KR101562096B1 - 공기압 리니어 가이드 방식의 병렬 슬라이더 장치 및 그 제어 방법 및 측정 장치 - Google Patents

공기압 리니어 가이드 방식의 병렬 슬라이더 장치 및 그 제어 방법 및 측정 장치 Download PDF

Info

Publication number
KR101562096B1
KR101562096B1 KR1020127023341A KR20127023341A KR101562096B1 KR 101562096 B1 KR101562096 B1 KR 101562096B1 KR 1020127023341 A KR1020127023341 A KR 1020127023341A KR 20127023341 A KR20127023341 A KR 20127023341A KR 101562096 B1 KR101562096 B1 KR 101562096B1
Authority
KR
South Korea
Prior art keywords
slider
linear guide
air
air pressure
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020127023341A
Other languages
English (en)
Korean (ko)
Other versions
KR20130048197A (ko
Inventor
가오루 나오이
요이치 이시자키
다츠히토 이노우치
고이치 세키구치
Original Assignee
구로다 세이코 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 구로다 세이코 가부시키가이샤 filed Critical 구로다 세이코 가부시키가이샤
Publication of KR20130048197A publication Critical patent/KR20130048197A/ko
Application granted granted Critical
Publication of KR101562096B1 publication Critical patent/KR101562096B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Bearings For Parts Moving Linearly (AREA)
KR1020127023341A 2010-03-10 2010-03-10 공기압 리니어 가이드 방식의 병렬 슬라이더 장치 및 그 제어 방법 및 측정 장치 Expired - Fee Related KR101562096B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/001714 WO2011111100A1 (ja) 2010-03-10 2010-03-10 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Publications (2)

Publication Number Publication Date
KR20130048197A KR20130048197A (ko) 2013-05-09
KR101562096B1 true KR101562096B1 (ko) 2015-10-20

Family

ID=44562949

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127023341A Expired - Fee Related KR101562096B1 (ko) 2010-03-10 2010-03-10 공기압 리니어 가이드 방식의 병렬 슬라이더 장치 및 그 제어 방법 및 측정 장치

Country Status (6)

Country Link
US (1) US8984971B2 (enExample)
JP (1) JP5624916B2 (enExample)
KR (1) KR101562096B1 (enExample)
DE (1) DE112010005364T5 (enExample)
TW (1) TWI500902B (enExample)
WO (1) WO2011111100A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240157811A (ko) 2023-04-25 2024-11-04 주식회사 에스비씨리니어 리니어 가이드 장치의 정강성 측정 시스템

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI666421B (zh) * 2018-07-10 2019-07-21 英屬維京群島商詮優科技有限公司 自動化設備之位移量測機構
CN113833754A (zh) * 2021-09-17 2021-12-24 浙江健壮传动科技有限公司 一种组合导轨滑块系统
CN119021974B (zh) * 2024-10-10 2025-03-18 江苏领臣精密机械有限公司 一种气体静压导轨
CN120619867B (zh) * 2025-08-13 2025-10-21 湖南先进技术研究院 一种静压导轨及其加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000337858A (ja) * 1999-03-23 2000-12-08 Yamabun Denki:Kk シート厚み又はうねり計測方法及び装置
JP2003508696A (ja) * 2000-02-18 2003-03-04 株式会社ニコン 静圧気体軸受
JP2004330405A (ja) * 2003-05-06 2004-11-25 Azumino Sekkeishitsu:Kk 精密移動位置決めステージ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57187926U (enExample) * 1981-05-25 1982-11-29
JPS58177245A (ja) * 1982-04-12 1983-10-17 Toyoda Mach Works Ltd 静圧軸受を用いた可動台のバ−ガイド装置
JP2706184B2 (ja) * 1991-05-21 1998-01-28 住友重機械工業株式会社 可動ステージ装置
JPH05215133A (ja) * 1992-02-03 1993-08-24 Canon Inc 静圧流体軸受およびその位置決め制御装置
JPH06330944A (ja) * 1993-05-24 1994-11-29 Fujitsu Autom Ltd 静圧移動案内装置
JPH11351857A (ja) 1998-06-08 1999-12-24 Kuroda Precision Ind Ltd 薄板の表面形状測定方法および薄板の表面形状測定装置
JP4132503B2 (ja) 1999-11-24 2008-08-13 黒田精工株式会社 薄円板の支持構造
JP3942971B2 (ja) * 2002-07-08 2007-07-11 株式会社ソディック 移動体駆動装置
JP2006033910A (ja) * 2004-07-12 2006-02-02 Sumitomo Heavy Ind Ltd リニアモータ及びこのリニアモータを用いたステージ装置
JP4535991B2 (ja) * 2005-11-29 2010-09-01 京セラ株式会社 静圧スライダ
US20090297075A1 (en) * 2005-12-15 2009-12-03 Kyocera Corporation Hydrostatic Slider
TW200729673A (en) * 2006-01-27 2007-08-01 Min-Fu Xie Synchronized motion control system for dual parallel linear motors
JP2008067463A (ja) * 2006-09-06 2008-03-21 Nsk Ltd リニアモータ式テーブル装置
CN101414185B (zh) * 2008-11-21 2010-08-11 广东工业大学 精密伺服线性驱动系统性能试验装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000337858A (ja) * 1999-03-23 2000-12-08 Yamabun Denki:Kk シート厚み又はうねり計測方法及び装置
JP2003508696A (ja) * 2000-02-18 2003-03-04 株式会社ニコン 静圧気体軸受
JP2004330405A (ja) * 2003-05-06 2004-11-25 Azumino Sekkeishitsu:Kk 精密移動位置決めステージ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240157811A (ko) 2023-04-25 2024-11-04 주식회사 에스비씨리니어 리니어 가이드 장치의 정강성 측정 시스템

Also Published As

Publication number Publication date
TWI500902B (zh) 2015-09-21
TW201137307A (en) 2011-11-01
US8984971B2 (en) 2015-03-24
KR20130048197A (ko) 2013-05-09
JP5624916B2 (ja) 2014-11-12
DE112010005364T5 (de) 2013-03-28
WO2011111100A1 (ja) 2011-09-15
JP2011185437A (ja) 2011-09-22
US20120318078A1 (en) 2012-12-20

Similar Documents

Publication Publication Date Title
US9898000B2 (en) Planar positioning system and method of using the same
US20100050832A1 (en) Ultra-precision machine tool
KR101831375B1 (ko) 기판 이동을 위한 위치 설정 장치
US9979262B2 (en) Positioning device in gantry type of construction having a position-measurement device for measuring the position of a carriage relative to a cross-member
US9579763B2 (en) Machine tool
US9248535B2 (en) Machine tools and methods of operation thereof
CN101925438B (zh) 机床及其操作方法
JP5797942B2 (ja) エンコーダ・フィードバック、誤差マッピング、および空気圧制御を用いた誤差補償システム
KR20150145187A (ko) 공작 기계
JP5624916B2 (ja) 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置
WO2005040945A1 (ja) ステージ装置
WO2017036523A1 (en) A chuck for a high precision machine tool
TWI360133B (enExample)
US4615568A (en) Guide device
TW200808489A (en) Stage device
CN113424018B (zh) 用于定位物体的定位系统
KR101600135B1 (ko) 병렬 슬라이더 장치의 제어 장치 및 제어 방법 및 측정 장치
JP2000337375A (ja) 静圧気体軸受装置
NL2014453B1 (en) Positioning system having part of a measuring means move along an auxiliary guide.
JP2007054953A (ja) 位置決め装置
CN106960690A (zh) 基于圆弧铰链夹持与多自由度解耦的圆柱度仪水平导轨驱动装置
WO2012007527A2 (en) Methods and systems for detecting, setting, monitoring, determining, storing and compensating the spatial situation of a mobile unit

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20211015

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20211015

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000