KR101631265B1 - 열처리장치 - Google Patents

열처리장치 Download PDF

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Publication number
KR101631265B1
KR101631265B1 KR1020090126684A KR20090126684A KR101631265B1 KR 101631265 B1 KR101631265 B1 KR 101631265B1 KR 1020090126684 A KR1020090126684 A KR 1020090126684A KR 20090126684 A KR20090126684 A KR 20090126684A KR 101631265 B1 KR101631265 B1 KR 101631265B1
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KR
South Korea
Prior art keywords
shutter
furnace
heater
opening
heat treatment
Prior art date
Application number
KR1020090126684A
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English (en)
Korean (ko)
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KR20100090185A (ko
Inventor
마사유키 무카이
Original Assignee
고요 써모 시스템 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 고요 써모 시스템 가부시끼 가이샤 filed Critical 고요 써모 시스템 가부시끼 가이샤
Publication of KR20100090185A publication Critical patent/KR20100090185A/ko
Application granted granted Critical
Publication of KR101631265B1 publication Critical patent/KR101631265B1/ko

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  • Optical Filters (AREA)
KR1020090126684A 2009-02-05 2009-12-18 열처리장치 KR101631265B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2009-025225 2009-02-05
JP2009025225A JP5562563B2 (ja) 2009-02-05 2009-02-05 熱処理装置

Publications (2)

Publication Number Publication Date
KR20100090185A KR20100090185A (ko) 2010-08-13
KR101631265B1 true KR101631265B1 (ko) 2016-06-16

Family

ID=42755871

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090126684A KR101631265B1 (ko) 2009-02-05 2009-12-18 열처리장치

Country Status (3)

Country Link
JP (1) JP5562563B2 (ja)
KR (1) KR101631265B1 (ja)
TW (1) TWI398615B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103774238B (zh) * 2014-02-20 2016-09-07 北京七星华创电子股份有限公司 热处理装置
JP6855687B2 (ja) * 2015-07-29 2021-04-07 東京エレクトロン株式会社 基板処理装置、基板処理方法及び基板処理装置のメンテナンス方法及び記憶媒体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008215652A (ja) 2007-02-28 2008-09-18 Espec Corp 熱処理装置
JP2009008306A (ja) * 2007-06-27 2009-01-15 Espec Corp 熱処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265417A (ja) * 1985-09-18 1987-03-24 Mitsubishi Electric Corp 半導体製造装置
JPH03128659U (ja) * 1990-04-06 1991-12-25
JP2971771B2 (ja) * 1995-01-23 1999-11-08 タバイエスペック株式会社 昇華物除去機能付熱処理装置
JPH11264665A (ja) * 1998-03-19 1999-09-28 Toppan Printing Co Ltd 着色レジスト焼成用オーブン
JP2003194467A (ja) * 2001-12-25 2003-07-09 Showa Mfg Co Ltd 均熱処理装置
JP3855127B2 (ja) * 2003-02-20 2006-12-06 光洋サーモシステム株式会社 熱処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008215652A (ja) 2007-02-28 2008-09-18 Espec Corp 熱処理装置
JP2009008306A (ja) * 2007-06-27 2009-01-15 Espec Corp 熱処理装置

Also Published As

Publication number Publication date
TWI398615B (zh) 2013-06-11
TW201033562A (en) 2010-09-16
JP2010181091A (ja) 2010-08-19
JP5562563B2 (ja) 2014-07-30
KR20100090185A (ko) 2010-08-13

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