KR101588937B1 - 패턴 검사 장치 및 패턴 검사 방법 - Google Patents

패턴 검사 장치 및 패턴 검사 방법 Download PDF

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Publication number
KR101588937B1
KR101588937B1 KR1020130161434A KR20130161434A KR101588937B1 KR 101588937 B1 KR101588937 B1 KR 101588937B1 KR 1020130161434 A KR1020130161434 A KR 1020130161434A KR 20130161434 A KR20130161434 A KR 20130161434A KR 101588937 B1 KR101588937 B1 KR 101588937B1
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KR
South Korea
Prior art keywords
light
pattern
image
light source
transparent substrate
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KR1020130161434A
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English (en)
Korean (ko)
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KR20140103027A (ko
Inventor
나리아키 후지와라
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가부시키가이샤 스크린 홀딩스
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Publication of KR20140103027A publication Critical patent/KR20140103027A/ko
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Publication of KR101588937B1 publication Critical patent/KR101588937B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020130161434A 2013-02-15 2013-12-23 패턴 검사 장치 및 패턴 검사 방법 KR101588937B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013028217A JP2014157086A (ja) 2013-02-15 2013-02-15 パターン検査装置
JPJP-P-2013-028217 2013-02-15

Publications (2)

Publication Number Publication Date
KR20140103027A KR20140103027A (ko) 2014-08-25
KR101588937B1 true KR101588937B1 (ko) 2016-01-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130161434A KR101588937B1 (ko) 2013-02-15 2013-12-23 패턴 검사 장치 및 패턴 검사 방법

Country Status (4)

Country Link
JP (1) JP2014157086A (ja)
KR (1) KR101588937B1 (ja)
CN (1) CN103995003B (ja)
TW (1) TWI504885B (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070730A (ja) * 2014-09-29 2016-05-09 株式会社Ｓｃｒｅｅｎホールディングス 画像取得装置および画像取得方法
KR102354193B1 (ko) * 2014-12-19 2022-01-20 가부시끼가이샤 사따께 곡립 품위 판별 장치
JP6435856B2 (ja) * 2014-12-26 2018-12-12 株式会社サタケ 穀粒品位判別装置
JP6435858B2 (ja) * 2014-12-26 2018-12-12 株式会社サタケ 穀粒品位判別装置
JP6435847B2 (ja) * 2014-12-19 2018-12-12 株式会社サタケ 穀粒品位判別装置
JP6496159B2 (ja) * 2015-02-23 2019-04-03 株式会社Ｓｃｒｅｅｎホールディングス パターン検査装置およびパターン検査方法
WO2019164382A1 (ko) 2018-02-26 2019-08-29 주식회사 고영테크놀러지 부품의 실장 상태를 검사하기 위한 방법, 인쇄 회로 기판 검사 장치 및 컴퓨터 판독 가능한 기록매체
CN108267461A (zh) * 2018-03-05 2018-07-10 福建省福联集成电路有限公司 一种可变光路的光学显微镜检测设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0843047A (ja) * 1994-08-02 1996-02-16 Toshiba Fa Syst Eng Kk 光学検査装置
JP3418054B2 (ja) * 1996-02-16 2003-06-16 三井金属鉱業株式会社 配線パターン線幅測定装置
IL118872A (en) * 1996-07-16 2000-06-01 Orbot Instr Ltd Optical inspection method and apparatus
US6175645B1 (en) * 1998-01-22 2001-01-16 Applied Materials, Inc. Optical inspection method and apparatus
JP3378795B2 (ja) * 1998-03-27 2003-02-17 シャープ株式会社 表示装置の検査装置および検査方法
JP2001305074A (ja) * 2000-04-19 2001-10-31 Dainippon Printing Co Ltd 板状ワークの検査方法及び装置
JP4304690B2 (ja) * 2002-12-27 2009-07-29 国際技術開発株式会社 テープ部材の検査装置
JP2005024386A (ja) * 2003-07-02 2005-01-27 Ushio Inc 配線パターン検査装置
JP4403777B2 (ja) * 2003-11-07 2010-01-27 ウシオ電機株式会社 配線パターン検査装置及び方法
KR20070048034A (ko) * 2005-11-03 2007-05-08 엘지전자 주식회사 테이프 제품의 검사장치
JP2008267851A (ja) * 2007-04-17 2008-11-06 Ushio Inc パターン検査装置およびパターン検査方法
TWI349772B (en) * 2007-11-08 2011-10-01 Chunghwa Picture Tubes Ltd Testing method
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法
CN101887030A (zh) * 2009-05-15 2010-11-17 圣戈本玻璃法国公司 用于检测透明基板表面和/或其内部的缺陷的方法及系统

Also Published As

Publication number Publication date
TWI504885B (zh) 2015-10-21
JP2014157086A (ja) 2014-08-28
CN103995003B (zh) 2017-04-19
TW201439523A (zh) 2014-10-16
KR20140103027A (ko) 2014-08-25
CN103995003A (zh) 2014-08-20

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