JP2011185437A5 - - Google Patents

Download PDF

Info

Publication number
JP2011185437A5
JP2011185437A5 JP2011047009A JP2011047009A JP2011185437A5 JP 2011185437 A5 JP2011185437 A5 JP 2011185437A5 JP 2011047009 A JP2011047009 A JP 2011047009A JP 2011047009 A JP2011047009 A JP 2011047009A JP 2011185437 A5 JP2011185437 A5 JP 2011185437A5
Authority
JP
Japan
Prior art keywords
slider
receiving area
pressure receiving
guide rails
pneumatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011047009A
Other languages
English (en)
Japanese (ja)
Other versions
JP5624916B2 (ja
JP2011185437A (ja
Filing date
Publication date
Priority claimed from PCT/JP2010/001714 external-priority patent/WO2011111100A1/ja
Application filed filed Critical
Priority to JP2011047009A priority Critical patent/JP5624916B2/ja
Priority claimed from JP2011047009A external-priority patent/JP5624916B2/ja
Publication of JP2011185437A publication Critical patent/JP2011185437A/ja
Publication of JP2011185437A5 publication Critical patent/JP2011185437A5/ja
Application granted granted Critical
Publication of JP5624916B2 publication Critical patent/JP5624916B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2011047009A 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置 Expired - Fee Related JP5624916B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011047009A JP5624916B2 (ja) 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2010/001714 WO2011111100A1 (ja) 2010-03-10 2010-03-10 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置
WOPCT/JP2010/001714 2010-03-10
JP2011047009A JP5624916B2 (ja) 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Publications (3)

Publication Number Publication Date
JP2011185437A JP2011185437A (ja) 2011-09-22
JP2011185437A5 true JP2011185437A5 (enExample) 2013-10-17
JP5624916B2 JP5624916B2 (ja) 2014-11-12

Family

ID=44791955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011047009A Expired - Fee Related JP5624916B2 (ja) 2010-03-10 2011-03-03 空気圧リニアガイド方式の並列スライダ装置およびその制御方法および測定装置

Country Status (1)

Country Link
JP (1) JP5624916B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119021974B (zh) * 2024-10-10 2025-03-18 江苏领臣精密机械有限公司 一种气体静压导轨
CN120619867B (zh) * 2025-08-13 2025-10-21 湖南先进技术研究院 一种静压导轨及其加工方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57187926U (enExample) * 1981-05-25 1982-11-29
JP4322380B2 (ja) * 1999-03-23 2009-08-26 株式会社山文電気 シート厚み又はうねり計測方法及び装置
JP2003508696A (ja) * 2000-02-18 2003-03-04 株式会社ニコン 静圧気体軸受
JP2004330405A (ja) * 2003-05-06 2004-11-25 Azumino Sekkeishitsu:Kk 精密移動位置決めステージ

Similar Documents

Publication Publication Date Title
IT1399905B1 (it) Struttura tessile laminare, particolarmente idonea per componenti acustici.
JP2013116291A5 (enExample)
JP2014526140A5 (enExample)
JP2012097894A5 (enExample)
WO2013074970A8 (en) Motive device for use in magnetically-sensitive environments
JP2013525942A5 (enExample)
JP2011170856A5 (enExample)
JP2013248600A5 (enExample)
FR2973847B1 (fr) Helice de generateur de flux d'air pulse, en particulier pour souffleur portatif.
JP2012123959A5 (enExample)
JP2013061024A5 (enExample)
JP2012184951A5 (enExample)
JP2011185437A5 (enExample)
JP2013044394A5 (enExample)
JP2012044147A5 (enExample)
JP2013005646A5 (enExample)
JP2011170857A5 (enExample)
JP2014113267A5 (enExample)
FR2991606B1 (fr) Dispositif d'ajustage du parallelisme et de l'espacement entre les surfaces de glissement d'outils de presse.
EP2889145A3 (en) Recording apparatus
JP2012207824A5 (enExample)
JP2011181497A5 (enExample)
FI20105323L (fi) Menetelmä rakennusteollisuudessa käytettävien rei'illä varustettujen levymäisten tai nauhamaisten kappaleiden valmistamiseksi sekä menetelmällä valmistettu kappale
JP2011219902A5 (enExample)
ITRM20050308A1 (it) Metodo per incrementare la sopravvivenza di ceppi batterici del genere rhizobium.