KR101439051B1 - MoSi₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈 - Google Patents
MoSi₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈 Download PDFInfo
- Publication number
- KR101439051B1 KR101439051B1 KR1020130100481A KR20130100481A KR101439051B1 KR 101439051 B1 KR101439051 B1 KR 101439051B1 KR 1020130100481 A KR1020130100481 A KR 1020130100481A KR 20130100481 A KR20130100481 A KR 20130100481A KR 101439051 B1 KR101439051 B1 KR 101439051B1
- Authority
- KR
- South Korea
- Prior art keywords
- heater
- coil
- mosi
- tubular
- diameter
- Prior art date
Links
- 229910016006 MoSi Inorganic materials 0.000 claims abstract description 42
- 239000000919 ceramic Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 description 26
- 238000009826 distribution Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000005452 bending Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000440 bentonite Substances 0.000 description 2
- 229910000278 bentonite Inorganic materials 0.000 description 2
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003232 water-soluble binding agent Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
- H05B3/64—Heating elements specially adapted for furnaces using ribbon, rod, or wire heater
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
- H05B3/56—Heating cables
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/018—Heaters using heating elements comprising mosi2
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2012-184115 | 2012-08-23 | ||
JP2012184115A JP5508487B2 (ja) | 2012-08-23 | 2012-08-23 | 管状ヒーターモジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20140026303A KR20140026303A (ko) | 2014-03-05 |
KR101439051B1 true KR101439051B1 (ko) | 2014-09-05 |
Family
ID=49084955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020130100481A KR101439051B1 (ko) | 2012-08-23 | 2013-08-23 | MoSi₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2701458B1 (zh) |
JP (1) | JP5508487B2 (zh) |
KR (1) | KR101439051B1 (zh) |
CN (1) | CN103634953B (zh) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5763856A (en) | 1993-08-11 | 1998-06-09 | Tokyo Electron Limited | Heat treatment apparatus and method |
WO2008108712A1 (en) | 2007-03-05 | 2008-09-12 | Sandvik Intellectual Property Ab | Heating element and insert for electric furnaces |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3812324A (en) * | 1971-07-08 | 1974-05-21 | Itt | Glow coil ignitor |
JPH08143365A (ja) | 1994-11-15 | 1996-06-04 | Riken Corp | 二珪化モリブデンヒーター |
SE522581C2 (sv) * | 2002-02-27 | 2004-02-17 | Sandvik Ab | Element av molybdensilicidtyp |
US8119954B2 (en) * | 2003-01-07 | 2012-02-21 | Micropyretics Heaters International, Inc. | Convective heating system for industrial applications |
JP2005100695A (ja) * | 2003-09-22 | 2005-04-14 | Ngk Insulators Ltd | 基板加熱方法、抵抗発熱体付基板及びその製造方法 |
JP2005175366A (ja) * | 2003-12-15 | 2005-06-30 | Seiko Epson Corp | ヒータおよびヒータ付き炉 |
JP2012526355A (ja) * | 2009-05-05 | 2012-10-25 | サンドヴィク インテレクチュアル プロパティー アーゲー | 発熱体 |
-
2012
- 2012-08-23 JP JP2012184115A patent/JP5508487B2/ja active Active
-
2013
- 2013-08-21 EP EP13306161.4A patent/EP2701458B1/en not_active Not-in-force
- 2013-08-22 CN CN201310369681.4A patent/CN103634953B/zh not_active Expired - Fee Related
- 2013-08-23 KR KR1020130100481A patent/KR101439051B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5763856A (en) | 1993-08-11 | 1998-06-09 | Tokyo Electron Limited | Heat treatment apparatus and method |
WO2008108712A1 (en) | 2007-03-05 | 2008-09-12 | Sandvik Intellectual Property Ab | Heating element and insert for electric furnaces |
Also Published As
Publication number | Publication date |
---|---|
CN103634953A (zh) | 2014-03-12 |
CN103634953B (zh) | 2015-06-10 |
EP2701458A1 (en) | 2014-02-26 |
JP5508487B2 (ja) | 2014-05-28 |
KR20140026303A (ko) | 2014-03-05 |
EP2701458B1 (en) | 2016-12-14 |
JP2014041784A (ja) | 2014-03-06 |
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