CN1321546C - MoSi2弧状加热器及其制造方法和装置 - Google Patents
MoSi2弧状加热器及其制造方法和装置 Download PDFInfo
- Publication number
- CN1321546C CN1321546C CNB028025857A CN02802585A CN1321546C CN 1321546 C CN1321546 C CN 1321546C CN B028025857 A CNB028025857 A CN B028025857A CN 02802585 A CN02802585 A CN 02802585A CN 1321546 C CN1321546 C CN 1321546C
- Authority
- CN
- China
- Prior art keywords
- arcuation
- heater block
- shaped
- mosi
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 229910016006 MoSi Inorganic materials 0.000 claims description 80
- 238000003466 welding Methods 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000005485 electric heating Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 229910020968 MoSi2 Inorganic materials 0.000 abstract 1
- 238000009434 installation Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/005—Soldering by means of radiant energy
- B23K1/0053—Soldering by means of radiant energy soldering by means of I.R.
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
- H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
- H05B3/64—Heating elements specially adapted for furnaces using ribbon, rod, or wire heater
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/018—Heaters using heating elements comprising mosi2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP131559/2001 | 2001-04-27 | ||
JP2001131559A JP3876131B2 (ja) | 2001-04-27 | 2001-04-27 | MoSi2製弧状ヒーター並びにその製造方法及び装置 |
JP131559/01 | 2001-04-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1465208A CN1465208A (zh) | 2003-12-31 |
CN1321546C true CN1321546C (zh) | 2007-06-13 |
Family
ID=18979725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028025857A Expired - Lifetime CN1321546C (zh) | 2001-04-27 | 2002-02-04 | MoSi2弧状加热器及其制造方法和装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6844532B2 (zh) |
EP (1) | EP1383355B1 (zh) |
JP (1) | JP3876131B2 (zh) |
KR (1) | KR100544959B1 (zh) |
CN (1) | CN1321546C (zh) |
TW (1) | TWI243151B (zh) |
WO (1) | WO2002091800A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100930031B1 (ko) * | 2007-10-23 | 2009-12-04 | 이상범 | 전기스토브 및 그 제어방법 |
US9908197B2 (en) | 2013-03-15 | 2018-03-06 | Automated Industrial Machinery, Inc. | Wire butt welder with adjustable alignment |
CN103231449B (zh) * | 2013-04-07 | 2015-10-14 | 上海交通大学 | 一种快速通电加热弯曲装置 |
US11123790B2 (en) | 2017-10-16 | 2021-09-21 | General Electric Company | Apparatus for casting a mold |
US11123791B2 (en) | 2017-10-16 | 2021-09-21 | General Electric Company | Method for casting a mold |
WO2020202619A1 (ja) * | 2019-03-29 | 2020-10-08 | Jx金属株式会社 | マルチシャンク型ヒーター |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5324920A (en) * | 1990-10-18 | 1994-06-28 | Tokyo Electron Sagami Limited | Heat treatment apparatus |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2045357A1 (de) * | 1969-09-16 | 1971-03-25 | Kanthal Ab | Elektrisches Widerstandselement |
US3912905A (en) * | 1974-02-25 | 1975-10-14 | Kanthal Corp | Electric resistance heating device |
US4016403A (en) * | 1975-05-01 | 1977-04-05 | National Element Inc. | Electrical heating element |
US4147888A (en) * | 1977-07-20 | 1979-04-03 | Seiki Sato | Electric heating element for electric resistance furnaces |
US4266119A (en) * | 1979-08-15 | 1981-05-05 | The Kanthal Corporation | Hairpin-type electric resistance heating element |
US4267435A (en) * | 1979-08-23 | 1981-05-12 | The Kanthal Corporation | Electric resistance heating element |
JPH0714604B2 (ja) | 1990-08-31 | 1995-02-22 | 株式会社リケン | 二珪化モリブデン発熱体の自動成形装置及び自動成形法 |
JPH04155822A (ja) | 1990-10-18 | 1992-05-28 | Tokyo Electron Sagami Ltd | 熱処理装置 |
US5449886A (en) * | 1993-03-09 | 1995-09-12 | University Of Cincinnati | Electric heating element assembly |
US5507639A (en) * | 1993-06-30 | 1996-04-16 | Tokyo Electron Kabushiki Kaisha | Heat treatment apparatus and method thereof |
JP3020773B2 (ja) * | 1993-07-06 | 2000-03-15 | 東京エレクトロン株式会社 | 熱処理装置 |
US5473141A (en) * | 1993-10-26 | 1995-12-05 | The Kanthal Corporation | Radiant tube heating assembly |
JPH08143365A (ja) | 1994-11-15 | 1996-06-04 | Riken Corp | 二珪化モリブデンヒーター |
JP3504784B2 (ja) * | 1995-09-07 | 2004-03-08 | 東京エレクトロン株式会社 | 熱処理方法 |
JPH10291875A (ja) | 1997-04-22 | 1998-11-04 | Riken Corp | セラミックス棒材の自動曲げ成形装置および成形方法 |
JP3657800B2 (ja) * | 1998-02-20 | 2005-06-08 | 株式会社リケン | 二珪化モリブデン系複合セラミックス発熱体及びその製造方法 |
-
2001
- 2001-04-27 JP JP2001131559A patent/JP3876131B2/ja not_active Expired - Lifetime
-
2002
- 2002-02-04 CN CNB028025857A patent/CN1321546C/zh not_active Expired - Lifetime
- 2002-02-04 KR KR1020037013834A patent/KR100544959B1/ko active IP Right Grant
- 2002-02-04 EP EP02711289A patent/EP1383355B1/en not_active Expired - Lifetime
- 2002-02-04 US US10/399,896 patent/US6844532B2/en not_active Expired - Lifetime
- 2002-02-04 WO PCT/JP2002/000870 patent/WO2002091800A1/ja active Application Filing
- 2002-03-15 TW TW091104966A patent/TWI243151B/zh not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5324920A (en) * | 1990-10-18 | 1994-06-28 | Tokyo Electron Sagami Limited | Heat treatment apparatus |
Also Published As
Publication number | Publication date |
---|---|
EP1383355B1 (en) | 2008-10-29 |
EP1383355A1 (en) | 2004-01-21 |
WO2002091800A1 (fr) | 2002-11-14 |
CN1465208A (zh) | 2003-12-31 |
TWI243151B (en) | 2005-11-11 |
EP1383355A4 (en) | 2007-03-28 |
KR20040015122A (ko) | 2004-02-18 |
US20040094536A1 (en) | 2004-05-20 |
US6844532B2 (en) | 2005-01-18 |
JP3876131B2 (ja) | 2007-01-31 |
JP2002329568A (ja) | 2002-11-15 |
KR100544959B1 (ko) | 2006-01-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: JX NIPPON MINING + METALS CORPORATION Free format text: FORMER NAME: NIPPON MINING + METALS CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: Tokyo, Japan Patentee after: JX Nippon Mining & Metals Corporation Address before: Tokyo, Japan Patentee before: Nippon Mining & Metals Co., Ltd. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: JX NIPPON MINING & METALS CORPORATION Address before: Tokyo, Japan Patentee before: JX Nippon Mining & Metals Corporation |
|
CP01 | Change in the name or title of a patent holder | ||
CX01 | Expiry of patent term |
Granted publication date: 20070613 |
|
CX01 | Expiry of patent term |