DE102011117498B4 - Verfahren zum fertigen eines substrats - Google Patents

Verfahren zum fertigen eines substrats Download PDF

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Publication number
DE102011117498B4
DE102011117498B4 DE102011117498.6A DE102011117498A DE102011117498B4 DE 102011117498 B4 DE102011117498 B4 DE 102011117498B4 DE 102011117498 A DE102011117498 A DE 102011117498A DE 102011117498 B4 DE102011117498 B4 DE 102011117498B4
Authority
DE
Germany
Prior art keywords
resin layer
substrate
structures
film
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102011117498.6A
Other languages
German (de)
English (en)
Other versions
DE102011117498A1 (de
Inventor
Masaya Uyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE102011117498A1 publication Critical patent/DE102011117498A1/de
Application granted granted Critical
Publication of DE102011117498B4 publication Critical patent/DE102011117498B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE102011117498.6A 2010-11-05 2011-11-02 Verfahren zum fertigen eines substrats Expired - Fee Related DE102011117498B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010248547A JP5627399B2 (ja) 2010-11-05 2010-11-05 保護層付き基板の製造方法および基板加工方法
JP2010-248547 2010-11-05

Publications (2)

Publication Number Publication Date
DE102011117498A1 DE102011117498A1 (de) 2012-05-10
DE102011117498B4 true DE102011117498B4 (de) 2017-09-07

Family

ID=45971388

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011117498.6A Expired - Fee Related DE102011117498B4 (de) 2010-11-05 2011-11-02 Verfahren zum fertigen eines substrats

Country Status (4)

Country Link
US (1) US9004666B2 (enExample)
JP (1) JP5627399B2 (enExample)
KR (1) KR101489547B1 (enExample)
DE (1) DE102011117498B4 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6230279B2 (ja) * 2013-06-06 2017-11-15 キヤノン株式会社 液体吐出ヘッドの製造方法
US9919526B2 (en) 2013-11-29 2018-03-20 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
CN107710118B (zh) * 2015-08-17 2020-10-16 富士胶片株式会社 触控面板用层叠体

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002368071A (ja) * 2001-06-11 2002-12-20 Ulvac Japan Ltd 処理用基板
DE60020308T2 (de) * 1999-02-01 2005-11-17 Casio Computer Co., Ltd. Verfahren zur herstellung eines tintenstrahldruckkopfes
US20070017894A1 (en) * 2005-07-25 2007-01-25 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
US20090139891A1 (en) * 2007-03-01 2009-06-04 Matsushita Electric Industrial Co., Ltd. Layered shrink film, method for producing layered shrink film, and container using layered shrink film
US20090183766A1 (en) * 2008-01-22 2009-07-23 Hidekazu Takahashi Semiconductor device and method of manufacturing semiconductor device
WO2010126116A1 (ja) * 2009-04-30 2010-11-04 日立化成工業株式会社 光導波路形成用樹脂組成物、光導波路形成用樹脂フィルム及び光導波路

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
US4688053A (en) * 1985-07-13 1987-08-18 Canon Kabushiki Kaisha Liquid jet recording head having a layer of a resin composition curable with an active energy ray
US5700316A (en) * 1996-03-29 1997-12-23 Xerox Corporation Acoustic ink compositions
EP0830945B1 (en) * 1996-04-04 2002-07-10 Sony Corporation Printer device and method of manufacturing same
JPH10264425A (ja) * 1997-03-25 1998-10-06 Tohoku Ricoh Co Ltd 感熱記録装置および感熱製版装置
US6375313B1 (en) 2001-01-08 2002-04-23 Hewlett-Packard Company Orifice plate for inkjet printhead
JP4054583B2 (ja) 2001-02-28 2008-02-27 キヤノン株式会社 インクジェットプリントヘッドの製造方法
US6786576B2 (en) * 2002-01-17 2004-09-07 Masao Mitani Inkjet recording head with minimal ink drop ejecting capability
JP3960084B2 (ja) * 2002-03-06 2007-08-15 セイコーエプソン株式会社 ヘッド駆動装置及び方法、液滴吐出装置、ヘッド駆動プログラム、並びにデバイス製造方法及びデバイス
JP3578162B2 (ja) * 2002-04-16 2004-10-20 セイコーエプソン株式会社 パターンの形成方法、パターン形成装置、導電膜配線、デバイスの製造方法、電気光学装置、並びに電子機器
JP4182921B2 (ja) * 2004-06-08 2008-11-19 セイコーエプソン株式会社 ノズルプレートの製造方法
KR100912413B1 (ko) 2004-07-15 2009-08-14 가부시키가이샤 리코 액체토출헤드, 액체토출헤드의 노즐부재, 카트리지 및 액체토출 기록장치
JP2006137065A (ja) * 2004-11-11 2006-06-01 Sony Corp 液体吐出ヘッドの製造方法
JP2006297652A (ja) * 2005-04-18 2006-11-02 Canon Inc 静電チャック
JP2007062291A (ja) * 2005-09-01 2007-03-15 Seiko Epson Corp 液滴吐出ヘッドの製造方法、液滴吐出ヘッドおよび液滴吐出装置
US20070182777A1 (en) * 2006-02-08 2007-08-09 Eastman Kodak Company Printhead and method of forming same
JP5305691B2 (ja) 2008-02-27 2013-10-02 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP5361231B2 (ja) 2008-03-26 2013-12-04 キヤノン株式会社 インクジェット記録ヘッド及び電子デバイス
JP5315975B2 (ja) * 2008-12-19 2013-10-16 セイコーエプソン株式会社 ノズル基板、液滴吐出ヘッド及び液滴吐出装置並びにこれらの製造方法
JP4775470B2 (ja) * 2009-03-26 2011-09-21 ブラザー工業株式会社 ノズルプレートの製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60020308T2 (de) * 1999-02-01 2005-11-17 Casio Computer Co., Ltd. Verfahren zur herstellung eines tintenstrahldruckkopfes
JP2002368071A (ja) * 2001-06-11 2002-12-20 Ulvac Japan Ltd 処理用基板
US20070017894A1 (en) * 2005-07-25 2007-01-25 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
US20090139891A1 (en) * 2007-03-01 2009-06-04 Matsushita Electric Industrial Co., Ltd. Layered shrink film, method for producing layered shrink film, and container using layered shrink film
US20090183766A1 (en) * 2008-01-22 2009-07-23 Hidekazu Takahashi Semiconductor device and method of manufacturing semiconductor device
WO2010126116A1 (ja) * 2009-04-30 2010-11-04 日立化成工業株式会社 光導波路形成用樹脂組成物、光導波路形成用樹脂フィルム及び光導波路
US20120076468A1 (en) * 2009-04-30 2012-03-29 Tatsuya Makino Resin composition for forming optical waveguide, resin film for forming optical waveguide, and optical waveguide

Also Published As

Publication number Publication date
KR101489547B1 (ko) 2015-02-03
JP5627399B2 (ja) 2014-11-19
US9004666B2 (en) 2015-04-14
JP2012096512A (ja) 2012-05-24
DE102011117498A1 (de) 2012-05-10
US20120113200A1 (en) 2012-05-10
KR20120048486A (ko) 2012-05-15

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R012 Request for examination validly filed
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee