TWI519803B - Circuit pattern inspection device - Google Patents
Circuit pattern inspection device Download PDFInfo
- Publication number
- TWI519803B TWI519803B TW103100490A TW103100490A TWI519803B TW I519803 B TWI519803 B TW I519803B TW 103100490 A TW103100490 A TW 103100490A TW 103100490 A TW103100490 A TW 103100490A TW I519803 B TWI519803 B TW I519803B
- Authority
- TW
- Taiwan
- Prior art keywords
- signal
- inspection
- electric field
- electrode
- arc extinguishing
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title claims description 175
- 230000005684 electric field Effects 0.000 claims description 85
- 239000004020 conductor Substances 0.000 claims description 80
- 238000009826 distribution Methods 0.000 claims description 71
- 238000001514 detection method Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 21
- 230000001629 suppression Effects 0.000 claims description 20
- 230000007547 defect Effects 0.000 claims description 14
- 238000012360 testing method Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 238000012545 processing Methods 0.000 description 8
- 230000002950 deficient Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000010363 phase shift Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000008033 biological extinction Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/14—Circuits therefor, e.g. for generating test voltages, sensing circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013001265A JP5417651B1 (ja) | 2013-01-08 | 2013-01-08 | 回路パターン検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201435373A TW201435373A (zh) | 2014-09-16 |
TWI519803B true TWI519803B (zh) | 2016-02-01 |
Family
ID=50287167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103100490A TWI519803B (zh) | 2013-01-08 | 2014-01-07 | Circuit pattern inspection device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5417651B1 (ja) |
KR (1) | KR101533187B1 (ja) |
CN (1) | CN103913667B (ja) |
TW (1) | TWI519803B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6202452B1 (ja) * | 2016-06-01 | 2017-09-27 | オー・エイチ・ティー株式会社 | 非接触型基板検査装置及びその検査方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1265232C (zh) * | 2000-12-01 | 2006-07-19 | 凸版印刷株式会社 | 电路图形检测装置和电路图形检测方法 |
JP4450143B2 (ja) * | 2001-05-24 | 2010-04-14 | オー・エイチ・ティー株式会社 | 回路パターン検査装置並びに回路パターン検査方法及び記録媒体 |
JP3760908B2 (ja) * | 2002-10-30 | 2006-03-29 | 株式会社日立製作所 | 狭指向性電磁界アンテナプローブおよびこれを用いた電磁界測定装置、電流分布探査装置または電気的配線診断装置 |
JP4246987B2 (ja) * | 2002-11-27 | 2009-04-02 | 日本電産リード株式会社 | 基板検査装置および基板検査方法 |
AU2003302525A1 (en) * | 2002-11-30 | 2004-06-23 | Oht Inc. | Circuit pattern inspection device and circuit pattern inspection method |
US20060043153A1 (en) * | 2002-11-30 | 2006-03-02 | Shuji Yamaoka | Circuit pattern inspection device and circuit pattern inspection method |
JP2007309691A (ja) * | 2006-05-16 | 2007-11-29 | Nidec-Read Corp | 基板検査装置及び基板検査方法 |
JP4291843B2 (ja) * | 2006-10-19 | 2009-07-08 | 株式会社東京カソード研究所 | パターン検査装置 |
KR101021427B1 (ko) * | 2008-09-29 | 2011-03-15 | 마이크로 인스펙션 주식회사 | 회로기판의 검사장치 |
JP4644745B2 (ja) * | 2009-08-04 | 2011-03-02 | オー・エイチ・ティー株式会社 | 回路パターン検査装置 |
JP5305111B2 (ja) * | 2011-01-21 | 2013-10-02 | オー・エイチ・ティー株式会社 | 回路パターン検査装置 |
JP5432213B2 (ja) * | 2011-05-20 | 2014-03-05 | 株式会社ユニオンアロー・テクノロジー | パターン検査装置 |
-
2013
- 2013-01-08 JP JP2013001265A patent/JP5417651B1/ja not_active Expired - Fee Related
-
2014
- 2014-01-03 KR KR1020140000643A patent/KR101533187B1/ko active IP Right Grant
- 2014-01-07 TW TW103100490A patent/TWI519803B/zh not_active IP Right Cessation
- 2014-01-08 CN CN201410056938.5A patent/CN103913667B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5417651B1 (ja) | 2014-02-19 |
KR101533187B1 (ko) | 2015-07-01 |
JP2014134398A (ja) | 2014-07-24 |
KR20140090096A (ko) | 2014-07-16 |
CN103913667A (zh) | 2014-07-09 |
TW201435373A (zh) | 2014-09-16 |
CN103913667B (zh) | 2016-08-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |