JP5624916B2 - 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置 - Google Patents

空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置 Download PDF

Info

Publication number
JP5624916B2
JP5624916B2 JP2011047009A JP2011047009A JP5624916B2 JP 5624916 B2 JP5624916 B2 JP 5624916B2 JP 2011047009 A JP2011047009 A JP 2011047009A JP 2011047009 A JP2011047009 A JP 2011047009A JP 5624916 B2 JP5624916 B2 JP 5624916B2
Authority
JP
Japan
Prior art keywords
slider
rail
guide
linear guide
pneumatic linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011047009A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011185437A (ja
JP2011185437A5 (enExample
Inventor
薫 直居
薫 直居
洋一 石崎
洋一 石崎
達人 井内
達人 井内
関口孝一
孝一 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuroda Precision Industries Ltd
Original Assignee
Kuroda Precision Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2010/001714 external-priority patent/WO2011111100A1/ja
Application filed by Kuroda Precision Industries Ltd filed Critical Kuroda Precision Industries Ltd
Priority to JP2011047009A priority Critical patent/JP5624916B2/ja
Publication of JP2011185437A publication Critical patent/JP2011185437A/ja
Publication of JP2011185437A5 publication Critical patent/JP2011185437A5/ja
Application granted granted Critical
Publication of JP5624916B2 publication Critical patent/JP5624916B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
JP2011047009A 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置 Expired - Fee Related JP5624916B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011047009A JP5624916B2 (ja) 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2010/001714 WO2011111100A1 (ja) 2010-03-10 2010-03-10 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置
WOPCT/JP2010/001714 2010-03-10
JP2011047009A JP5624916B2 (ja) 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Publications (3)

Publication Number Publication Date
JP2011185437A JP2011185437A (ja) 2011-09-22
JP2011185437A5 JP2011185437A5 (enExample) 2013-10-17
JP5624916B2 true JP5624916B2 (ja) 2014-11-12

Family

ID=44791955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011047009A Expired - Fee Related JP5624916B2 (ja) 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Country Status (1)

Country Link
JP (1) JP5624916B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119021974B (zh) * 2024-10-10 2025-03-18 江苏领臣精密机械有限公司 一种气体静压导轨
CN120619867B (zh) * 2025-08-13 2025-10-21 湖南先进技术研究院 一种静压导轨及其加工方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57187926U (enExample) * 1981-05-25 1982-11-29
JP4322380B2 (ja) * 1999-03-23 2009-08-26 株式会社山文電気 シート厚み又はうねり計測方法及び装置
JP2003508696A (ja) * 2000-02-18 2003-03-04 株式会社ニコン 静圧気体軸受
JP2004330405A (ja) * 2003-05-06 2004-11-25 Azumino Sekkeishitsu:Kk 精密移動位置決めステージ

Also Published As

Publication number Publication date
JP2011185437A (ja) 2011-09-22

Similar Documents

Publication Publication Date Title
US7845257B2 (en) Ultra-precision machine tool
US9979262B2 (en) Positioning device in gantry type of construction having a position-measurement device for measuring the position of a carriage relative to a cross-member
JP5797942B2 (ja) エンコーダ・フィードバック、誤差マッピング、および空気圧制御を用いた誤差補償システム
JP5624916B2 (ja) 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置
WO2011111100A1 (ja) 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置
CN100521143C (zh) 载台装置
TW200808489A (en) Stage device
JP4592445B2 (ja) 薄板の表面形状測定装置
JP5588897B2 (ja) 並列スライダ装置の制御装置および制御方法および測定装置
US20240168393A1 (en) Positioning device
JP2017013210A (ja) 二軸位置決めステージ装置
US20100096935A1 (en) Air bushing linear stage system
JP5717914B1 (ja) 三次元座標測定機
KR100909583B1 (ko) 모아레 측정장치의 테이블 이동장치
JP4636928B2 (ja) 測定部支持機構およびそれを備えた薄板の表面形状測定装置
JP6025905B2 (ja) 三次元座標測定機
JP5122416B2 (ja) エアテーブル装置および軸受間隔修正方法
JP5676045B2 (ja) 三次元座標測定機
JP5730451B2 (ja) 三次元座標測定機
JPH02253112A (ja) 形状測定装置
JP2017032585A (ja) 三次元座標測定機

Legal Events

Date Code Title Description
RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20110904

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130829

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130829

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140311

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140428

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140909

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140929

R150 Certificate of patent or registration of utility model

Ref document number: 5624916

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees