KR101597042B1 - 도포 장치 - Google Patents

도포 장치 Download PDF

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Publication number
KR101597042B1
KR101597042B1 KR1020140097378A KR20140097378A KR101597042B1 KR 101597042 B1 KR101597042 B1 KR 101597042B1 KR 1020140097378 A KR1020140097378 A KR 1020140097378A KR 20140097378 A KR20140097378 A KR 20140097378A KR 101597042 B1 KR101597042 B1 KR 101597042B1
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KR
South Korea
Prior art keywords
nozzle
nozzles
holding
scanning direction
sub
Prior art date
Application number
KR1020140097378A
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English (en)
Korean (ko)
Other versions
KR20150037502A (ko
Inventor
슈이치 사가라
마사토시 우에노
유키히로 다카무라
무네아키 오에
Original Assignee
가부시키가이샤 스크린 홀딩스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시키가이샤 스크린 홀딩스 filed Critical 가부시키가이샤 스크린 홀딩스
Publication of KR20150037502A publication Critical patent/KR20150037502A/ko
Application granted granted Critical
Publication of KR101597042B1 publication Critical patent/KR101597042B1/ko

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated

Landscapes

  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020140097378A 2013-09-30 2014-07-30 도포 장치 KR101597042B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013203387A JP6232239B2 (ja) 2013-09-30 2013-09-30 塗布装置
JPJP-P-2013-203387 2013-09-30

Publications (2)

Publication Number Publication Date
KR20150037502A KR20150037502A (ko) 2015-04-08
KR101597042B1 true KR101597042B1 (ko) 2016-02-23

Family

ID=52787608

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140097378A KR101597042B1 (ko) 2013-09-30 2014-07-30 도포 장치

Country Status (4)

Country Link
JP (1) JP6232239B2 (ja)
KR (1) KR101597042B1 (ja)
CN (1) CN104511396B (ja)
TW (1) TWI562832B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6843676B2 (ja) * 2017-03-30 2021-03-17 日本発條株式会社 剤料供給方法及び対象構造体
CN108269699B (zh) * 2018-03-16 2024-01-30 广州中力自动化设备科技有限公司 一种恒流源赋能机
CN111508874A (zh) * 2020-04-27 2020-08-07 南昌欧菲显示科技有限公司 喷管安装组件及蚀刻装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5822266B2 (ja) * 1978-12-19 1983-05-07 富士写真フイルム株式会社 塗布方法
JP2000015162A (ja) * 1998-06-30 2000-01-18 Asmo Co Ltd 自動グリース塗布装置
JP3808728B2 (ja) 2001-06-27 2006-08-16 大日本スクリーン製造株式会社 塗布装置
TW561070B (en) * 2002-10-30 2003-11-11 Ind Tech Res Inst Device and method for image alignment for biochip production jig
JP3891164B2 (ja) * 2003-10-15 2007-03-14 セイコーエプソン株式会社 吐出装置
DE10359280A1 (de) * 2003-12-17 2005-07-21 Itw Gema Ag Sprühbeschichtungsvorrichtung
JP4679895B2 (ja) * 2003-12-17 2011-05-11 大日本印刷株式会社 パターン形成装置、ヘッドユニット
JP4100354B2 (ja) * 2004-02-19 2008-06-11 セイコーエプソン株式会社 材料塗布方法、カラーフィルタの製造方法、エレクトロルミネッセンス表示装置の製造方法、およびプラズマ表示装置の製造方法。
JP4745727B2 (ja) * 2005-06-16 2011-08-10 芝浦メカトロニクス株式会社 ペースト塗布装置
JP4737685B2 (ja) * 2006-12-25 2011-08-03 大日本スクリーン製造株式会社 塗布装置
KR20090104887A (ko) * 2007-01-30 2009-10-06 도레 엔지니아린구 가부시키가이샤 도포장치
JP2009080454A (ja) * 2007-09-06 2009-04-16 Seiko Epson Corp 配向膜形成用組成物、液晶装置の製造方法
JP5037277B2 (ja) * 2007-09-18 2012-09-26 パナソニック株式会社 粘性流体塗布装置
JP5012651B2 (ja) * 2008-05-14 2012-08-29 東京エレクトロン株式会社 塗布装置、塗布方法、塗布、現像装置及び記憶媒体
JP5126185B2 (ja) * 2009-08-26 2013-01-23 カシオ計算機株式会社 塗布装置
US9299959B2 (en) * 2012-06-06 2016-03-29 Panasonic Intellectual Property Management Co., Ltd. Inkjet device and manufacturing method for organic el device

Also Published As

Publication number Publication date
CN104511396A (zh) 2015-04-15
TW201511840A (zh) 2015-04-01
CN104511396B (zh) 2017-04-12
JP2015066501A (ja) 2015-04-13
KR20150037502A (ko) 2015-04-08
JP6232239B2 (ja) 2017-11-15
TWI562832B (en) 2016-12-21

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