KR101679464B1 - 임프린트 장치 및 물품 제조 방법 - Google Patents

임프린트 장치 및 물품 제조 방법 Download PDF

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KR101679464B1
KR101679464B1 KR1020130047518A KR20130047518A KR101679464B1 KR 101679464 B1 KR101679464 B1 KR 101679464B1 KR 1020130047518 A KR1020130047518 A KR 1020130047518A KR 20130047518 A KR20130047518 A KR 20130047518A KR 101679464 B1 KR101679464 B1 KR 101679464B1
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mold
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unit
substrate
members
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KR20130125307A (ko
Inventor
히로토시 도리이
유스케 다나카
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • H10W20/091—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts by printing or stamping

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020130047518A 2012-05-08 2013-04-29 임프린트 장치 및 물품 제조 방법 Active KR101679464B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2012-107035 2012-05-08
JP2012107035 2012-05-08
JPJP-P-2013-078096 2013-04-03
JP2013078096A JP6304934B2 (ja) 2012-05-08 2013-04-03 インプリント装置および物品の製造方法

Publications (2)

Publication Number Publication Date
KR20130125307A KR20130125307A (ko) 2013-11-18
KR101679464B1 true KR101679464B1 (ko) 2016-11-24

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KR1020130047518A Active KR101679464B1 (ko) 2012-05-08 2013-04-29 임프린트 장치 및 물품 제조 방법

Country Status (3)

Country Link
US (1) US9682510B2 (https=)
JP (1) JP6304934B2 (https=)
KR (1) KR101679464B1 (https=)

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EP2469339B1 (en) * 2010-12-21 2017-08-30 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP6497839B2 (ja) * 2013-11-07 2019-04-10 キヤノン株式会社 インプリント装置及び物品の製造方法
JP6538695B2 (ja) 2013-12-31 2019-07-03 キャノン・ナノテクノロジーズ・インコーポレーテッド パーシャルフィールドインプリントのための非対称的なテンプレート形状の調節
JP6097704B2 (ja) 2014-01-06 2017-03-15 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法
WO2015108002A1 (ja) * 2014-01-15 2015-07-23 旭硝子株式会社 インプリント用テンプレート及び転写パターンを形成しうるテンプレート、並びにそれらの製造方法
JP6497849B2 (ja) * 2014-04-15 2019-04-10 キヤノン株式会社 インプリント装置、および物品の製造方法
JP6552329B2 (ja) * 2014-09-12 2019-07-31 キヤノン株式会社 インプリント装置、インプリントシステム及び物品の製造方法
US10331027B2 (en) 2014-09-12 2019-06-25 Canon Kabushiki Kaisha Imprint apparatus, imprint system, and method of manufacturing article
JP6552185B2 (ja) * 2014-11-20 2019-07-31 キヤノン株式会社 インプリント装置、補正機構の校正方法、および物品の製造方法
JP6584176B2 (ja) * 2015-07-09 2019-10-02 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法
JP6748461B2 (ja) * 2016-03-22 2020-09-02 キヤノン株式会社 インプリント装置、インプリント装置の動作方法および物品製造方法
JP6758967B2 (ja) * 2016-07-12 2020-09-23 キヤノン株式会社 インプリント装置、インプリント方法、及び物品の製造方法
JP6882027B2 (ja) * 2017-03-16 2021-06-02 キヤノン株式会社 インプリント装置、および物品製造方法
JP6894785B2 (ja) * 2017-07-12 2021-06-30 キヤノン株式会社 インプリント装置および物品製造方法
JP7060961B2 (ja) * 2018-01-05 2022-04-27 キヤノン株式会社 インプリント装置、インプリント方法および物品製造方法
JP7022615B2 (ja) * 2018-02-26 2022-02-18 キヤノン株式会社 インプリント方法、インプリント装置、モールドの製造方法、および、物品の製造方法
JP6973280B2 (ja) * 2018-05-08 2021-11-24 信越化学工業株式会社 インプリントモールド用合成石英ガラス基板
JP7150535B2 (ja) * 2018-09-13 2022-10-11 キヤノン株式会社 平坦化装置、平坦化方法及び物品の製造方法
JP7254564B2 (ja) * 2019-03-05 2023-04-10 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP7449171B2 (ja) * 2020-06-02 2024-03-13 キヤノン株式会社 インプリント装置及び物品の製造方法
EP4123379A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
EP4123374A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
EP4123378A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
EP4123377A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
EP4123376A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
EP4123373A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
US20240329520A1 (en) * 2021-07-21 2024-10-03 Koninklijke Philips N.V. Imprinting apparatus
JP7703397B2 (ja) * 2021-08-25 2025-07-07 キヤノン株式会社 インプリント装置、物品の製造方法、及びコンピュータプログラム
JP2023069027A (ja) * 2021-11-04 2023-05-18 キヤノン株式会社 成形装置、成形方法、インプリント方法および物品の製造方法

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JP2012507138A (ja) * 2008-10-23 2012-03-22 モレキュラー・インプリンツ・インコーポレーテッド インプリント・リソグラフィ装置、および方法

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US20050270516A1 (en) * 2004-06-03 2005-12-08 Molecular Imprints, Inc. System for magnification and distortion correction during nano-scale manufacturing
JP2007296783A (ja) * 2006-05-01 2007-11-15 Canon Inc 加工装置及び方法、並びに、デバイス製造方法
JP2010080714A (ja) * 2008-09-26 2010-04-08 Canon Inc 押印装置および物品の製造方法
JP5574801B2 (ja) * 2010-04-26 2014-08-20 キヤノン株式会社 インプリント装置及び物品の製造方法
JP5669466B2 (ja) * 2010-07-12 2015-02-12 キヤノン株式会社 保持装置、インプリント装置及び物品の製造方法
JP5395769B2 (ja) * 2010-09-13 2014-01-22 株式会社東芝 テンプレートチャック、インプリント装置、及びパターン形成方法
JP5930622B2 (ja) * 2010-10-08 2016-06-08 キヤノン株式会社 インプリント装置、及び、物品の製造方法

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2012507138A (ja) * 2008-10-23 2012-03-22 モレキュラー・インプリンツ・インコーポレーテッド インプリント・リソグラフィ装置、および方法

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JP6304934B2 (ja) 2018-04-04
US9682510B2 (en) 2017-06-20
KR20130125307A (ko) 2013-11-18
US20130300031A1 (en) 2013-11-14
JP2013254938A (ja) 2013-12-19

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