KR101666231B1 - 네거티브형 감광성 수지 조성물, 감광성 드라이 필름 및 수광 장치 - Google Patents

네거티브형 감광성 수지 조성물, 감광성 드라이 필름 및 수광 장치 Download PDF

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KR101666231B1
KR101666231B1 KR1020110035047A KR20110035047A KR101666231B1 KR 101666231 B1 KR101666231 B1 KR 101666231B1 KR 1020110035047 A KR1020110035047 A KR 1020110035047A KR 20110035047 A KR20110035047 A KR 20110035047A KR 101666231 B1 KR101666231 B1 KR 101666231B1
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KR
South Korea
Prior art keywords
photosensitive resin
group
resin composition
meth
negative
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KR1020110035047A
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English (en)
Korean (ko)
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KR20110116988A (ko
Inventor
다카히로 센자키
데츠야 가토
Original Assignee
도오꾜오까고오교 가부시끼가이샤
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Publication of KR20110116988A publication Critical patent/KR20110116988A/ko
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Publication of KR101666231B1 publication Critical patent/KR101666231B1/ko

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020110035047A 2010-04-19 2011-04-15 네거티브형 감광성 수지 조성물, 감광성 드라이 필름 및 수광 장치 KR101666231B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2010-095913 2010-04-19
JP2010095913A JP5624794B2 (ja) 2010-04-19 2010-04-19 ネガ型感光性樹脂組成物、感光性ドライフィルム、及び受光装置

Publications (2)

Publication Number Publication Date
KR20110116988A KR20110116988A (ko) 2011-10-26
KR101666231B1 true KR101666231B1 (ko) 2016-10-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110035047A KR101666231B1 (ko) 2010-04-19 2011-04-15 네거티브형 감광성 수지 조성물, 감광성 드라이 필름 및 수광 장치

Country Status (3)

Country Link
JP (1) JP5624794B2 (ja)
KR (1) KR101666231B1 (ja)
TW (1) TWI521301B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101835296B1 (ko) 2015-03-26 2018-03-06 도오꾜오까고오교 가부시끼가이샤 네거티브형 감광성 조성물, 패턴 형성 방법
EP3360933A1 (de) * 2017-02-08 2018-08-15 Evonik Degussa GmbH Direkt-strukturierbare formulierungen auf der basis von metalloxid-prekursoren zur herstellung oxidischer schichten
JP7419255B2 (ja) * 2018-10-31 2024-01-22 東京応化工業株式会社 表面処理液、表面処理方法、及び表面処理されたロール状シートの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004156024A (ja) 2002-10-15 2004-06-03 Dainippon Ink & Chem Inc エポキシ樹脂組成物、エポキシ樹脂の製造方法、新規エポキシ樹脂、及び新規フェノール樹脂
JP2006156024A (ja) 2004-11-26 2006-06-15 Sanyo Electric Co Ltd 電池システム装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235371A (ja) * 2005-02-25 2006-09-07 Nitto Denko Corp 感光性樹脂組成物およびそれを用いて得られるソルダーレジストを有する配線回路基板
JP4633500B2 (ja) * 2005-03-01 2011-02-16 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． エポキシ含有物質を含むネガ型感光性樹脂組成物
JP2006323089A (ja) 2005-05-18 2006-11-30 Hitachi Chem Co Ltd 感光性樹脂組成物及びこれを用いた感光性フィルム
KR101536366B1 (ko) * 2006-11-02 2015-07-13 토요잉크Sc홀딩스주식회사 감광성 수지 조성물과 그의 경화물, 및 감광성 수지의 제조방법
JP4959627B2 (ja) * 2007-05-25 2012-06-27 住友ベークライト株式会社 樹脂組成物、樹脂スペーサ用フィルムおよび半導体装置
JP2008297540A (ja) 2008-04-14 2008-12-11 Sumitomo Bakelite Co Ltd 感光性接着剤樹脂組成物、接着フィルムおよび受光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004156024A (ja) 2002-10-15 2004-06-03 Dainippon Ink & Chem Inc エポキシ樹脂組成物、エポキシ樹脂の製造方法、新規エポキシ樹脂、及び新規フェノール樹脂
JP2006156024A (ja) 2004-11-26 2006-06-15 Sanyo Electric Co Ltd 電池システム装置

Also Published As

Publication number Publication date
TW201211681A (en) 2012-03-16
KR20110116988A (ko) 2011-10-26
TWI521301B (zh) 2016-02-11
JP5624794B2 (ja) 2014-11-12
JP2011227246A (ja) 2011-11-10

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