KR101506136B1 - 네오펜타실란을 포함하는 조성물 및 이의 제조 방법 - Google Patents
네오펜타실란을 포함하는 조성물 및 이의 제조 방법 Download PDFInfo
- Publication number
- KR101506136B1 KR101506136B1 KR1020097008553A KR20097008553A KR101506136B1 KR 101506136 B1 KR101506136 B1 KR 101506136B1 KR 1020097008553 A KR1020097008553 A KR 1020097008553A KR 20097008553 A KR20097008553 A KR 20097008553A KR 101506136 B1 KR101506136 B1 KR 101506136B1
- Authority
- KR
- South Korea
- Prior art keywords
- neopentasilane
- silane
- tetrakis
- mixture
- trihalosilyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/541—Silicon-containing compounds containing oxygen
- C08K5/5415—Silicon-containing compounds containing oxygen containing at least one Si—O bond
- C08K5/5419—Silicon-containing compounds containing oxygen containing at least one Si—O bond containing at least one Si—C bond
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Silicon Compounds (AREA)
- Catalysts (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US85395806P | 2006-10-24 | 2006-10-24 | |
| US60/853,958 | 2006-10-24 | ||
| PCT/US2007/019165 WO2008051328A1 (en) | 2006-10-24 | 2007-08-29 | Composition comprising neopentasilane and method of preparing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090079908A KR20090079908A (ko) | 2009-07-22 |
| KR101506136B1 true KR101506136B1 (ko) | 2015-03-26 |
Family
ID=38896166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020097008553A Active KR101506136B1 (ko) | 2006-10-24 | 2007-08-29 | 네오펜타실란을 포함하는 조성물 및 이의 제조 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8147789B2 (https=) |
| EP (1) | EP2076558B8 (https=) |
| JP (1) | JP5103480B2 (https=) |
| KR (1) | KR101506136B1 (https=) |
| CN (1) | CN101528813B (https=) |
| TW (1) | TWI412530B (https=) |
| WO (1) | WO2008051328A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190101001A (ko) | 2018-02-22 | 2019-08-30 | 박계균 | 주열식 가설 흙막이 벽체의 시공방법 |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008025260B4 (de) | 2008-05-27 | 2010-03-18 | Rev Renewable Energy Ventures, Inc. | Halogeniertes Polysilan und thermisches Verfahren zu dessen Herstellung |
| DE102008042934A1 (de) * | 2008-10-17 | 2010-04-22 | Wacker Chemie Ag | Verfahren zur Herstellung von Neopentasilanen |
| DE102009027194A1 (de) | 2009-06-25 | 2010-12-30 | Wacker Chemie Ag | Verfahren zur Herstellung von Dodecahalogenneopentasilanen |
| DE102009053804B3 (de) | 2009-11-18 | 2011-03-17 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
| DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
| TWI559372B (zh) | 2010-04-06 | 2016-11-21 | 薄膜電子Asa公司 | 磊晶結構、其形成方法及含此結構之元件 |
| DE102010062984A1 (de) * | 2010-12-14 | 2012-06-14 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Halogen- und Hydridosilane |
| DE102010063823A1 (de) * | 2010-12-22 | 2012-06-28 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
| DE102011005387A1 (de) | 2011-03-10 | 2012-09-13 | Wacker Chemie Ag | Verfahren zur Reduzierung des Aluminiumgehaltes von Neopentasilan |
| TW201300459A (zh) * | 2011-03-10 | 2013-01-01 | Dow Corning | 用於抗反射塗層的聚矽烷矽氧烷(polysilanesiloxane)樹脂 |
| DE102012224202A1 (de) | 2012-12-21 | 2014-07-10 | Evonik Industries Ag | Verfahren zum Hydrieren höherer Halogen-haltiger Silanverbindungen |
| TWI634073B (zh) * | 2013-09-05 | 2018-09-01 | 道康寧公司 | 2,2,4,4-四矽基五矽烷及其組成物、方法及用途 |
| US11091649B2 (en) | 2013-09-05 | 2021-08-17 | Jiangsu Nata Opto-Electronic Materials Co. Ltd. | 2,2,4,4-tetrasilylpentasilane and its compositions, methods and uses |
| DE102014018435A1 (de) * | 2014-12-10 | 2016-06-16 | Silicon Products Bitterfeld GmbH&CO.KG | Verfahren zur Gewinnung von Hexachlordisilan aus in Prozessabgasströmen enthaltenen Gemischen von Chlorsilanen |
| US11117807B2 (en) * | 2017-06-23 | 2021-09-14 | Jiangsu Nata Opto-Electronic Materials Co. Ltd. | Method of making aluminum-free neopentasilane |
| WO2019005571A1 (en) * | 2017-06-29 | 2019-01-03 | Dow Silicones Corporation | Synthesis of 1,1,1-trichlorodisilane |
| EP3587348B1 (en) * | 2018-06-29 | 2021-08-11 | Evonik Operations GmbH | Partially hydrogenated chlorosilanes and methods for preparing same by selective hydrogenation |
| JP7580983B2 (ja) * | 2020-09-08 | 2024-11-12 | 株式会社日本触媒 | 環状水素化ポリシラン化合物の製造方法 |
| JP7621162B2 (ja) * | 2021-03-31 | 2025-01-24 | 株式会社日本触媒 | 環状水素化シラン化合物の製造方法 |
| CN115417413B (zh) * | 2022-08-31 | 2024-01-09 | 南大光电半导体材料有限公司 | 一种新戊硅烷中间体制备方法及其应用 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0760792B2 (ja) | 1984-05-16 | 1995-06-28 | キヤノン株式会社 | 堆積膜の形成方法 |
| JPS6191010A (ja) | 1984-10-09 | 1986-05-09 | Canon Inc | 堆積膜形成法 |
| JP3517934B2 (ja) * | 1994-03-24 | 2004-04-12 | 昭和電工株式会社 | シリコン膜の形成方法 |
| EP0902030B1 (en) * | 1997-08-27 | 2002-10-02 | Dow Corning Corporation | Compounds containing tetradecachlorocyclohexasilane dianion |
| JPH11260729A (ja) * | 1998-01-08 | 1999-09-24 | Showa Denko Kk | 高次シランの製造法 |
| KR100731558B1 (ko) * | 2000-08-02 | 2007-06-22 | 미쯔비시 마테리알 폴리실리콘 가부시끼가이샤 | 육염화이규소의 제조 방법 |
| AU2002306436A1 (en) | 2001-02-12 | 2002-10-15 | Asm America, Inc. | Improved process for deposition of semiconductor films |
| US7540920B2 (en) * | 2002-10-18 | 2009-06-02 | Applied Materials, Inc. | Silicon-containing layer deposition with silicon compounds |
| CN100471991C (zh) * | 2002-10-18 | 2009-03-25 | 应用材料有限公司 | 采用硅化合物进行的含硅层沉积 |
| US20040152287A1 (en) * | 2003-01-31 | 2004-08-05 | Sherrill Adrian B. | Deposition of a silicon film |
-
2007
- 2007-08-29 KR KR1020097008553A patent/KR101506136B1/ko active Active
- 2007-08-29 CN CN200780039179XA patent/CN101528813B/zh active Active
- 2007-08-29 EP EP07811642.3A patent/EP2076558B8/en active Active
- 2007-08-29 JP JP2009534570A patent/JP5103480B2/ja active Active
- 2007-08-29 WO PCT/US2007/019165 patent/WO2008051328A1/en not_active Ceased
- 2007-08-29 US US12/440,299 patent/US8147789B2/en active Active
- 2007-09-12 TW TW096134053A patent/TWI412530B/zh active
Non-Patent Citations (6)
| Title |
|---|
| - Inorg. Nucl. Chem. Lett. 9(7), 1973, pp.723-725 * |
| - Inorg. Nucl. Chem. Lett. 9(7), 1973, pp.723-725* |
| - J. Inorg. Nucl. Chem., Vol.26, 1964, pp.421-425 * |
| - J. Inorg. Nucl. Chem., Vol.26, 1964, pp.421-425* |
| - Neuere aspekte zur basenkatalysierten "Polykondensation" von silanen und zur praparativen chemie der silane und silyl-anionen, 퀼른대 수학-자연과학 학부 박사 학위 논문, 1973, pp.143-155 * |
| - Neuere aspekte zur basenkatalysierten "Polykondensation" von silanen und zur pr?parativen chemie der silane und silyl-anionen, 퀼른대 수학-자연과학 학부 박사 학위 논문, 1973, pp.143-155* |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190101001A (ko) | 2018-02-22 | 2019-08-30 | 박계균 | 주열식 가설 흙막이 벽체의 시공방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010507559A (ja) | 2010-03-11 |
| JP5103480B2 (ja) | 2012-12-19 |
| CN101528813A (zh) | 2009-09-09 |
| EP2076558B8 (en) | 2018-08-01 |
| TW200821322A (en) | 2008-05-16 |
| CN101528813B (zh) | 2011-10-26 |
| KR20090079908A (ko) | 2009-07-22 |
| US8147789B2 (en) | 2012-04-03 |
| EP2076558A1 (en) | 2009-07-08 |
| TWI412530B (zh) | 2013-10-21 |
| WO2008051328A1 (en) | 2008-05-02 |
| US20100176338A1 (en) | 2010-07-15 |
| EP2076558B1 (en) | 2018-04-18 |
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