KR101588566B1 - 롤-성형 표면을 갖는 서셉터 및 이를 제조하기 위한 방법 - Google Patents

롤-성형 표면을 갖는 서셉터 및 이를 제조하기 위한 방법 Download PDF

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Publication number
KR101588566B1
KR101588566B1 KR1020107023428A KR20107023428A KR101588566B1 KR 101588566 B1 KR101588566 B1 KR 101588566B1 KR 1020107023428 A KR1020107023428 A KR 1020107023428A KR 20107023428 A KR20107023428 A KR 20107023428A KR 101588566 B1 KR101588566 B1 KR 101588566B1
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South Korea
Prior art keywords
plasma reactor
substrate support
substrate
forming
susceptor
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Expired - Fee Related
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KR1020107023428A
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English (en)
Korean (ko)
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KR20100126533A (ko
Inventor
가쿠 후루타
데이비드 앳클레이
수 영 최
존 엠. 화이트
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어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20100126533A publication Critical patent/KR20100126533A/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020107023428A 2008-03-20 2009-03-18 롤-성형 표면을 갖는 서셉터 및 이를 제조하기 위한 방법 Expired - Fee Related KR101588566B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3805008P 2008-03-20 2008-03-20
US61/038,050 2008-03-20

Publications (2)

Publication Number Publication Date
KR20100126533A KR20100126533A (ko) 2010-12-01
KR101588566B1 true KR101588566B1 (ko) 2016-01-26

Family

ID=41089127

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107023428A Expired - Fee Related KR101588566B1 (ko) 2008-03-20 2009-03-18 롤-성형 표면을 갖는 서셉터 및 이를 제조하기 위한 방법

Country Status (6)

Country Link
US (1) US9243328B2 (enExample)
JP (1) JP5745394B2 (enExample)
KR (1) KR101588566B1 (enExample)
CN (1) CN101978473B (enExample)
TW (1) TWI527929B (enExample)
WO (1) WO2009117514A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7972470B2 (en) * 2007-05-03 2011-07-05 Applied Materials, Inc. Asymmetric grounding of rectangular susceptor
GB201709446D0 (en) * 2017-06-14 2017-07-26 Semblant Ltd Plasma processing apparatus
CN109881184B (zh) * 2019-03-29 2022-03-25 拓荆科技股份有限公司 具有静电力抑制的基板承载装置
CN112387798B (zh) * 2019-08-13 2024-05-14 青岛海尔多媒体有限公司 用于制作电子设备外壳的方法及系统
KR20210089079A (ko) 2020-01-06 2021-07-15 에이에스엠 아이피 홀딩 비.브이. 채널형 리프트 핀

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004342834A (ja) * 2003-05-15 2004-12-02 Seiko Epson Corp 基板載置トレイ
KR200412959Y1 (ko) * 2006-01-24 2006-04-05 (주)포인트엔지니어링 반도체 및 액정표시장치의 투명유리기판 제조용 플레이트
JP2007116150A (ja) * 2005-10-18 2007-05-10 Asm Japan Kk 基板保持装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6431501A (en) * 1987-07-24 1989-02-01 Kawasaki Steel Co Production of steel sheet for shadow mask
US5531835A (en) * 1994-05-18 1996-07-02 Applied Materials, Inc. Patterned susceptor to reduce electrostatic force in a CVD chamber
US6089182A (en) * 1995-08-17 2000-07-18 Tokyo Electron Limited Plasma processing apparatus
JP2901536B2 (ja) * 1996-02-28 1999-06-07 山形日本電気株式会社 サセプタ
KR100203780B1 (ko) * 1996-09-23 1999-06-15 윤종용 반도체 웨이퍼 열처리 장치
JP3160229B2 (ja) * 1997-06-06 2001-04-25 日本エー・エス・エム株式会社 プラズマｃｖｄ装置用サセプタ及びその製造方法
JP2002113536A (ja) * 2000-10-04 2002-04-16 Toyota Motor Corp 成形素材の成形性向上方法およびその装置
US6634882B2 (en) * 2000-12-22 2003-10-21 Asm America, Inc. Susceptor pocket profile to improve process performance
KR100375984B1 (ko) * 2001-03-06 2003-03-15 삼성전자주식회사 플레이트 어셈블리 및 이를 갖는 가공 장치
JP2004154814A (ja) * 2002-11-06 2004-06-03 Shooei Shoji:Kk 加工金属板材料
KR100758965B1 (ko) * 2003-04-02 2007-09-14 가부시키가이샤 사무코 반도체 웨이퍼용 열처리 치구
JP2004321848A (ja) * 2003-04-21 2004-11-18 Ngk Insulators Ltd ハニカム構造体及びその製造方法
US20040221959A1 (en) * 2003-05-09 2004-11-11 Applied Materials, Inc. Anodized substrate support
US8372205B2 (en) * 2003-05-09 2013-02-12 Applied Materials, Inc. Reducing electrostatic charge by roughening the susceptor
JP2006019572A (ja) * 2004-07-02 2006-01-19 Ricoh Co Ltd 半導体製造装置及び半導体製造方法
JP2006173259A (ja) * 2004-12-14 2006-06-29 Ricoh Co Ltd サセプター及びその製造方法及び半導体製造装置
KR100750968B1 (ko) * 2005-06-07 2007-08-22 주식회사 알지비하이텍 플라즈마화학적기상증착 기구 내의 서셉터 구조
KR100755874B1 (ko) * 2005-11-30 2007-09-05 주식회사 아이피에스 진공처리장치의 정전척, 그를 가지는 진공처리장치 및정전척의 제조방법
JP5122741B2 (ja) * 2005-12-01 2013-01-16 パナソニック株式会社 システムキッチン用シンク又はカウンター
JP2007168245A (ja) * 2005-12-21 2007-07-05 Fujifilm Corp 感光性シート及びその製造方法と装置
US8173228B2 (en) * 2006-01-27 2012-05-08 Applied Materials, Inc. Particle reduction on surfaces of chemical vapor deposition processing apparatus
JP4597894B2 (ja) * 2006-03-31 2010-12-15 東京エレクトロン株式会社 基板載置台および基板処理装置
US20080131622A1 (en) * 2006-12-01 2008-06-05 White John M Plasma reactor substrate mounting surface texturing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004342834A (ja) * 2003-05-15 2004-12-02 Seiko Epson Corp 基板載置トレイ
JP2007116150A (ja) * 2005-10-18 2007-05-10 Asm Japan Kk 基板保持装置
KR200412959Y1 (ko) * 2006-01-24 2006-04-05 (주)포인트엔지니어링 반도체 및 액정표시장치의 투명유리기판 제조용 플레이트

Also Published As

Publication number Publication date
JP2011515854A (ja) 2011-05-19
TW200951244A (en) 2009-12-16
CN101978473B (zh) 2015-11-25
US20090238734A1 (en) 2009-09-24
KR20100126533A (ko) 2010-12-01
TWI527929B (zh) 2016-04-01
JP5745394B2 (ja) 2015-07-08
WO2009117514A1 (en) 2009-09-24
CN101978473A (zh) 2011-02-16
US9243328B2 (en) 2016-01-26

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