CN216816479U - Detection device and detection equipment - Google Patents

Abstract

The application provides a detection device and detection equipment. The detection device comprises a light source, a bright field illumination optical fiber, a dark field illumination optical fiber and a switching module. The bright field illumination optical fiber is used for guiding light emitted by the light source to irradiate to-be-detected objects so as to carry out bright field illumination on the to-be-detected objects, and the dark field illumination optical fiber is used for guiding light emitted by the light source to irradiate to-be-detected objects so as to carry out dark field illumination on the to-be-detected objects. A switching module connects the brightfield illumination optical fiber and the darkfield illumination optical fiber for selectively aligning the brightfield illumination optical fiber and the darkfield illumination optical fiber with the light source. Therefore, bright field illumination and dark field illumination can be respectively carried out on the object to be detected through the switching module, so that defects on elements such as a panel can be more comprehensively detected, and the integrity of detection is improved.

Description

Detection device and detection equipment

Technical Field

The present application relates to the field of detection technologies, and more particularly, to a detection apparatus and a detection device.

Background

In the related art, a bright field illumination method is generally used for inspecting elements such as a panel, however, some defects are not easily detected or defect phenomena are not obvious under the bright field illumination, such as color of transparent non-metal inclusions, edge breakage, concave-convex points, scratches and the like on the panel.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a detection device and detection equipment.

The detection device of this application embodiment detects the determinand, detection device includes:

a light source;

the bright field illumination optical fiber is used for guiding light rays emitted by the light source to irradiate the object to be detected so as to carry out bright field illumination on the object to be detected;

the dark field illumination optical fiber is used for guiding the light rays emitted by the light source to irradiate the object to be detected so as to carry out dark field illumination on the object to be detected; and

a switching module connecting the brightfield illumination fiber and the darkfield illumination fiber, the switching module for selectively aligning the brightfield illumination fiber and the darkfield illumination fiber with the light source.

In certain embodiments, the switching module includes a motor and a mount on which the brightfield illumination fiber and the darkfield illumination fiber are mounted, the motor for driving the mount to move or rotate relative to the light source to selectively align the brightfield illumination fiber and the darkfield illumination fiber with the light source.

In some embodiments, the detection apparatus further includes an angle adjusting mechanism, the angle adjusting mechanism is connected to the dark field illumination fiber, and the angle adjusting mechanism is used for adjusting the angle of the light emitted from the dark field illumination fiber to the object to be detected.

In some embodiments, the detection apparatus further includes an imaging module, where the imaging module is configured to receive the light reflected by the object to be detected to image the object to be detected;

the angle adjusting mechanism comprises a first connecting piece and a second connecting piece, the first connecting piece is connected with the imaging module, the second connecting piece is connected with the emergent end of the dark field illumination optical fiber, and the second connecting piece can rotate relative to the first connecting piece so as to adjust the angle of the light emitted from the dark field illumination optical fiber to the object to be measured.

In some embodiments, an arc-shaped slot is formed on the first connecting piece, a protrusion is formed on the second connecting piece, the protrusion is matched with the arc-shaped slot, and the second connecting piece can rotate relative to the first connecting piece along the arc-shaped slot through the protrusion.

In some embodiments, a first arc-shaped groove and a second arc-shaped groove are formed in the first connecting piece, the first arc-shaped groove and the second arc-shaped groove are concentrically arranged, the radius of the first arc-shaped groove is larger than that of the second arc-shaped groove, a first protrusion and a second protrusion are formed on the second connecting piece, the first protrusion is matched with the first arc-shaped groove, the second protrusion is matched with the second arc-shaped groove, and the second connecting piece can rotate relative to the first connecting piece along the first arc-shaped groove and the second arc-shaped groove through the first protrusion and the second protrusion.

In certain embodiments, the detection device further comprises an imaging module comprising a detector and a light-splitting element;

the emergent end of the bright field illuminating optical fiber faces the light splitting element, and light rays emergent from the bright field illuminating optical fiber are reflected by the light splitting element and then are emitted to the object to be detected so as to carry out bright field illumination on the object to be detected;

the emergent end of the dark field illumination optical fiber faces the object to be detected, and light rays emergent from the dark field illumination optical fiber are directly emitted to the object to be detected;

the light reflected by the object to be detected can be received by the detector after transmitting the light splitting element so as to image the object to be detected.

In some embodiments, the detection device further comprises a first focusing assembly connected to the exit end of the bright field illumination fiber, and the first focusing assembly is used for focusing the light emitted from the bright field illumination fiber.

In some embodiments, the detection apparatus further comprises a second focusing assembly coupled to the exit end of the dark field illumination fiber for focusing the light exiting the dark field illumination fiber.

In certain embodiments, the brightfield illumination fibers comprise an entrance end and a plurality of exit ends; and/or.

The dark field illumination fiber includes an incident end and a plurality of exit ends.

The detection device of the embodiment of the application comprises the detection device of any one of the embodiments.

In the detection device and the detection equipment, the detection device can selectively align the bright field illumination optical fiber and the dark field illumination optical fiber with the light source by switching the module so as to realize bright field illumination and illumination according to the bright field illumination optical fiber and the dark field illumination optical fiber. Therefore, bright field illumination and dark field illumination can be respectively carried out on the object to be detected through the switching module, so that defects on elements such as a panel can be more comprehensively detected, and the integrity of detection is improved.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present application;

FIG. 2 is a schematic view of a part of the structure of a detecting device according to an embodiment of the present application;

fig. 3 is a schematic structural view of a dark field illumination optical fiber, a second focusing module and an angle adjusting mechanism of the inspection apparatus according to the embodiment of the present application;

FIG. 4 is a schematic structural diagram of a brightfield illumination fiber and a first focusing module of a detection apparatus according to an embodiment of the present disclosure;

fig. 5 is a block schematic diagram of a detection apparatus according to an embodiment of the present application.

Description of the main element symbols:

a detection device 1000;

the device comprises a detection device 100, a light source 10, a bright field illumination fiber 20, an incident end 21, an exit end 22, a dark field illumination fiber 30, an incident end 31, an exit end 32, a switching module 40, a motor 41, a mounting member 42, a first focusing assembly 50, a second focusing assembly 60, an imaging module 70, a detector 71, a light splitting element 72, an angle adjusting mechanism 80, a first connecting piece 81, a first arc-shaped groove 811, a second arc-shaped groove 812, a second connecting piece 82, a first protrusion 821 and a second protrusion 822;

a processor 200;

an analyte 300.

Detailed Description

Embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings identify the same or similar elements or elements having the same or similar functionality throughout.

In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1, the inspection apparatus 100 according to the embodiment of the present disclosure is used for inspecting an object 300 to be inspected, and the inspection apparatus 100 includes a light source 10, a bright field illumination fiber 20, a dark field illumination fiber 30, and a switching module 40. The bright field illumination fiber 20 is used for guiding the light emitted from the light source 10 to the object 300 to perform bright field illumination on the object 300, and the dark field illumination fiber 30 is used for guiding the light emitted from the light source 10 to the object 300 to perform dark field illumination on the object 300. A switching module 40 connects the brightfield illumination fiber 20 and the darkfield illumination fiber 30, the switching module 40 for selectively aligning the brightfield illumination fiber 20 and the darkfield illumination fiber 30 with the light source 10.

Specifically, in the present application, the dut 300 includes, but is not limited to, a display panel, a wafer, a chip, and the like. It is understood that in the related art, the bright field illumination is usually adopted for inspecting the elements such as the panel, however, under the bright field illumination, the defects such as short circuit and open circuit can be well detected, while some defects are not easy to detect, or the defect phenomenon is not obvious, for example, the defects such as color of transparent nonmetal inclusion, edge breakage, concave-convex points and scratches on the panel are not easy to detect.

In the inspection apparatus 100 according to the embodiment of the present application, the inspection apparatus 100 may selectively align the brightfield illumination fiber 20 and the darkfield illumination fiber 30 with the light source 10 by switching the module 40 to align the brightfield illumination fiber 20 and the darkfield illumination fiber 30, thereby realizing the brightfield illumination and the darkfield illumination. In this way, bright field illumination and dark field illumination can be respectively performed on the object 300 to be tested through the switching module 40, so that defects on elements such as a panel can be more comprehensively detected, and the integrity of detection can be improved.

In the embodiment of the present application, the "bright field illumination" may be understood as light emitted by the light source 10 is emitted toward the object 300 in a direction perpendicular to the object 300 to form signal light after being reflected by the object 300 or after being transmitted through the object 300, and the "dark field illumination" may be understood as light emitted by the light source 10 is emitted toward the object 300 at a non-perpendicular angle to form signal light after being reflected by the object 300. In addition, in the present application, "alignment" may be understood as that the incident end 21 of the brightfield illumination fiber 20 or the incident end 31 of the darkfield illumination fiber 30 is aligned with the light source 10, and the light emitted from the light source 10 can be incident into the brightfield illumination fiber 20 or the darkfield illumination fiber 30 from the incident end.

Referring to fig. 1, in some embodiments, the switching module 40 may include a motor 41 and a mounting member 42, the brightfield illumination fibers 20 and the darkfield illumination fibers 30 being mounted to the mounting member 42, the motor 41 being configured to drive the mounting member 42 to move or rotate relative to the light source 10 to selectively align the brightfield illumination fibers 20 and the darkfield illumination fibers 30 with the light source 10.

In this way, the switching between the bright field illumination and the dark field illumination can be realized by driving the mounting member 42 to move or rotate by the motor 41.

Specifically, in one possible embodiment, the mounting member 42 may be a turntable, the turntable may be rotatable relative to the light source 10, the incident end 21 of the bright field illumination fiber 20 and the incident end 31 of the dark field illumination fiber 30 may be mounted on the turntable and arranged at intervals along a circumferential direction of the turntable, and the motor 41 may drive the turntable to rotate relative to the light source 10 through a transmission element such as a gear transmission mechanism or a pulley transmission mechanism, so that when the bright field and dark field switching is required, it is only necessary to drive the turntable to rotate through the motor 41 so as to align the incident end 21 of the bright field illumination fiber 20 or the incident end 31 of the dark field illumination fiber 30 with the light source 10.

In another possible embodiment, the mounting member 42 may be a slider, the slider may be slidable with respect to the light source 10, the incident end 21 of the bright field illumination fiber 20 and the incident end 31 of the dark field illumination fiber 30 may be mounted on the slider and arranged at intervals along the same straight line, and the motor 41 may drive the slider to move with respect to the light source 10 through a transmission element such as a rack and pinion transmission mechanism or a lead screw nut transmission mechanism, so as to selectively align the incident end 21 of the bright field illumination fiber 20 and the incident end 31 of the dark field illumination fiber 30 with the light source 10.

Referring to fig. 1 and 2, in some embodiments, the detection apparatus 100 further includes an imaging module 70, and the imaging module 70 includes a detector 71 and a light splitting element 72. The exit end 21 of the brightfield illumination fiber 20 faces the light splitting element 72, and the light emitted from the brightfield illumination fiber 20 is reflected by the light splitting element 72 and then emitted to the object 300 to illuminate the object 300 brightfield. The exit end 31 of the dark field illumination fiber 30 faces the object 300, and the light emitted from the dark field illumination fiber 30 is directly emitted to the object 300. The light reflected by the object 300 can be transmitted through the light splitting element 72 and then received by the detector 71 to image the object 300.

In this way, the light emitted from the brightfield illumination fiber 20 can be reflected by the beam splitter 72 of the imaging module 70 and then emitted to the object 300 to realize brightfield illumination and brightfield imaging, while the light emitted from the darkfield illumination fiber 30 can directly image the object 300 at an oblique angle to realize darkfield illumination and darkfield imaging.

Specifically, in such an embodiment, the detector 71 may be an imaging camera, such as a color detection camera or a black and white detection camera, the light splitting element 72 may be a half-reflecting and half-transmitting mirror, the exit end of the bright field illumination fiber 20 is disposed toward the light splitting element 72, when performing bright field illumination, the bright field illumination fiber 20 may be aligned with the light source 10 by the switching device, light emitted from the bright field illumination fiber 20 may be emitted to the light splitting element 72, and may be emitted perpendicularly to the object 300 to be measured after being reflected by the light splitting element 72, and signal light formed after being reflected by the object 300 may be received by the detector 71 after passing through the light splitting element 72, so as to implement bright field imaging. During dark field illumination, the dark field illumination fiber is aligned to the light source 10 through the switching device, light emitted from the dark field illumination fiber is directly emitted to the object 300 from one side of the object 300 to be measured in an inclined manner, and signal light formed after being reflected by the object 300 to be measured can penetrate through the light splitting element 72 and then be received by the detector 71, so that dark field imaging is realized.

Referring to fig. 1 and 2, in some embodiments, the detecting device 100 may further include a first focusing assembly 50, the first focusing assembly 50 is connected to the exit end 22 of the bright field illumination fiber 20, and the first focusing assembly 50 is configured to focus the light emitted from the bright field illumination fiber 20.

In this manner, the light emitted from the brightfield illumination fiber 20 can be collected by the first focusing assembly 50 to improve the brightness and quality of the brightfield illumination.

Specifically, the first focusing assembly 50 may be a cylindrical mirror, and the number of the cylindrical mirrors may be one or more, and certainly, the first focusing assembly 50 is not limited to the cylindrical mirror, and may also be other optical elements capable of converging light rays, and is not limited herein, and only needs to be capable of converging light rays.

With continued reference to fig. 1 and 2, in some embodiments, the inspection apparatus 100 may further include a second focusing assembly 60, the second focusing assembly 60 being connected to the exit end 32 of the dark field illumination fiber 30, the second focusing assembly 60 being configured to focus the light emitted from the dark field illumination fiber 30.

In this manner, light emitted from the darkfield illumination fiber 30 can be collected by the second focusing assembly 60 to improve the imaging brightness and quality of the darkfield illumination.

Specifically, the second focusing assembly 60 may also be a cylindrical mirror, and the number of the cylindrical mirrors may be one or more, and certainly, the second focusing assembly 60 is not limited to the cylindrical mirror, and may also be other optical elements capable of converging light rays, and is not limited herein, and only needs to be capable of converging light rays.

Referring to fig. 2 and 3, in some embodiments, the inspection apparatus 100 further includes an angle adjusting mechanism 80, the angle adjusting mechanism 80 is connected to the dark field illumination fiber 30, and the angle adjusting mechanism 80 is used for adjusting an angle of the light emitted from the dark field illumination fiber 30 to the object 300 to be inspected.

In this way, when dark field illumination is performed, the incident angle of light to the object 300 can be adjusted by the angle adjusting mechanism 80 so that the detector 71 can acquire more accurate defect information in the dark field illumination.

Specifically, as shown in fig. 1, the detector 71 and the light splitting element 72 of the imaging module 70 are arranged along the optical axis direction of the detector 71, and both are located on the same straight line perpendicular to the object 300 to be measured, and the angle adjusting mechanism 80 is used to adjust the incident angle of the incident light, that is, to adjust the included angle between the incident optical fiber and the optical axis of the imaging module 70.

Referring to fig. 2 and 3, in some embodiments, the angle adjusting mechanism 80 may include a first connector 81 and a second connector 82, the first connector 81 is connected to the imaging module 70, the second connector 82 is connected to the exit end of the dark field illumination fiber 30, and the second connector 82 can rotate relative to the first connector 81 to adjust an angle of the light emitted from the dark field illumination fiber 30 to the object 300.

In this manner, the imaging module 70 and the dark field illumination fiber 30 can be connected by the first connector 81 and the second connector 82 to support the dark field illumination fiber 30, and the angle of the incident light can be adjusted by the rotation of the second connector 82 with respect to the first connector 81.

Specifically, in such an embodiment, the first connector 81 may be fixedly mounted on the housing of the imaging module 70 by fastening elements such as screws or bolts, and the second connector 82 may be fixedly mounted on the second focusing assembly 60 by fastening elements such as screws or bolts, and of course, when the second focusing assembly 60 is not provided, the second connector 82 may also be fixedly mounted on the exit end of the dark field illumination fiber 30 therebetween.

Further, with continued reference to fig. 2 and 3, in some embodiments, the first connecting member 81 may have a first arc-shaped groove 811 and a second arc-shaped groove 812, the first arc-shaped groove 811 and the second arc-shaped groove 812 are concentrically disposed, a radius of the first arc-shaped groove 811 is greater than a radius of the second arc-shaped groove 812, the second connecting member 82 has a first protrusion 821 and a second protrusion 822, the first protrusion 821 is engaged with the first arc-shaped groove 811, the second protrusion 822 is engaged with the second arc-shaped groove 812, and the second connecting member 82 can rotate relative to the first connecting member 81 along the first arc-shaped groove 811 and the second arc-shaped groove 812 by the first protrusion 821 and the second protrusion 822.

Therefore, the dark field illumination light spots can be ensured to coincide with the imaging view field on the object 300 to be measured at different angles through the matching of the two bulges and the two concentric arc-shaped grooves.

Specifically, the first arc-shaped groove 811 and the second arc-shaped groove 812 are concentrically arranged, the first protrusion 821 is matched with the first arc-shaped groove 811, and the second protrusion 822 is matched with the second arc-shaped groove 812, under such a condition, the exit ends of the first focusing assembly 50 and the dark-field illumination optical fiber 30 rotate relative to the first connector 81 (that is, the imaging module 70) by using the vertical intersection point of the imaging optical axis of the imaging module 70 and the object 300 to be measured as the center of a circle, and cannot rotate relative to the first connector 81 in other directions, so that the dark-field illumination light spots can coincide with the imaging view field on the object 300 to be measured no matter at which angle.

In the above embodiment, the angle adjustment is achieved by using two concentric arc-shaped slots and two protrusions. Of course, it is understood that in some embodiments, only one arc-shaped slot and one protrusion may be used to cooperate to realize the angle adjustment, in such a case, the arc-shaped slot is formed on the first connecting member 81, the protrusion is formed on the second connecting member 82, the protrusion cooperates with the arc-shaped slot, and the second connecting member 82 can rotate relative to the first connecting member 81 along the arc-shaped slot by the protrusion. In this way, adjustment of the incident angle of the incident light can also be achieved.

Referring to fig. 4, in some embodiments, the brightfield illumination fiber 20 may include an incident end 21 and a plurality of exit ends 22.

In this way, the object 300 can be brightfield illuminated by the plurality of exit ends 22 in different directions and positions to improve the bright field imaging quality.

Specifically, in such an embodiment, the brightfield illumination fiber 20 may be divided into a plurality of branches, each branch corresponding to one of the exit ends 22, and of course, each exit end 22 may also correspond to one of the first focusing assemblies 50, which is not limited herein.

Referring to fig. 3, in some embodiments, dark field illumination fibers 30 may also include an entrance end 31 and a plurality of exit ends 32.

In this way, the dark field illumination of the object 300 can be performed through the plurality of exit ends 32 in different directions and positions to improve the dark field imaging quality.

Specifically, in such an embodiment, the dark field illumination fiber 30 may also be divided into a plurality of branches, each branch corresponding to one of the exit ends 32, and of course, each exit end 32 may also correspond to one of the second focusing assemblies 60, which is not limited herein.

Referring to fig. 5, a detection apparatus 1000 according to an embodiment of the present disclosure includes the detection device 100 according to any one of the above embodiments.

The detection apparatus 1000 may further include a processor 200, the processor 200 may be electrically connected to the light source 10, the switching module 40 and the imaging module 70, specifically, the processor 200 may be electrically connected to the light source 10 to control on/off of the light source 10, the processor 200 may also be electrically connected to the motor 41 of the switching module 40, the processor 200 may control the motor 41 to operate according to a control instruction to selectively align the bright field illumination fiber 20 and the dark field illumination fiber 30 with the light source 10, and in addition, the processor 200 is connected to the detector 71 of the imaging module 70, the processor 200 may control the detector 71 to perform imaging and may receive and store an imaging picture of the detector 71.

In the inspection apparatus 1000 according to the embodiment of the present application, the inspection device 100 may selectively align the bright field illumination fiber 20 and the dark field illumination fiber 30 with the light source 10 by switching the module 40 to align the bright field illumination fiber 20 and the dark field illumination fiber 30 with each other to realize bright field illumination and dark field illumination. In this way, bright field illumination and dark field illumination can be respectively performed on the object 300 to be tested through the switching module 40, so that defects on elements such as a panel can be more comprehensively detected, and the integrity of detection can be improved.

In the description herein, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims (11)

1. A detection device for detecting an object to be detected, the detection device comprising:

a light source;

the bright field illumination optical fiber is used for guiding light rays emitted by the light source to irradiate the object to be detected so as to carry out bright field illumination on the object to be detected;

the dark field illumination optical fiber is used for guiding the light rays emitted by the light source to irradiate the object to be detected so as to carry out dark field illumination on the object to be detected; and

a switching module connecting the brightfield illumination fiber and the darkfield illumination fiber, the switching module for selectively aligning the brightfield illumination fiber and the darkfield illumination fiber with the light source.

2. The detection apparatus of claim 1, wherein the switching module includes a motor and a mount on which the brightfield illumination fiber and the darkfield illumination fiber are mounted, the motor for driving the mount to move or rotate relative to the light source to selectively align the brightfield illumination fiber and the darkfield illumination fiber with the light source.

3. The inspection apparatus as claimed in claim 1, further comprising an angle adjustment mechanism, wherein the angle adjustment mechanism is connected to the dark field illumination fiber, and the angle adjustment mechanism is used for adjusting an angle of the light emitted from the dark field illumination fiber to the object to be inspected.

4. The detecting device according to claim 3, further comprising an imaging module, wherein the imaging module is configured to receive the light reflected by the object to be detected so as to image the object to be detected;

the angle adjusting mechanism comprises a first connecting piece and a second connecting piece, the first connecting piece is connected with the imaging module, the second connecting piece is connected with the emergent end of the dark field illumination optical fiber, and the second connecting piece can rotate relative to the first connecting piece so as to adjust the angle of the light emitted from the dark field illumination optical fiber to the object to be measured.

5. The detecting device for detecting the rotation of a motor rotor according to claim 4, wherein an arc-shaped slot is formed on the first connecting piece, a protrusion is formed on the second connecting piece, the protrusion is matched with the arc-shaped slot, and the second connecting piece can rotate relative to the first connecting piece along the arc-shaped slot through the protrusion.

6. The detecting device according to claim 4, wherein a first arc-shaped slot and a second arc-shaped slot are formed on the first connecting piece, the first arc-shaped slot and the second arc-shaped slot are concentrically arranged, the radius of the first arc-shaped slot is larger than that of the second arc-shaped slot, a first protrusion and a second protrusion are formed on the second connecting piece, the first protrusion is matched with the first arc-shaped slot, the second protrusion is matched with the second arc-shaped slot, and the second connecting piece can rotate relative to the first connecting piece along the first arc-shaped slot and the second arc-shaped slot through the first protrusion and the second protrusion.

7. The detection device of claim 1, further comprising an imaging module comprising a detector and a light splitting element;

the emergent end of the bright field illuminating optical fiber faces the light splitting element, and light rays emergent from the bright field illuminating optical fiber are reflected by the light splitting element and then are emitted to the object to be detected so as to carry out bright field illumination on the object to be detected;

the emergent end of the dark field illumination optical fiber faces the object to be detected, and light rays emergent from the dark field illumination optical fiber are directly emitted to the object to be detected;

the light reflected by the object to be detected can be received by the detector after transmitting the light splitting element so as to image the object to be detected.

8. The detecting device according to claim 1, further comprising a first focusing assembly connected to the exit end of the bright field illuminating fiber, wherein the first focusing assembly is configured to focus the light emitted from the bright field illuminating fiber.

9. The detection apparatus according to claim 1, further comprising a second focusing assembly connected to the exit end of the dark field illumination fiber for focusing light emitted from the dark field illumination fiber.

10. The detection apparatus according to claim 1, wherein the bright field illumination fiber comprises an incident end and a plurality of exit ends; and/or the presence of a gas in the atmosphere,

the dark field illumination fiber includes an incident end and a plurality of exit ends.

11. A test device comprising a test apparatus according to any one of claims 1-10.

Images