing plate, the film, and the second polarizing plate, And the angle of the first polarizing plate is adjusted independently within the plane of the first polarizing plate and the angle of the second polarizing plate is independently adjusted within the plane of the second polarizing plate A defect inspection method of a film is provided.
According to a preferred aspect of the present invention, a plurality of the second polarizing plates and the light receiving means are arranged in the width direction of the film, and the angle of the second polarizing plate is independently adjusted according to the arrangement position. An inspection method is provided.
According to a preferred embodiment of the present invention, there is provided a liquid crystal display comprising: a shaft serving as a point for rotating the first polarizing plate when the angle of the first polarizing plate is adjusted in the first plane; And the angle of the polarizing plate is finely adjusted to a rotation accuracy of 1 DEG or less by a linear mechanism that pushes and pulls the film in the substantially rotating direction.
According to a preferred aspect of the present invention, in the region where the film is inspected, the angles of the first and second polarizing plates are shifted so that the amount of light received by the light receiving means is in the range of 10 to 30 at 256 gradations A defect inspection method of a film is provided.
According to a preferred aspect of the present invention, in the region where the film is inspected, the angle of the first and second polarizing plates is shifted so that the light receiving amount in the light receiving means is in the range of 30 to 50 at 256 gradations A defect inspection method of a film is provided.
According to a preferred aspect of the present invention, in the region where the film is inspected, the angle of the first and second polarizing plates is shifted from the state where the light receiving amount in the light receiving means becomes the minimum value in the range of 1 to 2 degrees A defect inspection method of a film is provided.
According to a preferred embodiment of the present invention, there is provided a defect inspection method for a film, characterized in that defect inspection is applied in the state of a release film before bonding another optical film or an optical member to a film to be inspected.
According to another aspect of the present invention, there is provided an inspection apparatus for detecting defects in a long film having a predetermined width, comprising: illumination means for illuminating the film on one side of the film; A first polarizing plate provided on the other side of the film and adapted to receive light transmitted through the first polarizing plate, the film, and the second polarizing plate, And angle adjusting means for adjusting the angle of the first polarizing plate independently in the plane of the first polarizing plate and independently of the angle of the second polarizing plate in the plane of the second polarizing plate. Wherein the defect inspection is carried out by a defect inspection method of the film.
Here, the polarizer refers to a plate or film having a property of transmitting only light oscillating in a specific direction.
Here, the release film is a film used for manufacturing or inspecting an optical member such as a polarizing plate or a retardation plate, and for the purpose of being peeled off at the time of use in order to protect the optical characteristics from being lost at the time of shipment. For this purpose, the adhesive layer necessary for adhesion may be formed on the surface, or the release layer may be formed on the surface so as to be peeled off during use.
Here, the state of the release film before the other optical film or optical member is bonded refers to a state in which a substance having a polarization property, that is, a substance for transmitting and outputting by changing incident polarized light is not bonded.
(Effects of the Invention)
According to the present invention, it is possible to perform a defect inspection with high accuracy even in a film having a deviation of birefringence in the film width direction, and to conduct a defect inspection apparatus capable of inspecting precisely by increasing the contrast of the defect portion and the top portion.
1 is a schematic perspective view showing one embodiment of a defect detection apparatus of the present invention.
2 is another schematic perspective view showing one embodiment of the defect detection apparatus of the present invention.
3 is a schematic sectional view showing one embodiment of the defect detection apparatus of the present invention.
4 is a schematic diagram showing the angle of the polarizer and the distribution of the amount of received light at that time in the film width direction.
Fig. 5 is another schematic diagram showing the angle of the polarizer in the film width direction and the distribution of the received light amount at that time.
Fig. 6 is a schematic diagram showing the distribution of the amount of received light in each light receiving means in the film width direction.
7 is another schematic diagram showing the angle of the polarizer in the film width direction and the distribution of the received light amount at that time.
Fig. 8 is another schematic diagram showing the light-receiving amount distribution in each light-receiving means in the film width direction.
Fig. 9 is a schematic diagram showing a relationship (a) between background noise and defective light receiving amount in defect detection in the related art, and a relationship (b) between background noise and defective light receiving amount in defect detection according to the present invention.
10 is a schematic diagram showing one form of arrangement of a point and a fist point when the first polarizing plate is rotated in the defect detection apparatus of the present invention.
11 is a schematic view showing one form of a direct-acting mechanism for pushing and pulling the first polarizing plate in a substantially rotating direction in the defect detecting apparatus of the present invention.
12 is a schematic diagram showing one form of arrangement of a point and a fist point when the second polarizing plate is rotated in the defect detection apparatus of the present invention.
13 is a schematic diagram (a) showing one embodiment of a mechanism for rotating the second polarizer in the defect detection apparatus of the present invention, and a schematic diagram (b) showing one form of rotation of the second polarizer by the mechanism.
Fig. 14 shows an image (a) obtained by imaging the surface defects occurring at the time of film processing at room temperature with the amount of light received by the light-receiving means of the present invention falling within a range of 10 to 30 at 256 gradations, (B ') obtained by photographing the image (a') taken with the light receiving unit of the present invention in the range of 10 to 30 at the light reception amount of 256 gradations and the image (B ') taken in the range of 30 to 50 in the gradation.
Hereinafter, this will be described in detail with reference to the drawings. As shown in FIG. 1, the defect inspection apparatus of the present invention comprises a first polarizing plate on one side of a film and a second polarizing plate on the other side of the film in parallel with the film in a region where the film surface is inspected, An illumination means for illuminating the film from the outside of the polarizing plate with the polarizing plate interposed therebetween and a light receiving means for receiving the transmitted light transmitted through the first polarizing plate, the film and the second polarizing plate on the other side of the film.
As the film to which the defect inspection apparatus of the present invention is applied, a film used as a release film of an optical member such as a polarizing plate and a retardation plate, specifically, a plastic film such as a polyethylene terephthalate (PET) film.
The polarizing plate which can be applied to the first polarizing plate is not particularly limited as long as the polarizing plate can be polarized without leaving the light from the illuminating means for illuminating the film. A commercially available polarizing plate can be used. It needs to be a size that can sufficiently cover the illumination range of the illumination means in order to sufficiently polarize the illumination light without leaving the illumination means and preferably uses a polarizing plate whose size in the plane parallel to the film is larger than the illumination means It is good. More preferably, when a plurality of illuminating means are arranged in the width direction of the film, by using the same number of polarizing plates as the number of illuminating means, the cross-Nicoll optical system can be adjusted with higher accuracy.
The second polarizing plate is also not particularly limited as long as it can transmit polarized light without leaving the illumination light incident on the light receiving means through the film. A commercially available polarizing plate can be used. Preferably, And by arranging the respective polarizing plates on the front surface of the light receiving portion of the light receiving means, the angle of the polarizing plate can be adjusted for each light receiving means, so that the cross-Nicol optical system can be adjusted with higher accuracy.
The light receiving means is not particularly limited as long as it can receive scattered and reflected light from the illuminating means in the defect through the polarizing plate, but it is preferable to use a commercially available CCD camera or CMOS camera for easy cost and signal processing Do. More preferably, it is preferable to use a line sensor camera in which CCD or CMOS, which is a light receiving element, is arranged in a straight line from an installation space or an imaging visual field per one camera. It is also preferable to arrange a plurality of light receiving means in the width direction in accordance with necessity as shown in Fig. 2 in consideration of cost, light receiving precision, and inspection range.
It is preferable that the illuminating means is capable of uniformly illuminating the inspection range of the film. For example, a line-shaped LED illuminator in which light emitting elements are arranged in a line form, a rod-shaped fluorescent lamp, a metal halide lamp Or the like can be guided to a rod-shaped light guide using an optical fiber and illuminated. Particularly, since the amount of illumination light is large, a method of guiding light from a metal halide lamp light source to a rod-shaped light guide using an optical fiber is preferable. In this case, in particular, in the case where the width of the film is large and the inspection range is wide, the cost is increased in one long light guide, so that a plurality of illumination means are arranged in the width direction of the film in consideration of the cost, inspection range, May be used.
In order to make the positional relationship between the film and the first and second polarizing plates, the illuminating means, and the light receiving means to be able to receive scattered and reflected light from the illuminating means in the defect as strong as possible, As shown in Fig. More preferably, the surface of the film to be inspected and the straight line are perpendicular to each other from the viewpoints of ease of installation and water retention.
In addition, the relationship between the first polarizing plate and the second polarizing plate can be checked by the same method as the Cross-Nicol method by arranging the cross-Nicol state in the Cross-Nicol method. In this case, if there is no defect, the image of the front black is inputted from the imaging unit, but if there is a defect, the part does not become black. That is, when there are foreign matters or defects in the polarizing plate, they appear as bright spots. The signal obtained by the light receiving means is processed by the signal processing means, and processing such as determination of the presence or absence of a defect is performed.
It is also preferable that the first and second polarizer angles are independently adjusted (first angle adjusting means and second angle adjusting means). This is because, in the case of a film having a birefringence deviation in the width direction, the angles of the first and second polarizing plates as crossed niches are different in the width direction of the film. Therefore, as shown in Fig. 4, When the first polarizing plate angle and the second polarizing plate angle are set to the same angle in the width direction, the cross-Nicol condition optimal for the width direction can not be obtained. Therefore, the light receiving amount to be received by the light- A difference occurs in the direction. In Fig. 4, L, C, and R indicate left, center, and right toward the traveling direction of the film.
5, the angle of the first polarizer plate and the angle of the second polarizer plate are respectively adjusted to the smallest amount of light received by all the light receiving means with respect to the film width direction, It is more preferable because a state close to the condition is obtained. Here, the adjustment of the angle of the polarizing plate means that both the first and second polarizing plates are rotated in parallel with the film surface and inward or outward relative to the running direction of the film. For example, as shown in Fig. 4, when the polarizing characteristic in the width direction of the film is U-shaped, the direction and size of the angle to be adjusted vary depending on the polarizing characteristic in the width direction of the film. , The polarizing plate on the left side of the film and the polarizing plate on the right side of the film tend to be opposite to each other in the direction of the center of the second polarizing plate and the end portion tends to have an optimum angle larger than the center of the film.
More preferably, the angle adjusting means (first angle adjusting means) for adjusting the angle of the first polarizing plate in the first plane includes a shaft serving as a point for rotating the first polarizing plate, It is preferable to have a direct drive mechanism that pushes and pulls the end of the motor in the substantially rotating direction. This is because the first polarizing plate needs to cover the entire width of the film to be inspected, and therefore, the first polarizing plate having a width larger than that of the optical film exceeding 2 m is required for a large LCD television. In order to tilt the first
More preferably, the amount of light received by the light receiving means is monitored to automatically adjust the angle by using a movable means such as a motor so as to obtain an optimum angle. At this time, it is necessary that the angle of the polarizing plate needs to correspond to the variation of the birefringence deviation in the width direction of the film and that the higher the accuracy of adjustment of the polarizing plate approaches the more complete Cross-Nicol state, , And the angle of the second polarizing plate is adjusted in the range of -8 DEG to + 8 DEG with a rotation accuracy of 1 DEG or less. 12 and 13, the end of the second
It is more preferable to inspect the angle of the first and second polarizing plates by shifting the angle so that the light receiving amount in the light receiving means is in the range of 10 to 30 at 256 gradations in the region where the film is inspected. Thus, as shown in Figs. 14 (a) and 14 (a '), surface defects occurring at the time of film processing at room temperature can be captured clearly with higher peak intensity.
It is more preferable to inspect the angle of the first and second polarizing plates by shifting the angle so that the amount of light received by the light receiving means is in the range of 30 to 50 at 256 gradations . Accordingly, as shown in Figs. 14 (b) and 14 (b '), surface defects that occur during film production and heating can be captured as a larger image with a wider width.
It is more preferable to arrange the polarizing plate so that the angle of the polarizing plate is shifted in the range of 1 to 2 degrees in the state of Cross-Nicol. This is because, even when the angle of the first and second polarizers is adjusted to the optimum angle by the above-described method so that they are close to the condition of the cross Nicol optimal for the width direction, the state of Cross Nicol in each light receiving means is different, For example, when the number of the light receiving means is five, as shown in Fig. 6, the distribution of the received light amounts at the base line of the light receiving amount is different from the vicinity of the center and the end of the film. However, since each light receiving means is adjusted to the optimum angle of the polarizing plate, it is difficult to lower the baseline of the amount of light received near the end of the film, for example, and to adjust it to the vicinity of the center. 7, the angle of the second polarizing plate disposed on the front face of each light receiving means is shifted in the range of 1 to 2 degrees, so that the baseline of the received light amount is adjusted in the height increasing direction so that the curve of the birefringence As shown in Fig. 8, it is also possible to obtain the linearity by uniformizing the light receiving amounts of the respective light receiving means in the width direction.
Thus, the detection sensitivity can be made constant in the width direction of the film, and compared with the conventional technique as shown in Fig. 9 (a), as shown in Fig. 9 (b) The background noise generated by light scattering due to the air layer is covered, so that the noise N can be reduced to N ', and the S / N ratio can be increased. As a result, it becomes possible to bring the threshold value for defect detection closer to the baseline of the received light amount of the defect-free portion than in the prior art, and the width h for detecting the amount of received light exceeding the threshold value can be more securely secured by h ' It is possible to perform inspection with higher density and less false detection.
[Example]
[Example 1]
Lemirror "[38R64] was prepared as a blood test sample.
(DME P3-80-8K-40 manufactured by DALSA) having a resolving power of 25 mu m is used as the light receiving means, and a metal halide And the second polarizing plate were combined, and the inspection sample was picked up at an inspection width of 1255 mm to confirm the base light reception amount.
The evaluation of the base light-receiving amount was carried out by adjusting the angles of the first polarizing plate and the second polarizing plate, checking the difference between the maximum value and the minimum value of the received light amount in a state in which the average value when evaluated at 256 gradations of the light- , And this car was evaluated as a difference in the amount of light received. It has been confirmed that the difference in the amount of received light in the embodiment is 20 or less.
It was also confirmed that the base received light amount could be adjusted in the range of 10 to 30 and 30 to 50 at 256 gradations by adjusting the angles of both the first polarizing plate and the second polarizing plate. From the above, it was confirmed that the inspection accuracy was uniform even in the film having the birefringence deviation in the film width direction under the condition of Example 1, and the inspection can be performed with high accuracy.
Fig. 14 shows a picture of a surface defect in detail according to the conditions in Example 1. Fig. An image (a) obtained by picking up the surface defects occurring at the time of processing the PET film at room temperature at the light receiving means of the present invention in the range of 10 to 30 in 256 gradations and the image (a) in the range of 30 to 50 in 256 gradations When the picked-up image (a ') was compared, the peak intensity from the baseline was 40 at (a) and 17 at (a'). That is, in detecting defects occurring on the surface of the film at such a room temperature, improvement of the S / N ratio is realized by imaging the light receiving means in the light receiving means of the present invention in the range of 10 to 30 at 256 gradations.
The image (b) obtained by picking up the surface defects generated during heating and drawing in the production of the PET film at the light-receiving means of the present invention in the range of 10 to 30 at 256 gradations, (B '), the peak intensity from the baseline was 80 at (b) and 70 at (b'), but the detected width was 760 at (b) To 940. That is, in detecting defects occurring on the surface of the film by the heating process, the amount of light received by the light-receiving means of the present invention falls within the range of 30 to 50 at 256 gradations, so that the width h ) Has been realized.
[Comparative Example 1]
The angle of the second polarizing plate provided on the camera side was uniformly fixed using the same apparatus and the same film as in Example 1 and only the angle of the first polarizing plate provided on the light source side was adjusted, Except for adjusting only the relative angle of the polarizing plate as in the example, imaging was performed to confirm the amount of received light of the base.
Under the condition of Comparative Example 1, the light receiving amount deviation was larger than 30, and the base received light amount could not be adjusted in the range of 10 to 30 and 30 to 50 at 256 gradations. From this, it was confirmed that, under the conditions of the comparative example, the inspection accuracy was not uniform in the film having the birefringence deviation in the film width direction, and the inspection with high precision could not be performed.
(Industrial availability)
The present invention can be applied not only to a defect detection apparatus of a film but also to a defect detection apparatus having a transparent or sheet-like form having a transmissive property, but its application range is not limited thereto.
1: film to be inspected 2: first polarizer plate
3: Second polarizing plate 4: Lighting means
5: light receiving means 6: signal processing means
7: Film obtained from the left portion at the time of production
8: Film obtained from the center portion at the time of production
9: Film obtained from the right side portion at the time of production
10: Distribution of the amount of light received in the film obtained from the left side portion at the time of manufacture
11: Distribution of the amount of light received in the film obtained from the central part at the time of manufacture
12: Distribution of the amount of light received in the film obtained from the right side portion during manufacture
13: Firing point when rotating the first polarizing plate
14: Point at which the first polarizing plate is rotated
15: a direct-acting mechanism for pushing and pulling the first polarizing plate in the substantially rotating direction
16: Driving device of direct drive mechanism
17: Firing point when rotating the second polarizing plate
18: Point at which the second polarizing plate is rotated
19: Driving device of a mechanism for rotating the second polarizing plate
Claims (12)
Illuminating means for illuminating the film on one side of the film,
A first polarizing plate provided between the illuminating means and the film,
A second polarizer provided on the other side of the film,
Receiving means provided on the other surface side of the film and illuminated from the illuminating means and receiving transmitted light that has passed through the first polarizing plate, the film, and the second polarizing plate;
Wherein the first polarizing plate has a shaft functioning as a point for rotating the first polarizing plate and a direct drive mechanism for pushing and pulling the rotating polarizing plate in the rotating direction with the end of the first polarizing plate as a fulcrum, The first angle adjusting means,
And second angle adjusting means for adjusting the angle of the second polarizing plate within the plane of the second polarizing plate.
Wherein a plurality of the second polarizing plates and the light receiving means are arranged in the width direction of the film and the second angle adjusting means are respectively provided to the plurality of second polarizing plates.
Wherein the angle of the first and second polarizing plates is adjusted to a range of at least -8 ° to + 8 ° with a rotation accuracy of 1 ° or less.
A first polarizing plate is provided between the illuminating means and the film, a second polarizing plate is provided on the other side of the film, and the first polarizing plate is provided between the illuminating means and the film, And the light transmitted through the first polarizing plate, the film and the second polarizing plate is received by the light receiving means provided on the other side of the film,
Wherein the angle of the first polarizing plate is rotated by a rotation angle of the polarizing plate at an angle of 1 DEG or less by a linear functioning mechanism that rotates the first polarizing plate, Adjusting in the plane of the first polarizing plate by fine adjustment with precision,
And adjusting the angle of the second polarizing plate within the plane of the second polarizing plate.
A plurality of the second polarizing plates and the light receiving means are arranged in the width direction of the film, and the angle of the second polarizing plate is independently adjusted according to the arrangement position.
And inspecting the angle of the first and second polarizing plates by shifting the angle so that the amount of light received by the light receiving means is in the range of 10 to 30 at 256 gradations.
And inspecting the angle of the first and second polarizing plates by shifting the angle so that the amount of light received by the light receiving means is in the range of 30 to 50 at 256 gradations.
Wherein the inspection is performed in a state in which the angle of the first and second polarizing plates is shifted to a range of 1 to 2 degrees from a state where the light receiving amount in the light receiving means becomes the minimum value.
And the defect inspection is applied in the state of the release film before the other optical film or the optical member is bonded.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010119220 | 2010-05-25 | ||
| JPJP-P-2010-119220 | 2010-05-25 | ||
| PCT/JP2011/060954 WO2011148790A1 (en) | 2010-05-25 | 2011-05-12 | Film defect inspection device, defect inspection method, and release film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130076801A KR20130076801A (en) | 2013-07-08 |
| KR101744606B1 true KR101744606B1 (en) | 2017-06-09 |
Family
ID=45003782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127027351A KR101744606B1 (en) | 2010-05-25 | 2011-05-12 | Film defect inspection device, defect inspection method, and release film |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5944165B2 (en) |
| KR (1) | KR101744606B1 (en) |
| CN (1) | CN102906561B (en) |
| TW (1) | TWI509238B (en) |
| WO (1) | WO2011148790A1 (en) |
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| JP5972061B2 (en) * | 2012-06-18 | 2016-08-17 | 旭化成株式会社 | Polarization axis direction measuring apparatus and polarization axis direction measuring method |
| TWI481834B (en) * | 2012-10-31 | 2015-04-21 | Oto Photonics Inc | Optical sensing module, optical mechanics of spectrometer, and spectrometer |
| WO2014117331A1 (en) | 2013-01-30 | 2014-08-07 | 台湾超微光学股份有限公司 | Optical sensing module, optical mechanism of spectrometer, and spectrometer |
| TWI490446B (en) * | 2013-04-10 | 2015-07-01 | 致茂電子股份有限公司 | Lighting module detecting device and lighting module detecting method |
| JP6182806B2 (en) * | 2013-06-04 | 2017-08-23 | 住友化学株式会社 | Defect inspection system and film manufacturing apparatus |
| JP6255186B2 (en) * | 2013-08-07 | 2017-12-27 | 日東電工株式会社 | Optical member inspection method, optical product manufacturing method, and optical member inspection apparatus |
| JP6437329B2 (en) * | 2015-02-03 | 2018-12-12 | 住友化学株式会社 | Optical film defect inspection method |
| KR101733017B1 (en) * | 2015-02-25 | 2017-05-24 | 동우 화인켐 주식회사 | Apparatus and method for detecting defect of optical film |
| CN106353332B (en) * | 2015-07-15 | 2019-05-28 | 明眼有限公司 | Utilize the polarisation film detection apparatus of pattern light-transmitting plate |
| CN107024482B (en) * | 2015-12-15 | 2020-11-20 | 住友化学株式会社 | Defect imaging device and method, film manufacturing device and method, and defect inspection method |
| WO2017171153A1 (en) * | 2016-03-31 | 2017-10-05 | 동우화인켐 주식회사 | Polarizing plate inspection method and polarizing plate inspection device |
| JP6924645B2 (en) * | 2017-07-31 | 2021-08-25 | 日東電工株式会社 | Polarizing film imaging device, inspection device, and inspection method |
| JP6948215B2 (en) * | 2017-10-11 | 2021-10-13 | 住友化学株式会社 | Defect inspection equipment, defect inspection method, and film manufacturing method |
| KR102272037B1 (en) * | 2019-04-01 | 2021-07-02 | 주식회사 성우하이텍 | Apparatus and method for inspecting piercing hole |
| JP2020173188A (en) * | 2019-04-11 | 2020-10-22 | 住友化学株式会社 | Inspection device, inspection method, and film manufacturing method |
| DE102019220561B4 (en) * | 2019-12-23 | 2021-09-30 | Greenerity Gmbh | Method and device for analyzing a functional layer of an electrochemical cell or an electrochemical sensor application |
| CN116465826B (en) * | 2023-03-15 | 2023-10-24 | 东阳市诰源闪光材料有限公司 | Device and method for testing polarization rate of optical film |
| CN116559199A (en) * | 2023-07-10 | 2023-08-08 | 杭州百子尖科技股份有限公司 | Film defect detection device and detection method based on machine vision |
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| Publication number | Publication date |
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| KR20130076801A (en) | 2013-07-08 |
| CN102906561B (en) | 2015-10-07 |
| JPWO2011148790A1 (en) | 2013-07-25 |
| JP5944165B2 (en) | 2016-07-05 |
| CN102906561A (en) | 2013-01-30 |
| TW201213792A (en) | 2012-04-01 |
| TWI509238B (en) | 2015-11-21 |
| WO2011148790A1 (en) | 2011-12-01 |
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