KR101533187B1 - 회로 패턴 검사 장치 - Google Patents

회로 패턴 검사 장치 Download PDF

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Publication number
KR101533187B1
KR101533187B1 KR1020140000643A KR20140000643A KR101533187B1 KR 101533187 B1 KR101533187 B1 KR 101533187B1 KR 1020140000643 A KR1020140000643 A KR 1020140000643A KR 20140000643 A KR20140000643 A KR 20140000643A KR 101533187 B1 KR101533187 B1 KR 101533187B1
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KR
South Korea
Prior art keywords
signal
inspection
electric field
field distribution
electrode
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KR1020140000643A
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English (en)
Korean (ko)
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KR20140090096A (ko
Inventor
히로시 하모리
Original Assignee
오에이치티 가부시끼가이샤
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Publication of KR20140090096A publication Critical patent/KR20140090096A/ko
Application granted granted Critical
Publication of KR101533187B1 publication Critical patent/KR101533187B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/14—Circuits therefor, e.g. for generating test voltages, sensing circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
KR1020140000643A 2013-01-08 2014-01-03 회로 패턴 검사 장치 KR101533187B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013001265A JP5417651B1 (ja) 2013-01-08 2013-01-08 回路パターン検査装置
JPJP-P-2013-001265 2013-01-08

Publications (2)

Publication Number Publication Date
KR20140090096A KR20140090096A (ko) 2014-07-16
KR101533187B1 true KR101533187B1 (ko) 2015-07-01

Family

ID=50287167

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140000643A KR101533187B1 (ko) 2013-01-08 2014-01-03 회로 패턴 검사 장치

Country Status (4)

Country Link
JP (1) JP5417651B1 (ja)
KR (1) KR101533187B1 (ja)
CN (1) CN103913667B (ja)
TW (1) TWI519803B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6202452B1 (ja) * 2016-06-01 2017-09-27 オー・エイチ・ティー株式会社 非接触型基板検査装置及びその検査方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030009349A (ko) * 2000-12-01 2003-01-29 도판 인사츠 가부시키가이샤 회로패턴 검출장치 및 회로패턴 검사방법
KR20040000503A (ko) * 2001-05-24 2004-01-03 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 회로 패턴 검사 방법 및 기록 매체
KR20100035737A (ko) * 2008-09-29 2010-04-07 마이크로 인스펙션 주식회사 회로기판의 검사장치
KR20110014107A (ko) * 2009-08-04 2011-02-10 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 검사 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3760908B2 (ja) * 2002-10-30 2006-03-29 株式会社日立製作所 狭指向性電磁界アンテナプローブおよびこれを用いた電磁界測定装置、電流分布探査装置または電気的配線診断装置
JP4246987B2 (ja) * 2002-11-27 2009-04-02 日本電産リード株式会社 基板検査装置および基板検査方法
AU2003302525A1 (en) * 2002-11-30 2004-06-23 Oht Inc. Circuit pattern inspection device and circuit pattern inspection method
US20060043153A1 (en) * 2002-11-30 2006-03-02 Shuji Yamaoka Circuit pattern inspection device and circuit pattern inspection method
JP2007309691A (ja) * 2006-05-16 2007-11-29 Nidec-Read Corp 基板検査装置及び基板検査方法
JP4291843B2 (ja) * 2006-10-19 2009-07-08 株式会社東京カソード研究所 パターン検査装置
JP5305111B2 (ja) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5432213B2 (ja) * 2011-05-20 2014-03-05 株式会社ユニオンアロー・テクノロジー パターン検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030009349A (ko) * 2000-12-01 2003-01-29 도판 인사츠 가부시키가이샤 회로패턴 검출장치 및 회로패턴 검사방법
KR20040000503A (ko) * 2001-05-24 2004-01-03 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 회로 패턴 검사 방법 및 기록 매체
KR20100035737A (ko) * 2008-09-29 2010-04-07 마이크로 인스펙션 주식회사 회로기판의 검사장치
KR20110014107A (ko) * 2009-08-04 2011-02-10 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 검사 방법

Also Published As

Publication number Publication date
JP5417651B1 (ja) 2014-02-19
JP2014134398A (ja) 2014-07-24
KR20140090096A (ko) 2014-07-16
TWI519803B (zh) 2016-02-01
CN103913667A (zh) 2014-07-09
TW201435373A (zh) 2014-09-16
CN103913667B (zh) 2016-08-17

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