KR101729671B1 - 레이저를 사용하는 재료 제거 중에 열 효과를 최소화하는 방법 - Google Patents

레이저를 사용하는 재료 제거 중에 열 효과를 최소화하는 방법 Download PDF

Info

Publication number
KR101729671B1
KR101729671B1 KR1020117025264A KR20117025264A KR101729671B1 KR 101729671 B1 KR101729671 B1 KR 101729671B1 KR 1020117025264 A KR1020117025264 A KR 1020117025264A KR 20117025264 A KR20117025264 A KR 20117025264A KR 101729671 B1 KR101729671 B1 KR 101729671B1
Authority
KR
South Korea
Prior art keywords
routing
laser
tool path
sheet material
polymer sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117025264A
Other languages
English (en)
Korean (ko)
Other versions
KR20120002599A (ko
Inventor
야수 오사코
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20120002599A publication Critical patent/KR20120002599A/ko
Application granted granted Critical
Publication of KR101729671B1 publication Critical patent/KR101729671B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • B23K26/384Removing material by boring or cutting by boring of specially shaped holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/18Sheet panels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/16Composite materials, e.g. fibre reinforced
    • B23K2103/166Multilayered materials
    • B23K2103/172Multilayered materials wherein at least one of the layers is non-metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/30Organic material
    • B23K2103/42Plastics

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
KR1020117025264A 2009-03-27 2010-02-26 레이저를 사용하는 재료 제거 중에 열 효과를 최소화하는 방법 Active KR101729671B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/413,084 2009-03-27
US12/413,084 US8729427B2 (en) 2009-03-27 2009-03-27 Minimizing thermal effect during material removal using a laser
PCT/US2010/025639 WO2010110991A2 (en) 2009-03-27 2010-02-26 Minimizing thermal effect during material removal using a laser

Publications (2)

Publication Number Publication Date
KR20120002599A KR20120002599A (ko) 2012-01-06
KR101729671B1 true KR101729671B1 (ko) 2017-04-24

Family

ID=42781749

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117025264A Active KR101729671B1 (ko) 2009-03-27 2010-02-26 레이저를 사용하는 재료 제거 중에 열 효과를 최소화하는 방법

Country Status (6)

Country Link
US (1) US8729427B2 (enExample)
JP (1) JP5634497B2 (enExample)
KR (1) KR101729671B1 (enExample)
CN (1) CN102348529B (enExample)
TW (1) TWI535516B (enExample)
WO (1) WO2010110991A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7633033B2 (en) 2004-01-09 2009-12-15 General Lasertronics Corporation Color sensing for laser decoating
WO2008118365A1 (en) 2007-03-22 2008-10-02 General Lasertronics Corporation Methods for stripping and modifying surfaces with laser-induced ablation
US8383984B2 (en) 2010-04-02 2013-02-26 Electro Scientific Industries, Inc. Method and apparatus for laser singulation of brittle materials
US10112257B1 (en) 2010-07-09 2018-10-30 General Lasertronics Corporation Coating ablating apparatus with coating removal detection
KR102035619B1 (ko) * 2010-07-26 2019-12-16 하마마츠 포토닉스 가부시키가이샤 레이저 가공방법
JP6392514B2 (ja) * 2010-12-30 2018-09-19 スリーエム イノベイティブ プロパティズ カンパニー レーザー切断方法及びこれにより製造された物品
JP2012196689A (ja) * 2011-03-22 2012-10-18 Fujitsu Ltd レーザ加工方法及びそのプログラム
US9895771B2 (en) 2012-02-28 2018-02-20 General Lasertronics Corporation Laser ablation for the environmentally beneficial removal of surface coatings
US9387041B2 (en) * 2013-03-15 2016-07-12 University Of North Texas Laser-assisted machining (LAM) of hard tissues and bones
US10188519B2 (en) 2013-03-15 2019-01-29 University Of North Texas Laser-assisted machining (LAM) of hard tissues and bones
KR102199211B1 (ko) * 2013-10-11 2021-01-07 삼성디스플레이 주식회사 레이저 가공 장치 및 이를 이용한 가공 방법
US10086597B2 (en) 2014-01-21 2018-10-02 General Lasertronics Corporation Laser film debonding method
KR102859580B1 (ko) * 2023-05-25 2025-09-12 현대모비스 주식회사 레이저 라우팅 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000288752A (ja) * 1999-04-02 2000-10-17 Mitsubishi Electric Corp レーザ加工方法及びレーザ加工装置
JP2005161322A (ja) * 2003-11-28 2005-06-23 Seiko Epson Corp 硬質材料の加工方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1015610B (zh) * 1990-05-03 1992-02-26 江西省机械工业设计研究院 钢结硬质合金模具激光切割工艺
JP2720669B2 (ja) 1991-11-11 1998-03-04 株式会社大林組 レーザービームによる厚板の溶断方法
DE4316012C2 (de) * 1993-05-13 1998-09-24 Gehring Gmbh & Co Maschf Verfahren zur Feinbearbeitung von Werkstück-Oberflächen
JP3159593B2 (ja) * 1994-02-28 2001-04-23 三菱電機株式会社 レーザ加工方法及びその装置
JP3534807B2 (ja) 1994-02-28 2004-06-07 三菱電機株式会社 レーザ切断方法
US6987786B2 (en) * 1998-07-02 2006-01-17 Gsi Group Corporation Controlling laser polarization
EP1262315B8 (de) 2001-05-25 2005-01-05 Stork Prints Austria GmbH Verfahren und Vorrichtung zur Herstellung einer Druckform
SG108262A1 (en) * 2001-07-06 2005-01-28 Inst Data Storage Method and apparatus for cutting a multi-layer substrate by dual laser irradiation
JP3753657B2 (ja) * 2001-12-27 2006-03-08 本田技研工業株式会社 ツインスポットパルスレーザ溶接方法および装置
US20060097430A1 (en) * 2004-11-05 2006-05-11 Li Xiaochun UV pulsed laser machining apparatus and method
JP2007277636A (ja) * 2006-04-06 2007-10-25 Yamazaki Mazak Corp レーザ焼入れ方法
US8624157B2 (en) 2006-05-25 2014-01-07 Electro Scientific Industries, Inc. Ultrashort laser pulse wafer scribing
US9029731B2 (en) 2007-01-26 2015-05-12 Electro Scientific Industries, Inc. Methods and systems for laser processing continuously moving sheet material
US7817685B2 (en) 2007-01-26 2010-10-19 Electro Scientific Industries, Inc. Methods and systems for generating pulse trains for material processing
JP2009049390A (ja) * 2007-07-25 2009-03-05 Rohm Co Ltd 窒化物半導体素子およびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000288752A (ja) * 1999-04-02 2000-10-17 Mitsubishi Electric Corp レーザ加工方法及びレーザ加工装置
JP2005161322A (ja) * 2003-11-28 2005-06-23 Seiko Epson Corp 硬質材料の加工方法

Also Published As

Publication number Publication date
US20100243625A1 (en) 2010-09-30
CN102348529B (zh) 2015-08-26
TW201034781A (en) 2010-10-01
WO2010110991A2 (en) 2010-09-30
JP2012521888A (ja) 2012-09-20
JP5634497B2 (ja) 2014-12-03
WO2010110991A3 (en) 2011-01-06
US8729427B2 (en) 2014-05-20
TWI535516B (zh) 2016-06-01
CN102348529A (zh) 2012-02-08
KR20120002599A (ko) 2012-01-06

Similar Documents

Publication Publication Date Title
KR101729671B1 (ko) 레이저를 사용하는 재료 제거 중에 열 효과를 최소화하는 방법
US11471980B2 (en) Method and system for ultrafast laser-based material removal, figuring and polishing
KR102662495B1 (ko) 공작물의 레이저 가공 방법, 광학 가공 시스템 및 레이저 가공 장치
JP5432285B2 (ja) 面取りした端部を有する形状にガラスをレーザ加工する方法
KR102781391B1 (ko) 작업물들을 레이저 가공하기 위한 레이저 가공 장치, 방법들 및 관련된 배열들
KR102230762B1 (ko) 레이저 빔 초점 라인을 사용하여 시트형 기판들을 레이저 기반으로 가공하는 방법 및 디바이스
JP6416901B2 (ja) 平坦なワークピースを複数の部分に分割する方法及び装置
KR20160023904A (ko) 펄스 레이저 비임에 의한 공작물의 융삭 방법
US9776906B2 (en) Laser machining strengthened glass
JP6849382B2 (ja) レーザ加工方法及びレーザ加工装置
CN105916626A (zh) 用于内部标记具有粗糙表面的基板的方法及设备
WO2013039012A1 (ja) レーザ加工方法及びレーザ加工装置
JP2008272832A (ja) レーザによる脆性材料の切断方法及び切断装置。
US6930274B2 (en) Apparatus and method of maintaining a generally constant focusing spot size at different average laser power densities
KR20100032650A (ko) 레이저 및 절삭 공구를 이용한 홈 가공 방법
JP6035127B2 (ja) レーザ加工方法及びレーザ加工装置
JP5560096B2 (ja) レーザ加工方法
WO2024118415A1 (en) Methods of seperating a substrate
KR20240123798A (ko) 기판 절단 및 쪼개기를 위한 기판 준비
Hambach et al. High Density Perforation of Thin Al-Foils with Ultra Short Pulse Lasers in Dependence on the Repetition Rate.
Pramanik et al. Optimization of surface roughness on stainless steel 316L using low power fiber laser beam machining
JP2013078803A (ja) レーザー加工方法及びレーザー加工品

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20111025

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
AMND Amendment
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20150226

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20160317

Patent event code: PE09021S01D

AMND Amendment
E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20160926

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20160317

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

AMND Amendment
PX0901 Re-examination

Patent event code: PX09011S01I

Patent event date: 20160926

Comment text: Decision to Refuse Application

Patent event code: PX09012R01I

Patent event date: 20160517

Comment text: Amendment to Specification, etc.

Patent event code: PX09012R01I

Patent event date: 20150226

Comment text: Amendment to Specification, etc.

PX0701 Decision of registration after re-examination

Patent event date: 20170118

Comment text: Decision to Grant Registration

Patent event code: PX07013S01D

Patent event date: 20161226

Comment text: Amendment to Specification, etc.

Patent event code: PX07012R01I

Patent event date: 20160926

Comment text: Decision to Refuse Application

Patent event code: PX07011S01I

Patent event date: 20160517

Comment text: Amendment to Specification, etc.

Patent event code: PX07012R01I

Patent event date: 20150226

Comment text: Amendment to Specification, etc.

Patent event code: PX07012R01I

X701 Decision to grant (after re-examination)
GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20170418

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20170419

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20200414

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20210406

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20220405

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20230405

Start annual number: 7

End annual number: 7