KR101489547B1 - 기판 제조 방법 및 기판 가공 방법 - Google Patents

기판 제조 방법 및 기판 가공 방법 Download PDF

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Publication number
KR101489547B1
KR101489547B1 KR20110111100A KR20110111100A KR101489547B1 KR 101489547 B1 KR101489547 B1 KR 101489547B1 KR 20110111100 A KR20110111100 A KR 20110111100A KR 20110111100 A KR20110111100 A KR 20110111100A KR 101489547 B1 KR101489547 B1 KR 101489547B1
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KR
South Korea
Prior art keywords
substrate
resin layer
film
ink
chucking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR20110111100A
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English (en)
Korean (ko)
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KR20120048486A (ko
Inventor
마사야 우야마
Original Assignee
캐논 가부시끼가이샤
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Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20120048486A publication Critical patent/KR20120048486A/ko
Application granted granted Critical
Publication of KR101489547B1 publication Critical patent/KR101489547B1/ko
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR20110111100A 2010-11-05 2011-10-28 기판 제조 방법 및 기판 가공 방법 Expired - Fee Related KR101489547B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010248547A JP5627399B2 (ja) 2010-11-05 2010-11-05 保護層付き基板の製造方法および基板加工方法
JPJP-P-2010-248547 2010-11-05

Publications (2)

Publication Number Publication Date
KR20120048486A KR20120048486A (ko) 2012-05-15
KR101489547B1 true KR101489547B1 (ko) 2015-02-03

Family

ID=45971388

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20110111100A Expired - Fee Related KR101489547B1 (ko) 2010-11-05 2011-10-28 기판 제조 방법 및 기판 가공 방법

Country Status (4)

Country Link
US (1) US9004666B2 (enExample)
JP (1) JP5627399B2 (enExample)
KR (1) KR101489547B1 (enExample)
DE (1) DE102011117498B4 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6230279B2 (ja) * 2013-06-06 2017-11-15 キヤノン株式会社 液体吐出ヘッドの製造方法
US9919526B2 (en) * 2013-11-29 2018-03-20 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
JP6496027B2 (ja) * 2015-08-17 2019-04-03 富士フイルム株式会社 タッチパネル用積層体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002234168A (ja) 2001-01-08 2002-08-20 Hewlett Packard Co <Hp> インクジェットプリントヘッド用オリフィス板
JP2002326361A (ja) 2001-02-28 2002-11-12 Canon Inc インクジェットプリントヘッド基板の形成方法とインクジェットプリントヘッド基板、およびインクジェットプリントヘッドの製造方法とインクジェットプリントヘッド
US20030132990A1 (en) 2002-01-17 2003-07-17 Masao Mitani Inkjet recording head, recording apparatus including the inkjet recording head, and method for manufacturing the inkjet recording head
KR20080081361A (ko) * 2004-07-15 2008-09-09 가부시키가이샤 리코 액체토출헤드 및 그 제조방법, 화상형성장치, 발잉크막형성방법 및 액체토출헤드의 노즐부재

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4688053A (en) * 1985-07-13 1987-08-18 Canon Kabushiki Kaisha Liquid jet recording head having a layer of a resin composition curable with an active energy ray
US5700316A (en) * 1996-03-29 1997-12-23 Xerox Corporation Acoustic ink compositions
EP0830945B1 (en) * 1996-04-04 2002-07-10 Sony Corporation Printer device and method of manufacturing same
JPH10264425A (ja) * 1997-03-25 1998-10-06 Tohoku Ricoh Co Ltd 感熱記録装置および感熱製版装置
US6473966B1 (en) 1999-02-01 2002-11-05 Casio Computer Co., Ltd. Method of manufacturing ink-jet printer head
JP2002368071A (ja) * 2001-06-11 2002-12-20 Ulvac Japan Ltd 処理用基板
JP3960084B2 (ja) * 2002-03-06 2007-08-15 セイコーエプソン株式会社 ヘッド駆動装置及び方法、液滴吐出装置、ヘッド駆動プログラム、並びにデバイス製造方法及びデバイス
JP3578162B2 (ja) * 2002-04-16 2004-10-20 セイコーエプソン株式会社 パターンの形成方法、パターン形成装置、導電膜配線、デバイスの製造方法、電気光学装置、並びに電子機器
JP4182921B2 (ja) * 2004-06-08 2008-11-19 セイコーエプソン株式会社 ノズルプレートの製造方法
JP2006137065A (ja) * 2004-11-11 2006-06-01 Sony Corp 液体吐出ヘッドの製造方法
JP2006297652A (ja) * 2005-04-18 2006-11-02 Canon Inc 静電チャック
JP4881081B2 (ja) 2005-07-25 2012-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2007062291A (ja) * 2005-09-01 2007-03-15 Seiko Epson Corp 液滴吐出ヘッドの製造方法、液滴吐出ヘッドおよび液滴吐出装置
US20070182777A1 (en) * 2006-02-08 2007-08-09 Eastman Kodak Company Printhead and method of forming same
JP2008213199A (ja) 2007-03-01 2008-09-18 Matsushita Electric Ind Co Ltd 熱収縮性積層フィルム、熱収縮性積層フィルムの製造方法、容器、容器の製造方法
JP5317712B2 (ja) 2008-01-22 2013-10-16 株式会社半導体エネルギー研究所 半導体装置及び半導体装置の作製方法
JP5305691B2 (ja) 2008-02-27 2013-10-02 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP5361231B2 (ja) * 2008-03-26 2013-12-04 キヤノン株式会社 インクジェット記録ヘッド及び電子デバイス
JP5315975B2 (ja) * 2008-12-19 2013-10-16 セイコーエプソン株式会社 ノズル基板、液滴吐出ヘッド及び液滴吐出装置並びにこれらの製造方法
JP4775470B2 (ja) * 2009-03-26 2011-09-21 ブラザー工業株式会社 ノズルプレートの製造方法
WO2010126116A1 (ja) 2009-04-30 2010-11-04 日立化成工業株式会社 光導波路形成用樹脂組成物、光導波路形成用樹脂フィルム及び光導波路

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002234168A (ja) 2001-01-08 2002-08-20 Hewlett Packard Co <Hp> インクジェットプリントヘッド用オリフィス板
JP2002326361A (ja) 2001-02-28 2002-11-12 Canon Inc インクジェットプリントヘッド基板の形成方法とインクジェットプリントヘッド基板、およびインクジェットプリントヘッドの製造方法とインクジェットプリントヘッド
US20030132990A1 (en) 2002-01-17 2003-07-17 Masao Mitani Inkjet recording head, recording apparatus including the inkjet recording head, and method for manufacturing the inkjet recording head
KR20080081361A (ko) * 2004-07-15 2008-09-09 가부시키가이샤 리코 액체토출헤드 및 그 제조방법, 화상형성장치, 발잉크막형성방법 및 액체토출헤드의 노즐부재

Also Published As

Publication number Publication date
US9004666B2 (en) 2015-04-14
DE102011117498B4 (de) 2017-09-07
JP2012096512A (ja) 2012-05-24
US20120113200A1 (en) 2012-05-10
DE102011117498A1 (de) 2012-05-10
KR20120048486A (ko) 2012-05-15
JP5627399B2 (ja) 2014-11-19

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